Wire feeding mechanism of vacuum evaporation chamber

Abstract

The utility model relates to the technical field of vacuum evaporation, and discloses a vacuum evaporation evaporation chamber wire feeding mechanism which comprises a fixed bottom plate, an aluminum wire disc is fixedly connected to the top end of the fixed bottom plate, a fixed support is fixedly connected to the top of the fixed bottom plate, and a wire feeding motor is fixedly connected to the top end of the fixed support. A shaping mechanism is fixedly connected to the top end of the fixed bottom plate, a feeding port is formed in the front face of the shaping mechanism, a shaping roller is fixedly connected to the interior of the shaping mechanism, a cam mechanism is fixedly connected to the top end of the fixed bottom plate, and an evaporation boat is fixedly connected to the top of the fixed bottom plate and located at the left end of the cam mechanism. The evaporation boat is arranged through the cam mechanism, the depth increasing speed of a molten pool of the evaporation boat can be slowed down, the service life of the evaporation boat is prolonged, the spreading area of molten aluminum can be increased, the evaporation efficiency is improved, the evaporation uniformity of the molten aluminum is improved, and splashing of the molten aluminum is reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum evaporation, in particular to a wire feeding mechanism for a vacuum evaporation chamber. Background Art

[0002] Composite aluminum current collectors have become a new development trend of lithium-ion battery current collectors with their high safety, light weight and lower thickness. At present, the main process route for the production of composite aluminum in the industry is to deposit a layer of aluminum of about 0.5-1.5μm on both sides of the polymer base film by vacuum evaporation, thereby obtaining a sandwich structure with a polymer layer in the middle and aluminum layers on both sides. Vacuum evaporation has high efficiency, simple process and low cost. It is currently the most important way to deposit aluminum. Vacuum evaporation requires heating high-purity aluminum in an evaporation container to above the boiling point of aluminum under high vacuum conditions to liquefy and evaporate the aluminum. The evaporated aluminum atoms are deposited on the surface of the base film to obtain an aluminum layer. Commonly used evaporation containers are ceramic evaporation boats and graphite / metal crucibles. Ceramic evaporation boats are widely used due to their easy cleaning and low cost.

[0003] During the evaporation process using an evaporation boat, high-purity aluminum wire is uniformly transported to the high-temperature surface of the evaporation boat through a wire feeding motor. The aluminum wire melts and evaporates. The common evaporation temperature of aluminum liquid reaches about 1500℃. As a carrier of aluminum liquid, the evaporation boat can be used at a maximum temperature of 1700℃. Aluminum has strong reactivity and corrosiveness at this temperature, and the material requirements for the evaporation boat are extremely high. In view of the above situation, the evaporation boat needs to have multiple properties such as high strength, conductivity, high temperature resistance, thermal shock resistance, and aluminum liquid corrosion resistance. The main components of the ceramic evaporation boat currently used include titanium diboride, boron nitride, aluminum nitride, and a small number of additives. Due to the corrosiveness of aluminum liquid, pits are generated on the surface of the evaporation boat during use, which limits its service life.

[0004] The existing wire feeding mechanism feeds the wire to the surface of the evaporation boat through the wire feeding tube along a fixed route. The wire feeding position on the surface of the evaporation boat is fixed. The molten aluminum liquid drips onto the surface of the evaporation boat to form a molten pool. As the service life increases, a deeper dissolution pit is formed at the dripping position of the aluminum liquid. When the pit depth reaches a certain level, the resistance distribution of the evaporation boat changes significantly and the service life ends. The existing wire feeding method results in a shorter life of the evaporation boat. At the same time, due to the uneven distribution of aluminum liquid on the surface, the risk of aluminum splashing is increased. Utility Model Content

[0005] In order to solve the above technical problems, the utility model provides a wire feeding mechanism for a vacuum evaporation chamber.

[0006] The utility model is implemented by the following technical scheme: a wire feeding mechanism for a vacuum evaporation chamber, comprising a fixed bottom plate, the top of the fixed bottom plate is fixedly connected to an aluminum wire disk, the top of the fixed bottom plate is fixedly connected to a fixed bracket, the top of the fixed bracket is fixedly connected to a wire feeding motor, the top of the fixed bottom plate is fixedly connected to a shaping mechanism, a feed port is provided on the front of the shaping mechanism, a shaping roller is fixedly connected inside the shaping mechanism, the top of the fixed bottom plate is fixedly connected to a cam mechanism, and the top of the fixed bottom plate is fixedly connected to an evaporation boat.

[0007] Through the above technical solution, the aluminum wire reel is used to install high-purity aluminum wire for evaporation, the wire feeding reel is insulated from the ground, and follows the transportation of the aluminum wire, the wire feeding reel rotates and evenly releases the aluminum wire.

[0008] As a further improvement of the above solution, the evaporation boat is located at the left end of the cam mechanism, and the cam mechanism is located on the left side of the shaping mechanism.

[0009] Through the above technical solution, the rotation of the cam causes the guide tube to reciprocate up and down, thereby achieving the purpose of moving the wire feeding point forward and backward.

[0010] As a further improvement of the above solution, the shaping roller is located at the left end of the feed inlet, and the shaping mechanism is located on the left side of the wire feeding motor.

[0011] Through the above technical scheme, the wire feeding motor is composed of a wire feeding motor and a wire feeding guide mechanism. The wire feeding motor evenly transports the aluminum wire forward according to the wire feeding speed setting. The wire feeding guide mechanism is composed of a guide tube and a shaping roller to ensure that the aluminum wire can be accurately delivered to the surface of the evaporation boat.

[0012] As a further improvement of the above solution, the aluminum wire reel is located on the right side of the wire feeding motor, and the aluminum wire reel is located on the right end of the fixed bracket.

[0013] As a further improvement of the above solution, the shaping mechanism is located on the left side of the fixed bracket, and the fixed bracket is located on the right end of the feed port.

[0014] As a further improvement of the above solution, the feed inlets are symmetrically distributed with the shaping mechanism as the center.

[0015] Compared with the prior art, the beneficial effects of the present invention are:

[0016] The utility model can slow down the speed of increasing the depth of the molten pool of the evaporation boat by arranging the evaporation boat through the cam mechanism, and prolong the service life of the evaporation boat. The internal shaping rollers arranged by the shaping mechanism can increase the spreading area of ​​the aluminum liquid, improve the evaporation efficiency, increase the evaporation uniformity of the aluminum liquid, and reduce the splashing of the aluminum liquid.

[0017] The utility model increases the stability of the equipment when it is in use and when conveying products by arranging a fixed bracket for the wire feeding motor, thereby improving the processing quality of the products when conveying. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0019] Figure 2 This is a schematic diagram of the anatomical structure of the plastic surgery mechanism of the utility model;

[0020] Figure 3 This is a schematic diagram of the disassembled structure of the cam mechanism of the utility model;

[0021] Figure 4 It is a schematic diagram of the disassembly structure of the aluminum wire reel of the utility model.

[0022] Description of main symbols:

[0023] 1. Fixed bottom plate; 2. Aluminum wire reel; 3. Wire feeding motor; 4. Fixed bracket; 5. Shaping mechanism; 6. Feeding port; 7. Shaping roller; 8. Cam mechanism; 9. Evaporation boat. DETAILED DESCRIPTION

[0024] The present invention is further described below in conjunction with the accompanying drawings and specific implementation methods. It should be noted that, under the premise of no conflict, the various embodiments or technical features described below can be arbitrarily combined to form a new embodiment.

[0025] Example:

[0026] Please combine Figure 1-4 A wire feeding mechanism for a vacuum evaporation chamber of the present embodiment includes a fixed base plate 1, an aluminum wire reel 2 is fixedly connected to the top of the fixed base plate 1, a fixed bracket 4 is fixedly connected to the top of the fixed base plate 1, a wire feeding motor 3 is fixedly connected to the top of the fixed bracket 4, a shaping mechanism 5 is fixedly connected to the top of the fixed base plate 1, a feed port 6 is provided on the front of the shaping mechanism 5, a shaping roller 7 is fixedly connected inside the shaping mechanism 5, a cam mechanism 8 is fixedly connected to the top of the fixed base plate 1, and an evaporation boat 9 is fixedly connected to the top of the fixed base plate 1. The evaporation boat is arranged by the cam mechanism 8 to slow down the speed of increasing the depth of the evaporation boat molten pool and extend the service life of the evaporation boat. The shaping roller 7 is arranged inside the shaping mechanism 5 to increase the spreading area of ​​the aluminum liquid, improve the evaporation efficiency, increase the uniformity of the aluminum liquid evaporation, and reduce the splashing of the aluminum liquid.

[0027] The aluminum wire reel 2 is used to install high-purity aluminum wire for evaporation. The wire feeding reel is insulated from the ground. Following the feeding of the aluminum wire, the wire feeding reel rotates and evenly releases the aluminum wire.

[0028] The evaporation boat is located at the left end of the cam mechanism 8 , and the cam mechanism 8 is located on the left side of the shaping mechanism 5 .

[0029] The rotation of the cam causes the guide tube to reciprocate up and down, achieving the purpose of moving the wire feeding point back and forth.

[0030] The shaping roller 7 is located at the left end of the feed port 6, and the shaping mechanism 5 is located on the left side of the wire feeding motor 3. The fixed bracket 4 is arranged on the wire feeding motor 3 to increase the stability of the equipment during use and when conveying products, thereby improving the processing quality of products during conveyance.

[0031] The wire feeding motor 3 is composed of a wire feeding motor 3 and a wire feeding guide mechanism. The wire feeding motor 3 uniformly feeds the aluminum wire forward according to the wire feeding speed setting. The wire feeding guide mechanism is composed of a guide tube and a shaping roller to ensure that the aluminum wire can be accurately fed to the surface of the evaporation boat.

[0032] The aluminum wire reel 2 is located on the right side of the wire feeding motor 3 , and the aluminum wire reel 2 is located on the right end of the fixed bracket 4 .

[0033] The shaping mechanism 5 is located on the left side of the fixed bracket 4 , and the fixed bracket 4 is located on the right end of the feed inlet 6 .

[0034] The feed ports 6 are symmetrically distributed with the shaping mechanism 5 as the center.

[0035] The implementation principle of a wire feeding mechanism for a vacuum evaporation chamber in the embodiment of the present application is as follows: placing the equipment in a suitable position, and setting an evaporation boat through a cam mechanism 8 can slow down the speed at which the depth of the evaporation boat molten pool increases, thereby extending the life of the evaporation boat; setting an internal shaping roller 7 through a shaping mechanism 5 can increase the spreading area of ​​the aluminum liquid, improve the evaporation efficiency, increase the uniformity of aluminum liquid evaporation, and reduce aluminum liquid splashing; setting a fixed bracket 4 through a wire feeding motor 3 increases the stability of the equipment during use and during product transportation, and improves the processing quality of the product during transportation; a cam mechanism 8 is added at the end of the wire feeding mechanism, and the wire feeding tube periodically rises and falls with the rotation of the cam mechanism 8, thereby achieving the purpose of changing the position of the aluminum wire feeding point back and forth.

[0036] The above-mentioned implementation modes are only preferred implementation modes of the present invention, and cannot be used to limit the protection scope of the present invention. Any non-substantial changes and substitutions made by technicians in this field on the basis of the present invention shall fall within the scope of protection required by the present invention.

Claims

1. A wire feeding mechanism for a vacuum evaporation chamber, characterized in that: The invention comprises a fixed base plate (1), the top of which is fixedly connected to an aluminum wire reel (2), the top of which is fixedly connected to a fixed bracket (4), the top of which is fixedly connected to a wire feeding motor (3), the top of which is fixedly connected to a shaping mechanism (5), the front of which is provided with a feed port (6), the interior of which is fixedly connected to a shaping roller (7), the top of which is fixedly connected to a cam mechanism (8), and the top of which is fixedly connected to an evaporation boat (9).

2. A vacuum evaporation chamber wire feeding mechanism according to claim 1, characterized in that: The evaporation boat (9) is located at the left end of the cam mechanism (8), and the cam mechanism (8) is located on the left side of the shaping mechanism (5).

3. A wire feeding mechanism for a vacuum evaporation chamber according to claim 1, characterized in that: The shaping roller (7) is located at the left end of the feed port (6), and the shaping mechanism (5) is located on the left side of the wire feeding motor (3).

4. A wire feeding mechanism for a vacuum evaporation chamber according to claim 1, characterized in that: The aluminum wire reel (2) is located on the right side of the wire feeding motor (3), and the aluminum wire reel (2) is located at the right end of the fixed bracket (4).

5. A wire feeding mechanism for a vacuum evaporation chamber according to claim 1, characterized in that: The shaping mechanism (5) is located on the left side of the fixed bracket (4), and the fixed bracket (4) is located on the right end of the feed port (6).

6. A wire feeding mechanism for a vacuum evaporation chamber according to claim 1, characterized in that: The feed ports (6) are symmetrically distributed with the shaping mechanism (5) as the center.

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