Wafer box carrying composite robot

Abstract

The utility model discloses a wafer cassette carrying composite robot, which relates to the technical field of wafer robots, and comprises a robot bidirectional fork arm and a protection assembly used for sealing and protecting the robot bidirectional fork arm, the protection assembly comprises a protection shell installed outside the robot bidirectional fork arm, and the front side of the protection shell is provided with a chute. According to the protection device, the two folding curtains are driven to be folded or stretched in the guide grooves through the square barrier plate in the ascending or descending process of the robot two-way fork arm in the protection shell, so that the sliding grooves are sealed, and vertical movement of the robot two-way fork arm is not affected; rotation of the robot two-way fork arm is not affected in the sealing process, normal use of the robot two-way fork arm is guaranteed, dust and oil molecules are blocked, oil molecule leakage is avoided, dust is prevented from entering the robot two-way fork arm, the cleanliness of the stacking industrial robot fork arm is improved, and the service life of the stacking industrial robot fork arm is prolonged.

Description

Technical Field

[0001] The utility model belongs to the technical field of wafer robots, and specifically relates to a wafer box transporting composite robot. Background Art

[0002] In recent years, the rapid advancement of robotics technology has provided new solutions for wafer box handling; in particular, composite robotics technology combines the advantages of multiple robots, such as the flexibility of robotic arms, the mobility of AGVs (automatic guided vehicles), and the accuracy of visual recognition systems, making the wafer box handling process more intelligent and automated; by integrating these technologies, composite robots can autonomously navigate in complex production environments, accurately identify and transport wafer boxes, greatly improving production efficiency and cleanliness.

[0003] The Chinese patent with patent number CN202320297346.7 discloses a wafer box clamping device, including a clamp body, the clamp body includes a support plate, and the support plate is provided with a makeshift groove with a front end opening and used to make way for a connecting block of the wafer box; guide blocks are respectively provided on both sides and the rear side of the makeshift groove, and the inner side surface of the guide block facing the makeshift groove includes a guide surface located at the upper part and a positioning surface located at the lower part; an upper accommodating area for accommodating a clamping plate of the wafer box is formed between the guide surfaces of the guide blocks, and a lower positioning area for positioning the clamping plate of the wafer box is formed between the positioning surfaces of the guide blocks; the guide surface is used to guide the clamping plate from the upper accommodating area to enter the lower positioning area, and a positioning column cooperating with the positioning groove arranged on the clamping plate is provided in the lower positioning area; a wafer box handling composite robot is also disclosed; the wafer box clamping device and the wafer box handling composite robot can not only meet the transportation requirements of the wafer box, but also have the advantages of high reliability and long service life.

[0004] However, in the implementation of relevant technologies, it was found that the robot of the above design has the following problems: its clamp body is exposed to the outside, easily invaded by dust, sewage or splashing objects, and its moving joints cannot be sealed, so it is difficult to prevent the leakage of dust and oil molecules, thereby reducing the cleanliness and service life of the stacking industrial robot fork arm, i.e., the wafer box clamping device. In view of this, a wafer box handling composite robot is provided to overcome the above defects. Utility Model Content

[0005] The technical problem to be solved by the utility model is to overcome the deficiencies of the prior art and provide a wafer box handling composite robot to block dust and oil molecules, prevent oil molecules from leaking out, prevent dust from entering the robot's bidirectional fork arm, and extend the cleanliness and service life of the fork arm of the stacking industrial robot.

[0006] In order to solve the above technical problems, the utility model provides a wafer box handling compound robot, including a robot bidirectional fork arm and a protective component for sealing and protecting the robot bidirectional fork arm, the protective component including a protective shell installed on the outside of the robot bidirectional fork arm, a slide groove is provided on the front side of the protective shell, a guide groove is provided on the inner wall of the slide groove, a square blocking plate and two folding curtains for sealing the slide groove are slidably connected between the inner left wall and the inner right wall of the guide groove, one of the folding curtains is installed between the inner top wall of the guide groove and the top of the square blocking plate, and the other folding curtain is installed between the inner bottom wall of the guide groove and the bottom of the square blocking plate, and the middle part of the square blocking plate is rotatably connected to a circular blocking plate plugged into the robot bidirectional fork arm.

[0007] Furthermore, it also includes a photovoltaic panel, which includes a slot penetrating through the front side of the circular baffle plate and a permanent magnetic limit ring connected to the outer ring of the circular baffle plate, the slot is plugged into the robot's two-way fork arm, the front side of the square baffle plate is penetrated by a rotating groove rotatably connected to the outer ring of the circular baffle plate, the inner wall of the rotating groove is provided with an annular limit groove, the permanent magnetic limit ring is located inside the annular limit groove, and the outer wall of the permanent magnetic limit ring is rotatably connected to the inner wall of the annular limit groove.

[0008] Furthermore, a sealing ring is installed on the inner wall of the slot, the outer wall of the sealing ring is in conflict with the outer wall of the robot's bidirectional fork arm, and the sealing ring is made of nitrile rubber.

[0009] Furthermore, a plurality of embedding grooves are provided on both sides of the left side of the square blocking plate, balls are embedded in the embedding grooves, the outer walls of the balls are rollingly connected to the inner walls of the embedding grooves, and the inner side walls of the guide grooves are rollingly connected to the outer walls of the balls.

[0010] Furthermore, a plurality of permanent magnets magnetically attracted to the inner wall of the guide groove are installed on both sides of the left and right sides of the folding curtain, and two adjacent permanent magnets are respectively located on both sides of the bending part of the folding curtain, and the opposite ends of the two adjacent permanent magnets are integrally formed with arc chamfers.

[0011] Furthermore, an annular sealing gasket is installed on the inner wall of the rotating groove, the outer ring of the circular blocking plate is rotatably connected to the inner wall of the annular sealing gasket, and the material of the annular sealing gasket is fluororubber.

[0012] After adopting the above technical scheme, the utility model has the following beneficial effects compared with the prior art.

[0013] 1. In the utility model, when the robot's bidirectional fork arm rises or falls in the protective shell, the square blocking plate drives the two folding curtains to fold or stretch in the guide groove, thereby sealing the slide groove without affecting the up and down movement of the robot's bidirectional fork arm. By providing a circular blocking plate rotatably connected to the square blocking plate, the rotation of the robot's bidirectional fork arm is not affected during the sealing process, thereby ensuring the normal use of the robot's bidirectional fork arm, thereby blocking dust and oil molecules, preventing oil molecules from leaking out, preventing dust from entering the robot's bidirectional fork arm, and extending the cleanliness and service life of the fork arm of the stacking industrial robot.

[0014] 2. In the utility model, the outer surface of the permanent magnetic limit ring is smooth, and the material is quartz glass with strong thermal stability. At the same time, the ring is embedded in the magnetic annular limit groove. The magnetic seal has a long service life. An extremely thin oil film is maintained between the sealing end faces to avoid dry friction between the end faces, and the circular baffle plate cannot be separated from the square baffle plate during the rotation of the robot's bidirectional fork arm. Without affecting the normal use of the robot's bidirectional fork arm, the fork arm joint rotates in a static sealing state to avoid leakage of oil molecules and dust from entering the robot's bidirectional fork arm, thereby extending the cleanliness and service life of the fork arm of the stacking industrial robot. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] The accompanying drawings are part of the present invention and are used to provide a further understanding of the present invention. The schematic embodiments of the present invention and their descriptions are used to explain the present invention, but do not constitute an improper limitation on the present invention. Obviously, the accompanying drawings described below are only some embodiments. For ordinary technicians in this field, other accompanying drawings can be obtained based on these accompanying drawings without creative work. In the accompanying drawings:

[0016] Figure 1 This is a schematic diagram of the overall structure of a wafer box handling composite robot according to the utility model;

[0017] Figure 2 This is a schematic structural diagram of a bidirectional fork arm of a wafer box handling composite robot of the utility model;

[0018] Figure 3 This is a schematic diagram of the structure of a square blocking plate in a wafer box handling composite robot of the utility model;

[0019] Figure 4 This is a schematic diagram of the structure of a folding curtain in a wafer box handling composite robot of the utility model;

[0020] Figure 5 This is a schematic diagram of the structure of a circular blocking plate in a wafer box handling composite robot of the utility model;

[0021] Figure 6for Figure 2 A magnified view of the structure at center A;

[0022] Figure 7 for Figure 3 A magnified view of the structure at B in the middle;

[0023] Figure 8 for Figure 3 A magnified view of the structure at C in the middle;

[0024] Fig. 9 for Figure 4 Enlarged view of the structure at D in the middle.

[0025] Numbers in the figure:

[0026] 1. Robot bidirectional fork arm;

[0027] 2. Protective assembly; 201. Protective housing; 202. Slide; 203. Guide groove; 204. Square baffle plate; 205. Folding curtain; 206. Round baffle plate;

[0028] 3. Photovoltaic cell panel; 301. slot; 302. permanent magnetic limit ring; 303. rotation slot; 304. annular limit slot;

[0029] 4. Sealing ring; 5. Ball bearing; 6. Permanent magnet; 7. Arc chamfer.

[0030] It should be noted that these drawings and textual descriptions are not intended to limit the conceptual scope of the present invention in any way, but rather to illustrate the concept of the present invention for those skilled in the art by referring to specific embodiments. DETAILED DESCRIPTION

[0031] In order to make the purpose, technical solutions and advantages of the embodiments of the utility model clearer, the technical solutions in the embodiments will be clearly and completely described below in conjunction with the drawings in the embodiments of the utility model. The following embodiments are used to illustrate the utility model but are not used to limit the scope of the utility model.

[0032] In the description of the present invention, it should be noted that the terms "upper", "lower", "front", "back", "left", "right", "vertical", "inside", "outside", etc. indicate directions or positional relationships based on the directions or positional relationships shown in the accompanying drawings. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific direction, be constructed and operated in a specific direction. Therefore, they cannot be understood as limitations on the present invention.

[0033] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0034] During the use of an existing wafer box clamping device and a wafer box handling composite robot, the clamp body is exposed to the outside without any safety protection and is easily invaded by dust, sewage or splashing objects, causing electrical short circuit problems, thereby reducing its service life. In addition, its moving joints cannot be sealed, making it difficult to prevent dust and oil molecules from leaking out, thereby reducing the cleanliness and service life of the stacking industrial robot fork arm, i.e., the wafer box clamping device. Example

[0035] Depend on Figure 1-Figure 9 The utility model provides a wafer box transporting composite robot.

[0036] Specifically, from the figure Figure 1 , Figure 2 , Figure 3 , Figure 4 and Figure 6 Provided is a robot bidirectional fork arm 1 and a protection component 2 for sealing and protecting the robot bidirectional fork arm 1, wherein the protection component 2 comprises a protection shell 201 installed on the outside of the robot bidirectional fork arm 1, a slide groove 202 is provided on the front side of the protection shell 201, a guide groove 203 is provided on the inner wall of the slide groove 202, a square blocking plate 204 and two folding curtains 205 for sealing the slide groove 202 are slidably connected between the inner left wall and the inner right wall of the guide groove 203, wherein one folding curtain 205 is installed between the inner top wall of the guide groove 203 and the top of the square blocking plate 204, and the other folding curtain 205 is installed between the inner bottom wall of the guide groove 203 and the bottom of the square blocking plate 204, and the middle part of the square blocking plate 204 is rotatably connected with a circular blocking plate 206 plugged into the robot bidirectional fork arm 1;

[0037] A plurality of embedding grooves are provided on both sides of the left side of the square blocking plate 204, and the distance between two adjacent embedding grooves is equal. A ball 5 is embedded in the embedding groove. The material of the ball 5 is stainless steel, which is not easy to rust, thereby extending the service life of the ball 5. The inside of the ball 5 is integrally formed with a cavity, so that the weight of the ball 5 is light, avoiding affecting the rise or fall of the square blocking plate 204. The outer wall of the ball 5 is rollingly connected to the inner wall of the embedding groove, and the inner wall of the guide groove 203 is connected to the outer wall of the ball 5. Rolling connection, by setting the embedding groove, it is convenient to embed the ball 5 on the left and right sides of the square blocking plate 204. By setting the ball 5, the friction between the square blocking plate 204 and the guide groove 203 is reduced, ensuring that the square blocking plate 204 slides more smoothly in the guide groove 203. The left and right sides of the folding curtain 205 are equipped with multiple permanent magnetic sheets 6 that are magnetically attracted to the inner side wall of the guide groove 203. The two adjacent permanent magnetic sheets 6 are respectively located on both sides of the bending part of the folding curtain 205. The opposite ends of the two permanent magnetic sheets 6 are integrally formed with arc chamfers 7. By setting and utilizing the magnetism of the permanent magnetic sheets 6, the left and right sides of the folding curtain 205 are prevented from being away from the inner wall of the guide groove 203, thereby ensuring the sealing effect of the folding curtain 205. By setting the arc chamfers 7, the problem of motion interference caused by the permanent magnetic sheets 6 following the bending of the folding curtain 205 during movement is avoided. During the process of the robot's two-way fork arm 1 rising or falling in the protective shell 201, the square blocking plate 204 drives the two folding curtains 205 to fold or stretch in the guide groove 203, thereby sealing the slide groove 202 without affecting the up and down movement of the robot's two-way fork arm 1. By setting a circular blocking plate 206 rotatably connected to the square blocking plate 204, the rotation of the robot's two-way fork arm 1 is not affected during the sealing process, thereby ensuring the normal use of the robot's two-way fork arm 1, thereby blocking dust and oil molecules, preventing oil molecules from leaking out, and preventing dust from entering the robot's two-way fork arm 1, thereby extending the cleanliness and service life of the fork arm of the stacking industrial robot. Example

[0038] Furthermore, as a specific implementation of the present invention, the present invention provides a wafer box transporting composite robot.

[0039] Based on the first embodiment, specifically, Figure 5 and Figure 8The invention also includes a photovoltaic cell panel 3, which includes a slot 301 extending through the front side of the circular baffle plate 206 and a permanent magnetic limit ring 302 connected to the outer ring of the circular baffle plate 206. The slot 301 is plugged into the robot bidirectional fork arm 1. A rotating groove 303 rotatably connected to the outer ring of the circular baffle plate 206 is provided through the front side of the square baffle plate 204. An annular limit groove 304 is provided on the inner wall of the rotating groove 303. The permanent magnetic limit ring 302 is located inside the annular limit groove 304. The outer wall of the permanent magnetic limit ring 302 is rotatably connected to the inner wall of the annular limit groove 304. The outer surface is smooth and made of quartz glass with strong thermal stability. At the same time, the ring is embedded in the magnetic annular limit groove 304. The magnetic seal has a long service life. An extremely thin oil film is maintained between the sealing end faces to avoid dry friction between the end faces, and the circular baffle plate 206 cannot be separated from the square baffle plate 204 during the rotation of the robot's bidirectional fork arm 1. Without affecting the normal use of the robot's bidirectional fork arm 1, the fork arm joint rotates in a static sealing state to avoid leakage of oil molecules and dust from entering the robot's bidirectional fork arm 1, thereby extending the cleanliness and service life of the fork arm of the stacking industrial robot.

[0040] Furthermore, a sealing ring 4 is installed on the inner wall of the slot 301, and the outer wall of the sealing ring 4 is in conflict with the outer wall of the robot's bidirectional fork arm 1. The sealing ring 4 is made of nitrile rubber. Nitrile rubber has excellent oil resistance, high wear resistance, good heat resistance, and strong adhesion. In addition, it also has good water resistance, air tightness and excellent bonding properties. By setting the sealing ring 4 to be made of nitrile rubber, the sealing between the slot 301 and the robot's bidirectional fork arm 1 is improved, blocking dust and oil molecules, preventing oil molecules from leaking, and preventing dust from entering the robot's bidirectional fork arm 1, thereby extending the cleanliness and service life of the fork arm of the stacking industrial robot.

[0041] Furthermore, an annular sealing gasket is installed on the inner wall of the rotating groove 303. The material of the annular sealing gasket is fluororubber. Fluororubber is a high-performance special rubber with excellent high temperature resistance and chemical stability. It is an ideal material for making seals in high temperature and high pressure environments. The outer ring of the circular baffle plate 206 is rotatably connected to the inner wall of the annular sealing gasket. By setting the annular sealing gasket to fluororubber material, the sealing between the rotating groove 303 and the circular baffle plate 206 is improved, dust and oil molecules are blocked, oil molecules are prevented from leaking, dust is prevented from entering the protective shell 201, and the cleanliness and service life of the fork arm of the stacking industrial robot are extended.

[0042] Working principle:

[0043] When the robot's bidirectional fork arm 1 rises or falls in the protective shell 201, the square blocking plate 204 drives the two folding curtains 205 to fold or stretch in the guide groove 203, thereby sealing the slide groove 202 without affecting the up and down movement of the robot's bidirectional fork arm 1. By setting a circular blocking plate 206 rotatably connected to the square blocking plate 204, the rotation of the robot's bidirectional fork arm 1 is not affected during the sealing process, ensuring the normal use of the robot's bidirectional fork arm 1, thereby blocking dust and oil molecules, preventing oil molecules from leaking, and preventing dust from entering the robot's bidirectional fork arm 1, thereby extending the cleanliness and service life of the fork arm of the stacking industrial robot.

[0044] The outer surface of the permanent magnetic limit ring 302 is smooth, and its material is quartz glass with strong thermal stability. At the same time, the ring is embedded in the magnetic annular limit groove 304. The magnetic seal has a long service life. An extremely thin oil film is maintained between the sealing end faces to avoid dry friction between the end faces, and the circular baffle plate 206 cannot be separated from the square baffle plate 204 during the rotation of the robot's bidirectional fork arm 1. Without affecting the normal use of the robot's bidirectional fork arm 1, the fork arm joint rotates in a static sealing state to avoid leakage of oil molecules and dust from entering the robot's bidirectional fork arm 1, thereby extending the cleanliness and service life of the fork arm of the stacking industrial robot.

[0045] By setting and utilizing the magnetism of the permanent magnetic sheet 6, the left and right sides of the folding curtain 205 are prevented from being away from the inner wall of the guide groove 203, thereby ensuring the sealing effect of the folding curtain 205. By setting the arc chamfer 7, the problem of motion interference caused by the permanent magnetic sheet 6 following the bending of the folding curtain 205 during movement is avoided. By setting the annular sealing gasket made of fluororubber material, the sealing between the rotating groove 303 and the circular blocking plate 206 is improved, dust and oil molecules are blocked, oil molecules are prevented from leaking, and dust is prevented from entering the protective shell 201, thereby extending the cleanliness and service life of the fork arm of the stacking industrial robot.

[0046] The above is only a preferred embodiment of the present invention, and does not constitute any form of limitation to the present invention. Although the present invention has been disclosed as a preferred embodiment as above, it is not intended to limit the present invention. Any technician familiar with this patent can make some changes or modifications to equivalent embodiments of equivalent changes using the technical content suggested above without departing from the scope of the technical solution of the present invention. The implementation schemes in the above embodiments can also be further combined or replaced. However, any simple modifications, equivalent changes and modifications made to the above embodiments based on the technical essence of the present invention without departing from the content of the technical solution of the present invention are still within the scope of the present invention.

Claims

1. A wafer box handling composite robot, comprising: Robot bidirectional fork arm (1); A protection component (2) for sealing and protecting a bidirectional fork arm (1) of a robot; The protective assembly (2) is characterized in that the protective housing (201) comprises a protective housing (201) mounted on the outside of the robot bidirectional fork arm (1), a slide groove (202) is provided on the front side of the protective housing (201), a guide groove (203) is provided on the inner wall of the slide groove (202), a square blocking plate (204) and two folding curtains (205) for sealing the slide groove (202) are slidably connected between the inner left wall and the inner right wall of the guide groove (203), one of the folding curtains (205) is mounted between the inner top wall of the guide groove (203) and the top of the square blocking plate (204), and the other of the folding curtains (205) is mounted between the inner bottom wall of the guide groove (203) and the bottom of the square blocking plate (204), and the middle part of the square blocking plate (204) is rotatably connected with a circular blocking plate (206) plugged into the robot bidirectional fork arm (1).

2. A wafer box handling composite robot according to claim 1, characterized in that: The invention also comprises a photovoltaic cell panel (3), wherein the photovoltaic cell panel (3) comprises a slot (301) extending through the front side of the circular baffle plate (206) and a permanent magnetic limit ring (302) connected to the outer ring of the circular baffle plate (206); the slot (301) is plugged into the robot bidirectional fork arm (1); a rotation slot (303) extending through the front side of the square baffle plate (204) and rotatably connected to the outer ring of the circular baffle plate (206); an annular limit groove (304) is provided on the inner wall of the rotation groove (303); the permanent magnetic limit ring (302) is located inside the annular limit groove (304); and the outer wall of the permanent magnetic limit ring (302) is rotatably connected to the inner wall of the annular limit groove (304).

3. The wafer box transporting composite robot according to claim 2, characterized in that: A sealing ring (4) is installed on the inner wall of the slot (301), the outer wall of the sealing ring (4) is in contact with the outer wall of the robot bidirectional fork arm (1), and the sealing ring (4) is made of nitrile rubber.

4. The wafer box transporting composite robot according to claim 3, characterized in that: A plurality of embedding grooves are provided on both sides of the left side of the square blocking plate (204), and balls (5) are embedded in the embedding grooves. The outer wall of the balls (5) is rollingly connected to the inner wall of the embedding grooves, and the inner wall of the guide groove (203) is rollingly connected to the outer wall of the balls (5).

5. The wafer box transporting composite robot according to claim 4, characterized in that: A plurality of permanent magnet sheets (6) magnetically attracted to the inner side wall of the guide groove (203) are mounted on both left and right sides of the folding curtain (205); two adjacent permanent magnet sheets (6) are respectively located on both sides of a bend of the folding curtain (205); and arc chamfers (7) are integrally formed at opposite ends of the two adjacent permanent magnet sheets (6).

6. The wafer box transporting composite robot according to claim 5, characterized in that: An annular sealing gasket is installed on the inner wall of the rotating groove (303), and the outer ring of the circular blocking plate (206) is rotatably connected to the inner wall of the annular sealing gasket, and the material of the annular sealing gasket is fluororubber.

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