Cooling system for tail gas treatment

Abstract

The utility model discloses a cooling system for tail gas treatment, which comprises a first cooling tower, the first cooling tower comprises a through first hollow cavity, a first water cooling cavity independent of the first hollow cavity is formed outside the first hollow cavity, and a plurality of first cooling pipes are arranged in the first hollow cavity in a through manner. The two end openings of the first cooling pipe communicate with the first water cooling cavity, and the first water cooling cavity further communicates with a first water inlet pipe opening and a first water outlet pipe opening. The cooling device is reasonable in structure, small in size and good in cooling effect.

Description

Technical Field

[0001] The utility model relates to the technical field of tail gas treatment, in particular to a cooling system for tail gas treatment. Background Art

[0002] In modern production, exhaust gas treatment is an important part of production. For example, various types of exhaust gas will be generated in the semiconductor production process. These exhaust gases mainly come from chemical cleaning, photolithography, etching, doping, packaging and other links in the semiconductor manufacturing process, and contain a variety of harmful substances. Exhaust gas treatment methods can be roughly divided into water washing, adsorption and combustion, etc., which are usually a combination of multiple treatment methods. Among them, combustion method is widely used. The high-temperature products produced after combustion often need to be cooled before they can be discharged. How to cool them efficiently and quickly is an important issue in the cooling link. Utility Model Content

[0003] The utility model discloses a cooling system for exhaust gas treatment, which solves the technical problems of complex structure and low cooling efficiency in the cooling system in the prior art, and has the technical advantages of reasonable structure, small size and good cooling effect. The technical solution adopted is as follows:

[0004] A cooling system for exhaust gas treatment includes a first cooling tower, wherein the first cooling tower includes a first hollow cavity extending therethrough, a first water-cooling cavity independent of the first hollow cavity is formed outside the first hollow cavity, a plurality of first cooling pipes extend through the first hollow cavity, and both ends of the first cooling pipes are connected to the first water-cooling cavity, and the first water-cooling cavity is also connected to a first water inlet and a first water outlet.

[0005] On the basis of the above technical solution, the first water-cooling cavity includes two independent first sub-chambers, and the two first sub-chambers are relatively arranged on both sides of the first hollow cavity.

[0006] On the basis of the above technical solution, it also includes a spray head connected to the first hollow cavity, and the spray head can spray cooling water into the first hollow cavity.

[0007] On the basis of the above technical solution, cooling fins are provided outside the first cooling tube, and the first cooling tube is arranged perpendicular to the flow direction of the air flow to be cooled.

[0008] On the basis of the above technical solution, a plurality of the first cooling tubes are arranged in multiple layers up and down in the first hollow cavity, and the multiple layers of the first cooling tubes are arranged alternately to form a winding airflow channel.

[0009] On the basis of the above technical solution, the fins extend in a spiral shape along the outer wall of the first cooling tube to disturb the airflow.

[0010] On the basis of the above technical solution, it also includes a cooling box and a second cooling tower, the first cooling tower and the second cooling tower are arranged above the cooling box and the inner cavities are connected, the cooling box includes a third hollow cavity connected to the first hollow cavity, and the bottom of the third hollow cavity is connected to a drain pipe; the second cooling tower includes a second hollow cavity, and the second hollow cavity is penetrated by a plurality of second air pipes independent of the second hollow cavity, the second air pipes connect the third hollow cavity with the inner cavity of the adjacent component to allow the gas to be cooled to enter the cooling system.

[0011] On the basis of the above technical solution, the second hollow cavity is connected with a second water inlet pipe opening and a second water outlet pipe opening.

[0012] On the basis of the above technical solution, a third water-cooling cavity independent of the third hollow cavity is formed outside the third hollow cavity, a plurality of third cooling pipes pass through the third hollow cavity, both ends of the third cooling pipes are connected to the third water-cooling cavity, and the third water-cooling cavity is also connected to a third water inlet and a third water outlet.

[0013] On the basis of the above technical solution, the third water-cooling chamber is arranged at the upper part of the cooling box and includes two independent third sub-chambers, and the two third sub-chambers are relatively arranged on both sides of the third hollow cavity.

[0014] Beneficial Effects

[0015] The utility model has a reasonable structure. A water-cooling chamber is further provided outside the hollow cavity of the first cooling tower. In addition, a cooling pipe connected to the water-cooling chamber is further provided in the hollow cavity. In this way, when the gas to be cooled passes through the first cooling tower, on the one hand, the setting of the cooling pipe can continuously break up the airflow, effectively reduce the gas flow rate and extend the contact time with the gas, thereby improving the heat exchange law. On the other hand, cooling water is continuously circulated in the cooling pipe, and fins are provided outside the cooling pipe, thereby further improving the heat exchange efficiency. On the other hand, the cooling chamber also performs heat exchange with the hollow cavity, which is beneficial to efficient and rapid cooling. In addition, the setting of the water-cooling chamber is also beneficial to improving the safety of use, thereby avoiding burns and the like caused by no touch.

[0016] In addition, a spray head is provided in the first cooling tower, which can cool the hollow cavity by spraying, thereby further improving the cooling effect.

[0017] In the utility model, the first cooling tower is connected with the inner cavity of the cooling box and the second cooling tower, wherein the first cooling tower and the second cooling tower are arranged above the cooling box, and are arranged in a U shape as a whole, with a compact structure and a reasonable design, wherein the second cooling tower can connect adjacent components with the inner cavity of the cooling system, such as connecting the inner cavity of the burner with the inner cavity of the cooling system, wherein the arrangement of the second cooling tower can, on the one hand, effectively isolate the heat exchange between the inner cavity of the burner and the inner cavity of the cooling system to avoid lowering the temperature in the burner, and on the other hand, can perform preliminary cooling when the exhaust gas passes through, and the structural design is ingenious and reasonable. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the prior art descriptions are briefly introduced below. Obviously, the drawings described below are only one embodiment of the utility model. For ordinary technicians in this field, other implementation drawings can be derived from the provided drawings without creative work.

[0019] Figure 1 : A schematic diagram of the three-dimensional structure of the first cooling tower in the utility model;

[0020] Figure 2 : A schematic diagram of the three-dimensional structure of the first cooling tower, the second cooling tower and the cooling box after assembly in the utility model;

[0021] Figure 3 : Figure 2 A schematic diagram of the cross-sectional structure of the main view;

[0022] Figure 4 : Figure 2 Schematic diagram of the cross-sectional structure along the BB direction; DETAILED DESCRIPTION

[0023] The following description and accompanying drawings fully illustrate the specific embodiments of this article so that those skilled in the art can practice them. Parts and features of some embodiments may be included in or replace parts and features of other embodiments. The scope of the embodiments of this article includes the entire scope of the claims, as well as all available equivalents of the claims. Herein, the terms "first", "second", etc. are only used to distinguish one element from another, without requiring or implying any actual relationship or order between these elements. In fact, the first element can also be called the second element, and vice versa. Moreover, the terms "include", "comprise" or any other variant thereof are intended to cover non-exclusive inclusion, so that the structure, device or equipment including a series of elements includes not only those elements, but also other elements that are not explicitly listed, or also include elements inherent to such structure, device or equipment. In the absence of more restrictions, the elements defined by the sentence "including one..." do not exclude the existence of other identical elements in the structure, device or equipment including the elements. Each embodiment is described in a progressive manner herein, and each embodiment focuses on the differences from other embodiments, and the same and similar parts between the embodiments can be referred to each other.

[0024] The terms "longitudinal", "lateral", "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc. in this document indicate the orientation or position relationship based on the orientation or position relationship shown in the drawings, and are only for the convenience of describing this document and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operate in a specific orientation, and therefore cannot be understood as a limitation on the present invention. In the description of this document, unless otherwise specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a mechanical connection or an electrical connection, it can also be the internal communication of two elements, it can be a direct connection, or it can be an indirect connection through an intermediate medium. For ordinary technicians in this field, the specific meanings of the above terms can be understood according to specific circumstances.

[0025] As used herein, the term "plurality" means two or more than two, unless otherwise specified.

[0026] In this document, the character " / " indicates that the preceding and following objects are in an "or" relationship. For example, A / B means: A or B.

[0027] In this article, the term "and / or" is a description of the association relationship between objects, indicating that three relationships may exist. For example, A and / or B means: A or B, or, A and B.

[0028] like Figures 1 to 4 The exhaust gas treatment cooling system shown comprises a first cooling tower 4, a second cooling tower 5 and a cooling box 6 arranged in a U shape. The first cooling tower 4 and the second cooling tower 5 are arranged above the cooling box 5 and their inner cavities are connected.

[0029] like Figure 1 As shown, the first cooling tower 4 is vertically arranged, including a through first hollow cavity, a first water-cooling cavity 41 independent of the first hollow cavity is formed outside the first hollow cavity, the first water-cooling cavity 41 includes two independent first sub-chambers, the two first sub-chambers are relatively arranged on both sides of the first hollow cavity, a plurality of first cooling pipes 42 pass through the first hollow cavity, the first cooling pipes 42 are arranged perpendicular to the flow direction of the air flow to be cooled, and the plurality of first cooling pipes 42 are arranged in multiple layers up and down in the first hollow cavity, and the multiple layers of the first cooling pipes 42 are staggered to form a winding air flow channel.

[0030] In addition, both ends of the first cooling pipe 42 are connected to the first water cooling chamber 41, and cooling fins are arranged outside the first cooling pipe 42. The fins extend spirally along the outer wall of the first cooling pipe 42 to disturb the airflow. Figure 3As shown, the two first sub-chambers are also connected to a first water inlet pipe 43 and a first water outlet pipe 44, respectively, wherein the first water inlet pipe 43 is arranged at the lower part of the first sub-chamber, and the first water outlet pipe 44 is arranged at the upper part of the first sub-chamber. In other embodiments of the utility model, the cooling medium may also be other coolants.

[0031] like Figure 3 As shown, the first hollow cavity is connected with a spray head 9, and the spray head 9 can spray cooling water into the first hollow cavity, wherein one spray head 9 is arranged at the middle position of the side wall of the first hollow cavity, and the outlet end of the first hollow cavity is connected upward with a cooling pipe section 8, and the side wall of the cooling pipe section 8 is provided with three spray heads 9 arranged circumferentially, and the three spray heads 9 are used to spray cooling water downward to cool the airflow, and at the same time, the cooling water falls on the fins, and can also wash and absorb some harmful components in the exhaust gas, which is beneficial to improve the exhaust gas treatment effect. In addition, the upper part of the cooling pipe section 8 is connected with the air inlet of the fan 7, which is used to form negative pressure in the first cooling tower 4, the second cooling tower 5 and the cooling box 6, and drive the gas to be cooled to flow.

[0032] like Figure 3 and 4 As shown, the cooling box 6 includes a third hollow cavity connected to the first hollow cavity, and the bottom of the third hollow cavity is connected to a drain pipe 53, the inlet end of the drain pipe 53 is close to the inner bottom surface of the cooling box 6 to avoid exhaust gas leakage when the water level in the cooling box 6 is low, and the exhaust gas passing through the cooling water in the third hollow cavity can be washed with water on the one hand, and the exhaust gas temperature can be reduced on the other hand. A third water cooling cavity 61 independent of the third hollow cavity is formed outside the third hollow cavity, wherein the third water cooling cavity 61 is arranged at the upper part of the cooling box 6, and the third water cooling cavity 61 is connected to a third water inlet and a third water outlet, and a plurality of third cooling pipes 62 are passed through the third hollow cavity, and both ends of the third cooling pipe 62 are connected to the third water cooling cavity 61, so that when the cooling water flows in through the third water inlet and is discharged through the third water outlet, the temperature can be cooled by water. The third cooling pipe 62 has the same structure as the first cooling pipe 42, and both include spirally extending fins.

[0033] like Figure 2 and 3 As shown, the second cooling tower 5 includes a second hollow cavity 51, and a plurality of second air passages 52 independent of the second hollow cavity 51 are passed through the second hollow cavity 51. The second air passages 52 are connected to the third hollow cavity and the inner cavity of the adjacent component, such as the inner cavity of the burner, so that the gas to be cooled enters the cooling system. The second hollow cavity 51 is connected to a second water inlet and a second water outlet, which can effectively isolate the heat exchange between the inner cavity of the burner and the inner cavity of the cooling system to avoid lowering the temperature in the burner, and can perform preliminary cooling when the exhaust gas passes through, and the structural design is ingenious and reasonable.

[0034] The present invention is described above by way of examples, but the present invention is not limited to the above specific embodiments, and any changes or modifications based on the present invention belong to the scope of protection required by the present invention.

Claims

1. A cooling system for exhaust gas treatment, characterized in that: The invention comprises a first cooling tower (4), wherein the first cooling tower (4) comprises a first hollow cavity extending therethrough, a first water-cooling cavity (41) independent of the first hollow cavity is formed outside the first hollow cavity, a plurality of first cooling pipes (42) extend through the first hollow cavity, and both ends of the first cooling pipes (42) are connected to the first water-cooling cavity (41), and the first water-cooling cavity (41) is further connected to a first water inlet (43) and a first water outlet (44).

2. The cooling system for exhaust gas treatment according to claim 1, characterized in that: The first water-cooling cavity (41) comprises two independent first sub-cavities, and the two first sub-cavities are relatively arranged on both sides of the first hollow cavity.

3. The exhaust gas treatment cooling system according to claim 1, characterized in that: It also includes a spray head (9) in communication with the first hollow cavity, and the spray head (9) can spray cooling water into the first hollow cavity.

4. The cooling system for exhaust gas treatment according to claim 1, characterized in that: The first cooling tube (42) is provided with cooling fins on the outside, and the first cooling tube (42) is arranged perpendicular to the flow direction of the air flow to be cooled.

5. The exhaust gas treatment cooling system according to claim 3, characterized in that: A plurality of the first cooling tubes (42) are arranged in multiple layers up and down in the first hollow cavity, and the multiple layers of the first cooling tubes (42) are arranged in a staggered manner to form a winding airflow channel.

6. The exhaust gas treatment cooling system according to claim 4, characterized in that: The fins extend in a spiral shape along the outer wall of the first cooling tube (42) to disturb the airflow.

7. The exhaust gas treatment cooling system according to any one of claims 1 to 6, characterized in that: The system further comprises a cooling box (6) and a second cooling tower (5), wherein the first cooling tower (4) and the second cooling tower (5) are arranged above the cooling box (6) and their inner cavities are connected, wherein the cooling box (6) comprises a third hollow cavity connected to the first hollow cavity, and a drain pipe (53) is connected to the bottom of the third hollow cavity; the second cooling tower (5) comprises a second hollow cavity (51), wherein a plurality of second air passages (52) independent of the second hollow cavity (51) pass through the second hollow cavity, and the second air passages (52) communicate with the third hollow cavity and the inner cavity of an adjacent component so that the gas to be cooled enters the cooling system.

8. The exhaust gas treatment cooling system according to claim 7, characterized in that: The second hollow cavity (51) is connected to a second water inlet and a second water outlet.

9. The cooling system for exhaust gas treatment according to claim 7, characterized in that: A third water-cooling cavity (61) independent of the third hollow cavity is formed outside the third hollow cavity, a plurality of third cooling pipes (62) are passed through the third hollow cavity, both ends of the third cooling pipes (62) are in communication with the third water-cooling cavity (61), and the third water-cooling cavity (61) is also in communication with a third water inlet and a third water outlet.

10. The cooling system for exhaust gas treatment according to claim 9, characterized in that: The third water-cooling chamber (61) is arranged on the upper part of the cooling box (6) and comprises two independent third sub-chambers, and the two third sub-chambers are relatively arranged on both sides of the third hollow cavity.

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