Laser and laser device

Abstract

The utility model provides a laser and laser equipment. The laser comprises at least two laser emitting modules, at least two compression modules and a spectrum beam combining module. The laser emitting module comprises the two light-emitting elements and a polarization beam combiner, and the polarization beam combiner can emit laser emitted by the two light-emitting elements after polarization beam combination; each compression module is arranged on a laser light path of the laser emitting module so as to compress laser of the laser emitting module in the fast axis direction and the slow axis direction; the spectrum beam combining module comprises a dichroic mirror, and the dichroic mirror can carry out spectrum beam combining on the laser emitted by the two laser emitting modules and then emit the laser in the first direction. According to the technical scheme of the invention, the energy density and uniformity of the whole light spot of the laser can be improved.

Description

Technical Field

[0001] The utility model relates to the technical field of lasers, in particular to a laser and laser equipment. Background Art

[0002] In order to obtain higher power, existing lasers can set up multiple light-emitting elements to synthesize various spots for laser processing. However, the total spot gap will increase linearly with the number of light-emitting elements. The gap position increases the overall spot size and reduces the spot energy density. In addition, the fast-axis light in the laser spot will diverge quickly and greatly, while the slow-axis divergence is slow and the spot changes less, which often causes the fast-axis spot to be much larger than the slow-axis when transmitted to the actual use distance, resulting in poor uniformity of the synthesized spot. Utility Model Content

[0003] The main purpose of the utility model is to provide a laser and a laser device, aiming to improve the energy density and uniformity of the overall light spot.

[0004] To achieve the above object, the utility model provides a laser, comprising:

[0005] At least two laser emission modules, each of which comprises two light emitting elements and a polarization beam combiner, and the polarization beam combiner can combine the laser beams emitted by the two light emitting elements and then emit the laser beams;

[0006] At least two compression modules, each of which is disposed on the laser light path of the laser output module to compress the laser of the laser output module in the fast axis direction and the slow axis direction; and

[0007] A spectral beam combining module includes a dichroic mirror, and the dichroic mirror can spectrally combine the lasers emitted by the two laser emitting modules and then emit them in a first direction.

[0008] In one embodiment of the present application, the dichroic mirror has two mirror surfaces arranged back to back, one of which is provided with an anti-reflection film, and the other is provided with a reflective film;

[0009] The laser light emitted by one of the laser emission modules may be emitted toward the anti-reflection film along the first direction, and the laser light emitted by the other laser emission module may be emitted toward the reflective film along a second direction, wherein the second direction is perpendicular to the first direction.

[0010] In one embodiment of the present application, the two laser emitting modules that perform spectral beam combining through the same dichroic mirror both emit laser light along the second direction, and the spectral beam combining module further includes a first reflector, and the first reflector and the dichroic mirror are arranged along the first direction;

[0011] One of the laser emitting modules is disposed toward the first reflector to reflect the laser to the anti-reflection film through the first reflector, and the other laser emitting module is disposed toward the reflective film.

[0012] In an embodiment of the present application, the laser emission modules are arranged in parallel along the first direction and are located on the same side of the spectrum combining module.

[0013] In one embodiment of the present application, in the two laser emission modules that combine beams through the same dichroic mirror, one of the laser emission modules and the dichroic mirror are arranged along the first direction and disposed toward the anti-reflection film, and the other laser emission module and the dichroic mirror are arranged along the second direction and disposed toward the reflective film;

[0014] And / or, the two laser emitting modules that perform spectral beam combining through the same dichroic mirror both emit laser light along the first direction, the spectral beam combining module further comprises a second reflector, the second reflector and the dichroic mirror are arranged along the second direction, one of the laser emitting modules is arranged toward the first reflector to reflect the laser light to the reflective film through the first reflector, and the other laser emitting module is arranged toward the anti-reflection film;

[0015] And / or, the laser is provided with at least four laser emission modules, the spectral beam combining module is provided with at least two dichroic mirrors, each of the dichroic mirrors is arranged in a stepped manner along the first direction and the second direction, each of the dichroic mirrors is used to perform spectral beam combining on the lasers emitted by the two laser emission modules, and the distance between the light emitting positions of any two of the dichroic mirrors along the first direction is smaller than the distance along the second direction.

[0016] In one embodiment of the present application, an optical rotator is provided between at least one of the light emitting elements of the laser emission module and the polarization beam combiner, and the optical rotator can change the polarization direction of the laser emitted by the light emitting element.

[0017] In one embodiment of the present application, the polarization beam combiner includes a reflective surface and a transparent surface arranged back to back, and the lasers emitted by the two light-emitting elements can be respectively emitted toward the reflective surface and the transparent surface, and both are emitted from the reflective surface.

[0018] In one embodiment of the present application, one of the light-emitting elements of at least one of the laser emission modules is disposed toward the light-reflecting surface, and another light-emitting element is disposed toward the light-transmitting surface;

[0019] And / or, the two light-emitting elements of at least one of the laser emission modules are arranged side by side, and the laser emission module also includes a second reflector, wherein one of the light-emitting elements is arranged toward the reflective surface, and the other light-emitting element is arranged toward the second reflector, so that the emitted laser is reflected to the transparent surface by the second reflector.

[0020] In one embodiment of the present application, the compression module includes a fast-axis collimating lens and a slow-axis collimating lens arranged on the light-emitting side of the light-emitting element, and a fast-axis collimating lens and a slow-axis collimating lens are arranged between each of the light-emitting elements and the polarization beam combiner.

[0021] In one embodiment of the present application, the laser further includes a beam expansion module, and the beam expansion module is disposed on the light output side of the reflector.

[0022] In one embodiment of the present application, the beam expansion module includes:

[0023] A beam expander, which is arranged on the light-emitting side of the spectral beam combining module; and

[0024] A collimator is arranged on the light-emitting side of the beam expander.

[0025] In one embodiment of the present application, at least one of the beam expander and the collimator can be moved along the arrangement direction of the beam expander and the collimator to adjust the distance between the beam expander and the collimator;

[0026] The beam expansion module further includes a connecting shaft, which extends along an arrangement direction of the beam expander and the collimator, and at least one of the beam expander and the collimator is translationally movably disposed on the connecting shaft.

[0027] In one embodiment of the present application, one of the beam expander and the collimator is threadedly connected to the connecting shaft;

[0028] Or, the beam expansion module comprises two connecting shafts, and the beam expander and the collimator are respectively threadedly connected to one of the connecting shafts;

[0029] Alternatively, the connecting shaft has two threaded sections arranged along its length direction, and the thread rotation directions of the two threaded sections are opposite, and the beam expander and the collimator are respectively threadedly connected to one of the threaded sections.

[0030] In one embodiment of the present application, the laser also includes a mounting shell, a mounting cavity is formed in the mounting shell, the mounting shell is provided with a light outlet connected to the mounting cavity, the laser emission module, the compression module and the spectral beam combining module are all arranged in the mounting cavity, and the light outlet is located on the light output side of the spectral beam combining module.

[0031] In one embodiment of the present application, the light emitting element is disposed through the wall of the mounting shell of the laser;

[0032] And / or, the laser is a semiconductor laser or a solid-state laser.

[0033] The present application also proposes a laser device, which includes a laser as described in any of the aforementioned embodiments.

[0034] According to the technical solution of the utility model, at least two groups of laser output modules can be used in the laser. For a laser output module including two light-emitting elements, two laser beams with different polarization directions emitted by the two light-emitting elements can be polarized and combined into a beam of circularly polarized light through a polarization beam combiner, thereby reducing the number of laser beams, reducing the laser spot size of the laser output module, and improving the power density.

[0035] In addition, a compression module is arranged on the light output path of each laser output module, and the compression module can compress and focus the laser emitted by the laser output module in the fast axis direction and the slow axis direction, so that the divergence angle of the fast axis is smaller than the divergence angle of the slow axis. With such an arrangement, the light of the slow axis can be expanded to a larger size under the condition of the same fast axis size, and the diameter of the light beam transmitted from the laser output module to the spectrum beam combining module can be reduced, thereby reducing the size of the overall light spot and improving the power density of the light spot.

[0036] In addition, a color separation mirror is provided in the spectral beam combining module, which can spectrally combine the lasers of different wavelengths emitted by the two laser emission modules to form one laser. The gap between the laser spots after the color separation mirror is very small or there is no gap, which further improves the power density of the laser spot. That is, after the divergence angle compression collimation, polarization beam combining and beam combining of multiple laser beams, the present application improves the power density of the laser spot finally emitted by the laser, so that the same effective spot size can be undertaken by a smaller aperture galvanometer, which greatly reduces the load on the electrode and improves the operating speed of the overall processing equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0037] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on the structures shown in these drawings without paying creative work.

[0038] Figure 1 This is a structural diagram of the first embodiment of the laser of the utility model;

[0039] Figure 2 This is a structural diagram of the second embodiment of the laser of the utility model;

[0040] Figure 3 This is a structural diagram of the third embodiment of the laser of the utility model;

[0041] Figure 4 This is a structural diagram of a fourth embodiment of the laser of the utility model;

[0042] Figure 5 This is a structural diagram of a fifth embodiment of the laser of the utility model;

[0043] Figure 6 This is a structural diagram of a sixth embodiment of the laser of the utility model;

[0044] Figure 7 This is a structural diagram of the seventh embodiment of the laser of the utility model;

[0045] Figure 8 for Figure 7 Another view of the laser structure.

[0046] Description of Figure Numbers:

[0047] Label name Label name 100 Laser 51 Dichroic Mirror 10 Laser output module 53 First reflector 11 Light-emitting components 55 Second reflector 13 Polarization Beam Combiner 70 Beam expansion module 15 Optical Rotation Element 71 Beam Expander 17 The third reflector 73 Collimator 30 Compression Module 90 Install Shell 31 Fast Axis Collimating Lenses 91 Mounting cavity 33 Slow Axis Collimating Lenses 93 light outlet 50 Spectral beam combining module

[0048] The realization of the purpose, functional features and advantages of the utility model will be further explained in conjunction with embodiments and with reference to the accompanying drawings. DETAILED DESCRIPTION

[0049] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0050] It should be noted that all directional indications in the embodiments of the present invention (such as up, down, left, right, front, back...) are only used to explain the relative position relationship, movement status, etc. between the components under a certain specific posture (as shown in the accompanying drawings). If the specific posture changes, the directional indication will also change accordingly.

[0051] In the present invention, unless otherwise clearly specified and limited, the terms "connection", "fixation", etc. should be understood in a broad sense. For example, "fixation" can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0052] In addition, in the present utility model, descriptions such as "first", "second", etc. are only used for descriptive purposes and cannot be understood as indicating or implying their relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In addition, the technical solutions between the various embodiments can be combined with each other, but they must be based on the ability of ordinary technicians in the field to implement them. When the combination of technical solutions is contradictory or cannot be implemented, it should be deemed that such a combination of technical solutions does not exist and is not within the scope of protection required by the present utility model.

[0053] The utility model provides a laser 100 .

[0054] Please refer to Figures 1 to 7 In some embodiments of the present application, the laser 100 includes at least two laser output modules 10, at least two compression modules 30 and a spectrum combining module 50. The laser output module 10 includes two light emitting elements 11 and a polarization beam combiner 13, and the polarization beam combiner 13 can combine the lasers emitted by the two light emitting elements 11 and then emit them; each compression module 30 is arranged on the laser optical path of the laser output module 10 to compress the laser of the laser output module 10 in the fast axis direction and the slow axis direction; the spectrum combining module 50 includes a dichroic mirror 51, and the dichroic mirror 51 can combine the lasers emitted by the two laser output modules 10 and then emit them along the first direction.

[0055] The laser 100 proposed in the present application may be a semiconductor laser 100, such as a blue light semiconductor laser 100, an infrared semiconductor laser 100, etc., or a solid laser 100, etc. The laser 100 includes at least two laser output modules 10, and the light-emitting element 11 in the laser output module 10 may be a light-emitting chip or a light-emitting diode. The laser output module 10 includes two light-emitting elements 11 and a polarization beam combiner 13, and the laser beams emitted by the two light-emitting elements 11 are combined into a laser beam by the polarization beam combiner 13; the laser output module 10 includes two light-emitting elements 11 and a polarization beam combiner 13, and both light-emitting elements 11 emit light toward the polarization beam combiner 13, and the polarization beam combiner 13 combines the two laser beams into one beam and emits them to the reflector. Specifically, the polarization states of the laser beams incident on the polarization beam combiner 13 from the two light emitting elements 11 are perpendicular to each other, for example, one laser beam is P polarized light and the other laser beam is S polarized light; then, under the action of the polarization beam combiner 13, the two laser beams are combined into one beam to achieve superposition, and the light intensities are complementary, so that the power density of the laser spot can be doubled while maintaining the beam quality unchanged. The polarization beam combiner 13 can be a thin film polarizer or a polarization prism.

[0056] Since the laser emitted by the semiconductor laser 100 has the characteristics of large divergence angle, unequal divergence angles in the direction perpendicular to the junction plane, i.e., the slow axis direction, and unequal divergence angles in the direction parallel to the junction plane, i.e., the fast axis direction, and an elliptical far-field spot, a compression module 30 is provided on the laser optical path of each laser output module 10, and the compression module 30 can be used to compress and focus the laser emitted by the laser output module 10 in the fast axis direction and the slow axis direction, so that the divergence angles of the laser beam in the fast axis direction and the slow axis direction are compressed to within a preset range, thereby reducing the diameter of the laser beam of the laser 100 and improving the energy density of the laser beam. In addition, by adjusting the compression module 30 to compress the divergence angle compression ratio of the laser light beam in the fast axis direction and the slow axis direction, the divergence angle of the fast axis in the laser light beam is made smaller than the divergence angle of the slow axis; such a setting reduces the beam expansion of the laser in the fast axis direction, so that when the size of the laser spot in the fast axis direction is determined, the laser 100 of the present application can be used to expand the beam spot in the slow axis direction to a larger size, so that the focused spot can be small and the axes of the two directions of the spot are basically equal, and the overall focused spot is smaller after passing through the field lens or other focusing lens, and the optical power density is higher, thereby improving the processing efficiency.

[0057] In this embodiment, it is necessary to make the divergence angles of each laser beam of the laser 100 in the fast axis and the slow axis uniformly shaped. At this time, each laser output module 10 can use the same type of light-emitting element 11, so that the compression module 30 of the same specification can be used; of course, different types of light-emitting elements 11 can also be used, according to the divergence angles of the lasers emitted by each laser output module 10 in the fast axis direction and the slow axis direction, and according to the final required divergence angle requirements, the compression module 30 of corresponding specifications is selected to adjust the laser divergence angle to the required range. In some embodiments, when the same type of light-emitting element 11 is selected, due to the manufacturing error of the light-emitting element 11 or other factors, the laser divergence angles emitted by different light-emitting elements 11 may also be different. At this time, the compression module 30 of corresponding specifications can also be selected according to the actual laser divergence angle emitted by the light-emitting element 11. When the compression module 30 is used to shape the laser emitted by the laser output module 10, the diameter of the laser beam will also be reduced, thereby reducing the size of the laser spot, increasing the optical power density of the laser spot, and improving the laser processing efficiency.

[0058] In the embodiment of the present application, the compression range of the fast axis and slow axis divergence angles can be adjusted by adjusting the distance between the compression module 30 and the light emitting element 11 and the polarization beam combiner 13; in addition, the structure of the compression module 30 itself can also be adjusted to adjust the compression range of the fast axis and slow axis divergence angles. For example, the compression module 30 can also use at least two cylindrical mirrors that are perpendicular to each other in the light path emission direction, so that the generatrix of the two cylindrical mirrors is perpendicular to the fast axis direction and the slow axis direction respectively, so that the divergence angle of the laser can be compressed along the fast axis direction and the slow axis direction respectively, and the curvature and focal length of the cylindrical mirror can be adjusted to adjust the compression ratio.

[0059] It should be noted that, in this embodiment, a compression module 30 may be respectively arranged after each light-emitting element 11, so as to compress and focus the laser light emitted by each light-emitting element 11 and then combine it by the polarization beam combiner 13, or the laser light may be combined and then compressed and focused. In addition, in some embodiments, the compression module 30 includes a fast-axis collimating lens 31 and a slow-axis collimating lens 33, and a fast-axis collimating lens 31 may be arranged between each light-emitting element 11 and the polarization beam combiner 13, and a slow-axis collimating lens 33 may be arranged after the polarization beam combiner 13, so that the two laser beams after fast-axis compression are subjected to slow-axis compression after being combined by the polarization beam combiner 13; or a slow-axis collimating lens 33 may be arranged between each light-emitting element 11 and the polarization beam combiner 13, and a fast-axis collimating lens 31 may be arranged after the polarization beam combiner 13, so that the two laser beams after slow-axis compression are subjected to fast-axis compression after being combined by the polarization beam combiner 13.

[0060] The laser 100 of the present application is also provided with a spectral beam combining module 50, which includes at least one dichroic mirror 51, which has significantly different spectral reflection or transmission characteristics at two wavelengths (or bands), that is, it can allow light of a specific wavelength or wavelength range to pass through the dichroic mirror 51, while light of other wavelengths cannot pass through the dichroic mirror 51 and will be reflected on the dichroic mirror 51; in this way, the lasers of different wavelength bands in the lasers emitted by the two laser emission modules 10 can be combined into one beam through the dichroic mirror 51, thereby reducing the gap between the two laser beams or even eliminating the gap between the two laser beams; further reducing the laser spot diameter and improving the spot power density. The dichroic mirror 51 can be a prism structure, or a plane mirror or other structure.

[0061] It can be understood that when three or more laser output modules 10 are provided in the laser 100, only one dichroic mirror 51 is provided to combine the lasers emitted by two of the laser output modules 10, which can also play a role in reducing the overall spot diameter and improving the spot power density to a certain extent; and more laser output modules 10 are paired in pairs and are respectively combined by the dichroic mirror 51. As the number of dichroic mirrors 51 increases and the number of laser beams combined increases, the effect of reducing the overall spot diameter and improving the spot power density is better.

[0062] Therefore, it can be understood that according to the technical solution of the utility model, at least two groups of laser output modules 10 can be used in the laser 100. For the laser output module 10 including two light-emitting elements 11, the two laser beams with different polarization directions emitted by the two light-emitting elements 11 can be polarized and combined into a beam of circularly polarized light through the polarization combiner 13, thereby reducing the number of laser beams, reducing the laser spot size of the laser output module 10, and improving the power density.

[0063] In addition, a compression module 30 is arranged on the light output path of each laser output module 10, and the compression module 30 can compress and focus the laser emitted by the laser output module 10 in the fast axis direction and the slow axis direction, so that the divergence angle of the fast axis is smaller than the divergence angle of the slow axis. In this way, the light of the slow axis can be expanded to a larger size under the same fast axis size, and the diameter of the light beam transmitted from the laser output module 10 to the spectrum combining module 50 can be reduced, thereby reducing the size of the overall light spot and improving the power density of the light spot.

[0064] In addition, a dichroic mirror 51 is provided in the spectral beam combining module 50, which can spectrally combine the lasers of different wavelengths emitted by the two laser emission modules 10 to form one laser. The gap between the laser spots after the combination by the dichroic mirror 51 is very small or there is no gap, which further improves the power density of the laser spot. That is, after the divergence angle compression collimation, polarization beam combining and beam combining of multiple laser beams, the present application improves the power density of the laser spot finally emitted by the laser 100, so that the same effective spot size can be undertaken by a smaller aperture galvanometer, which greatly reduces the load on the electrode and improves the operating speed of the overall processing equipment.

[0065] Please refer to Figure 1 In some embodiments of the present application, the dichroic mirror 51 has two mirror surfaces arranged back to back, one of which is provided with an anti-reflection film, and the other is provided with a reflective film;

[0066] The laser light emitted by one of the laser emission modules 10 may be emitted toward the anti-reflection film along the first direction, and the laser light emitted by the other laser emission module 10 may be emitted toward the reflective film along a second direction, wherein the second direction is perpendicular to the first direction.

[0067] In this embodiment, the dichroic mirror 51 is a plane mirror and has two mirror surfaces arranged back to back, one of which is provided with an anti-reflection film and the other is provided with a reflective film; the provision of the anti-reflection film can improve the transmittance of light of a specific wavelength, for example, the reflected light generated on the front and rear surfaces of the film interferes with each other, thereby enhancing the transmission, so as to reduce the loss of laser light of a specific wavelength that can pass through the dichroic mirror 51 and improve the utilization rate of light. The reflective film reflects the laser light directed to the dichroic mirror 51 without affecting the transmission of the laser light of a specific wavelength, so that the laser light transmitted from the dichroic mirror 51 passes through the reflective film and is combined with the laser light reflected on the surface of the reflective film. Among them, the two laser beams directed to the dichroic mirror 51 can be made substantially perpendicular, and the anti-reflection film and the reflective film are arranged at a substantially 45° angle with the laser beam. Of course, in some embodiments, since the laser light transmitted from the dichroic mirror 51 will also produce a certain refraction in the dichroic mirror 51, the placement direction of the dichroic mirror 51 can be set by the refraction angle. In addition, the dichroic mirror 51 can be made of glass, quartz or other materials, which are not limited here.

[0068] It should be noted that, in this embodiment, the two laser beams need to be perpendicular to each other so as to be directed toward the anti-reflection film and the reflective film respectively. At this time, the two laser emission modules 10 can be set in a variety of ways. For example, the light emission directions of the two laser emission modules 10 can be perpendicular to each other, and they can be set toward the anti-reflection film and the reflective film respectively, and the light emission direction of the laser emission module 10 directed toward the anti-reflection film is the first direction. A reflector can also be set to adjust the laser light path emitted by the laser emission module 10, so that the setting position of the laser emission module 10 is more flexible; for example, both laser emission modules 10 emit lasers in the second direction, and the first direction is perpendicular to the second direction; one laser emission module 10 emits lasers toward the reflective film, and the laser emitted by the other laser emission module 10 changes the laser direction through the reflector, so that the laser is reflected and emitted toward the anti-reflection film along the first direction. Alternatively, both laser emitting modules 10 may emit lasers in the first direction, wherein the laser of one laser emitting module 10 is directly emitted toward the anti-reflection film, and the laser of the other laser emitting module 10 changes the laser direction via a reflector, so that the laser is reflected and emitted toward the reflective film in the second direction. Of course, multiple reflectors may be provided according to the position of the laser emitting structure to change the laser direction, and it is only necessary to make the two laser beams finally emitted toward the dichroic mirror 51 substantially perpendicular to each other and emitted toward the anti-reflection film and the reflective film respectively.

[0069] Please refer to Figure 1 , Figure 2 as well as Figure 6 In some embodiments of the present application, the two laser emitting modules 10 that perform spectral beam combining through the same dichroic mirror 51 both emit laser light along the second direction, and the spectral beam combining module 50 further includes a first reflector 53, and the first reflector 53 and the dichroic mirror 51 are arranged along the first direction;

[0070] One of the laser emitting modules 10 is disposed toward the first reflector 53 to reflect the laser to the anti-reflection film through the first reflector 53 , and the other laser emitting module 10 is disposed toward the reflective film.

[0071] In this embodiment, in the two laser emitting modules 10 that perform spectral beam combining through the same dichroic mirror 51, the lasers emitted by each laser emitting module 10 propagate along the second direction; the laser emitted by one laser emitting module 10 is directly emitted to the reflective film of the dichroic mirror 51, and the laser emitted by the other laser emitting module 10 is emitted to the first reflector 53 located on the side of the anti-reflection film of the dichroic mirror 51. The laser of the laser emitting module 10 is reflected to the anti-reflection film by the first reflector 53, and passes through the dichroic mirror 51 to be combined with another laser beam reflected from the reflective film into a laser beam, and then propagates and emits along the first direction. In this way, the two laser emitting modules 10 can be set on the same side of the spectral beam combining module 50, which improves the setting flexibility of the laser emitting module 10.

[0072] In addition, it should be noted that in this embodiment, each laser emission module 10 can be arranged on the same side of the spectrum combining module 50 along the second direction, or Figure 2 As shown, they are respectively arranged on both sides of the spectrum combining module 50, which is not limited here.

[0073] Please refer to Figure 1 , Figure 6 as well as Figure 7 In some embodiments of the present application, the laser emission modules 10 are arranged in parallel along the first direction and are located on the same side of the spectrum combining module 50 .

[0074] In this embodiment, the laser emission modules 10 and the spectrum emission modules of the laser 100 are arranged along the second direction, and the laser emission modules 10 are located on the same side of the spectrum emission module; in this way, it is not necessary to set the laser emission module 10 on the other side of the spectrum beam combining module 50, which reduces the space occupied on the other side of the spectrum beam combining module 50 and can reduce the width of the laser 100 in the second direction; in addition, the laser emission modules 10 are arranged in parallel along the first direction, which can also reduce the width of the laser 100 in the second direction. That is, the technical solution of this embodiment can reduce the volume and occupied space of the laser 100.

[0075] Please refer to Figure 3 In some embodiments of the present application, in the two laser emission modules 10 that are combined by the same dichroic mirror 51, one of the laser emission modules 10 and the dichroic mirror 51 are arranged along the first direction and are set toward the anti-reflection film; the other laser emission module 10 and the dichroic mirror 51 are arranged along the second direction and are set toward the reflective film.

[0076] In this embodiment, the dichroic mirror 51 is placed at approximately 45° to the first direction and the second direction, so that the light emission directions of the two laser emission modules 10 are perpendicular to each other, one of the laser emission modules 10 is located on the anti-reflection film side of the dichroic mirror 51 along the first direction, so that the laser can be directly emitted to the anti-reflection film of the dichroic mirror 51; the other laser emission module 10 is located on the reflective film side of the dichroic mirror 51 along the second direction, so that the laser can be directly emitted to the reflective film of the dichroic mirror 51, and then the two laser beams are emitted from the reflective film side to the first direction after the spectrum is combined in the dichroic mirror 51. With such a configuration, it is not necessary to set an optical device such as a reflector in the laser 100 to change the propagation direction of the laser emitted by the laser emission module 10, thereby reducing the use of optical devices in the laser 100.

[0077] Please refer to Figure 4 and Figure 5In some embodiments of the present application, the two laser emitting modules 10 that perform spectral beam combining through the same dichroic mirror 51 both emit laser light along the first direction, and the spectral beam combining module 50 further includes a second reflector 55, and the second reflector 55 and the dichroic mirror 51 are arranged along the second direction;

[0078] One of the laser emitting modules 10 is disposed toward the first reflector 53 to reflect the laser to the reflective film through the first reflector 53 , and the other laser emitting module 10 is disposed toward the anti-reflection film.

[0079] In this embodiment, in the two laser emitting modules 10 that perform spectral beam combining through the same dichroic mirror 51, the laser beams emitted by each laser emitting module 10 are propagated along the first direction; the laser beam emitted by one of the laser emitting modules 10 is directly emitted to the anti-reflection film of the dichroic mirror 51, and the laser beam emitted by the other laser emitting module 10 is emitted to the second reflecting mirror 55 located on the side of the reflecting film of the dichroic mirror 51, and the laser beam of the laser emitting module 10 is reflected to the reflecting film by the second reflecting mirror 55, and is combined with the other laser beam that passes through the dichroic mirror 51 into a laser beam, which is then propagated and emitted along the first direction.

[0080] Please refer to Figure 2 In some embodiments of the present application, the laser 100 is provided with at least four laser output modules 10, and the spectral beam combining module 50 is provided with at least two dichroic mirrors 51, each of which is arranged in a stepped manner along the first direction and the second direction, and each of the dichroic mirrors 51 is used to perform spectral beam combining on the lasers emitted by the two laser output modules 10;

[0081] The distance between the light emitting positions of any two dichroic mirrors 51 along the first direction is smaller than the distance along the second direction.

[0082] In this embodiment, the laser 100 is provided with at least four laser emitting modules 10, and the lasers emitted by each laser emitting module 10 propagate along the second direction. Correspondingly, at least two dichroic mirrors 51 are provided in the spectral beam combining module 50. Each dichroic mirror 51 can be used to perform spectral beam combining on the lasers emitted by two laser emitting modules 10. In the two laser emitting modules 10 that perform spectral beam combining through the same dichroic mirror 51, the laser emitted by one of the laser emitting modules 10 is directly directed to the reflective film of the dichroic mirror 51, and the laser emitted by the other laser emitting module 10 is reflected to the anti-reflection film through the first reflector 53.

[0083] The dichroic mirrors 51 are arranged in a stepped manner along the first direction and the second direction, so as to avoid blocking the propagation of the laser beams combined by other dichroic mirrors 51 due to a dichroic mirror 51 being located on the laser emission path of another dichroic mirror 51; to ensure that the laser beams combined and emitted by each dichroic mirror 51 can be emitted to be utilized, thereby realizing the spatial combination of various light spots.

[0084] It can be understood that the laser beams emitted from the two laser emitting modules 10 after being beam-combined by the dichroic mirror 51 are approximately located at the reflecting position of the reflective film at the light emitting position of the dichroic mirror 51. The distance between the two laser beams emitted from the two dichroic mirrors 51 after spectral beam combination is defined as L, and the distance between the two laser beams respectively emitted to the reflective films of the two dichroic mirrors 51 is defined as D. By adjusting the position so that the distance between the light emitting positions of any two dichroic mirrors 51 in the first direction is smaller than the distance in the second direction, D>L can be achieved, that is, the spatial gap between the laser beams after spectral beam combination is reduced by the position setting of the dichroic mirror 51, the size of the overall light spot is reduced, and the power density of the light spot is improved.

[0085] In addition, since a compression module 30 is arranged on the light output path of each laser output module 10, the compression module 30 can compress and focus the laser emitted by the laser output module 10 in the fast axis direction and the slow axis direction, so that the divergence angle of the fast axis is smaller than the divergence angle of the slow axis. With such arrangement, the light of the slow axis can be expanded to a larger size under the same fast axis size, and the diameter of the light beam transmitted to the dichroic mirror 51 can be reduced, so that the spatial misalignment between the two dichroic mirrors 51 can be made very small, and the spatial gap between the two laser beams can be further reduced, the size of the overall light spot can be reduced, and the power density of the light spot can be increased; and since the light spot gap is very small after the spatial beam combination, the same effective light spot size can be undertaken by a smaller aperture galvanometer, which greatly reduces the load on the electrode and improves the operating speed of the overall processing equipment.

[0086] Please refer to Figure 1 and Figure 2 In some embodiments of the present application, an optical rotator 15 is provided between at least one of the light-emitting elements 11 of the laser emission module 10 and the polarization beam combiner 13 , and the optical rotator 15 can change the polarization direction of the laser emitted by the light-emitting element 11 .

[0087] In the embodiment of the present application, a polarization beam combiner 13 is used in the laser output module 10 to perform polarization beam combining on two laser beams with different polarization directions. The main principle is that the polarization directions of the two laser beams incident on the polarization beam combiner 13 are perpendicular to each other. However, if the light emitting element 11 is adjusted in position or a reflector is set, the light emitting element 11 and the reflector need to have a high position accuracy, which makes adjustment more difficult and the accuracy is difficult to guarantee. In the present embodiment, an optical rotation element 15 can be set between one of the light emitting elements 11 and the polarization beam combiner 13; the optical rotation element 15 is an optical element with optical rotation, such as a half-wave plate, an optical rotation plate, etc., which can change the polarization direction of light so that the polarization direction of the laser passing through the optical rotation element 15 is constant. An optical rotation element 15 may be arranged between any one of the light emitting elements 11 and the polarization beam combiner 13; or an optical rotation element 15 may be arranged between both light emitting elements 11 and the polarization beam combiner 13. In this case, it is necessary to make the optical rotation angles of the two optical rotation elements 15 different; thereby ensuring that the polarization directions of the two laser beams incident on the polarization beam combiner 13 are perpendicular to each other; and with such an arrangement, there is no need to have high position accuracy requirements for the light emitting element 11 and the reflector, etc., thus avoiding a complicated and time-consuming adjustment process, and improving the convenience of installation and adjustment of structures such as the light emitting element 11 and the reflector.

[0088] In some embodiments of the present application, the optical rotation element 15 is an optical rotation plate or a half-wave plate.

[0089] In this embodiment, a polarization plate or a half-wave plate can be used as the polarization element 15. Both the half-wave plate and the polarization plate have optical activity. The optical axis of the half-wave plate is parallel to the crystal plane, and the optical axis of the polarization plate is perpendicular to the crystal plane. Both can be used to convert the polarization state of light to adjust the laser to the desired polarization direction.

[0090] Please refer to Figures 1 to 7 In some embodiments of the present application, the polarization beam combiner 13 includes a reflective surface and a translucent surface arranged back to back, and the lasers emitted by the two light-emitting elements 11 can be respectively emitted toward the reflective surface and the translucent surface, and both are emitted from the reflective surface.

[0091] In this embodiment, the polarization beam combiner 13 has a reflective surface and a transparent surface that are arranged back to back; the two laser beams directed to the dichroic mirror 51 can be made substantially perpendicular, and the transparent surface and the reflective surface are arranged substantially at a 45° angle to the laser beam, and the two laser beams are directed to the transparent surface and the reflective surface respectively. At this time, the two light-emitting elements 11 can be arranged in a variety of ways. For example, the light-emitting directions of the two light-emitting elements 11 can be made perpendicular to each other, and they can be arranged toward the transparent surface and the reflective surface respectively; a reflector can also be arranged to adjust the laser light path emitted by the light-emitting element 11, so that the setting position of the light-emitting element 11 is more flexible; for example, the two light-emitting elements 11 can emit lasers in the same direction, one of which is directed toward the reflective surface, and the laser emitted by the other light-emitting element 11 changes the laser direction through the reflector, so that the laser is reflected and directed toward the transparent surface. Of course, multiple reflectors can also be arranged according to the position of the laser emission structure to change the laser direction, and it is only necessary to make the two laser beams that finally direct to the dichroic mirror 51 substantially perpendicular to each other and directed toward the transparent surface and the reflective surface respectively.

[0092] It should be noted that the specific structures of the laser emitting modules 10 in the laser 100 may be different. For example, the light emitting directions of the two light emitting elements 11 of one laser emitting module 10 may be perpendicular to each other, and the light emitting directions of the two light emitting elements 11 of another laser emitting module 10 may be the same, and the propagation direction of at least one laser beam may be changed by means of at least one reflector. Of course, the structural arrangement of each laser emitting module 10 may also be consistent, which is not limited here.

[0093] Please refer to Figures 1 to 3 In some embodiments of the present application, one of the light-emitting elements 11 of at least one of the laser emission modules 10 is disposed toward the reflective surface, and another light-emitting element 11 is disposed toward the transparent surface.

[0094] In this embodiment, the light emission directions of the two light emitting elements 11 of at least one laser emission module 10 in the laser 100 are perpendicular to each other, and the two light emitting elements 11 can directly emit laser light toward the polarization beam combiner 13. With this arrangement, there is no need to set up reflectors and other elements in the laser emission module 10 to adjust the laser light path, thereby reducing the use of optical devices in the laser 100.

[0095] Please refer to Figure 6 In some embodiments of the present application, the two light emitting elements 11 of at least one laser emission module 10 are arranged side by side, and the laser emission module 10 further includes a third reflector 17;

[0096] One of the light emitting elements 11 faces one of the reflective surface and the transparent surface, and the other light emitting element 11 faces the third reflector 17, so that the emitted laser is reflected by the third reflector 17 to the other of the reflective surface and the transparent surface.

[0097] In this embodiment, the light emitting directions of the two light emitting elements 11 of at least one laser emitting module 10 in the laser 100 are the same, and the optical path of at least one of the laser beams is adjusted by a reflector so that the two laser beams are approximately perpendicular to each other and are emitted to the reflective surface and the light-transmitting surface respectively. Among them, the laser of one of the laser emitting modules 10 can be directly emitted to the light-transmitting surface, and the laser of the other laser emitting module 10 can be changed in direction by the third reflector 17 so that the laser is reflected and emitted to the reflective surface. Alternatively, the laser of one of the laser emitting modules 10 can be directly emitted to the reflective surface, and the laser of the other laser emitting module 10 can be changed in direction by the third reflector 17 so that the laser is reflected and emitted to the light-transmitting surface.

[0098] Of course, multiple reflectors can also be set according to the position of the light emitting element 11 to change the direction of the laser. It is only necessary to make the two laser beams that finally irradiate the polarization beam splitter substantially perpendicular to each other and irradiate the reflective surface and the transparent surface respectively.

[0099] Please refer to Figures 1 to 7 In some embodiments of the present application, the compression module 30 includes a fast-axis collimating lens 31 and a slow-axis collimating lens 33 disposed on the light-emitting side of the light-emitting element 11 .

[0100] In this embodiment, the compression module 30 may also include a fast-axis collimating lens 31 and a slow-axis collimating lens 33 arranged along the optical path. The fast-axis collimating lens 31 may be used to compress the divergence angle of the laser in the fast-axis direction and collimate the laser beam. The slow-axis collimating lens 33 may be used to compress the divergence angle of the laser in the slow-axis direction and collimate the laser beam. The fast-axis collimating lens 31 and the slow-axis collimating lens 33 may both be cylindrical lenses, which may be plano-convex cylindrical lenses, plano-concave cylindrical lenses, bi-convex cylindrical lenses, bi-convex cylindrical lenses, or plano-convex cylindrical lenses. Concave cylinder, meniscus cylinder, cylinder-cross cylinder and special-shaped cylinder lens, etc.; and make the generatrix of the fast-axis collimating lens 31 perpendicular to the fast-axis direction, make the generatrix of the slow-axis collimating lens 33 perpendicular to the slow-axis direction, and make the cylindrical curvature of the slow-axis collimating lens 33 smaller than the cylindrical curvature of the fast-axis collimating lens 31, so that the reduction in the divergence angle of the laser on the slow axis can be smaller than the reduction in the divergence angle on the fast axis, so that the divergence angle of the laser in the slow axis direction can be not less than the divergence angle in the fast axis direction. The fast-axis collimating lens 31 and the slow-axis collimating lens 33 can be arranged in such a way that the fast-axis collimating lens 31 is arranged on the light-emitting side of the slow-axis collimating lens 33, or the slow-axis collimating lens 33 is arranged on the light-emitting side of the fast-axis collimating lens 31.

[0101] Among them, the same laser output module 10 can use a set of compression modules 30, that is, the fast axis collimating lens 31 and the slow axis collimating lens 33 are arranged on the light output side of the polarization beam combiner 13. It is also possible to make the two light emitting elements 11 of the same laser output module 10 share the fast axis collimating lens 31 or the slow axis collimating lens 33; for example, a fast axis collimating lens 31 is arranged between each light emitting element 11 and the polarization beam combiner 13, and a slow axis collimating lens 33 is arranged after the polarization beam combiner 13, so that the two laser beams after fast axis compression are subjected to slow axis compression after being combined by the polarization beam combiner 13; or, a slow axis collimating lens 33 is arranged between each light emitting element 11 and the polarization beam combiner 13, and a fast axis collimating lens 31 is arranged after the polarization beam combiner 13, so that the two laser beams after slow axis compression are subjected to fast axis compression after being combined by the polarization beam combiner 13. Of course, as in the following embodiment, a set of compression modules 30 may be provided between each light emitting element 11 and the polarization beam combiner 13, which will not be described in detail here.

[0102] Please refer to Figure 1 In some embodiments of the present application, the fast-axis collimating lens 31 and the slow-axis collimating lens 33 are provided between each of the light-emitting elements 11 and the polarization beam combiner 13 .

[0103] In this embodiment, a fast-axis collimating lens 31 and a slow-axis collimating lens 33 are arranged between each light-emitting element 11 and the polarization beam combiner 13, so that the lasers emitted by the two light-emitting chips can be compressed before being directed to the polarization beam combiner 13, so as to reduce the diameter of the light beam directed to the polarization beam combiner 13, thereby reducing the diameter of the light beam after polarization beam combining, which is beneficial to improving the spot power density.

[0104] Please refer to Figures 1 to 7 In some embodiments of the present application, the laser 100 further includes a beam expansion module 70 , and the beam expansion module 70 is disposed on the light output side of the spectral beam combining module 50 .

[0105] In this embodiment, the laser 100 includes a beam expansion module 70, which is arranged on the light-emitting side of the reflector to enlarge the size of the synthesized laser spot to a desired spot size, and in this process, the size of the laser spot in the fast axis direction and the slow axis direction are increased, the laser beam can maintain the spot distribution before beam expansion, and the increase in the spot size can increase the processing area and improve the processing efficiency. Among them, the beam expansion module 70 can only be provided with a plano-concave lens as the beam expander 71, or it can be provided as a combination structure of the beam expander 71 and the collimator 73 in the following embodiment.

[0106] Please refer to Figures 1 to 7 In some embodiments of the present application, the beam expansion module 70 includes:

[0107] A beam expander 71, which is disposed on the light-emitting side of the spectral beam combining module 50; and

[0108] The collimator 73 is disposed on the light-emitting side of the beam expander 71 .

[0109] In this embodiment, the beam expansion module 70 includes a beam expander 71 and a collimator 73 arranged in sequence along the light emitting direction; the beam expander 71 can be a plano-concave lens, such as a plano-concave spherical mirror, which can increase the divergence angle of the laser beam to expand the diameter of the laser beam; after the laser beam is expanded, it is emitted to the collimator 73, and the collimator 73 can be a plano-convex lens, such as a plano-convex spherical mirror, which can collimate the laser beam to adjust the coaxiality of the laser beam, thereby improving the directivity of the laser beam, so that the energy of the laser beam passing through the beam expander 71 is more concentrated, and it can also have a larger power density when the transmission distance is long, thereby improving the processing efficiency.

[0110] In some embodiments of the present application, at least one of the beam expander 71 and the collimator 73 can be moved along the arrangement direction of the beam expander 71 and the collimator 73 to adjust the distance between the beam expander 71 and the collimator 73 .

[0111] In the embodiment of the present application, the laser beam synthesized by the spectrum combining module 50 can be expanded by the beam expansion module 70 composed of the beam expander 71 and the collimator 73, and the expanded laser beam can be roughly collimated. The degree of expansion of the laser beam depends on the distance between the beam expander 71 and the collimator 73. When the distance between the beam expander 71 and the collimator 73 is larger, the transmission distance of the laser beam passing through the beam expander 71 when reaching the collimator 73 is far, the degree of beam expansion divergence is also greater, the diameter of the collimated laser beam is also larger, and the laser spot becomes larger; on the contrary, if the distance between the beam expander 71 and the collimator 73 is smaller, the transmission distance of the laser beam when reaching the collimator 73 is smaller, the divergence is smaller, the diameter of the collimated laser beam is also smaller, and the laser spot becomes smaller; therefore, the diameter of the beam can be changed by changing the distance between the beam expander 71 and the collimator 73, thereby changing the size of the spot.

[0112] The beam expander 71 may be movable to approach and move away from the collimator 73, or the collimator 73 may be movable to approach and move away from the beam expander 71; or both the beam expander 71 and the collimator 73 may be movable, which is not limited here.

[0113] In some embodiments of the present application, the beam expander module 70 further includes a connecting axis, which extends along the arrangement direction of the beam expander 71 and the collimator 73; at least one of the beam expander 71 and the collimator 73 can be translationally disposed on the connecting axis.

[0114] In this embodiment, the beam expander module 70 also includes at least one connecting shaft, which extends along the arrangement direction of the beam expander 71 and the collimator 73, and allows at least one of the beam expander 71 and the collimator 73 to be arranged on the connecting shaft in a translational manner, for example, the beam expander 71 is connected to the connecting shaft, or the collimator 73 is connected to the connecting shaft, or both the beam expander 71 and the collimator 73 are connected to the connecting shaft. The beam expander 71 and the collimator 73 can be connected to the connecting shaft by directly sleeved in the connecting shaft, or by slidingly connecting to the connecting shaft using other connecting parts, for example, the connecting shaft is set as a screw, and the beam expander 71 or the collimator 73 is fixed on the screw nut. By setting the connecting shaft, the beam expander 71 and the collimator 73 can approach and move away from each other along the connecting shaft; that is, the connecting shaft plays a guiding and limiting role, so as to avoid the displacement of the beam expander 71 and the collimator 73 during the movement, thereby affecting the beam expansion and collimation of the laser.

[0115] In some embodiments, the laser 100 includes a mounting housing 90 , and the connecting shaft can be fixedly connected to the mounting housing 90 .

[0116] In some embodiments of the present application, one of the beam expander 71 and the collimator 73 is threadedly connected to the connecting shaft;

[0117] Or, the beam expansion module 70 includes two connecting shafts, and the beam expander 71 and the collimator 73 are respectively threadedly connected to one of the connecting shafts;

[0118] Alternatively, the connecting shaft has two threaded sections arranged along its length direction, and the thread rotation directions of the two threaded sections are opposite, and the beam expander 71 and the collimator 73 are respectively threadedly connected to one of the threaded sections.

[0119] In this embodiment, at least one of the beam expander 71 and the collimator 73 is threadedly connected to the connecting shaft, and the distance between the beam expander 71 and the collimator 73 can be adjusted by rotating the connection. Among them, one of the beam expander 71 and the collimator 73 can be threadedly connected to the connecting shaft, and the lens connected to the connecting shaft can be translated along the connecting shaft by rotating the connection. Alternatively, two connecting shafts are set, and the beam expander 71 and the collimator 73 are respectively threadedly connected to a connecting shaft, and the lens connected thereto can be translated along the connecting shaft by rotating the corresponding connecting shaft. It is also possible to set two threaded sections arranged along the length direction of the connecting shaft, and the thread rotation directions of the two threaded sections are opposite, so that the beam expander 71 and the collimator 73 are respectively threadedly connected to a threaded section. At this time, rotating the connecting shaft can make the beam expander 71 and the collimator 73 move toward or away from each other, thereby adjusting the distance between the beam expander 71 and the collimator 73, and adjusting the spot size after beam expansion and collimation.

[0120] Please refer to Figure 7 and Figure 8In some embodiments of the present application, the laser 100 also includes a mounting shell 90, a mounting cavity 91 is formed in the mounting shell 90, and the mounting shell 90 is provided with a light outlet 93 connected to the mounting cavity 91, the laser emission module 10, the compression module 30 and the spectral beam combining module 50 are all arranged in the mounting cavity 91, and the light outlet 93 is located on the light output side of the spectral beam combining module 50.

[0121] In this embodiment, the laser 100 further includes a mounting shell 90, in which a mounting cavity 91 is formed, and a light outlet 93 connected to the mounting cavity 91 is provided on the shell wall of the mounting shell 90, so that the laser 100 can emit laser light outward. The mounting shell 90 has a mounting cavity 91 formed therein, and the compression module 30 and the spectrum combining module 50 are both mounted in the mounting cavity 91, and the light emitting side of the laser emission module 10 is arranged toward the mounting cavity 91, so as to protect the laser emission module 10, the compression module 30, the spectrum combining module 50 and other components; and the shaping processes such as the spot compression and synthesis of the laser 100 are all completed in the mounting cavity 91, so as to prevent the laser shaping process from being affected by the outside world.

[0122] In some embodiments, the laser 100 includes a beam expander module 70 formed by a beam expander 71 and a collimator 73, and the distance between the beam expander 71 and the collimator 73 is adjustable. In this case, a plurality of mounting positions arranged along the arrangement direction of the beam expander 71 and the collimator 73 may be provided in the mounting cavity 91, and the mounting positions may be used to install at least one of the beam expander 71 and the collimator 73, and the distance between the beam expander 71 and the collimator 73 may be adjusted by adjusting the mounting position of the beam expander 71 and / or the collimator 73.

[0123] In some embodiments, a connecting shaft extending along the arrangement direction of the beam expander 71 and the collimator 73 may be provided, and the connecting shaft is threadedly connected to one of the beam expander 71 and the collimator 73. When the connecting shaft is rotated, the end of the beam expander 71 or the collimator 73 connected to the connecting shaft can be used to adjust the distance between the beam expander 71 and the collimator 73; of course, a screw rod may be provided to avoid directly providing threaded holes on the beam expander 71 and the collimator 73. Moreover, this distance adjustment method makes the distance adjustment range between the beam expander 71 and the collimator 73 continuous, thereby improving the flexibility of distance adjustment and laser spot size adjustment.

[0124] Please refer to Figure 7 In some embodiments of the present application, the light emitting element 11 is disposed through the wall of the mounting shell 90 of the laser 100 .

[0125] In this embodiment, the light emitting element 11 of the laser emission module 10 is arranged on the wall of the mounting shell 90 of the laser 100. Such an arrangement can improve the connection strength between the light emitting element 11 and the mounting shell 90, and limit the light emitting element 11, so that the light emitting direction of the light emitting element 11 can be kept stable. In some embodiments, the light emitting element 11 needs to be connected to a power source or other structure, so that the light emitting element 11 is arranged on the wall of the mounting shell 90, so that the end of the light emitting element 11 away from the light emitting side can be used to connect to an external power source or other structure, which is convenient for the use of the laser 100.

[0126] In the embodiment of the present application, the laser 100 is a semiconductor laser 100 or a solid laser 100. The light-emitting element 11 used in the semiconductor laser 100 and the solid laser 100 has the advantages of small size, high output power and high brightness. However, the divergence angle of the laser emitted is not equal in the direction perpendicular to the junction plane, that is, the slow axis direction, and the direction parallel to the junction plane, that is, the fast axis direction. Through the structural setting of the laser 100 in the embodiment of the present application, the lasers of multiple light-emitting elements 11 can be superimposed and synthesized, and the diameter of the overall light beam finally emitted by the laser 100 can be reduced, and the size of the laser spot can be reduced; thereby, the optical power density of the laser spot can be increased, and the energy distribution of the spot can be uniform, which can improve the laser processing efficiency.

[0127] The present application also proposes a laser device, which includes the laser 100 as described in any of the above embodiments. The laser device proposed in the present application can be, for example, a laser engraving device, a laser cutting device or other laser processing device, or a medical device, a laser radar, a laser printer, a scanner or other device, which is not limited here.

[0128] Since the laser device proposed in the present application applies all the technical solutions of all the aforementioned embodiments, it at least has all the beneficial effects brought by all the aforementioned technical solutions, which will not be described one by one here.

[0129] The above description is only a preferred embodiment of the utility model, and does not limit the patent scope of the utility model. All equivalent structural changes made by using the contents of the utility model specification and drawings under the utility model concept, or directly / indirectly used in other related technical fields are included in the patent protection scope of the utility model.

Claims

1. A laser, characterized in that: include: At least two laser emission modules, the laser emission modules comprising two light emitting elements and a polarization beam combiner, the polarization beam combiner can combine the laser beams emitted by the two light emitting elements into polarization beams and then emit them; At least two compression modules, each of which is arranged on the laser light path of the laser output module to compress the laser of the laser output module in the fast axis direction and the slow axis direction; as well as A spectral beam combining module includes a dichroic mirror, and the dichroic mirror can spectrally combine the lasers emitted by the two laser emitting modules and then emit them in a first direction.

2. The laser according to claim 1, characterized in that The dichroic mirror has two mirror surfaces arranged back to back, one of which is provided with an anti-reflection film, and the other is provided with a reflective film; The laser light emitted by one of the laser emission modules may be emitted toward the anti-reflection film along the first direction, and the laser light emitted by the other laser emission module may be emitted toward the reflective film along a second direction, wherein the second direction is perpendicular to the first direction.

3. The laser according to claim 2, characterized in that The two laser emitting modules that perform spectral beam combining through the same dichroic mirror both emit laser light along the second direction, and the spectral beam combining module further includes a first reflector, and the first reflector and the dichroic mirror are arranged along the first direction; One of the laser emitting modules is disposed toward the first reflector to reflect the laser to the anti-reflection film through the first reflector, and the other laser emitting module is disposed toward the reflective film.

4. The laser according to claim 3, characterized in that The laser emission modules are arranged in parallel along the first direction and are located on the same side of the spectrum combining module.

5. The laser according to claim 3, characterized in that Of the two laser emitting modules that combine beams through the same dichroic mirror, one of the laser emitting modules and the dichroic mirror are arranged along the first direction and are disposed toward the anti-reflection film, and the other of the laser emitting modules and the dichroic mirror are arranged along the second direction and are disposed toward the reflective film; And / or, the two laser emitting modules that perform spectral beam combining through the same dichroic mirror both emit laser light along the first direction, the spectral beam combining module further comprises a second reflector, the second reflector and the dichroic mirror are arranged along the second direction, one of the laser emitting modules is arranged toward the first reflector to reflect the laser light to the reflective film through the first reflector, and the other laser emitting module is arranged toward the anti-reflection film; And / or, the laser is provided with at least four laser emission modules, the spectral beam combining module is provided with at least two dichroic mirrors, each of the dichroic mirrors is arranged in a stepped manner along the first direction and the second direction, each of the dichroic mirrors is used to perform spectral beam combining on the lasers emitted by the two laser emission modules, and the distance between the light emitting positions of any two of the dichroic mirrors along the first direction is smaller than the distance along the second direction.

6. The laser according to claim 1, characterized in that An optical rotator is provided between at least one of the light emitting elements of the laser emitting module and the polarization beam combiner, and the optical rotator can change the polarization direction of the laser emitted by the light emitting element.

7. The laser according to claim 1, characterized in that The polarization beam combiner comprises a reflective surface and a light-transmitting surface which are arranged back to back. The lasers emitted by the two light-emitting elements can be respectively emitted toward the reflective surface and the light-transmitting surface, and both are emitted from the reflective surface.

8. The laser according to claim 7, characterized in that One of the light-emitting elements of at least one of the laser emission modules is disposed toward the light-reflecting surface, and another light-emitting element is disposed toward the light-transmitting surface; And / or, the two light-emitting elements of at least one of the laser emission modules are arranged side by side, and the laser emission module also includes a third reflector, wherein one of the light-emitting elements faces one of the reflective surface and the transparent surface, and the other light-emitting element is arranged toward the third reflector, so that the emitted laser is reflected by the third reflector to the other of the reflective surface and the transparent surface.

9. The laser according to claim 1, characterized in that The compression module comprises a fast-axis collimating lens and a slow-axis collimating lens arranged on the light-emitting side of the light-emitting element, and a fast-axis collimating lens and a slow-axis collimating lens are arranged between each of the light-emitting elements and the polarization beam combiner.

10. The laser according to claim 1, characterized in that The laser further comprises a beam expansion module, and the beam expansion module is arranged at the light output side of the spectrum combining module.

11. The laser according to claim 10, characterized in that The beam expansion module comprises: A beam expander, which is arranged on the light-emitting side of the spectral beam combining module; and A collimator is arranged on the light-emitting side of the beam expander.

12. The laser according to claim 11, characterized in that At least one of the beam expander and the collimator can be moved along the arrangement direction of the beam expander and the collimator to adjust the distance between the beam expander and the collimator; The beam expansion module further includes a connecting shaft, which extends along an arrangement direction of the beam expander and the collimator, and at least one of the beam expander and the collimator is translationally movably disposed on the connecting shaft.

13. The laser according to claim 12, characterized in that One of the beam expander and the collimator is threadedly connected to the connecting shaft; Or, the beam expansion module comprises two connecting shafts, and the beam expander and the collimator are respectively threadedly connected to one of the connecting shafts; Alternatively, the connecting shaft has two threaded sections arranged along its length direction, and the thread rotation directions of the two threaded sections are opposite, and the beam expander and the collimator are respectively threadedly connected to one of the threaded sections.

14. A laser as claimed in any one of claims 1 to 13, characterized in that The laser also includes a mounting shell, a mounting cavity is formed in the mounting shell, and the mounting shell is provided with a light outlet connected to the mounting cavity. The laser emission module, the compression module and the spectrum combining module are all arranged in the mounting cavity, and the light outlet is located on the light output side of the spectrum combining module.

15. The laser according to claim 14, characterized in that The light emitting element is disposed through the wall of the mounting shell of the laser; And / or, the laser is a semiconductor laser or a solid-state laser.

16. A laser device, characterized in that: The laser device comprises a laser as claimed in any one of claims 1 to 15.

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