Radio frequency plasma excitation device

Abstract

The utility model belongs to the technical field of radio frequency plasma excitation, and particularly relates to a radio frequency plasma excitation device which comprises a shell, an ionization chamber is arranged in the shell, the top of the ionization chamber is connected with a grid mesh, a coil is arranged in the shell, and the left side and the right side of the bottom of the shell are connected with a support through screws. According to the radio frequency plasma excitation device, the coil water outlet pipe is connected with the water inlet of the shell cooling water pipe, and the radio frequency coil is grounded with the shell in the vacuum chamber, so that radio frequency is prevented from being grounded outside the vacuum chamber to cause damage to a human body due to radio frequency emission, and the problem that radio frequency water cooling and shell water cooling are separated in the background technology is solved. The problems that a group of water inlet through-wall flange seats are additionally needed, incoming radio frequency energy is lost between a coil and a shell, the shell needs to be grounded and is unstable during use, and the radio frequency entering an ion source is coupled on the coil and then comes out of a vacuum chamber, so that human body injury is caused by the risk that the radio frequency is externally played are solved.

Description

Technical Field

[0001] The utility model relates to the technical field of radio frequency plasma excitation, in particular to a radio frequency plasma excitation device. Background Art

[0002] As the temperature rises, the state of matter generally shows a transformation process between solid, liquid and gas. We call these three basic forms the three states of matter. For gaseous matter, when the temperature rises to several thousand degrees, the thermal motion of the molecules of the matter intensifies and the collisions between them will cause the gas molecules to ionize. The matter then becomes a mixture of freely moving and interacting positive ions and electrons. This state of existence is called the fourth state of matter, namely plasma.

[0003] In the prior art, the RF water cooling and the shell water cooling are separated, which not only requires an extra set of water inlet wall flange seats, but also causes the incoming RF energy to be lost between the coil and the shell. When in use, the shell needs to be grounded, which is unstable. In addition, the RF entering the ion source, after coupling on the coil, will go out of the vacuum chamber, and there is a risk of RF discharge causing human harm.

[0004] For this reason, we urgently need to provide a radio frequency plasma excitation device. Utility Model Content

[0005] The purpose of the utility model is to provide a radio frequency plasma excitation device to solve the problem of separating radio frequency water cooling and shell water cooling proposed in the above-mentioned background technology, which not only requires an extra set of water inlet wall flange seats, but also causes the incoming radio frequency energy to be lost between the coil and the shell. When in use, the shell needs to be grounded, which is unstable. Moreover, the radio frequency entering the ion source, after being coupled on the coil, will be discharged outside the vacuum chamber, which may cause human harm.

[0006] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a radio frequency plasma excitation device, comprising a shell, an ionization chamber is installed inside the shell, a grid is connected to the top of the ionization chamber, a coil is arranged inside the shell, brackets are connected to the left and right sides of the bottom of the shell by screws, a coil power connection and cooling water inlet is connected to the left side of the bottom of the shell by screws, a coil power connection and cooling water outlet is connected to the right side of the bottom of the shell by screws, and a process air inlet is installed at the bottom of the shell between the coil power connection and cooling water inlet and the coil power connection cooling water outlet.

[0007] Preferably, the coil includes a coil insulating column 1, a coil tube, a coil insulating column 2, a clamping screw, a support rod, a fixing screw, a locking nut, a water inlet locking joint, a locking stud and a water outlet locking joint. The support rod is installed around the bottom of the inner shell, the fixing screw is threadedly connected to the inside of the support rod and extends to the inside of the shell, the coil insulating column 2 is installed on one side of the support rod, the coil insulating column 1 is installed on the side of the coil insulating column 2 away from the support rod, the coil tube is installed between the coil insulating column 1 and the coil insulating column 2, the clamping screw passes through the coil insulating column 1, the coil insulating column 2 and the support rod, the locking nut is connected to one end of the coil tube, the water inlet locking joint is installed at the other end of the coil tube, the locking stud is connected to one end of the locking nut, and the water outlet locking joint is connected to the end of the locking stud away from the locking stud.

[0008] Preferably, the ionization chamber is connected to the grid via insulating ceramic.

[0009] Preferably, the process air inlet is connected to the air pipe and the sealing joint by means of a locking joint.

[0010] Preferably, the water channel seals between the water inlet locking joint, the coil tube, the locking nut, the locking stud, and the water outlet locking joint all use silver gaskets.

[0011] Preferably, the ionization chamber is an insulating material chamber.

[0012] Preferably, the coil tube is wound around the ionization chamber.

[0013] Compared with the prior art, the beneficial effects of the utility model are:

[0014] 1. The RF plasma excitation device is connected to the water inlet of the outer shell cooling water pipe through the coil water outlet pipe. The RF coil is grounded to the outer shell in the vacuum chamber to prevent the RF from being grounded outside the vacuum chamber, which would cause harm to the human body caused by the RF emission. This solves the problem of separating RF water cooling and outer shell water cooling proposed in the background technology, which not only requires an extra set of water inlet wall flange sockets, but also causes the incoming RF energy to be lost between the coil and the outer shell. When in use, the outer shell needs to be grounded, which is unstable. Moreover, the RF entering the ion source, after being coupled on the coil, will be discharged outside the vacuum chamber, causing harm to the human body.

[0015] 2. The RF plasma excitation device has little influence on RF under vacuum state, low and stable reflected power, energy saving, and reduces one set of water inlet cooling flanges, thus saving costs. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 This is a cross-sectional view of the internal structure of the shell of the utility model;

[0017] Figure 2 It is a schematic diagram of the coil structure of the utility model;

[0018] Figure 3 It is a schematic diagram of the partial structure of the coil of the utility model;

[0019] Figure 4 It is a top view of the utility model.

[0020] In the figure: 101, grid; 102, housing; 103, ionization chamber; 104, coil; 105, bracket; 106, coil power connection and cooling water inlet; 107, coil power connection and cooling water outlet; 108, process air inlet; 201, coil insulation column one; 202, coil tube; 203, coil insulation column two; 204, clamping screw; 205, support rod; 206, fixing screw; 207, locking nut; 208, water inlet locking joint; 209, locking stud; 710, water outlet locking joint. DETAILED DESCRIPTION

[0021] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0022] See also Figure 1-Figure 4 The utility model provides a technical solution: a radio frequency plasma excitation device, including a shell 102, an ionization chamber 103 is installed inside the shell 102, a grid 101 is connected to the top of the ionization chamber 103, the ionization chamber 103 is an insulating material chamber, and the ionization chamber 103 is connected to the grid 101 through insulating ceramics. A coil 104 is arranged inside the shell 102, and brackets 105 are connected to the left and right sides of the bottom of the shell 102 by screws. The left side of the bottom of the shell 102 is connected to a coil power connection and cooling water inlet 106 by screws, and the right side of the bottom of the shell 102 is connected to a coil power connection and cooling water outlet 107 by screws. A process air inlet 108 is installed at the bottom of the shell 102 between the coil power connection and cooling water inlet 106 and the coil power connection cooling water outlet 107, and the process air inlet 108 is connected to the air pipe and the sealing joint in the form of a locking joint.

[0023] The coil 104 includes a coil insulating column 1 201, a coil tube 202, a coil insulating column 203, a clamping screw 204, a support rod 205, a fixing screw 206, a locking nut 207, a water inlet locking joint 208, a locking stud 209 and a water outlet locking joint 710. The support rod 205 is installed around the bottom of the inner part of the shell 102, the fixing screw 206 is threadedly connected to the inside of the support rod 205 and extends to the inside of the shell 102, the coil insulating column 203 is installed on one side of the support rod 205, the coil insulating column 1 201 is installed on the side of the coil insulating column 203 away from the support rod 205, the coil tube 202 is installed between the coil insulating column 1 201 and the coil insulating column 203, and the coil tube 202 is wrapped around the ionization chamber 103. The clamping screw 204 passes through the coil insulating column 1 201, the coil insulating column 203 and the support rod 205, the locking nut 207 is connected to one end of the coil tube 202, and the water inlet locking joint 208 is installed at the other end of the coil tube 202. The water channel seals among the water inlet locking joint 208, the coil tube 202, the locking nut 207, the locking stud 209, and the water outlet locking joint 710 are all made of silver gaskets. The locking stud 209 is connected to one end of the locking nut 207, and the water outlet locking joint 710 is connected to the end of the locking stud 209 away from the locking stud 209. Cold water is introduced into the coil through the power supply and the cooling water inlet 106, so that the cold water flows along the coil tube 202 to cool the heat generated by the outer casing 102 and the working China.

[0024] When in use, the RF power is fed to the coil 104 through the coil power connection and the outer wall of the cooling water inlet 106. The coil 104 is connected to the water pipe on the housing 102 to ground the RF, forming a closed loop circuit. At the same time, process gas, such as oxygen or argon and other inert gases, enters the ionization chamber 103 through the process gas inlet 108. The ionization chamber 103 is an insulating material chamber. Under the high-frequency oscillation of 13.56 MHZ on the coil 104 wrapped around the ionization chamber 103, the gas in the ionization chamber 103 is ionized to form negatively charged electrons and positively charged ions. The positive ions are charged by the positive charge of the screen grid on the grid 101, forming an ion sheath around the small holes on the grid. Under the pull of the negative voltage of the acceleration grid on the grid 101, the positive ions pass through the screen grid and the acceleration grid, as well as the top deceleration grid, and are introduced into the vacuum container. During the oscillation operation, a large amount of heat is generated, so the cooling water also flows through the coil power connection and the inner hole of the cooling water inlet 106, through the coil 104, the shell 102, and then to the coil power connection cooling water outlet 107.

[0025] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, the elements defined by the statement "comprise a ..." do not exclude the presence of other identical elements in the process, method, article or device including the elements.

Claims

1. A radio frequency plasma excitation device, comprising a housing (102), characterized in that: An ionization chamber (103) is installed inside the shell (102), a grid (101) is connected to the top of the ionization chamber (103), a coil (104) is arranged inside the shell (102), brackets (105) are connected to the left and right sides of the bottom of the shell (102) by screws, a coil power connection and cooling water inlet (106) is connected to the left side of the bottom of the shell (102) by screws, a coil power connection and cooling water outlet (107) is connected to the right side of the bottom of the shell (102) by screws, and a process air inlet (108) is installed at the bottom of the shell (102) between the coil power connection and cooling water inlet (106) and the coil power connection cooling water outlet (107).

2. The radio frequency plasma excitation device according to claim 1, characterized in that: The coil (104) comprises a coil insulating column 1 (201), a coil tube (202), a coil insulating column 2 (203), a clamping screw (204), a support rod (205), a fixing screw (206), a locking nut (207), a water inlet locking joint (208), a locking stud (209) and a water outlet locking joint (710), wherein the support rod (205) is installed around the bottom of the housing (102), the fixing screw (206) is threadedly connected to the inside of the support rod (205) and extends into the housing (102), the coil insulating column 2 (203) is installed on one side of the support rod (205), and the coil insulating column 1 (201) is installed on the inside of the housing (102). The coil tube (202) is installed between the coil insulation column (201) and the coil insulation column (203), the clamping screw (204) passes through the coil insulation column (201), the coil insulation column (203) and the support rod (205), the locking nut (207) is connected to one end of the coil tube (202), the water inlet locking joint (208) is installed at the other end of the coil tube (202), the locking stud (209) is connected to one end of the locking nut (207), and the water outlet locking joint (710) is connected to the end of the locking stud (209) away from the locking stud (209).

3. The radio frequency plasma excitation device according to claim 1, characterized in that: The ionization chamber (103) is connected to the grid (101) via insulating ceramic.

4. The radio frequency plasma excitation device according to claim 1, characterized in that: The process air inlet (108) is connected to the air pipe and the sealing joint in the form of a locking joint.

5. The radio frequency plasma excitation device according to claim 2, characterized in that: Silver gaskets are used to seal the water passages between the water inlet locking joint (208), the coil tube (202), the locking nut (207), the locking stud (209), and the water outlet locking joint (710).

6. The radio frequency plasma excitation device according to claim 1, characterized in that: The ionization chamber (103) is an insulating material chamber.

7. The radio frequency plasma excitation device according to claim 2, characterized in that: The coil tube (202) is wound around the ionization chamber (103).

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