High-efficiency energy density thin film deposition device

Abstract

The utility model discloses an efficient energy density film deposition device, relates to film deposition technical field, including box and guide component, the bottom of box is provided with the evaporation source, and the top of box is provided with the motor, the bottom of motor is fixed with the connecting shaft, and the bottom of connecting shaft is provided with the rotating plate, and the rotating plate is provided with the guide component. And the guide assembly is arranged at the bottom of the rotating plate. According to the high-efficiency energy density thin film deposition device, through the arrangement of the guide assembly, the guide groove can be used for limiting the carrying disc, so that the height of the bottom of the carrying disc is consistent with that of the bottom of the rotating plate, and therefore, when the rotating plate blocks part of film molecules, workpieces can be in full contact with the film molecules in other directions along with the movement of the carrying disc; and the conical guide block can guide the film material molecules in the rising process of the film material molecules to enable the film material molecules to float towards the bottom of the carrying disc, so that the film material molecules below the workpiece can be denser, and the overall film coating efficiency is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of thin film deposition, in particular to a high-efficiency energy density thin film deposition device. Background Art

[0002] Thin film deposition equipment is a process test instrument used in the fields of physics and materials science. With the development needs of modern industry, the application fields of vacuum coating are becoming more and more extensive, such as optics, architecture, aerospace, medical treatment, integrated circuits, etc.

[0003] For example, the utility model with application number CN202321628194.0 discloses a thin film deposition device. After the driver is rotated, the loading disk will rotate with the workpiece while revolving around the rotating disk, so that the film material molecules are laid more evenly on the workpiece, realizing continuous and uniform coating on the microporous side walls and flat surfaces on the workpiece, making the film layer more continuous and uniform, effectively solving the problem of poor coating effect of existing coating equipment, but in the actual use of the device, the loading disk will rotate outside the rotating plate, so when the film material molecules rise due to evaporation, some of the film material molecules will accumulate in the middle of the rotating plate, which is not convenient for full contact with the workpiece at the outer end, resulting in the problem of affecting the overall coating effect.

[0004] Therefore, in view of this, the existing structure and defects are studied and improved to provide a high-efficiency energy density thin film deposition device. Utility Model Content

[0005] The purpose of the utility model is to provide a high-efficiency energy density thin film deposition device to solve the problems raised in the above background technology.

[0006] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a high-efficiency energy density thin film deposition device, comprising a box body and a guide assembly, an evaporation source is arranged at the bottom of the box body, and a motor is arranged at the top of the box body, a connecting shaft is fixed to the bottom of the motor, and a rotating plate is arranged at the bottom of the connecting shaft, the guide assembly is arranged at the bottom of the rotating plate, the guide assembly comprises a guide groove, a guide block, a side ring and a ball bearing, a guide groove is opened at the outer end of the bottom of the rotating plate, and a guide block is arranged at the center of the bottom of the rotating plate, a side ring is fixed to the outer side of the rotating plate, and a ball bearing is connected to one side of the side ring, a transmission shaft is rotatably connected to the inner part of the outer end of the rotating plate, and a loading plate is arranged at the bottom of the transmission shaft.

[0007] Furthermore, the guide block is conical, and the center line of the guide block coincides with the center line of the loading plate.

[0008] Furthermore, a gear is arranged on the top of the transmission shaft, and a gear ring is meshed on one side of the gear, and the gear ring is fixedly connected to the box body.

[0009] Furthermore, a quick-release assembly is provided inside the loading tray, and the quick-release assembly includes a limiting groove and a connecting block. The bottom of the transmission shaft is provided with a limiting groove, and the inside of the limiting groove is slidably connected with a connecting block.

[0010] Furthermore, the connecting block is fixedly connected to the loading plate, and the cross section of the connecting block is rectangular.

[0011] Furthermore, the quick-release assembly also includes a pull rod, a baffle and a spring. The lower end of the connecting block is slidably connected to the pull rod, and a baffle is arranged on the outer side of the middle part of the pull rod, and a spring is arranged on one side of the baffle.

[0012] Furthermore, the quick-release assembly also includes a connecting plate, a clamping block and a clamping slot. The upper end of the pull rod is rotatably connected to the connecting plate, and one end of the connecting plate is rotatably connected to the clamping block. The inner side of the transmission shaft is symmetrically provided with a clamping slot.

[0013] Furthermore, the clamping block is slidably connected to the connecting block, and the clamping block is matched with the clamping slot.

[0014] The utility model provides a high-efficiency energy density thin film deposition device, which has the following beneficial effects:

[0015] 1. The utility model can limit the loading plate by using the guide groove through the setting of the guide assembly, so that the bottom of the loading plate is consistent with the bottom height of the rotating plate. Therefore, when the rotating plate blocks some film material molecules, the workpiece can be fully contacted with the film material molecules in other directions as the loading plate moves, thereby improving the coating effect. The conical guide block can also guide the film material molecules in the process of rising, so that they float to the bottom of the loading plate, which can make the film material molecules under the workpiece denser, thereby improving the overall coating efficiency. The ball bearing can also reduce the friction loss between the side ring and the box body, and the side ring can be used to improve the stability of the rotating plate when it rotates.

[0016] 2. The utility model provides a quick-release assembly. When disassembling the loading tray, since the connecting block will limit and guide the card block, it is only necessary to pull down the pull rod, and the connecting plate will pull the card block to separate it from the card slot, thereby quickly releasing the restriction between the connecting block and the transmission shaft, which is beneficial to improving the convenience during unloading. During installation, similarly, the pull rod is first pulled to shrink the card block into the inside of the connecting block, and then the connecting block is inserted into the limiting groove, and the bottom of the limiting groove expands outward, which can play a guiding role, making docking more convenient. After insertion, let go, the spring can push the baffle to reset the pull rod, and the card block will be inserted into the card slot, which is also very convenient during loading and installation. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a schematic diagram of the overall front cross-sectional structure of a high-efficiency energy density thin film deposition device of the utility model;

[0018] Figure 2 The utility model is a high-efficiency energy density thin film deposition device Figure 1 The enlarged structural diagram at A in the middle;

[0019] Figure 3 It is a schematic diagram of the three-dimensional structure of a quick-assembly component part of a high-efficiency energy density thin film deposition device of the utility model.

[0020] In the figure: 1. box body; 2. evaporation source; 3. motor; 4. connecting shaft; 5. rotating plate; 6. guide assembly; 601. guide groove; 602. guide block; 603. side ring; 604. ball bearing; 7. transmission shaft; 8. loading plate; 9. gear; 10. gear ring; 11. quick-release assembly; 1101. limit groove; 1102. connecting block; 1103. pull rod; 1104. baffle; 1105. spring; 1106. connecting plate; 1107. block; 1108. slot. DETAILED DESCRIPTION

[0021] The following is a further detailed description of the implementation of the present invention in conjunction with the accompanying drawings and examples. The following examples are used to illustrate the present invention, but cannot be used to limit the scope of the present invention.

[0022] like Figure 1 and Figure 2As shown, a high-efficiency energy density thin film deposition device includes a box body 1 and a guide assembly 6. An evaporation source 2 is arranged at the bottom of the box body 1, and a motor 3 is arranged on the top of the box body 1. A connecting shaft 4 is fixed to the bottom of the motor 3, and a rotating plate 5 is arranged at the bottom of the connecting shaft 4. The guide assembly 6 is arranged at the bottom of the rotating plate 5. The guide assembly 6 includes a guide groove 601, a guide block 602, a side ring 603 and a ball 604. The outer end of the bottom of the rotating plate 5 is provided with a guide groove 601, and a guide block 602 is arranged at the center of the bottom of the rotating plate 5. A side ring 603 is fixed to the outer side of the rotating plate 5, and a ball 604 is connected to one side of the side ring 603. The ball 604 can reduce the friction loss between the side ring 603 and the box body 1, and the side ring 603 is used to improve The stability of the rotating plate 5 during rotation, the outer end of the rotating plate 5 is internally rotatably connected to the transmission shaft 7, and a loading plate 8 is arranged at the bottom of the transmission shaft 7, the guide block 602 is conical, and the center line of the guide block 602 coincides with the center line of the loading plate 8, the conical guide block 602 will guide the film material molecules during the rising process, so that they float to the bottom of the workpiece, which can make the film material molecules under the workpiece denser, thereby improving the overall coating efficiency, a gear 9 is arranged on the top of the transmission shaft 7, and a gear ring 10 is meshed on one side of the gear 9, and the gear ring 10 is fixedly connected to the box body 1, when the rotating plate 5 rotates, it will drive the transmission shaft 7 to move, so that the gear 9 can roll on the inside of the gear ring 10, thereby driving the loading plate 8 to rotate to improve the coating effect.

[0023] like Figure 2 and Figure 3As shown, a quick-release assembly 11 is provided inside the loading tray 8, and the quick-release assembly 11 includes a limiting groove 1101 and a connecting block 1102. The bottom of the transmission shaft 7 is provided with a limiting groove 1101, and the limiting groove 1101 is slidably connected to the inside of the connecting block 1102, the connecting block 1102 is fixedly connected to the loading tray 8, and the cross-section of the connecting block 1102 is rectangular, and the bottom of the limiting groove 1101 expands outward, which can play a guiding role, making docking more convenient. The quick-release assembly 11 also includes a pull rod 1103, a baffle 1104 and a spring 1105. The lower end of the connecting block 1102 is slidably connected to the pull rod 1103, and the baffle 1104 is arranged on the outer side of the middle part of the pull rod 1103, and a spring 1105 is arranged on one side of the baffle 1104. The quick-release assembly 11 also includes a connecting plate 1106, a block 1107 and a slot 1108. The upper end of the pull rod 1103 It is rotatably connected with a connecting plate 1106, and one end of the connecting plate 1106 is rotatably connected with a block 1107. A slot 1108 is symmetrically provided on the inner side of the transmission shaft 7. Only by pulling down the pull rod 1103, the connecting plate 1106 will pull the block 1107 to separate it from the slot 1108, thereby quickly releasing the restriction between the connecting block 1102 and the transmission shaft 7, which is beneficial to improving the convenience during unloading. The block 1107 is slidably connected to the connecting block 1102, and the block 1107 is matched with the slot 1108. Pull the pull rod 1103 to shrink the block 1107 into the inside of the connecting block 1102, and then insert the connecting block 1102 into the limiting slot 1101, and let go after insertion, the spring 1105 can push the baffle 1104 to reset the pull rod 1103, and at this time the block 1107 will be inserted into the slot 1108, which is also very convenient during loading and installation.

[0024] In summary, when using the high-efficiency energy density thin film deposition device, firstly according to Figure 1 , Figure 2 and Figure 3According to the structure shown in the figure, the door panel of the box body 1 is first opened, and the pull rod 1103 is pulled down, and the connecting plate 1106 will pull the block 1107 to separate it from the slot 1108, so that the carrier plate 8 can be removed and the workpiece is placed in the carrier plate 8. Then, after the workpiece is placed in the carrier plate 8, the pull rod 1103 is pulled to shrink the block 1107 into the connecting block 1102, and then the connecting block 1102 is inserted into the limiting groove 1101, and after the insertion, the spring 1105 can push the baffle 1104 to reset the pull rod 1103, and then the block 1107 will be inserted into the slot 1108, and then the door panel is closed and vacuum is drawn, and then the film material molecules are sent into the box body 1 through the evaporation source 2. At this time, the conical guide block 602 will guide the film material molecules during their rise, causing them to float to the bottom of the carrier plate 8, and the rotating plate 5 will block some of the film material molecules. Then the motor 3 drives the rotating plate 5 to rotate through the connecting shaft 4, which will cause the movement of the carrier plate 8 to allow the workpiece to fully contact with the film material molecules in other directions, thereby improving the coating effect. At the same time, the ball 604 can also reduce the friction loss between the side ring 603 and the box body 1, and use the side ring 603 to improve the stability of the rotating plate 5 during rotation. Finally, during the rotation of the rotating plate 5, it will drive the transmission shaft 7 to move, so that the gear 9 can roll on the inside of the gear ring 10, thereby driving the carrier plate 8 to rotate to improve the coating effect.

[0025] The embodiments of the present invention are provided for the purpose of illustration and description, and are not intended to be exhaustive or to limit the present invention to the disclosed forms. Many modifications and variations will be apparent to those of ordinary skill in the art. The embodiments are selected and described to better illustrate the principles and practical applications of the present invention, and to enable those of ordinary skill in the art to understand the present invention and thereby design various embodiments with various modifications suitable for specific uses.

Claims

1. A high-efficiency energy density thin film deposition device, comprising a housing (1) and a guide assembly (6), characterized in that: An evaporation source (2) is arranged at the bottom of the housing (1), and a motor (3) is arranged at the top of the housing (1). A connecting shaft (4) is fixed at the bottom of the motor (3), and a rotating plate (5) is arranged at the bottom of the connecting shaft (4). The guide assembly (6) is arranged at the bottom of the rotating plate (5), and the guide assembly (6) comprises a guide groove (601), a guide block (602), a side ring (603) and a ball bearing (604). A guide groove (601) is provided at the outer end of the bottom of the rotating plate (5), and a guide block (602) is arranged at the center of the bottom of the rotating plate (5). A side ring (603) is fixed at the outer side of the rotating plate (5), and a ball bearing (604) is connected to one side of the side ring (603). A transmission shaft (7) is rotatably connected to the inner side of the outer end of the rotating plate (5), and a loading tray (8) is arranged at the bottom of the transmission shaft (7).

2. The high-efficiency energy density thin film deposition device according to claim 1, characterized in that: The guide block (602) is conical, and the center line of the guide block (602) coincides with the center line of the loading plate (8).

3. The high-efficiency energy density thin film deposition device according to claim 1, characterized in that: A gear (9) is arranged on the top of the transmission shaft (7), and a gear ring (10) is meshed on one side of the gear (9), and the gear ring (10) is fixedly connected to the box body (1).

4. The high-efficiency energy density thin film deposition device according to claim 1, characterized in that: A quick-release assembly (11) is arranged inside the loading tray (8), and the quick-release assembly (11) comprises a limiting groove (1101) and a connecting block (1102). The bottom of the transmission shaft (7) is provided with a limiting groove (1101), and the connecting block (1102) is slidably connected inside the limiting groove (1101).

5. The high-efficiency energy density thin film deposition device according to claim 4, characterized in that: The connecting block (1102) is fixedly connected to the loading plate (8), and the cross section of the connecting block (1102) is rectangular.

6. The high-efficiency energy density thin film deposition device according to claim 4, characterized in that: The quick-release assembly (11) further comprises a pull rod (1103), a baffle (1104) and a spring (1105); the pull rod (1103) is slidably connected to the interior of the lower end of the connecting block (1102); a baffle (1104) is arranged on the outer side of the middle part of the pull rod (1103); and a spring (1105) is arranged on one side of the baffle (1104).

7. The high-efficiency energy density thin film deposition device according to claim 6, characterized in that: The quick-release assembly (11) further comprises a connecting plate (1106), a clamping block (1107) and a clamping slot (1108); the upper end of the pull rod (1103) is rotatably connected to the connecting plate (1106), and one end of the connecting plate (1106) is rotatably connected to the clamping block (1107); and the inner side of the transmission shaft (7) is symmetrically provided with a clamping slot (1108).

8. The high-efficiency energy density thin film deposition device according to claim 7, characterized in that: The clamping block (1107) is slidably connected to the connecting block (1102), and the clamping block (1107) is matched with the clamping slot (1108).

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