Automatic cleaning device

Abstract

The utility model provides an automatic cleaning device which comprises a liquid supply pipe which is configured to be connected with a liquid source and provide cleaning liquid; the waste liquid collector is used for collecting waste liquid generated in the cleaning process; the pump body is connected with a to-be-cleaned device, the liquid supply pipe and the waste liquid collector, and the pump body is configured to control the cleaning liquid to flow from the liquid source to the to-be-cleaned device when the to-be-cleaned device is cleaned. After cleaning is finished, the waste liquid is controlled to flow from the device to be cleaned to the waste liquid collector; and the controller is used for controlling a switch of the pump body and the liquid pumping direction and speed of the pump body. According to the automatic cleaning device, the online monitoring equipment can be automatically cleaned, manual operation is reduced, and the equipment operation rate is increased.

Description

Technical Field

[0001] The present application relates to the field of semiconductor manufacturing technology, and in particular to an automatic cleaning device. Background Art

[0002] The test conditions set for the factory's online monitoring equipment, such as the ammonia nitrogen online monitor, are often based on laboratory environments. In the actual production process, the relatively poor water quality of the factory often affects the normal operation of the equipment. Specifically, the chloride ions, calcium and magnesium ions in the water react with the reagents of the online monitoring equipment and generate precipitates, which causes the equipment to operate abnormally. Therefore, the online monitoring equipment needs to be cleaned regularly. However, online monitoring equipment usually requires professional operation and maintenance personnel to complete the task, and it is impossible to clean it at any time, which affects the operation rate of the equipment.

[0003] Therefore, an automatic cleaning device is needed to automatically clean the online monitoring equipment, reduce manual operations, and improve the equipment operation rate. Utility Model Content

[0004] The purpose of the present application is to provide an automatic cleaning device to automatically clean online monitoring equipment.

[0005] An embodiment of the present application provides an automatic cleaning device, comprising: a liquid supply pipe, which is configured to be connected to a liquid source to provide cleaning liquid; a waste liquid collector, which is used to collect waste liquid generated during the cleaning process; a pump body, which is connected to the device to be cleaned, the liquid supply pipe and the waste liquid collector, and the pump body is configured to control the cleaning liquid to flow from the liquid source to the device to be cleaned when cleaning the device to be cleaned, and to control the waste liquid to flow from the device to be cleaned to the waste liquid collector after cleaning is completed; and a controller, which is used to control the switch of the pump body and the pumping direction and speed of the pump body.

[0006] In some embodiments, the pump body is connected to the device to be cleaned via a first liquid transmission pipe, and the first liquid transmission pipe is provided with a first valve body for controlling the flow of liquid in the first liquid transmission pipe.

[0007] In some embodiments, the first valve body is a solenoid valve.

[0008] In some embodiments, the liquid supply pipe is provided with a second valve body for controlling the flow direction of the cleaning liquid in the liquid supply pipe.

[0009] In some embodiments, the pump body is connected to the waste liquid collector via a second liquid transmission pipe, and the second liquid transmission pipe is provided with a third valve body for controlling the flow of the waste liquid in the second liquid transmission pipe.

[0010] In some embodiments, the second valve body is a check valve, controlling the cleaning liquid to flow unidirectionally from the liquid source to the pump body; and the third valve body is a check valve, controlling the waste liquid to flow unidirectionally from the pump body to the waste liquid collector.

[0011] In some embodiments, the automatic cleaning device also includes a time switch, which is electrically connected to the first valve body, the second valve body, the third valve body and the controller to control the opening and closing of the first valve body, the second valve body, the third valve body and the controller.

[0012] In some embodiments, the first liquid transmission tube, the second liquid transmission tube, and the liquid supply tube are all made of transparent polytetrafluoroethylene.

[0013] In some embodiments, the pump body is a peristaltic pump.

[0014] In some embodiments, the controller is electrically connected to the pump body.

[0015] The beneficial effects of the automatic cleaning device provided by the present application include but are not limited to the following:

[0016] The automatic cleaning device provided by the present application can be connected to the online monitoring equipment to automatically clean the structures of the online monitoring equipment that need to be cleaned, such as quantitative tubes, cuvettes, etc., eliminating the need for manual cleaning and manual supervision, which not only avoids the contamination and damage of the online monitoring device due to untimely cleaning, but also reduces the labor cost of maintaining the online monitoring equipment. In addition, the automatic cleaning device uses a peristaltic pump with a small size and convertible pumping direction, which not only facilitates the transfer and placement of the automatic cleaning device, but also enables the automatic cleaning device to switch between cleaning and waste liquid collection modes, further reducing manual participation and improving cleaning efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] The following figures describe in detail the exemplary embodiments disclosed in this application. The same reference numerals represent similar structures in several views of the drawings. Those skilled in the art will understand that these embodiments are non-limiting, exemplary embodiments, and the drawings are only for the purpose of illustration and description, and are not intended to limit the scope of this application. Other embodiments may also accomplish the inventive intent in this application. It should be understood that the drawings are not drawn to scale.

[0018] in:

[0019] Figure 1 It is a schematic diagram of the structure of an automatic cleaning device according to some embodiments of the present application. DETAILED DESCRIPTION

[0020] The following description provides specific application scenarios and requirements of the present application, with the purpose of enabling those skilled in the art to make and use the content in the present application. It will be apparent to those skilled in the art that various local modifications to the disclosed embodiments are apparent, and the general principles defined herein may be applied to other embodiments and applications without departing from the spirit and scope of the present application. Therefore, the present application is not limited to the embodiments shown, but to the widest scope consistent with the claims.

[0021] The present application provides an automatic cleaning device, comprising: a liquid supply pipe, which is configured to be connected to a liquid source to provide cleaning liquid; a waste liquid collector, which is used to collect waste liquid generated during the cleaning process; a pump body, which is connected to the device to be cleaned, the liquid supply pipe and the waste liquid collector, and the pump body is configured to control the cleaning liquid to flow from the liquid source to the device to be cleaned when cleaning the device to be cleaned, and to control the waste liquid to flow from the device to be cleaned to the waste liquid collector after cleaning is completed; and a controller, which is used to control the switch of the pump body and the pumping direction of the pump body.

[0022] The automatic cleaning device provided in the present application can be connected to the online monitoring equipment to automatically clean the structures of the online monitoring equipment that need to be cleaned, such as quantitative tubes, cuvettes, etc., eliminating the need for manual cleaning and manual supervision, thereby avoiding contamination and damage of the online monitoring equipment due to untimely cleaning, and reducing the manpower cost of maintaining the online monitoring equipment.

[0023] The automatic cleaning device provided in the present application will be described in detail below in conjunction with the embodiments and drawings.

[0024] refer to Figure 1 An embodiment of the present application provides an automatic cleaning device, comprising: a pump body 100, a liquid supply pipe 200 and a waste liquid collector 300. When cleaning the device to be cleaned 11, the cleaning liquid flows from the liquid source 12 through the liquid supply pipe 200 and the pump body 100 to the device to be cleaned 11 in sequence; when the cleaning is completed, the waste liquid flows from the automatic cleaning device through the pump body 100 to the waste liquid collector 300.

[0025] In some embodiments, when cleaning the device to be cleaned 11, the pump body 100 is configured to control the cleaning liquid to flow from the liquid source 12 to the device to be cleaned 11, and control the waste liquid to flow from the device to be cleaned 11 to the waste liquid collector 300 after cleaning.

[0026] In some embodiments, the pump body 100 is a peristaltic pump, which can change the liquid pumping direction by adjusting the rotation direction, and the peristaltic pump is small in size and easy to move and place.

[0027] In some embodiments, the pump body 100 is connected to the device to be cleaned 11 through a first liquid transfer tube 400. During the cleaning process, the cleaning liquid is transferred from the pump body 100 to the device to be cleaned 11 through the first liquid transfer tube 400. During the waste liquid collection process after cleaning, the cleaning liquid flows from the device to be cleaned 11 to the pump body 100.

[0028] In some embodiments, the first liquid transmission pipe 400 is provided with a first valve body 401 for controlling the flow of liquid in the first liquid transmission pipe 400. When the device to be cleaned 11 needs to be cleaned, the first valve body 401 is opened, and during the cleaning and waste liquid collection process, the first valve body 401 remains in an open state so that the cleaning liquid or waste liquid can flow in the first liquid transmission pipe 400. After the cleaning and waste liquid collection are completed or when the automatic cleaning device is not started, the first valve body 401 is in a closed state.

[0029] In some embodiments, the first valve body 401 is a solenoid valve.

[0030] In some embodiments, the control voltage of the first valve body 401 is 24V.

[0031] In some embodiments, the pump body 100 is connected to the liquid source 12 through the liquid supply tube 200. Specifically, the first end of the liquid supply tube 200 is connected to the liquid source 12, and the second end of the liquid supply tube 200 is connected to the pump body 100. During the cleaning process, the cleaning liquid flows from the liquid source 12 to the pump body 100 through the liquid supply tube 200.

[0032] In some embodiments, a second valve body 201 is disposed on the liquid supply pipe 200 to control the flow direction of the cleaning liquid in the liquid supply pipe 200 .

[0033] When it is necessary to clean the device to be cleaned 11, the second valve body 201 is opened, and the cleaning liquid flows from the liquid source 12 to the pump body 100. It should be noted that, in some embodiments, cleaning and waste liquid collection are performed alternately at a short time and high frequency. During the waste liquid collection process, the second valve body 201 remains open. When the cleaning of the device to be cleaned 11 is completed or the automatic cleaning device is not started, the second valve body 201 is closed.

[0034] In some embodiments, the second valve body 201 is a check valve, which controls the cleaning liquid to flow from the liquid source 12 to the pump body 100 in one direction, thereby preventing the cleaning liquid from flowing back in the liquid supply pipe 200.

[0035] In some embodiments, the pump body 100 is connected to the waste liquid collector 300 through a second liquid transfer pipe 500. During the waste liquid collection process, the waste liquid generated by cleaning the device to be cleaned 11 flows through the first liquid transfer pipe 400 and the first liquid transfer pipe 400 in turn to the waste liquid collector 300.

[0036] In some embodiments, the second liquid transmission pipe 500 is provided with a third valve body 501 for controlling the flow of the waste liquid in the second liquid transmission pipe 500 .

[0037] When the device to be cleaned 11 needs to be cleaned, the third valve body 501 is opened, and the waste liquid flows from the pump body 100 to the waste liquid collector 300. When the cleaning of the device to be cleaned 11 is completed or the automatic cleaning device is not started, the third valve body 501 is closed.

[0038] In some embodiments, the third valve body 501 is a check valve, which controls the waste liquid to flow from the pump body 100 to the waste liquid collector 300 in one direction, thereby preventing the waste liquid from flowing back in the second liquid transmission pipe 500.

[0039] In some embodiments, the pump body 100 is connected to the liquid supply pipe 200 and the second liquid transmission pipe 500 through a three-way pipe 600 .

[0040] In some embodiments, the three-way pipeline 600, the first liquid transmission tube 400, the second liquid transmission tube 500 and the liquid supply tube 200 are all made of transparent polytetrafluoroethylene to facilitate observation of the flow direction of the liquid in the tube.

[0041] In some embodiments, the outer diameters of the three-way pipeline 600, the liquid supply pipe 200, the first liquid transmission pipe 400 and the second liquid transmission pipe 500 are 3.0 to 3.4 mm; the inner diameters of the three-way pipeline 600, the liquid supply pipe 200, the first liquid transmission pipe 400 and the second liquid transmission pipe 500 are 1.4 to 1.8 mm; optionally, the outer diameters of the three-way pipeline 600, the liquid supply pipe 200, the first liquid transmission pipe 400 and the second liquid transmission pipe 500 are 3.0 mm, 3.2 mm or 3.4 mm; and the inner diameters of the three-way pipeline 600, the liquid supply pipe 200, the first liquid transmission pipe 400 and the second liquid transmission pipe 500 are 1.4 mm, 1.6 mm or 1.8 mm.

[0042] The automatic cleaning device provided in the present application also includes a controller 700, which is used to control the switch of the pump body 100, the pumping direction and speed of the pump body 100. When the device to be cleaned 11 needs to be cleaned, the controller 700 controls the pump body 100 to open. During cleaning, the controller 700 controls the pump body 100 to rotate forward, so that the cleaning liquid flows from the liquid source 12 to the device to be cleaned 11 through the pump body 100; during the waste liquid collection process after the cleaning, the controller 700 controls the pump body 100 to reverse, so that the waste liquid flows from the device to be cleaned 11 to the waste liquid collector 300 through the pump body 100.

[0043] In some embodiments, the controller 700 includes a stepper motor, and the switch of the pump body 100, the pumping direction and speed of the pump body 100 can be controlled by controlling the subdivided paddle of the stepper motor. In some embodiments, the controller 700 controls the speed of the pump body 100 to be 55-65r / min, and switches forward and reverse every 25-30s. The switching time can be adaptively adjusted according to the capacity of the device to be cleaned. In some embodiments, the controller 700 controls the speed of the pump body 100 to be 60r / min, and switches forward and reverse every 30s.

[0044] In some embodiments, the waste liquid collector 300 is connected to the second liquid transfer pipe 500 to collect waste liquid generated during the cleaning process.

[0045] In some embodiments, the material of the waste liquid collector 300 includes polytetrafluoroethylene.

[0046] In some embodiments, the automatic cleaning device also includes a time switch 800, which is electrically connected to the first valve body 401, the second valve body 201, the third valve body 501 and the controller 700 to control the opening and closing of the first valve body 401, the second valve body 201, the third valve body 501 and the controller 700.

[0047] When the cleaning device needs to be started, the time-controlled switch 800 controls the first valve body 401, the second valve body 201, the third valve body 501 and the controller 700 to open; after the cleaning and waste liquid collection are completed, the time-controlled switch 800 controls the first valve body 401, the second valve body 201, the third valve body 501 and the controller 700 to close.

[0048] In some embodiments, the time-controlled switch 800 includes a time relay and outputs a DC voltage.

[0049] In some embodiments, the time for starting the automatic cleaning device can be set as needed, for example, 24h / time, 8h / time, etc. The initial time of cleaning should avoid the time of equipment measurement. For example, the measurement time of the device to be cleaned 11 is 8:00, and the measurement end time is 8:45, then the first start time of the automatic cleaning device can be set to 8:47, the cleaning time is 5 minutes, and the total cleaning time is generally 3 to 5 minutes / time.

[0050] The cleaning process of the device to be cleaned 11 using the automatic cleaning device provided in the present application is as follows: connect the automatic cleaning device to the device to be cleaned 11, adjust the time switch 800 to control the cleaning frequency, and when the set cleaning time is reached, the time switch 800 controls the first valve body 401, the second valve body 201, the third valve body 501 and the controller 700 to open, and the controller 700 cleans the device to be cleaned 11 and collects the waste liquid after cleaning by controlling the switch of the pump body 100 and the pumping direction of the pump body 100.

[0051] The cleaning liquid used during cleaning can be selected according to the water quality and the device 11 to be cleaned. For example, for an ammonia nitrogen online monitor, when the chloride ion content in the monitored water quality is high, the silver sulfate reagent in the ammonia nitrogen online monitor will react chemically with the chloride ions to generate silver chloride precipitates that adhere to the quantitative tube or cuvette of the ammonia nitrogen online monitor. At this time, ammonia water can be used as a cleaning liquid to remove the silver chloride precipitates; when the calcium and magnesium ion content in the water quality is high and calcium and magnesium ion precipitates are generated on the quantitative tube or cuvette, hydrochloric acid can be used as a cleaning liquid to remove the calcium and magnesium ion precipitates.

[0052] The beneficial effects of the automatic cleaning device provided by the present application include but are not limited to the following:

[0053] The automatic cleaning device provided by the present application can be connected to the online monitoring equipment to automatically clean the structures of the online monitoring equipment that need to be cleaned, such as quantitative tubes, cuvettes, etc., eliminating the need for manual cleaning and manual supervision, which not only avoids the contamination and damage of the online monitoring device due to untimely cleaning, but also reduces the labor cost of maintaining the online monitoring equipment. In addition, the automatic cleaning device uses a peristaltic pump with a small size and convertible pumping direction, which not only facilitates the transfer and placement of the automatic cleaning device, but also enables the automatic cleaning device to switch between cleaning and waste liquid collection modes, further reducing manual participation and improving cleaning efficiency.

[0054] It should be noted that different embodiments may produce different beneficial effects. In different embodiments, the beneficial effects that may be produced may be any one or a combination of the above, or any other beneficial effects that may be obtained.

[0055] The basic concepts have been described above. Obviously, for those skilled in the art, the above detailed disclosure is only for example and does not constitute a limitation of this specification. Although not explicitly stated here, those skilled in the art may make various modifications, improvements and corrections to this application. Such modifications, improvements and corrections are suggested in this specification, so such modifications, improvements and corrections still belong to the spirit and scope of the exemplary embodiments of this application.

[0056] It should be noted that in the description of this application, unless otherwise clearly specified and limited, the terms "install", "connect", "connect", and "fix" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a rotating connection or a sliding connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood in combination with specific circumstances.

[0057] In addition, when terms such as "first", "second", and "third" are used in the specification of this application to describe various features, these terms are only used to distinguish these features and cannot be understood as indicating or implying the relationship between the features, the relative importance, or implicitly indicating the number of features indicated.

[0058] In addition, the present specification describes exemplary embodiments by reference to idealized exemplary cross-sectional views and / or plan views and / or stereograms. Therefore, differences from the illustrated shapes due to, for example, manufacturing techniques and / or tolerances are foreseeable. Therefore, the exemplary embodiments should not be interpreted as being limited to the shapes of the regions shown herein, but should include deviations in shapes caused by, for example, manufacturing. Therefore, the regions shown in the figures are schematic in nature, and their shapes are not intended to illustrate the actual shapes of the regions of the device nor to limit the scope of the exemplary embodiments.

[0059] At the same time, the present application uses specific words to describe the embodiments of this specification. For example, "one embodiment", "an embodiment", and / or "some embodiments" refer to a certain feature, structure or characteristic related to at least one embodiment of the present application. Therefore, it should be emphasized and noted that "one embodiment" or "an embodiment" or "an alternative embodiment" mentioned twice or more in different positions in the present application does not necessarily refer to the same embodiment. In addition, some features, structures or characteristics in one or more embodiments of the present application can be appropriately combined.

[0060] Similarly, it should be noted that in order to simplify the description of the disclosure of this application and thus help understand one or more embodiments of the invention, in the above description of the embodiments of this application, multiple features are sometimes combined into one embodiment, figure or description thereof. However, this disclosure method does not mean that the features required by the object of this application are more than the features mentioned in the claims. In fact, the features of the embodiments are less than all the features of the single embodiment disclosed above.

[0061] Finally, it should be understood that the embodiments described in this application are only used to illustrate the principles of the embodiments of the present application. Other variations may also fall within the scope of the present application. Therefore, as an example and not a limitation, the alternative configurations of the embodiments of the present application may be considered to be consistent with the teachings of the present application. Accordingly, the embodiments of the present application are not limited to the embodiments explicitly introduced and described in the present application.

Claims

1. An automatic cleaning device, characterized in that: include: A liquid supply pipe, the liquid supply pipe is configured to be connected to a liquid source to provide a cleaning liquid; A waste liquid collector, used to collect waste liquid generated during the cleaning process; a pump body, the pump body being connected to the device to be cleaned, the liquid supply pipe and the waste liquid collector, the pump body being configured to control the cleaning liquid to flow from the liquid source to the device to be cleaned when cleaning the device to be cleaned, and to control the waste liquid to flow from the device to be cleaned to the waste liquid collector after cleaning is completed; as well as The controller is used to control the switch of the pump body, the pumping direction and speed of the pump body.

2. The automatic cleaning device according to claim 1, characterized in that: The pump body is connected to the device to be cleaned via a first liquid transmission pipe, and the first liquid transmission pipe is provided with a first valve body for controlling the flow of liquid in the first liquid transmission pipe.

3. The automatic cleaning device according to claim 2, characterized in that: The first valve body is a solenoid valve.

4. The automatic cleaning device according to claim 2, characterized in that: The liquid supply pipe is provided with a second valve body for controlling the flow direction of the cleaning liquid in the liquid supply pipe.

5. The automatic cleaning device according to claim 4, characterized in that: The pump body is connected to the waste liquid collector via a second liquid transmission pipe, and the second liquid transmission pipe is provided with a third valve body for controlling the flow of the waste liquid in the second liquid transmission pipe.

6. The automatic cleaning device according to claim 5, characterized in that: The second valve body is a check valve, controlling the cleaning liquid to flow unidirectionally from the liquid source to the pump body; and the third valve body is a check valve, controlling the waste liquid to flow unidirectionally from the pump body to the waste liquid collector.

7. The automatic cleaning device according to claim 6, characterized in that: It also includes a time-controlled switch, which is electrically connected to the first valve body, the second valve body, the third valve body and the controller to control the opening and closing of the first valve body, the second valve body, the third valve body and the controller.

8. The automatic cleaning device according to claim 6, characterized in that: The first liquid transmission tube, the second liquid transmission tube and the liquid supply tube are all made of transparent polytetrafluoroethylene.

9. The automatic cleaning device according to claim 1, characterized in that: The pump body is a peristaltic pump.

10. The automatic cleaning device according to claim 1, characterized in that: The controller is electrically connected to the pump body.

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