Clamp, positioning mechanism and machining device

Abstract

The utility model discloses a clamp which comprises an installation seat, a pressing plate and an elastic piece, the pressing plate is connected to the installation seat in a sliding mode and used for pressing a clamped piece, one end of the elastic piece is fixedly connected to the installation seat, and the other end of the elastic piece is fixedly connected to the pressing plate. The stretching direction of the elastic piece is the same as the sliding direction of the pressing plate, the elastic piece is used for driving the pressing plate to slide in the first direction when stretching out, and the elastic piece is used for driving the pressing plate to slide in the second direction opposite to the first direction and enabling the pressing plate to press the clamped piece tightly when stretching out. According to the clamp, the installation and positioning accuracy of the clamp is improved, time and labor are saved when a clamped piece is replaced, abrasion to the clamp due to frequent disassembly and assembly is avoided, and the stability of the clamp is guaranteed. The utility model further provides a positioning mechanism. The utility model further provides a machining device.

Description

Technical Field

[0001] The utility model relates to the technical field of auxiliary positioning devices for processing equipment, in particular to a clamp, a positioning mechanism and a processing device. Background Art

[0002] Wafers are silicon chips used to make silicon semiconductor circuits. In the chip production process, since the chips are all prepared on wafers, the wafers need to be split into several small pieces according to the shape of the chips. The wafer splitter can split the wafer. Compared with the manual separation of wafers, the splitting machine has high efficiency and high degree of automation.

[0003] The wafer cutting process and the splitting process after cutting are two important processes in the wafer processing process. Both the cutting device used in the cutting process and the splitting device used in the splitting process need to position the wafer in a fixed position during processing. In the prior art, the iron frame of the wafer is pressed tightly by a clamp. Generally, the clamp needs to be disassembled and installed every time the wafer is replaced. The current clamp has poor positioning accuracy, which is time-consuming and labor-intensive when replacing wafers. It is severely worn out after long-term use and has poor stability. Utility Model Content

[0004] In view of this, the utility model provides a clamp, which improves the installation and positioning accuracy of the clamp, saves time and effort in replacing clamped parts, avoids wear of the clamp due to frequent disassembly and assembly, and ensures the stability of the clamp.

[0005] The utility model also provides a positioning mechanism.

[0006] The utility model also provides a processing device.

[0007] In order to achieve the above purpose, the utility model provides the following technical solutions:

[0008] A clamp, comprising:

[0009] Mounting seat;

[0010] A pressing plate, slidably connected to the mounting seat, for pressing the clamped part;

[0011] An elastic member, one end of which is fixedly connected to the mounting seat, and the other end of which is fixedly connected to the pressing plate;

[0012] The extension and contraction direction of the elastic member is the same as the sliding direction of the pressure plate. When the elastic member is extended, it is used to drive the pressure plate to slide along a first direction. When the elastic member is contracted, it is used to drive the pressure plate to slide along a second direction opposite to the first direction and make the pressure plate press the clamped part.

[0013] Optionally, the pressing plate is connected to the mounting seat via a sliding structure;

[0014] The sliding structure comprises a guide rail and a sliding block which are slidably connected, the guide rail is arranged along the sliding direction of the pressing plate, the guide rail is fixedly connected to the mounting seat, and the sliding block is fixedly connected to the pressing plate.

[0015] Optionally, a stop structure for limiting the position of the pressing plate is provided on the surface of the mounting seat close to the pressing plate;

[0016] The stop structure includes a connecting block and a supporting bolt threadedly connected to the connecting block, the connecting block is fixedly connected to the mounting seat, the tail end of the supporting bolt is arranged opposite to the first limit block on the pressure plate, and the pressure plate limits the movement of the pressure plate along the second direction by stopping the first limit block by the tail end of the supporting bolt.

[0017] Optionally, the elastic member is a coil spring, one end of the coil spring is connected to the connecting block, and the other end is connected to the first limiting block.

[0018] Optionally, a second limit block is also provided on the mounting seat, and the second limit block and the connecting block are respectively arranged at two ends of the mounting seat, the connecting block is arranged at the end close to the clamped part, and the second limit block is arranged at the end away from the clamped part, and the pressure plate limits the movement of the pressure plate along the first direction by the second limit block stopping the first limit block.

[0019] Optionally, a pressing inclined surface and a stop surface connected together are provided on the surface of the pressing plate close to the clamped part;

[0020] The stop surface is used to limit the movement of the clamped component along the first direction. The angle between the clamping slope and the stop surface is an obtuse angle. The clamping slope is arranged on a side of the stop surface close to the clamped component.

[0021] Optionally, a driving pull plate is provided on the pressing plate;

[0022] The driving pull plate is an L-shaped pull plate, one end of which is fixedly connected to the pressure plate;

[0023] Alternatively, the driving pull plate is an annular handle, and the annular handle is fixedly connected to the pressing plate.

[0024] Optionally, the spring is provided with one;

[0025] There are two springs, which are arranged in parallel and symmetrically.

[0026] It can be seen from the above technical scheme that the clamp provided by the utility model includes a mounting seat, a pressure plate and an elastic member. When the pressure plate is pulled in a direction away from the clamped part by an external force, the elastic member stretches and the pressure plate moves away from the position for placing the clamped part, thereby making room for the clamped part to be removed or placed on the clamp. After the external force is removed, the elastic member contracts, and in this process, the pressure plate is driven to move in the direction of the clamped part, thereby pressing the clamped part, and the clamped part after replacement can also be fixed through the above process. The clamp of the utility model only needs to adjust the position during installation. When replacing the clamped part, there is no need to disassemble and install the clamp, and the clamped part can be easily replaced by pulling the pressure plate. Since the clamp is not disassembled, only part of the structure on the clamp needs to be pulled, so that the installation position of the clamp does not change, thereby ensuring the installation and positioning accuracy of the clamp, saving time and effort when replacing the clamped part, avoiding the wear of the clamp due to frequent disassembly and assembly, and ensuring the stability of the clamp.

[0027] The utility model also provides a positioning mechanism, comprising a turntable and a clamp, wherein the clamp is installed on the turntable, the clamp is the above-mentioned clamp, and a clamped piece is placed on the turntable.

[0028] Optionally, four clamps are provided, and the four clamps are evenly distributed around the turntable;

[0029] The clamp comprises three driven clamps and one active clamp, wherein an elastic member is arranged in the driven clamp and two elastic members are arranged in the active clamp.

[0030] The positioning mechanism of the present invention includes the above-mentioned clamp, and thus has the advantages of the above-mentioned clamp, which will not be described in detail here.

[0031] The utility model also provides a processing device, comprising a positioning mechanism, wherein the positioning mechanism is used to position a clamped part to be processed, and the positioning mechanism is the above-mentioned positioning mechanism.

[0032] The processing device of the present invention includes the above-mentioned positioning mechanism, and thus has the advantages of the above-mentioned positioning mechanism, which will not be described in detail here. BRIEF DESCRIPTION OF THE DRAWINGS

[0033] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0034] Figure 1 A schematic structural diagram of an angle of the clamp provided by an embodiment of the utility model;

[0035] Figure 2 A schematic structural diagram of another angle of the clamp provided in an embodiment of the utility model;

[0036] Figure 3 A schematic diagram of the exploded structure of a clamp provided in one embodiment of the utility model;

[0037] Figure 4 for Figure 3 A schematic diagram of the structure of the clamp in the embodiment after removing the pressing plate;

[0038] Figure 5 A schematic diagram of an exploded structure of a clamp provided in another embodiment of the utility model;

[0039] Figure 6 for Figure 5 A schematic diagram of the structure of the clamp in the embodiment after removing the pressing plate;

[0040] Figure 7 A schematic diagram of the structure of a pressing plate provided in an embodiment of the utility model;

[0041] Figure 8 A schematic diagram of the structure of a driving pull plate provided in an embodiment of the utility model;

[0042] Fig. 9 A schematic diagram of the exploded structure of the positioning mechanism provided in the embodiment of the utility model;

[0043] Fig.10 A structural schematic diagram of a positioning mechanism provided by an embodiment of the utility model at one angle;

[0044] Fig.11 A structural schematic diagram of a positioning mechanism provided by an embodiment of the utility model from another angle;

[0045] Fig.12 for Fig.11 A schematic cross-sectional structure diagram of the AA position;

[0046] Fig.13 for Fig.12 A schematic diagram of the enlarged structure of part B;

[0047] Fig.14 A partially enlarged structural schematic diagram of the positions of the pressing slope and the stop surface of the pressing plate provided in an embodiment of the utility model.

[0048] in:

[0049] 1. Mounting seat, 101. Connecting block, 102. Second limiting block, 103. First threaded hole, 2. Elastic member, 3. Pressing plate, 301. Connecting groove, 302. First limiting block, 303. Pressing slope, 304. Second threaded hole, 4. Driving pull plate, 401. First plate body, 402. Second plate body, 403. First connecting through hole, 305. Stop surface, 5. Support bolt, 6. Sliding structure, 601. Guide rail, 602. Slider, 7. Limiting nut, 8. Positioning column, 9. Second connecting through hole, 10. Turntable, 1001. Mounting groove, 11. Clamped part. DETAILED DESCRIPTION

[0050] The utility model discloses a clamp, which improves the installation and positioning accuracy of the clamp, saves time and effort in replacing clamped parts, avoids wear of the clamp caused by frequent disassembly and assembly, and ensures the stability of the clamp.

[0051] The utility model also provides a positioning mechanism.

[0052] The utility model also provides a processing device.

[0053] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0054] See also Figures 1 to 14 The clamp of the utility model comprises a mounting seat 1, a pressing plate 3 and an elastic member 2. The pressing plate 3 is slidably connected to the mounting seat 1 and is used to press the clamped member 11. One end of the elastic member 2 is fixedly connected to the mounting seat 1, and the other end is fixedly connected to the pressing plate 3. The expansion and contraction direction of the elastic member 2 is the same as the sliding direction of the pressing plate 3. When the elastic member 2 is extended, it is used to drive the pressing plate 3 to slide along a first direction. When the elastic member 2 is contracted, it is used to drive the pressing plate 3 to slide along a second direction opposite to the first direction and make the pressing plate 3 press the clamped member 11.

[0055] The mounting seat 1 is a supporting bottom plate of the clamp. When replacing the clamped part 11, the pressing plate 3 is slid in a first direction by external force, the first direction is a direction away from the clamped part 11, the elastic part 2 is extended, and the pressing plate 3 moves away from the clamped part 11, thereby releasing the clamped part 11 and facilitating the removal of the clamped part 11. After replacing another clamped part, the external force is removed, the elastic part 2 contracts, and the pressing plate 3 is driven to slide in a second direction, the second direction is a direction close to the clamped part 11, thereby pressing the replaced clamped part 11 and fixing the clamped part 11. The clamped part 11 is a product.

[0056] The clamp of the utility model includes a mounting seat 1, a pressure plate 3 and an elastic member 2. When the pressure plate 3 is pulled in a direction away from the clamped part 11 by an external force, the elastic member 2 stretches and the pressure plate 3 moves away from the position where the clamped part 11 is placed, thereby making room for the clamped part 11 to be removed or placed on the clamp. After the external force is removed, the elastic member 2 contracts, and in the process drives the pressure plate 3 to move in the direction of the clamped part 11, thereby pressing the clamped part 11, and the clamped part 11 after replacement can also be fixed through the above process. The clamp of the utility model only needs to adjust the position during installation. When replacing the clamped part 11, there is no need to disassemble and install the clamp, and the clamped part 11 can be easily replaced by only pulling the pressure plate 3. Since the clamp is not disassembled, only part of the structure on the clamp needs to be pulled, so that the installation position of the clamp does not change, thereby ensuring the installation and positioning accuracy of the clamp, saving time and effort when replacing the clamped part 11, avoiding wear on the clamp due to frequent disassembly and assembly, and ensuring the stability of the clamp.

[0057] In order to ensure the stability of the sliding process of the pressing plate 3 and realize the reliable clamping of the clamped part 11, the pressing plate 3 is connected to the mounting seat 1 through the sliding structure 6. The sliding structure 6 includes a guide rail 601 and a slider 602 that are slidably connected. The guide rail 601 is arranged along the sliding direction of the pressing plate 3. The guide rail 601 is fixedly connected to the mounting seat 1, and the slider 602 is fixedly connected to the pressing plate 3. Figure 4 shown.

[0058] In order to limit the position where the elastic member 2 pulls the pressing plate 3 to move toward the clamped member 11, a stop structure for limiting the position of the pressing plate 3 is provided on the surface of the mounting base 1 close to the pressing plate 3. The stop structure includes a connecting block 101 and a support bolt 5 threadedly connected to the connecting block 101. The connecting block 101 is fixedly connected to the mounting base 1, and the tail end of the support bolt 5 is arranged opposite to the first limit block 302 on the pressing plate 3. Figure 7 As shown, it can be understood that the tail end of the support bolt 5 is close to one end of the first limit block 302. The tail end of the support bolt 5 abuts against the side of the first limit block 302, thereby limiting the movement of the pressing plate 3 along the second direction. The support bolt 5 is threadedly connected with a limit nut 7, which is used to fix the position of the support bolt 5, so that the length of the tail end of the support bolt 5 extending out of the connection block 101 is more reliable. The axis of the support bolt 5 is set along the sliding direction of the pressing plate 3.

[0059] In one embodiment, the elastic member 2 is a coil spring, one end of which is connected to the first threaded hole 103 on the side of the connecting block 101 by a bolt. Figure 6As shown, the other end is connected to the second threaded hole 304 on the side of the first limit block 302 by a bolt. The first limit block 302 is fixedly connected to the pressure plate 3. In one embodiment, the bottom surface of the first limit block 302 is set at a certain distance from the upper surface of the mounting seat, so that the pressure plate 3 is easy to slide.

[0060] In order to limit the movement of the pressing plate 3 along the first direction, a second limit block 102 is further provided on the mounting seat 1. The second limit block 102 and the connecting block 101 are respectively arranged at two ends of the mounting seat 1, the connecting block 101 is arranged at the end close to the clamped part 11, and the second limit block 102 is arranged at the end away from the clamped part 11. The pressing plate 3 is limited to move along the first direction by the second limit block 102 stopping the first limit block 302. The surface of the second limit block 102 close to the pressing plate 3 is spaced from the pressing plate 3 by a set distance to prevent the second limit block 102 from affecting the sliding of the pressing plate 3.

[0061] In order to reliably position the clamped part 11, the surface of the pressing plate 3 close to the clamped part 11 is provided with a pressing inclined surface 303 and a stop surface 305 connected together. Fig.13 and Fig.14 The stop surface is used to limit the movement of the clamped component along the first direction, and the angle between the pressing inclined surface 303 and the stop surface 305 is an obtuse angle, as shown in FIG. Fig.14 , so that the pressing plate 3 is pressed on the clamped part 11 along the second direction, wherein the pressing inclined surface 303 is arranged on the side of the stop surface 305 close to the clamped part 11. By setting the pressing inclined surface 303, it can be applied to clamping of clamped parts 11 of different thicknesses, and the stop surface 305 is provided to prevent the clamped part 11 from excessive displacement in the radial direction.

[0062] In order to facilitate pulling the pressing plate 3 by external force, a driving pull plate 4 is provided on the pressing plate 3. In one embodiment, the driving pull plate 4 is an L-shaped pull plate, one end of which is fixedly connected to the pressing plate 3. Figure 8 As shown. Specifically, the L-shaped pull plate includes a first plate body 401 and a second plate body 402 connected together, and a first connecting through hole 403 is provided on the first plate body 401. The L-shaped pull plate is connected to the pressure plate 3 by bolts penetrated in the first connecting through hole 403. In order to prevent the position where the L-shaped pull plate is connected to the pressure plate 3 from protruding from the surface of the pressure plate 3, a connecting groove 301 is provided at the position where the pressure plate 3 is connected to the first plate body 401, and the distance between the bottom surface of the connecting groove 301 and the surface of the pressure plate 3 where the connecting groove 301 is provided is the same as the thickness of the first plate body 401. In another embodiment, the driving pull plate 4 is an annular handle (not shown in the figure), and the annular handle is fixedly connected to the pressure plate 3. The annular handle can be a circular ring structure or a rectangular ring structure, which will not be repeated here.

[0063] In one embodiment, the spring is provided with one, and the pressing plate 3 is slidably connected to the mounting seat 1 through the slider 602 and the guide rail 601. Under the pulling force of one spring, the pressing plate 3 moves in the pulling direction of the spring and then stops at the limit position of the support bolt 5. In another embodiment, the spring is provided with two, and the two springs are arranged in parallel and symmetrically. The pressing plate 3 is slidably connected to the mounting seat 1 through the slider 602 and the guide rail 601. Under the pulling force of the two springs, the pressing plate 3 moves in the pulling direction of the spring and then stops at the limit position of the support bolt 5.

[0064] The utility model also provides a positioning mechanism, including a turntable 10 and a clamp, and the clamp is installed on the turntable 10. The clamp is the above-mentioned clamp, and the clamped member 11 is arranged on the turntable 10. Specifically, the turntable 10 is provided with a mounting groove 1001, and the clamp is installed at the mounting groove 1001, such as Figures 9 to 13 shown.

[0065] In order to improve the positioning reliability, the clamps are provided with four, and the four clamps are evenly distributed around the turntable 10. In one embodiment, the four clamps may include an active clamp and three driven clamps, wherein two elastic members 2 are provided in the active clamp, and one elastic member 2 may be provided in the driven clamp. In order to cooperate with the positioning, a plurality of positioning posts 8 are provided along the circumference of the turntable 10 and at a position opposite to the active clamp, wherein the plurality of positioning posts 8 here are two or more, so that when clamping the clamped part 11, the pressure plates 3 of the four clamps can be pulled outward at the same time, and after the clamped part 11 is placed, the external force of the active clamp is first withdrawn, and under the action of the elastic member 2, the pressure plate 3 of the active clamp pushes the clamped part 11, so that the edge of the clamped part 11 close to the positioning post 8 is pressed against the positioning post 8 to achieve positioning, and at the same time, under the action of the elastic member 2, the active clamp also clamps the clamped part 11, and then the external forces on the other three driven clamps are withdrawn to achieve the clamping of the clamped part 11 by the other three driven clamps. The mounting base 1 is provided with a second connecting through hole 9, and the mounting base 1 is mounted on the turntable 10 by means of connecting bolts passing through the second connecting through hole 9. In the above embodiment, a mode of cooperation of one active clamp and three driven clamps is provided to avoid the problems of warping and misalignment of the clamped part 11 during loading.

[0066] The utility model also provides a processing device, including a positioning mechanism, the positioning mechanism is used to position the clamped part 11 to be processed, the positioning mechanism is the above-mentioned positioning mechanism, and no further description is given here. The above-mentioned positioning mechanism plays a positioning function in the processing device. The processing device here can be a splitter.

[0067] In the description of this solution, it should be understood that the terms "upper", "lower", "vertical", "inside", "outside", etc., indicating the orientation or position relationship, are based on the orientation or position relationship shown in the accompanying drawings, and are only for the convenience of describing the utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on this solution.

[0068] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of this solution, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.

[0069] The various embodiments in this specification are described in a progressive manner, and each embodiment focuses on the differences from other embodiments. The same or similar parts between the various embodiments can be referenced to each other.

[0070] The above description of the disclosed embodiments enables those skilled in the art to implement or use the present invention. Various modifications to these embodiments will be apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention will not be limited to the embodiments shown herein, but will conform to the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A clamp, characterized in that: include: Mounting seat; A pressing plate, slidably connected to the mounting seat, for pressing the clamped part; An elastic member, one end of which is fixedly connected to the mounting seat, and the other end of which is fixedly connected to the pressing plate; The extension and contraction direction of the elastic member is the same as the sliding direction of the pressure plate. When the elastic member is extended, it is used to drive the pressure plate to slide along a first direction. When the elastic member is contracted, it is used to drive the pressure plate to slide along a second direction opposite to the first direction and make the pressure plate press the clamped part.

2. The clamp according to claim 1, characterized in that: The pressing plate is connected to the mounting seat via a sliding structure; The sliding structure comprises a guide rail and a sliding block which are slidably connected, the guide rail is arranged along the sliding direction of the pressing plate, the guide rail is fixedly connected to the mounting seat, and the sliding block is fixedly connected to the pressing plate.

3. The clamp according to claim 2, characterized in that: A stop structure for limiting the position of the pressing plate is provided on the surface of the mounting seat close to the pressing plate; The stop structure includes a connecting block and a supporting bolt threadedly connected to the connecting block, the connecting block is fixedly connected to the mounting seat, the tail end of the supporting bolt is arranged opposite to the first limit block on the pressure plate, and the pressure plate limits the movement of the pressure plate along the second direction by stopping the first limit block by the tail end of the supporting bolt.

4. The clamp according to claim 3, characterized in that: The elastic member is a coil spring, one end of which is connected to the connecting block, and the other end of which is connected to the first limiting block.

5. The clamp according to claim 3, characterized in that: A second limit block is also provided on the mounting seat, and the second limit block and the connecting block are respectively arranged at two ends of the mounting seat, the connecting block is arranged at an end close to the clamped part, and the second limit block is arranged at an end away from the clamped part, and the pressure plate limits the movement of the pressure plate along the first direction by the second limit block stopping the first limit block.

6. The clamp according to claim 1, characterized in that: The surface of the pressing plate close to the clamped part is provided with a pressing inclined surface and a stop surface connected together; The stop surface is used to limit the movement of the clamped component along the first direction. The angle between the clamping slope and the stop surface is an obtuse angle. The clamping slope is arranged on a side of the stop surface close to the clamped component.

7. The clamp according to any one of claims 1 to 6, characterized in that: The pressing plate is provided with a driving pull plate; The driving pull plate is an L-shaped pull plate, one end of which is fixedly connected to the pressure plate; Alternatively, the driving pull plate is an annular handle, and the annular handle is fixedly connected to the pressing plate.

8. The clamp according to claim 4, characterized in that: The spring is provided with one; There are two springs, which are arranged in parallel and symmetrically.

9. A positioning mechanism, comprising a turntable and a fixture, wherein the fixture is mounted on the turntable, characterized in that: The clamp is the clamp according to any one of claims 1 to 8, and the clamped object is placed on the turntable.

10. The positioning mechanism according to claim 9, characterized in that: There are four clamps, and the four clamps are evenly distributed around the turntable; The clamp comprises three driven clamps and one active clamp, wherein an elastic member is arranged in the driven clamp and two elastic members are arranged in the active clamp.

11. A processing device, comprising a positioning mechanism, the positioning mechanism is used to position a clamped part to be processed, characterized in that: The positioning mechanism is the positioning mechanism according to claim 9 or 10.

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