Multi-station feeding and receiving robot sheet guiding equipment

Abstract

The utility model discloses a multi-station feeding and receiving robot sheet guiding device. The silicon wafer transfer device comprises a basket tool, a transfer boat tool, a first transfer mechanism for driving the basket tool to transfer back and forth, a first jacking mechanism for jacking up a silicon wafer in a basket on the basket tool, and a first restoration mechanism for restoring the left and right sides of the silicon wafer jacked by the first jacking mechanism, the second transferring mechanism is used for driving the transfer boat tool to transfer back and forth; the second jacking mechanism is used for jacking up silicon wafers in a transfer boat on the transfer boat tool; the second correcting mechanism is used for correcting the positions of the left side and the right side of the silicon wafer jacked up by the second jacking mechanism; and the multi-axis robot carrying mechanism is used for carrying the silicon wafer between the flower basket supplying and receiving station and the silicon wafer unloading and loading station. According to the utility model, the multi-axis robot is matched with double stations to supply and receive materials, so that efficient battery piece guide is realized, the production efficiency is improved, the space flexibility is high, and the equipment maintenance operation space is large.

Description

[Technical field]

[0001] The utility model belongs to the technical field of silicon wafer manufacturing equipment, in particular to a multi-station material supply and collection robot wafer guiding equipment. [Background technology]

[0002] During the production of battery cells, there is a process called the wafer guiding process, which requires stacking two silicon wafers in the basket back to back and placing them in the transfer boat. In the prior art, the patent publication number CN116281050B discloses a wafer guiding device and a wafer guiding method, which realizes the automatic wafer guiding and loading of the whole battery cell, and the gantry-type wafer pick-up and placement transfer mechanism is arranged above the correction mechanism, which makes the equipment inconvenient to install, and the gantry-type wafer picking and placement space flexibility is limited, making it difficult to repair the equipment; in the prior art, the patent publication number CN115910890B discloses a half-wafer silicon wafer tidying device, tidying equipment and handling equipment, which realizes the automatic wafer guiding and loading of half-wafer cells, and also uses a gantry-type wafer pick-up and placement transfer mechanism, and also has the above-mentioned defects.

[0003] Therefore, it is necessary to provide a multi-station material supply and collection robot guide device to solve the above technical problems. [Contents of the utility model]

[0004] The main purpose of the utility model is to provide a multi-station material supply and collection robot guiding device, based on a multi-axis robot with dual-station material supply and collection, to achieve efficient battery cell guiding, improve production efficiency, and have high spatial flexibility and large equipment maintenance and operation space.

[0005] The utility model achieves the above-mentioned purpose through the following technical scheme: a multi-station material supply and collection robot guide device, which includes a flower basket tool and a transfer boat tool, a first transfer mechanism that drives the flower basket tool to move forward and backward between the flower basket loading station and the flower basket supply and collection station, a first lifting mechanism that lifts up the silicon wafers in the flower basket on the flower basket tool at the flower basket supply and collection station, a first correction mechanism that corrects the left and right positions of the silicon wafers lifted by the first lifting mechanism, a second transfer mechanism that drives the transfer boat tool to move forward and backward between the silicon wafer unloading and loading station and the transfer boat unloading and loading station, a second lifting mechanism that lifts up the silicon wafers in the transfer boat on the transfer boat tool at the silicon wafer unloading and loading station, a second correction mechanism that corrects the left and right positions of the silicon wafers lifted by the second lifting mechanism, and a multi-axis robot transport mechanism that realizes silicon wafer transport between the flower basket supply and collection station and the silicon wafer unloading and loading station.

[0006] Furthermore, there are two flower basket supply and receiving stations arranged side by side, and each of the flower basket supply and receiving stations is equipped with the first transfer mechanism, a flower basket tooling, a first lifting mechanism and a first straightening mechanism; there are two silicon wafer unloading and loading stations, which are respectively arranged on the left and right outer sides of the two flower basket supply and receiving stations, and each of the silicon wafer unloading and loading stations is equipped with a second lifting mechanism and a second straightening mechanism.

[0007] Furthermore, the flower basket tooling is provided with two flower basket bearing positions, and carries two flower baskets, and the battery cells in the two flower baskets are arranged in opposite directions.

[0008] Furthermore, the first supporting mechanism includes a first motor, a second supporting plate driven by the first motor to move left and right, a second motor fixed on the second supporting plate, a third supporting plate driven by the second motor to move up and down, and two groups of fork-tine lifting jigs arranged on the third supporting plate; the two groups of fork-tine lifting jigs correspond to the positions of corresponding rows of battery cells in the two flower baskets in the flower basket tooling.

[0009] Furthermore, the fork tine lifting fixture includes a pair of bottom brackets and a plurality of grille baffles arranged on the bottom brackets at equal intervals along the front-to-back direction.

[0010] Furthermore, the first alignment mechanism includes a fourth support plate, a third motor and a fourth motor fixed on the fourth support plate, a first transmission belt driven by the third motor for horizontal transmission, a second transmission belt driven by the fourth motor for horizontal transmission and arranged parallel to the first transmission belt, and an active alignment jig and a driven alignment jig horizontally slidably arranged on the fourth support plate, and the active alignment jig and the driven alignment jig respectively correspond to the positions of corresponding rows of battery cells in the two flower baskets in the flower basket tooling.

[0011] Furthermore, the active alignment jig and the driven alignment jig both include a first alignment component and a second alignment component that cooperate with each other to move together or apart and limit the position of the left and right sides of the battery cell. The first alignment component in the active alignment jig is fixedly connected to the first transmission belt and is connected to the first alignment component in the driven alignment jig through a first connecting rod; the second alignment component in the active alignment jig is fixedly connected to the second transmission belt and is connected to the second alignment component in the driven alignment jig through a second connecting rod.

[0012] Furthermore, the first correcting assembly and the second correcting assembly both include a fifth support plate, a plurality of positioning side teeth arranged on the fifth support plate at equal intervals along the front-to-back direction, and a bottom support plate arranged below the fifth support plate.

[0013] Furthermore, the multi-axis robot conveying mechanism includes a multi-axis robot and a conveying and adsorption module arranged at the movable end of the multi-axis robot; the conveying and adsorption module includes a seventh support plate fixed at the movable end of the multi-axis robot, a fifth motor fixed on the seventh support plate, and two groups of suction units driven by the fifth motor to move towards or away from each other left and right.

[0014] Furthermore, the suction unit includes an eighth support plate driven by the fifth motor to move left and right, a sixth motor fixed on the eighth support plate, a ninth support plate driven by the sixth motor to move forward and backward, and a suction cup assembly arranged on the ninth support plate.

[0015] Compared with the prior art, the beneficial effects of the multi-station material supply and collection robot guiding device of the utility model are: by arranging a multi-axis robot in cooperation with a handling and adsorption module, efficient silicon wafer handling is achieved, and the flower basket material supply and collection station and the silicon wafer unloading and loading station are arranged within the working range of the multi-axis robot, so as to achieve efficient guiding of silicon wafers between the flower basket and the transfer boat; the equipment is arranged with a double-station flower basket material supply and collection, so as to achieve uninterrupted continuous feeding of silicon wafers and improve feeding efficiency; at the same time, two transfer boat loading and unloading stations are also arranged to realize a double-in and double-out or "one-side in, one-side out" structure of the coating equipment, and cooperate with the double-station flower basket material supply and collection and the multi-axis robot silicon wafer handling, so as to greatly improve the silicon wafer guiding efficiency; the multi-axis robot is adopted to realize the handling and transfer of silicon wafers between the flower basket and the transfer boat, so the space flexibility is strong, and when the equipment needs maintenance, it has better maintenance operation space.

Brief Description of the Drawings

[0016] Figure 1 It is a three-dimensional structural schematic diagram of an embodiment of the utility model;

[0017] Figure 2 It is a schematic diagram of the top view of the structure of an embodiment of the utility model;

[0018] Figure 3 This is a schematic diagram of the main structure of an embodiment of the utility model;

[0019] Figure 4 This is a structural schematic diagram of the material supply and collection station of the flower basket in the embodiment of the utility model;

[0020] Figure 5 This is a structural schematic diagram of a flower basket tooling in an embodiment of the utility model;

[0021] Figure 6 This is a structural schematic diagram of the first supporting mechanism in the embodiment of the utility model;

[0022] Figure 7 This is a structural schematic diagram of the first correction mechanism in the embodiment of the utility model;

[0023] Figure 8 This is a schematic diagram of the structure of the silicon wafer unloading and loading station in the embodiment of the utility model;

[0024] Fig. 9 This is a structural schematic diagram of the transport and adsorption module in an embodiment of the utility model;

[0025] The numbers in the figure represent:

[0026] 100-Multi-station robotic film guide equipment for receiving and feeding materials;

[0027] 1-flower basket tooling, 11-first support plate, 12-first limit baffle, 13-first movable limit plate, 14-first cylinder, 15-first avoidance gap;

[0028] 2-transfer boat tooling, 21-sixth support plate, 22-positioning clamping assembly;

[0029] 3- first transfer mechanism;

[0030] 4-first supporting mechanism, 41-first motor, 42-second supporting plate, 43-second motor, 44-fork tooth lifting fixture, 441-bottom supporting bracket, 442-grid baffle;

[0031] 5-first correction mechanism, 51-fourth support plate, 52-third motor, 53-fourth motor, 54-first transmission belt, 55-second transmission belt, 56-active correction fixture, 561-first correction component, 5611-fifth support plate, 5612-positioning side teeth, 5613-bottom support plate, 562-second correction component, 57-driven correction fixture, 58-first connecting rod, 59-second connecting rod;

[0032] 6-second transfer mechanism; 7-second supporting mechanism; 8-second correcting mechanism;

[0033] 9-multi-axis robot transport mechanism, 91-multi-axis robot, 92-transport adsorption module, 921-seventh support plate, 922-fifth motor, 923-suction unit, 9231-eighth support plate, 9232-sixth motor, 9233-ninth support plate, 9234-suction cup assembly. [Specific implementation method]

[0034] Embodiment 1:

[0035] Please refer to Figure 1-Figure 9The present embodiment is a multi-station material supply and collection robot guide device 100, which includes a basket tool 1 and a transfer boat tool 2, a first transfer mechanism 3 for driving the basket tool 1 to perform horizontal transfer between the basket loading station and the basket supply and collection station, a first supporting mechanism 4 for lifting up the silicon wafers in the basket on the basket tool 1 at the basket supply and collection station, a first correcting mechanism 5 for correcting the left and right positions of the silicon wafers lifted by the first supporting mechanism 4, a second transfer mechanism 6 for driving the transfer boat tool 2 to perform horizontal transfer between the silicon wafer unloading and loading station and the transfer boat unloading and loading station, a second supporting mechanism 7 for lifting up the silicon wafers in the transfer boat on the transfer boat tool 2 at the silicon wafer unloading and loading station, a second correcting mechanism 8 for correcting the left and right positions of the silicon wafers lifted by the second supporting mechanism 7, and a multi-axis robot transport mechanism 9 for realizing silicon wafer transport between the basket supply and collection station and the silicon wafer unloading and loading station.

[0036] The first transfer mechanism 3 drives the flower basket tool 1 to perform horizontal transfer between the flower basket loading station and the flower basket supply and receiving station. At the flower basket loading station, the flower basket carrying the silicon wafers to be processed is placed in the flower basket tool 1 to realize the flower basket loading; at the flower basket supply and receiving station, the silicon wafers to be processed in the flower basket are taken out and placed in the transfer boat, and then placed in the graphite boat with the transfer boat to enter the coating equipment for coating processing; the silicon wafers after coating are put back into the flower basket, and then discharged with the flower basket.

[0037] The second transfer mechanism 6 drives the transfer boat tooling 2 to perform horizontal transfer between the silicon wafer unloading and loading station and the transfer boat loading and unloading station, and at the silicon wafer unloading and loading station, the silicon wafers in the transfer boat are placed in or taken out; at the transfer boat loading and unloading station, the transfer boat fully loaded with silicon wafers on the transfer boat tooling 2 is placed into the graphite boat and enters the coating equipment, or the transfer boat fully loaded with silicon wafers is taken out of the graphite boat and then put back on the transfer boat tooling 2, to realize the loading and unloading of the transfer boat.

[0038] In this embodiment, the multi-axis robot handling mechanism 9 includes a multi-axis robot 91 and a handling adsorption module 92 arranged at the movable end of the multi-axis robot 91. Since the multi-axis robot 91 is used to carry silicon wafers, its transfer efficiency is high. Therefore, in order to achieve efficient operation, two first transfer mechanisms 3 and two flower basket tooling 1 are configured in this embodiment to realize double-station flower basket supply and collection; correspondingly, each flower basket supply and collection station is configured with a first supporting mechanism 4 and a first correcting mechanism 5. The two flower basket supply and collection stations are arranged side by side. In addition, two silicon wafer unloading and loading stations are also correspondingly arranged, which are respectively arranged on the left and right outer sides of the two flower basket supply and collection stations. Correspondingly, each silicon wafer unloading and loading station is configured with a second supporting mechanism 7 and a second correcting mechanism 8.

[0039] The two basket feeding and receiving stations can realize the dual-station feeding and corresponding receiving of the silicon wafers to be processed; at the same time, the two wafer unloading and loading stations can realize the dual-input and dual-output feeding and receiving of the coating equipment, and can also realize the feeding and receiving mode of the coating equipment with one side feeding and the other side discharging. Users can flexibly configure the functions of each station according to their needs.

[0040] The flower basket tool 1 comprises a first support plate 11 driven by the first transfer mechanism 3 to move forward and backward, a plurality of first limit baffles 12 arranged on the first support plate 11 and limiting the three sides of the flower basket, a first movable limit plate 13 limiting the other fourth side of the flower basket, and a first cylinder 14 driving the first movable limit plate 13 to move horizontally. The first support plate 11 supports the bottom of the flower basket and is provided with a first avoidance notch 15 for the first supporting mechanism 4 to extend into.

[0041] This embodiment is mainly aimed at the guides of half-cell batteries. Each basket contains two rows of half-cell batteries. When the guides are placed in the transfer boat, the two cells need to be stacked back to back so that only the front of the cells are coated during coating. Therefore, the multi-axis robot handling mechanism 9 will take out two rows of half-cell batteries at the same time, and then perform the stacking and closing operation. Then the placement direction of the cells in the same basket is the same. Therefore, in order to realize the above-mentioned stacking and closing operation, two baskets are provided in the basket tooling 1, and two baskets are carried, and the cells in the two baskets face opposite directions. For example, the front of the cells in one basket is ahead, while the front of the cells in the other basket is placed backward. The above-mentioned adjustment of the front and back directions of the cells can be realized by adjusting the direction of the basket placed in the basket tooling 1.

[0042] The first lifting mechanism 4 includes a first motor 41, a second support plate 42 driven by the first motor 41 to move left and right, a second motor 43 fixed on the second support plate 42, a third support plate 43 driven by the second motor 43 to move up and down, and two sets of fork-tooth lifting fixtures 44 arranged on the third support plate 43. The two sets of fork-tooth lifting fixtures 44 correspond to the positions of the corresponding rows of battery cells in the two flower baskets in the flower basket tooling 1, and lift the corresponding rows of battery cells in the two flower baskets upward at the same time. The length of the fork-tooth lifting fixture 44 can be designed according to the number of battery cells that need to be lifted and lifted at one time, generally corresponding to the overall length of the battery cell row in the flower basket, lifting the entire row of battery cells in the flower basket at one time, or half of the overall length of the battery cell row, lifting half a row of battery cells in the flower basket at one time. By driving the two sets of fork-tooth lifting fixtures 44 to move left and right through the first motor 41, the position switching between the two rows of battery cells in the same flower basket can be achieved. When one row of battery cells is taken out, it can be moved to the position of the other row of battery cells for lifting and lifting operations.

[0043] The fork-tine lifting fixture 44 includes a pair of bottom brackets 441 and a plurality of grille baffles 442 arranged on the bottom brackets 441 at equal intervals along the front-to-back direction. The grille baffles 442 form a partition between two adjacent battery cells, and a load-bearing limiting groove is formed between two adjacent grille baffles 442 for the front-to-back position of the battery cell. The bottom brackets 441 constitute a support for the bottom of the battery cell.

[0044] The first alignment mechanism 5 includes a fourth support plate 51, a third motor 52 and a fourth motor 53 fixed on the fourth support plate 51, a first transmission belt 54 driven by the third motor 52 for horizontal transmission, a second transmission belt 55 driven by the fourth motor 53 for horizontal transmission and arranged parallel to the first transmission belt 54, and an active alignment jig 56 and a driven alignment jig 57 horizontally slidably arranged on the fourth support plate 51, and the active alignment jig 56 and the driven alignment jig 57 both cooperate with each other to move closer or apart. The first correcting component 561 and the second correcting component 562 for limiting the position of the left and right sides of the battery cell, the first correcting component 561 in the active correcting fixture 56 is fixedly connected to the first transmission belt 54 and is connected to the first correcting component 561 in the driven correcting fixture 57 through the first connecting rod 58 to achieve linkage, the second correcting component 562 in the active correcting fixture 56 is fixedly connected to the second transmission belt 55 and is connected to the second correcting component 562 in the driven correcting fixture 57 through the second connecting rod 59 to achieve linkage.

[0045] The third motor 52 and the fourth motor 53 can realize the mutual opening and closing between the first return component 561 and the second return component 562, and can also realize the position switching between the active return fixture 56 and the driven return fixture 57 between different battery rows in the same basket.

[0046] The first return assembly 561 and the second return assembly 562 both include a fifth support plate 5611, a plurality of positioning side teeth 5612 arranged on the fifth support plate 5611 at equal intervals along the front-rear direction, and a bottom support plate 5613 arranged below the fifth support plate 5611. One end of the fifth support plate 5611 is slidably arranged on the fourth support plate 51 through a slider, and the other end of the fifth support plate 5611 is cantilevered out of the fourth support plate 51, and is located above the first supporting mechanism 4.

[0047] When the flower basket carrying two rows of half-cell batteries arrives at the flower basket supply and collection station, the first supporting mechanism 4 lifts the corresponding two rows of battery batteries in the two flower baskets upward to the working range height of the first correcting mechanism 5, and then the first correcting component 561 and the second correcting component 562 are close to limit the left and right sides of each battery battery, and then the first supporting mechanism 4 descends, and the two rows of battery batteries are transferred to the bottom support plate 5613, and the bottom edge of the battery batteries is supported by the bottom support plate 5613 to keep the bottom support height consistent, and then under the action of the two rows of positioning side teeth 5612, the positions of all battery batteries are accurately positioned, providing a basis for the absorption of the multi-axis robot handling mechanism 9.

[0048] The transfer boat tooling 2 includes a sixth support plate 21 driven by the second transfer mechanism 6 to move forward and backward, and a positioning clamping assembly 22 disposed on the sixth support plate 21 and used to position the front and rear positions of the transfer boat.

[0049] The second supporting mechanism 7 has a substantially identical structure to the first supporting mechanism 4 , with the difference being that only one set of fork-tine lifting fixtures 44 is provided in the second supporting mechanism 7 .

[0050] The second correcting mechanism 8 has a substantially identical structure to the first correcting mechanism 5 , with the difference being that the second correcting mechanism 8 only includes one set of correcting jigs, namely, active correcting jigs 56 .

[0051] In this embodiment, the multi-axis robot 91 is a five-axis robot or a six-axis robot. The handling and adsorption module 92 includes a seventh support plate 921 fixed to the movable end of the multi-axis robot 91, a fifth motor 922 fixed to the seventh support plate 921, and two groups of suction units 923 driven by the fifth motor 922 to move toward each other or away from each other. The suction unit 923 includes an eighth support plate 9231 driven by the fifth motor 922 to move left and right, a sixth motor 9232 fixed to the eighth support plate 9231, a ninth support plate 9233 driven by the sixth motor 9232 to move forward and backward, and a suction cup assembly 9234 arranged on the ninth support plate 9233. The fifth motor 922 drives two groups of suction units 923 to suck two rows of battery cells in two flower baskets, and then the battery cell row in one of the suction units 923 is driven by the sixth motor 9232 to move back and forth, so that a one-to-one misalignment relationship is formed with the battery cells on the other suction unit 923, and then the two suction units 923 are brought close to each other, so that the two rows of battery cells are misaligned and inserted, and then the front and rear positions of the two rows of battery cells are adjusted by the sixth motor 9232, so that the corresponding two battery cells are stacked back to back.

[0052] In this embodiment, the transfer boat has three load-bearing units, and the handling and adsorption module 92 can only carry half of the capacity of a load-bearing unit in a single handling. Therefore, it takes multiple handling and loading to fill a transfer boat; the same is true for unloading. Therefore, in this embodiment, the multi-axis robot 91 is used to carry and transfer silicon wafers, which can effectively improve the efficiency of wafer guiding.

[0053] The above are only some embodiments of the present invention. For those skilled in the art, several modifications and improvements can be made without departing from the inventive concept of the present invention, which all belong to the protection scope of the present invention.

Claims

1. A multi-station feeding and receiving robot guide device, characterized in that: It includes a flower basket tool and a transfer boat tool, a first transfer mechanism that drives the flower basket tool to move forward and backward between a flower basket loading station and a flower basket supply and receiving station, a first supporting mechanism that lifts up the silicon wafers in the flower basket on the flower basket tool at the flower basket supply and receiving station, a first correcting mechanism that corrects the left and right positions of the silicon wafers lifted by the first supporting mechanism, a second transfer mechanism that drives the transfer boat tool to move forward and backward between a silicon wafer unloading and loading station and a transfer boat unloading and loading station, a second supporting mechanism that lifts up the silicon wafers in the transfer boat on the transfer boat tool at the silicon wafer unloading and loading station, a second correcting mechanism that corrects the left and right positions of the silicon wafers lifted by the second supporting mechanism, and a multi-axis robot transport mechanism that realizes silicon wafer transport between the flower basket supply and receiving station and the silicon wafer unloading and loading station.

2. The multi-station feeding and receiving robot sheet guiding device according to claim 1, characterized in that: There are two flower basket supply and receiving stations arranged side by side, and each of the flower basket supply and receiving stations is equipped with the first transfer mechanism, a flower basket tooling, a first lifting mechanism and a first correcting mechanism; there are two silicon wafer unloading and loading stations, which are respectively arranged on the left and right outer sides of the two flower basket supply and receiving stations, and each of the silicon wafer unloading and loading stations is equipped with a second lifting mechanism and a second correcting mechanism.

3. The multi-station feeding and receiving robot sheet guiding device according to claim 1, characterized in that: The flower basket tooling is provided with two flower basket bearing positions, and carries two flower baskets, and the battery cells in the two flower baskets are arranged in opposite directions.

4. The multi-station material supply and collection robot sheet guiding device as claimed in claim 3, characterized in that: The first supporting mechanism includes a first motor, a second supporting plate driven by the first motor to move left and right, a second motor fixed on the second supporting plate, a third supporting plate driven by the second motor to move up and down, and two groups of fork-tine lifting jigs arranged on the third supporting plate; the two groups of fork-tine lifting jigs correspond to the positions of corresponding rows of battery cells in the two flower baskets in the flower basket tooling.

5. The multi-station material supply and collection robot guide device as claimed in claim 4, characterized in that: The fork tine lifting fixture comprises a pair of bottom brackets and a plurality of grille baffles arranged on the bottom brackets at equal intervals in the front-rear direction.

6. The multi-station material supply and collection robot guide device as claimed in claim 3, characterized in that: The first alignment mechanism includes a fourth support plate, a third motor and a fourth motor fixed on the fourth support plate, a first transmission belt driven by the third motor for horizontal transmission, a second transmission belt driven by the fourth motor for horizontal transmission and arranged parallel to the first transmission belt, and an active alignment jig and a driven alignment jig horizontally slidably arranged on the fourth support plate, the active alignment jig and the driven alignment jig respectively correspond to the positions of the corresponding rows of battery cells in the two flower baskets in the flower basket tooling.

7. The multi-station material supply and collection robot sheet guiding device according to claim 6, characterized in that: The active correcting jig and the driven correcting jig both include a first correcting component and a second correcting component that cooperate with each other to move together or apart and limit the position of the left and right sides of the battery cell. The first correcting component in the active correcting jig is fixedly connected to the first transmission belt and is connected to the first correcting component in the driven correcting jig through a first connecting rod; the second correcting component in the active correcting jig is fixedly connected to the second transmission belt and is connected to the second correcting component in the driven correcting jig through a second connecting rod.

8. The multi-station material supply and collection robot guide device according to claim 7, characterized in that: The first alignment component and the second alignment component both include a fifth support plate, a plurality of positioning side teeth arranged on the fifth support plate at equal intervals along the front-rear direction, and a bottom support plate arranged below the fifth support plate.

9. The multi-station material supply and collection robot sheet guiding device according to claim 1, characterized in that: The multi-axis robot conveying mechanism includes a multi-axis robot and a conveying and adsorption module arranged at the movable end of the multi-axis robot; the conveying and adsorption module includes a seventh support plate fixed at the movable end of the multi-axis robot, a fifth motor fixed on the seventh support plate, and two groups of suction units driven by the fifth motor to move towards or away from each other left and right.

10. The multi-station material supply and collection robot guide device according to claim 9, characterized in that: The suction unit includes an eighth support plate driven by the fifth motor to move left and right, a sixth motor fixed on the eighth support plate, a ninth support plate driven by the sixth motor to move forward and backward, and a suction cup assembly arranged on the ninth support plate.

Images