RF power supply power transmission mechanism

Abstract

The utility model relates to the technical field of vacuum coating equipment, and discloses an RF (Radio Frequency) power supply power transmission mechanism which comprises a power supply, a base, a cover plate, a first conductive rod, a second conductive rod and a power connection element, the power connection element is connected with the second conductive rod, the first conductive rod vertically penetrates through the base, the lower end of the first conductive rod is electrically connected with the power source, the second conductive rod is in sliding connection with the cover plate, an elastic piece is arranged between the second conductive rod and the cover plate, the cover plate rotates by a certain angle to cover the base, and the cover plate is connected with the power source. And the second conductive rod is in contact conduction with the first conductive rod under the elastic force action of the elastic piece, so that the power supply and the power connection element are in conduction conduction. The beneficial effects of the utility model are that the structure is simplified, the production cost is reduced, the stability when the RF power supply and the power connection element are connected is ensured, poor contact when the RF power supply and the power connection element transmit power is avoided, and the normal work of the power connection element is ensured.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum coating equipment, in particular to an RF power transmission mechanism. Background Art

[0002] At present, vacuum coating equipment is generally connected to the RF power supply through a conductor rod to achieve the on and off of the power-connecting elements. The power transmission mechanism in the prior art is relatively complex in structure and has a high production cost. In addition, poor contact is prone to occur during the process of connecting the RF power supply and the power-connecting elements, and the power-connecting elements cannot work normally. Utility Model Content

[0003] The purpose of the utility model is to provide an RF power transmission mechanism, simplify the structure, reduce the production cost, ensure the stability of the RF power supply and the power connection element when they are connected, avoid poor contact between the RF power supply and the power connection element when transmitting power, and ensure the normal operation of the power connection element.

[0004] In order to achieve the above-mentioned purpose, the utility model provides an RF power transmission mechanism, including: a power supply, a base, a cover plate, a first conductive rod, a second conductive rod and a power connection element;

[0005] The power source is arranged below the base, and the cover plate is rotatably connected to the base, the power connection element is fixed to the cover plate, and the power connection element is connected to the second conductive rod.

[0006] The first conductive rod vertically penetrates the base and the lower end thereof is electrically connected to the power source. The second conductive rod is slidably connected to the cover plate, and an elastic member is provided between the second conductive rod and the cover plate. The elastic member has a tendency to push the second conductive rod to move axially. The cover plate is rotated at a certain angle and is covered on the top of the base, and the lower end surface of the cover plate is parallel to the upper end surface of the base. The second conductive rod is in contact with the first conductive rod under the elastic force of the elastic member, thereby causing the power source and the power connection element to be electrically connected.

[0007] Furthermore, a first mounting hole is provided on the base, a first insulating sleeve is provided in the mounting hole, the first conductive rod is inserted into the first insulating sleeve, a second mounting hole is provided on the cover plate, a second insulating sleeve is provided in the second mounting hole, the second conductive rod is inserted into the second insulating sleeve, a pressing plate is provided above the second insulating sleeve, one end of the elastic member is against the pressing plate, and the other end is against the second conductive rod.

[0008] Furthermore, a conductive sheet for connecting to the power connection element is fixed on the upper end of the second conductive rod, and one end of the elastic member is against the pressing plate, and the other end is against the conductive sheet.

[0009] Furthermore, a limiting portion is provided on the side wall of the second conductive rod, and a limiting step corresponding to the limiting portion is provided in the second insulating sleeve.

[0010] Furthermore, a mounting groove for limiting the elastic member is provided on the lower end surface of the pressing plate.

[0011] Furthermore, the elastic member is a spring.

[0012] Furthermore, the power supply is fixed to the base via screws.

[0013] Furthermore, a limiting hole for installing the power connection element is formed on the cover plate, and a limiting groove corresponding to the power connection element is formed on the upper end of the base.

[0014] Furthermore, connecting seats are symmetrically provided on both sides of the base, a rotating shaft is fixed between the connecting seats, and a through hole corresponding to the rotating shaft is opened on the cover plate.

[0015] Furthermore, a diameter of the first conductive rod is greater than a diameter of the second conductive rod.

[0016] Compared with the prior art, the RF power transmission mechanism of the utility model embodiment has the following beneficial effects: the first conductive rod vertically penetrates the base and the lower end thereof is electrically connected to the power source, the second conductive rod is slidably connected to the cover plate, and an elastic member is provided between the second conductive rod and the cover plate, the elastic member has a tendency to push the second conductive rod to move axially, when the power source and the power connection element need to be turned on, the cover plate is rotated at a certain angle and covered on the top of the base, so that the lower end surface of the cover plate is parallel to the upper end surface of the base, at this time, the second conductive rod is under the action of the elastic member, so that the second conductive rod and the first conductive rod are always kept in contact and turned on, thereby avoiding poor contact between the power source and the power connection element, the overall structure is simple, the cost is low, the conduction effect is good, when the power connection element needs to be turned off, the power can be turned off by rotating the cover plate, the on-off is stable, and the structure is simple. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 This is a cross-sectional view of the RF power transmission mechanism of the utility model when it is powered on;

[0018] Figure 2 It is a cross-sectional view of the RF power transmission mechanism of the embodiment of the utility model when the power is cut off;

[0019] Figure 3 It is a schematic diagram of the installation of the second conductive rod of the RF power transmission mechanism of the embodiment of the utility model.

[0020] In the figure, 1, power supply; 2, base; 21, limiting groove; 22, connecting seat; 23, rotating shaft; 3, cover plate; 31, limiting hole; 4, first conductive rod; 5, second conductive rod; 51, limiting part; 6, power connection element; 7, elastic member; 8, first insulating sleeve; 9, second insulating sleeve; 10, conductive sheet; 11, pressing plate; 111, mounting groove. DETAILED DESCRIPTION

[0021] The following is a further detailed description of the specific implementation of the present invention in conjunction with the accompanying drawings and examples. The following examples are used to illustrate the present invention, but are not intended to limit the scope of the present invention.

[0022] In the description of the present invention, it should be understood that the terms "upper", "lower", "front", "back", "inside", "outside", etc. used in the present invention to indicate the orientation or positional relationship are based on the positional relationship shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the referred devices and elements must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0023] In the description of the present invention, it should be understood that the terms "first", "second", etc. are used in the present invention to describe various information, but these information should not be limited to these terms, and these terms are only used to distinguish the same type of information from each other. For example, without departing from the scope of the present invention, "first" information may also be referred to as "second" information, and similarly, "second" information may also be referred to as "first" information.

[0024] like Figure 1As shown, an RF power transmission mechanism of a preferred embodiment of the utility model comprises: a power supply 1, a base 2, a cover plate 3, a first conductive rod 4, a second conductive rod 5 and a power connection element 6, wherein the power supply 1 is an RF power supply 1, hereinafter referred to as the power supply 1, in order to facilitate the switching of the power supply 1 and the power connection element 6, specifically, the power supply 1 is arranged below the base 2, and the cover plate 3 is rotatably connected to the base 2, the power connection element 6 is fixed on the cover plate 3, the power connection element 6 is connected to the second conductive rod 5, the first conductive rod 4 vertically penetrates the base 2 and the lower end thereof is electrically connected to the power supply 1, when power connection is required, the cover plate 3 is rotated so that the first conductive rod 4 is electrically connected to the power supply 1, and the second conductive rod 5 is electrically connected to the second conductive rod 5. The connection of electricity can be completed when a conductive rod 4 contacts with a second conductive rod 5. Furthermore, in order to avoid poor contact during the connection of electricity, the second conductive rod 5 is slidably connected with the cover plate 3, and an elastic member 7 is provided between the second conductive rod 5 and the cover plate 3. The elastic member 7 has a tendency to push the second conductive rod 5 to move axially. When it is necessary to connect electricity, the cover plate 3 is rotated to a certain angle and is covered on the top of the base 2, and the lower end surface of the cover plate 3 is parallel to the upper end surface of the base 2. Under the action of the elastic member 7, the second conductive rod 5 always keeps in contact with the first conductive rod 4, and the power supply 1 and the power connection element 6 are connected and connected. In some embodiments, in order to avoid the second conductive rod 5 from contacting the base 2 when contacting the first conductive rod 4, so that the base 2 is charged, the diameter of the first conductive rod 4 is greater than the diameter of the second conductive rod 5, and when the first conductive rod 4 and the second conductive rod 5 are in contact, the first conductive rod 4 and the second conductive rod 5 are coaxial.

[0025] Furthermore, in some embodiments, in order to avoid safety accidents caused by the conduction of the base 2 and the cover 3 during the power connection process, a first mounting hole is opened on the base 2, a first insulating sleeve 8 is provided in the mounting hole, the first conductive rod 4 is inserted into the first insulating sleeve 8, a second mounting hole is opened on the cover 3, a second insulating sleeve 9 is provided in the second mounting hole, and the second conductive rod 5 is inserted into the second insulating sleeve 9, so as to avoid the base 2 and the cover 3 being energized when the power supply 1 and the power connection element 6 are turned on, thereby reducing the safety risk. Furthermore, in order to facilitate the installation of the second conductive rod 5, a pressing plate 11 is provided above the second insulating sleeve 9, one end of the elastic member 7 is against the pressing plate 11, and the other end is against the second conductive rod 5.

[0026] Furthermore, in order to facilitate the connection between the second conductive rod 5 and the power connection element 6, a conductive sheet 10 for connecting with the power connection element 6 is fixed on the upper end of the second conductive rod 5. Specifically, one end of the elastic member 7 is abutted against the pressing plate 11, and the other end is abutted against the conductive sheet 10. The elastic member 7 can push the second conductive rod 5 and the conductive sheet 10 to move synchronously. Further, in order to limit the position of the elastic member 7 during installation, a mounting groove 111 for limiting the position of the elastic member 7 is provided on the lower end surface of the pressing plate 11. In some embodiments, in order to simplify the structure of the elastic member 7, the elastic member 7 can be a spring, which has low cost and is easy to purchase.

[0027] In some embodiments, in order to facilitate the positioning of the power connection element 6 during installation, a limiting hole 31 for installing the power connection element 6 is provided on the cover plate 3, and at the same time, in order to facilitate the positioning of the power connection element 6 during power connection, a limiting groove 21 corresponding to the power connection element 6 is provided on the upper end of the base 2. Further, in some embodiments, in order to facilitate the rotational connection between the base 2 and the cover plate 3, connecting seats 22 are symmetrically provided on both sides of the base 2, a rotating shaft 23 is fixed between the connecting seats 22, a through hole corresponding to the rotating shaft 23 is provided on the cover plate 3, the rotating shaft 23 is penetrated in the through hole, and the cover plate 3 can rotate around the axis of the rotating shaft 23.

[0028] In some embodiments, in order to prevent the second conductive rod 5 from coming out of the second insulating sleeve 9, refer to Figure 3 A limiting portion 51 is provided on the side wall of the second conductive rod 5, and a limiting step corresponding to the limiting portion 51 is provided in the second insulating sleeve 9, and mechanical limiting is adopted, and the structure is stable and reliable. In some embodiments, in order to facilitate the fixing of the power supply 1 and the base 2, the power supply 1 is fixed to the base 2 by screws.

[0029] The working process of the utility model is: when power is required, refer to Figure 1 , the cover plate 3 is rotated to a certain angle and is placed on the top of the base 2, and the lower end surface of the cover plate 3 is parallel to the upper end surface of the base 2. Under the action of the elastic member 7, the second conductive rod 5 and the first conductive rod 4 are always in contact and connected, and the power supply 1 and the power connection element 6 are connected and connected. When it is necessary to cut off the power, refer to Figure 2 , rotate the cover plate 3 to make the second conductive rod 5 and the first conductive rod 4 out of contact, and the power can be cut off, which is simple to operate.

[0030] In summary, the embodiment of the utility model provides a power transmission mechanism of an RF power supply 1, wherein the first conductive rod 4 vertically penetrates the base 2 and the lower end thereof is electrically connected to the power supply 1, the second conductive rod 5 is slidably connected to the cover plate 3, and an elastic member 7 is provided between the second conductive rod 5 and the cover plate 3, and the elastic member 7 has a tendency to push the second conductive rod 5 to move axially. When the power supply 1 and the power connection element 6 need to be turned on, the cover plate 3 is rotated at a certain angle and covered on the top of the base 2, so that the lower end surface of the cover plate 3 and the upper end surface of the base 2 are parallel. At this time, under the action of the elastic member 7, the second conductive rod 5 and the first conductive rod 4 are always kept in contact and turned on, thereby avoiding poor contact between the power supply 1 and the power connection element 6. The overall structure is simple, the cost is low, and the conduction effect is good. When the power connection element 6 needs to be turned off, the cover plate 3 can be turned off, the on-off is stable, and the structure is simple.

[0031] The above is only a preferred embodiment of the present invention. It should be pointed out that for ordinary technicians in this technical field, several improvements and substitutions can be made without departing from the technical principle of the present invention. These improvements and substitutions should also be regarded as the protection scope of the present invention.

Claims

1. An RF power transmission mechanism, characterized in that: include: A power source, a base, a cover plate, a first conductive rod, a second conductive rod and a power connection element; The power source is arranged below the base, and the cover plate is rotatably connected to the base, the power connection element is fixed to the cover plate, and the power connection element is connected to the second conductive rod. The first conductive rod vertically penetrates the base and the lower end thereof is electrically connected to the power source. The second conductive rod is slidably connected to the cover plate, and an elastic member is provided between the second conductive rod and the cover plate. The elastic member has a tendency to push the second conductive rod to move axially. The cover plate is rotated at a certain angle and is covered on the top of the base, and the lower end surface of the cover plate is parallel to the upper end surface of the base. The second conductive rod is in contact with the first conductive rod under the elastic force of the elastic member, thereby causing the power source and the power connection element to be electrically connected.

2. The RF power transmission mechanism according to claim 1, characterized in that: The base is provided with a first mounting hole, a first insulating sleeve is provided in the mounting hole, the first conductive rod is inserted into the first insulating sleeve, a second mounting hole is provided in the cover plate, a second insulating sleeve is provided in the second mounting hole, the second conductive rod is inserted into the second insulating sleeve, a pressing plate is provided above the second insulating sleeve, one end of the elastic member is against the pressing plate, and the other end is against the second conductive rod.

3. The RF power transmission mechanism according to claim 2, characterized in that: A conductive sheet for connecting to the power-connecting element is fixed on the upper end of the second conductive rod. One end of the elastic member is against the pressing plate, and the other end is against the conductive sheet.

4. The RF power transmission mechanism according to claim 2, wherein: A limiting portion is provided on the side wall of the second conductive rod, and a limiting step corresponding to the limiting portion is provided in the second insulating sleeve.

5. The RF power transmission mechanism according to claim 2, wherein: The lower end surface of the pressing plate is provided with an installation groove for limiting the elastic member.

6. The RF power transmission mechanism according to claim 1, characterized in that: The elastic member is a spring.

7. The RF power transmission mechanism according to claim 1, characterized in that: The power supply is fixed to the base via screws.

8. The RF power transmission mechanism according to claim 1, wherein: The cover plate is provided with a limiting hole for installing the power connection element, and the upper end of the base is provided with a limiting groove corresponding to the power connection element.

9. The RF power transmission mechanism according to claim 1, wherein: The base is symmetrically provided with connecting seats on both sides, a rotating shaft is fixed between the connecting seats, and the cover plate is provided with a through hole corresponding to the rotating shaft.

10. The RF power transmission mechanism according to claim 1, wherein: The diameter of the first conductive rod is greater than the diameter of the second conductive rod.

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