Novel tail gas combustion treatment device

Abstract

The utility model discloses a novel tail gas combustion treatment device which comprises an inner cavity and an outer cavity which are in a negative pressure state, the outer cavity is arranged outside the inner cavity in a sleeved mode, the upper portion of the outer cavity is communicated with the inner cavity, a heating assembly is arranged outside the outer cavity, and the heating assembly is used for heating first gas introduced into the outer cavity. The lower part of the outer cavity is communicated with a first gas inlet for introducing a first gas, the top of the inner cavity is communicated with a second gas inlet for introducing a second gas, the first gas flows through the heating assembly and then enters the inner cavity, and the second gas is subjected to combustion reaction. The burner is reasonable in structure, beneficial to sufficient burning and small in size.

Description

Technical Field

[0001] The utility model relates to the technical field of tail gas treatment, in particular to a novel tail gas combustion treatment device. Background Art

[0002] High-purity hydrogen plays an important role in the semiconductor industry. For example, in the cleaning process, high-purity hydrogen is often used in the wet cleaning step of the semiconductor device manufacturing process, which can effectively remove oxides and other contaminants on the surface of silicon wafers, especially for those advanced semiconductor processes that are sensitive to impurities. In the dry etching process, in certain specific dry etching processes, high-purity hydrogen can be used as a reaction gas or dilution gas to participate in the selective removal of specific material layers on the surface of silicon wafers. In the epitaxial growth process, high-purity hydrogen is often used in the silicon epitaxial growth process. In the epitaxial furnace, high-purity hydrogen is used as a carrier gas or reaction gas to help maintain the required atmosphere conditions, promote the uniform growth of silicon single crystal layers, and inhibit unwanted side reactions. In the doping process, in the growth process of certain high-purity, large-size compound semiconductor crystals such as gallium nitride (GaN) or gallium arsenide (GaAs), high-purity hydrogen is used as one of the reaction gases to participate in the generation and transport of hydrides, which helps to achieve efficient and large-area epitaxial growth.

[0003] As we all know, high-purity hydrogen is a flammable and explosive gas that is directly discharged, which not only pollutes the air but is also extremely dangerous. It also has high recycling costs. It is usually purified by combustion, but existing processing equipment has a complex structure, high cost, and has the problem of incomplete combustion. Utility Model Content

[0004] The utility model discloses a novel exhaust gas combustion treatment device, which solves the technical problems of complex structure, high cost and incomplete combustion of the burner in the prior art, and has the technical effects of reasonable structure, conducive to complete combustion and small size. The technical scheme adopted is as follows:

[0005] A novel exhaust gas combustion treatment device comprises an inner cavity and an outer cavity in a negative pressure state, wherein the outer cavity is sleeved outside the inner cavity and connected with the inner cavity at the upper part, a heating component is arranged outside the outer cavity, and the heating component is used to heat a first gas introduced into the outer cavity, a first air inlet for the first gas is connected at the lower part of the outer cavity, and a second air inlet for the second gas is connected at the top of the inner cavity, and the first gas flows into the inner cavity after passing through the heating component and the second gas burns and reacts.

[0006] On the basis of the above technical solution, the first gas is high-purity hydrogen and the second gas is compressed air.

[0007] On the basis of the above technical solution, it also includes a perforated plate, which is fixed in the inner cavity, and the second gas entering through the second air inlet passes downward through the perforated plate and then enters the inner cavity.

[0008] On the basis of the above technical solution, it also includes a guide plate arranged below the orifice plate, one end of the guide plate is fixedly connected to the inner wall of the inner cavity, and the other end of the guide plate extends inward and downward, and the upper part of the outer cavity is connected to the inner cavity through a plurality of short tubes, and the plurality of short tubes are arranged circumferentially and have a downward inclination angle from the outside to the inside.

[0009] On the basis of the above technical solution, a high temperature resistant diaphragm is also provided in the outer cavity. The diaphragm is designed so that when the inner cavity is working normally and is in a negative pressure state, the diaphragm opens the outer cavity to allow the first gas to flow through the outer cavity. When the inner cavity changes to a negative pressure state due to a fault, the diaphragm closes the outer cavity to cut off the flow of the first gas.

[0010] On the basis of the above technical solution, the diaphragm includes several circumferentially arranged sub-diaphragms, the sub-diaphragms are made of high-temperature resistant ceramic-based sheets, one end of the sub-diaphragm is hinged to an inner wall surface of the outer cavity, and the other end of the sub-diaphragm is connected to the outer cavity through a support and the other inner wall surface of the outer cavity, and the support is used to support the sub-diaphragm to overcome the self-weight of the sub-diaphragm.

[0011] Based on the above technical solution, the heating component includes a plurality of heating rods arranged around the outer cavity, the heating rods are covered with spiral heating wires, the heating component is covered with a flame retardant layer, and the flame retardant layer is covered with an insulating layer.

[0012] On the basis of the above technical solution, a supporting mesh plate is further provided between the flame retardant layer and the thermal insulation layer to improve the structural strength of the flame retardant layer and the thermal insulation layer. A shell is provided outside the thermal insulation layer, and an explosion-proof cavity is formed between the shell and the thermal insulation layer.

[0013] On the basis of the above technical solution, it also includes an air supply unit, the inner cavity extends downward to form an air supply inner cavity of the air supply unit, the outer cavity extends downward to form an air supply outer cavity of the air supply unit, an air supply buffer cavity is also arranged outside the air supply outer cavity, the first air inlet is arranged on the outer wall forming the air supply buffer cavity, the air supply buffer cavity is connected with the air supply outer cavity through a plurality of second through holes arranged circumferentially, and the air supply outer cavity is connected with the outer cavity through a plurality of first through holes arranged circumferentially.

[0014] On the basis of the above technical solution, the first air inlet, the second through hole and the first through hole are staggered and have gradually smaller diameters.

[0015] Beneficial Effects

[0016] The utility model has a reasonable structure, and the inner cavity, outer cavity and heating component are set in a sleeve arrangement. On the one hand, the heating component can uniformly and gradually heat the first gas in the outer cavity, such as high-purity hydrogen (purity 99.999%), which is conducive to avoiding the setting of a higher heating power. At the same time, the diffusion process of the first gas in the outer cavity can ensure the sufficiency and uniformity of the heating, so that when the first gas and the second gas contact and produce a combustion reaction, the combustion sufficiency can be greatly improved, and the exhaust gas treatment effect can be improved; in addition, the heating component can also promote the diffusion of the first gas from bottom to top in the outer cavity, which is conducive to guiding the first gas to flow into the inner cavity, and the structural design is ingenious. On the other hand, the method of isolating the second gas from heating the first gas can avoid the process of igniting the two gases after mixing and then igniting them with an open flame in the prior art, which is safer; on the other hand, the method of setting the inner cavity, outer cavity and heating component in a sleeve arrangement makes the processing equipment structure more compact, and is conducive to saving longitudinal space and realizing compactness.

[0017] In the utility model, the second gas passes downward through the orifice plate into the inner cavity to contact with the first gas, so that the first gas and the second gas can be mixed evenly and the combustion is sufficient.

[0018] In the utility model, a high temperature resistant diaphragm is also arranged in the outer cavity. When the inner cavity of the equipment is in a negative pressure state during normal operation, the diaphragm opens the outer cavity to allow the first gas to flow through the outer cavity. When the inner cavity changes to a negative pressure state due to a fault, the sub-diaphragm closes the outer cavity to cut off the flow of the first gas. In this way, the outer cavity can be cut off in time when the equipment fails to cause greater losses, and the use safety is good. In addition, a shell is arranged outside the flame retardant layer and the heat insulation layer, and an explosion-proof cavity is formed inside the shell. On the one hand, it can prevent the explosion fragments from splashing outwards when a fault occurs, and on the other hand, the explosion-proof cavity can form an air insulation layer to improve the thermal insulation effect. It also includes a support mesh plate for positioning the heat insulation layer and the flame retardant layer. The heat insulation layer material is usually thicker. The setting of the support mesh plate can prevent the heat insulation layer material from piling up downwards due to thermal expansion or long-term use, which is conducive to ensuring the smooth operation of the equipment.

[0019] The air delivery unit in the utility model comprises an air delivery inner cavity, an air delivery outer cavity and an air delivery buffer cavity which are nested with each other. The first gas enters the outer cavity through the second through hole and the first through hole and is heated. The first gas is diverted and dispersed for many times in the process of passing through the air delivery buffer cavity and the air delivery outer cavity, so that the first gas can enter the outer cavity evenly and then be evenly heated. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the prior art descriptions are briefly introduced below. Obviously, the drawings described below are only one embodiment of the utility model. For ordinary technicians in this field, other implementation drawings can be derived from the provided drawings without creative work.

[0021] Figure 1 : A schematic diagram of the three-dimensional structure of the utility model;

[0022] Figure 2 : A schematic diagram of the cross-sectional structure of the main view of the utility model;

[0023] Figure 3 : Figure 2 A schematic diagram of the local enlarged structure at C in the middle;

[0024] Figure 4 : Schematic diagram of the cross-sectional structure of the air supply unit; DETAILED DESCRIPTION

[0025] The following description and accompanying drawings fully illustrate the specific embodiments of this article so that those skilled in the art can practice them. Parts and features of some embodiments may be included in or replace parts and features of other embodiments. The scope of the embodiments of this article includes the entire scope of the claims, as well as all available equivalents of the claims. Herein, the terms "first", "second", etc. are only used to distinguish one element from another, without requiring or implying any actual relationship or order between these elements. In fact, the first element can also be called the second element, and vice versa. Moreover, the terms "include", "comprise" or any other variant thereof are intended to cover non-exclusive inclusion, so that the structure, device or equipment including a series of elements includes not only those elements, but also other elements that are not explicitly listed, or also include elements inherent to such structure, device or equipment. In the absence of more restrictions, the elements defined by the sentence "including one..." do not exclude the existence of other identical elements in the structure, device or equipment including the elements. Each embodiment is described in a progressive manner herein, and each embodiment focuses on the differences from other embodiments, and the same and similar parts between the embodiments can be referred to each other.

[0026] The terms "longitudinal", "lateral", "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc. in this document indicate the orientation or position relationship based on the orientation or position relationship shown in the drawings, and are only for the convenience of describing this document and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operate in a specific orientation, and therefore cannot be understood as a limitation on the present invention. In the description of this document, unless otherwise specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a mechanical connection or an electrical connection, it can also be the internal communication of two elements, it can be a direct connection, or it can be an indirect connection through an intermediate medium. For ordinary technicians in this field, the specific meanings of the above terms can be understood according to specific circumstances.

[0027] As used herein, the term "plurality" means two or more than two, unless otherwise specified.

[0028] In this document, the character " / " indicates that the preceding and following objects are in an "or" relationship. For example, A / B means: A or B.

[0029] In this article, the term "and / or" is a description of the association relationship between objects, indicating that three relationships may exist. For example, A and / or B means: A or B, or, A and B.

[0030] like Figures 1 to 4 A novel exhaust gas combustion treatment device is shown, comprising an inner cavity 11 and an outer cavity 12 in a negative pressure state. In this embodiment, the outlet end of the inner cavity 11 can be connected to the air inlet of the fan to form a negative pressure state. The outer cavity 12 is sleeved outside the inner cavity 11 and connected to the inner cavity 11 at the upper part. The inner cavity 11 and the outer cavity 12 are coaxially arranged and cylindrical;

[0031] A heating component 2 is provided outside the outer cavity 12, and the heating component 2 is used to heat the first gas passing into the outer cavity 12. The heating component 2 includes a plurality of heating rods 21 arranged around the outer cavity, and the heating rods 21 are provided with spiral heating wires 22. Electric heating is adopted, so that the first gas is gradually heated to the set temperature when flowing through the outer cavity 12 from bottom to top. The heating component 2 is provided with a flame retardant layer 13, wherein the flame retardant material constituting the flame retardant layer 13 is the prior art, and those skilled in the art can select it according to the needs, which will not be repeated here. The flame retardant layer 13 is provided with a heat insulation layer 14 outside, such as the heat insulation layer 14 formed by heat-insulating ceramic fiber material, which can effectively reduce the heat exchange between the inner cavity and the outside world, and at the same time improve the combustion completeness. In addition, in order to improve the structural stability of the flame retardant layer 13 and the heat insulation layer 14, a high temperature resistant metal mesh plate 15 can be provided between the flame retardant layer 13 and the heat insulation layer 14.

[0032] like Figure 1 and 2As shown, a shell 16 is disposed outside the heat insulation layer 14, and a plurality of heat dissipation holes (not shown) are disposed on the shell 16, and an explosion-proof cavity 17 is formed between the shell 16 and the heat insulation layer 14. In this embodiment, the shell 16 includes a plurality of detachably connected sub-shells, and the plurality of sub-shells together enclose the explosion-proof cavity 17. To facilitate the disassembly and assembly of the sub-shells, handles are further provided on the side walls and the bottom end of the sub-shells to facilitate the operation of workers.

[0033] The lower part of the outer cavity 12 is connected with a first air inlet 331 for the first gas to pass through. Specifically, it also includes an air supply unit 3 arranged below the outer cavity 12 and the inner cavity 11. The inner cavity 11 extends downward to form an air supply inner cavity 31 of the air supply unit 3. The outer cavity 12 extends downward to form an air supply outer cavity 32 of the air supply unit 3. An air supply buffer cavity 33 is also sleeved outside the air supply outer cavity 32. The air supply buffer cavity 33 is annular and is coaxially arranged with the air supply inner cavity 31. The first air inlet 331 is arranged on the outer wall forming the air supply buffer cavity 33. The first air inlet 331 is for the first gas to pass through. In this embodiment, the first gas is high-purity hydrogen (purity 99.999%), which is used as a process gas in the semiconductor production process and as an exhaust gas for combustion treatment. The air supply buffer cavity 33 is connected to the air supply outer cavity 32 through a plurality of second through holes 321 arranged circumferentially, such as Figure 4 As shown, the axis of the second through hole 321 extends radially, and the air supply outer cavity 32 is connected to the outer cavity 12 through a plurality of first through holes 322 arranged circumferentially, wherein the first through hole 322 is axially parallel to the axis of the air supply inner cavity 31, so that the first gas entering passes upward through the first through hole 322 and enters the outer cavity 12. In addition, in order to make the first gas evenly fill the outer cavity 12, the first air inlet 331, the second through hole 321 and the first through hole 322 are staggered, and the diameters of the first air inlet 331, the second through hole 321 and the first through hole 322 are gradually reduced, but the number is gradually increased.

[0034] In addition, the air supply unit 3 is connected to the housing upwards through a flange, and a graphene gasket is placed between the two flanges.

[0035] like Figure 2 As shown, the top of the inner cavity 11 is connected to a second air inlet 111 for the second gas to pass through. The first gas flows through the heating component 2 and enters the inner cavity 11, and the second gas burns and reacts. Specifically, the second air inlet 111 is arranged on the inner top surface of the inner cavity 11, and a perforated plate 19 is fixed in the inner cavity 11. The perforated plate 19 covers the upper port of the inner cavity 11. The second air inlet 111 vertically passes the second gas downward. After passing through the perforated plate 19, the second gas can evenly enter the inner cavity 11, which is conducive to the uniform mixing and contact of the first gas and the second gas. A guide plate 120 is provided below the orifice plate 19. The upper end of the guide plate 120 is fixedly connected to the inner wall surface of the inner cavity 11, and the end of the guide plate 120 is downward and extends inward to guide the second gas to converge to the center of the inner cavity 11.

[0036] like Figure 2As shown, the upper portion of the outer cavity 12 is connected to the inner cavity 11 via a plurality of short tubes 18, and the plurality of short tubes 18 are arranged circumferentially and have a downward inclination angle from the outside to the inside, so that when the first gas enters the inner cavity 11 through the short tubes 18, the first gas can be guided to flow downward. In addition, the caliber of the lower port formed at the end of the guide plate 120 is roughly the same as the caliber of the structure formed by the plurality of short tubes 18, so that the first gas and the second gas can fully contact and react.

[0037] In this embodiment, the first gas is high-purity hydrogen (purity 99.999%), and the second gas is compressed air.

[0038] In addition, a high temperature resistant diaphragm 8 is also provided in the outer cavity 12. The high temperature resistant diaphragm 8 includes a plurality of circumferentially arranged sub-diaphragms 81, such as Figure 3 As shown, one end of the sub-diaphragm 81 is hinged to an inner wall surface of the outer cavity 12, and the other end of the sub-diaphragm 81 is connected to the outer cavity through a support member 82 and another inner wall surface of the outer cavity 12. In this embodiment, the support member 82 is a compression spring made of a high-temperature resistant metal material. The compression spring is used to support the sub-diaphragm 81 to overcome the self-weight of the sub-diaphragm 81. In other embodiments of the present invention, the compression spring can also be replaced by other support members to overcome the self-weight of the sub-diaphragm 81 and reduce the resistance to the flipping of the sub-diaphragm 81. The sub-diaphragm 81 is designed so that when the outer cavity 12 and the inner cavity 11 are in a negative pressure state, the sub-diaphragm 81 opens the outer cavity 12 to allow the first gas to flow through the outer cavity 12. When the outer cavity 12 and the inner cavity 11 change the negative pressure state due to a fault, the sub-diaphragm 82 closes the outer cavity 12 to cut off the flow of the first gas. The sub-diaphragm sheet 81 is made of a high-temperature resistant ceramic-based sheet, such as a silicon nitride (Si3N4) ceramic sheet, a zirconium oxide (ZrO2) ceramic sheet, etc., and those skilled in the art can select according to their needs.

[0039] In addition, it also includes a sensor for monitoring the temperature in the inner cavity 11 and the outer cavity 12 and a pressure sensor. The sensor can be electrically connected to an external controller and can send an alarm signal in time when a fault occurs.

[0040] The present invention is described above by way of examples, but the present invention is not limited to the above specific embodiments, and any changes or modifications based on the present invention belong to the scope of protection required by the present invention.

Claims

1. A novel exhaust gas combustion treatment device, characterized in that: The invention comprises an inner cavity (11) and an outer cavity (12) in a negative pressure state, wherein the outer cavity (12) is sleeved outside the inner cavity (11) and is connected to the inner cavity (11) at the top, a heating component (2) is arranged outside the outer cavity (12), and the heating component (2) is used to heat a first gas passing into the outer cavity (12), the lower part of the outer cavity (12) is connected to a first air inlet (331) for the first gas to pass through, and the top of the inner cavity (11) is connected to a second air inlet (111) for the second gas to pass through, and the first gas flows through the heating component (2) and enters the inner cavity (11), and the second gas burns and reacts.

2. The novel exhaust gas combustion treatment device according to claim 1 is characterized in that: The first gas is high-purity hydrogen, and the second gas is compressed air.

3. The novel exhaust gas combustion treatment device according to claim 1 is characterized in that: It also comprises a perforated plate (19), wherein the perforated plate (19) is fixedly arranged in the inner cavity (11), and the second gas entering through the second gas inlet (111) passes downward through the perforated plate (19) and then enters the inner cavity.

4. The novel exhaust gas combustion treatment device according to claim 3 is characterized in that: It also includes a guide plate (120) disposed below the orifice plate (19), one end of the guide plate (120) being fixedly connected to the inner wall surface of the inner cavity (11), and the other end of the guide plate (120) extending inwardly and downwardly, and the upper part of the outer cavity (12) is connected to the inner cavity (11) via a plurality of short tubes (18), and the plurality of short tubes (18) are arranged circumferentially and have a downwardly inclined angle from the outside to the inside.

5. The novel exhaust gas combustion treatment device according to claim 1 is characterized in that: A high temperature resistant diaphragm (8) is also provided in the outer cavity (12). The diaphragm (8) is designed such that when the inner cavity (11) is operating normally and is in a negative pressure state, the diaphragm (8) opens the outer cavity (12) to allow the first gas to flow through the outer cavity (12); and when the inner cavity (11) changes to a negative pressure state due to a fault, the diaphragm (8) closes the outer cavity (12) to cut off the flow of the first gas.

6. The novel exhaust gas combustion treatment device according to claim 5 is characterized in that: The diaphragm (8) includes a plurality of circumferentially arranged sub-diaphragms (81), wherein the sub-diaphragms (81) are made of high-temperature resistant ceramic-based thin sheets, one end of the sub-diaphragm (81) is hinged to an inner wall surface of the outer cavity (12), and the other end of the sub-diaphragm (81) is connected to the outer cavity (12) through a support member (82) and the other inner wall surface of the outer cavity (12), and the support member (82) is used to support the sub-diaphragm (81) to overcome the self-weight of the sub-diaphragm (81).

7. The novel exhaust gas combustion treatment device according to any one of claims 1 to 6, characterized in that: The heating component (2) comprises a plurality of heating rods (21) arranged around an outer cavity (12), the heating rods (21) are provided with spiral heating wires (22) on their outer casings, the heating component (2) is provided with a flame retardant layer (13) on its outer casing, and the flame retardant layer (13) is provided with a heat insulation layer (14) on its outer casings.

8. The novel exhaust gas combustion treatment device according to claim 7 is characterized in that: A supporting mesh plate (15) is also provided between the flame retardant layer (13) and the heat insulation layer (14) to improve the structural strength of the flame retardant layer (13) and the heat insulation layer (14); a shell (16) is provided outside the heat insulation layer (14), and an explosion-proof cavity (17) is formed between the shell (16) and the heat insulation layer (14).

9. The novel exhaust gas combustion treatment device according to claim 7 is characterized in that: It also comprises an air supply unit (3), wherein the inner cavity (11) extends downward to form an air supply inner cavity (31) of the air supply unit (3), and the outer cavity (12) extends downward to form an air supply outer cavity (32) of the air supply unit (3); an air supply buffer cavity (33) is also provided outside the air supply outer cavity (32); the first air inlet (331) is provided on the outer wall forming the air supply buffer cavity (33); the air supply buffer cavity (33) is connected to the air supply outer cavity (32) through a plurality of second through holes (321) arranged circumferentially; and the air supply outer cavity (32) is connected to the outer cavity (12) through a plurality of first through holes (322) arranged circumferentially.

10. The novel exhaust gas combustion treatment device according to claim 9 is characterized in that: The first air inlet (331), the second through hole (321) and the first through hole (322) are staggered and have gradually smaller diameters.

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