Angle adjusting mechanism for correction plate of electron beam evaporation table

Abstract

The utility model relates to the technical field of evaporation coating machine equipment, in particular to an angle adjusting mechanism for a correction plate of an electron beam evaporation table, which adopts the technical scheme that the angle adjusting mechanism comprises an evaporation table shell and a rotating shaft arranged on the evaporation table shell in a penetrating manner, and is characterized in that the rotating shaft is rotationally arranged relative to the evaporation table shell by virtue of a bearing; the outer circumferential face of the middle section of the rotating shaft is sleeved with a connecting piece, and the top end face of the connecting piece is fixedly connected with a correction plate through a bolt. The worm gear is arranged at one end of the rotating shaft, the worm gear meshed with the worm gear is arranged below the worm gear, the motor is adopted for driving the worm to rotate, then the correction plate is driven to adjust the angle, and the angle adjustment speed of the correction plate is high and the precision is higher through motor driving; and the pointer sleeved on the rotating shaft points to the scale value on the dial, so that the inclination angle of the correction plate is displayed in real time through the scale value in the working process of the evaporation table, and an operator can conveniently carry out real-time fine adjustment control.

Description

Technical Field

[0001] The utility model relates to the technical field of evaporation coating machine equipment, in particular to an angle adjustment mechanism for a correction plate of an electron beam evaporation table. Background Art

[0002] In the field of semiconductor manufacturing, electron beam evaporation table is a commonly used equipment, which is used to form coatings on semiconductor devices. The quality and consistency of the coatings have an important impact on the performance and reliability of semiconductor devices. However, in the process of evaporation coating on the electron beam evaporation table, due to the different distances from the evaporation source to the substrate on the umbrella frame, it is easy to cause uneven coating on the substrate. The existing treatment method is to add a correction plate between the umbrella frame and the evaporation source, and partially block the top of the evaporation source through the correction plate to make the film layer coated on the substrate as uniform as possible.

[0003] The prior art also has the following defects during use:

[0004] The correction plate angle adjustment mechanism in the prior art uses a rotating shaft to connect a hand wheel to drive the correction plate to adjust the angle through manual rotation. This mechanism is difficult to operate, has a slow adjustment speed, and cannot accurately control the angle of the correction plate. It is difficult to meet the high requirements of modern semiconductor manufacturing for precision and speed, and greatly affects the effect and quality of electron beam evaporation.

[0005] In view of this, we propose an angle adjustment mechanism for an electron beam evaporation table correction plate to solve the existing problem. Utility Model Content

[0006] The utility model aims to provide an angle adjustment mechanism for a correction plate of an electron beam evaporation stage to solve the problems raised in the above-mentioned background technology.

[0007] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: an angle adjustment mechanism for a correction plate of an electron beam evaporation table, comprising an evaporation table shell and a rotating shaft passing through the evaporation table shell, characterized in that: the rotating shaft is rotatably arranged relative to the evaporation table shell by means of a bearing, a connecting piece is sleeved on the outer circumferential surface of the middle section of the rotating shaft, and the top end surface of the connecting piece is fixedly connected to the correction plate by bolts, a transmission device is installed at one end of the rotating shaft passing through the outer side of the evaporation table shell, and an angle display device is arranged at the other end.

[0008] Preferably, the correction plates are arranged inside the evaporation table housing, and a plurality of groups are provided, and the correction plates are fixedly connected to the rotating shaft via a connecting member.

[0009] Preferably, the transmission device includes a worm wheel sleeved on the rotating shaft, a worm arranged below the worm wheel and meshing with the worm wheel, a motor is installed at one end of the worm wheel, and the motor is drivingly connected to the worm wheel through a coupling.

[0010] Preferably, the angle display device includes a dial and a pointer, the dial is installed on the outside of the evaporation table shell and is coaxial with the rotating shaft, the pointer is mounted on the side of the rotating shaft away from the transmission device and rotates synchronously with the rotating shaft, the dial is engraved with scale values ​​along the circumferential direction, and the sharp end of the pointer points to the scale value.

[0011] Preferably, the scale value is an angle value, and the starting scale of the scale is on the same horizontal line as the initial angle of the correction plate.

[0012] Compared with the prior art, the beneficial effects of the utility model are:

[0013] The utility model has a worm gear disposed at one end of a rotating shaft, and a worm gear meshing with the worm gear is disposed below the worm gear, and a motor is used to drive the worm to rotate, thereby driving the correction plate to adjust the angle. The motor drive makes the correction plate angle adjustment speed fast and the accuracy higher, and a dial is disposed at the other end of the rotating shaft. The pointer mounted on the rotating shaft points to the scale value on the dial, so that the inclination angle of the correction plate is displayed in real time through the scale value during the operation of the evaporation table, which is convenient for operators to perform real-time fine-tuning control. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 It is a cross-sectional structural schematic diagram of the utility model;

[0015] Figure 2 It is a schematic diagram of the three-dimensional structure of the utility model;

[0016] Figure 3 It is a side view structural schematic diagram of the utility model;

[0017] Figure 4 It is a partial enlarged structural schematic diagram of the utility model.

[0018] In the figure: 1, dial; 101, scale value; 2, pointer; 3, rotating shaft; 4, evaporation table shell; 5, motor; 6, worm; 7, worm wheel; 8, correction plate; 9, connecting part. DETAILED DESCRIPTION

[0019] The technical solution of the utility model is further described below in conjunction with the accompanying drawings and specific embodiments.

[0020] Embodiment 1

[0021] like Figure 1 , Figure 2 , Figure 3 and Figure 4As shown, the utility model proposes an angle adjustment mechanism for a correction plate 8 of an electron beam evaporation table, comprising an evaporation table shell 4 and a rotating shaft 3 passing through the evaporation table shell 4, characterized in that: the rotating shaft 3 is rotatably arranged relative to the evaporation table shell 4 by means of a bearing, a connecting member 9 is sleeved on the outer circumferential surface of the middle section of the rotating shaft 3, and the top end surface of the connecting member 9 is fixedly connected with the correction plate 8 by bolts, which is used to drive the correction plate 8 to rotate, and a transmission device is installed at one end of the rotating shaft 3 passing through the outer side of the evaporation table shell 4, which is used to drive the rotating shaft 3 to rotate, and an angle display device is arranged at the other end to display the rotation angle of the correction plate 8.

[0022] Furthermore, the correction plates 8 are arranged inside the evaporation table housing 4, and multiple groups are provided. The correction plates 8 are fixedly connected to the rotating shaft 3 through the connecting parts 9. The multiple groups of correction plates 8 partially block the evaporation source during coating, so that the film layer coated on the substrate is as uniform as possible.

[0023] Furthermore, the transmission device includes a worm wheel 7 sleeved on the rotating shaft 3, a worm 6 arranged below the worm wheel 7 and meshing with the worm wheel 7, a motor 5 is installed at one end of the worm 6, and the motor 5 is connected to the worm 6 through a coupling. By arranging the motor 5 to drive the worm wheel 7 and the worm 6 to mesh with each other, the rotating shaft 3 drives the correction plate 8 to rotate more accurately.

[0024] Furthermore, the angle display device includes a dial 1 and a pointer 2. The dial 1 is installed on the outside of the evaporation table shell 4 and is coaxial with the rotating shaft 3. The pointer 2 is mounted on the side of the rotating shaft 3 away from the transmission device and rotates synchronously with the rotating shaft 3. The dial 1 is engraved with scale values ​​101 along the circumferential direction. The sharp end of the pointer 2 points to the scale value 101, which is used to assist in displaying the numerical value of the rotation of the correction plate 8.

[0025] Furthermore, the scale value 101 is an angle value, and the starting scale of the scale is on the same horizontal line as the initial angle of the correction plate 8. The scale value 101 on the dial 1 can be used to accurately understand the rotation and tilt angle of the correction plate 8 in the evaporation table housing 4, which is convenient for adjustment.

[0026] The working principle of the angle adjustment mechanism of the correction plate 8 of the electron beam evaporation table based on the first embodiment is: when the utility model is used, the correction plate 8 is fixedly installed on the rotating shaft 3. When coating, the power is turned on, the motor 5 is started, the motor 5 rotates and drives the worm 6 to rotate through the coupling, the worm 6 rotates through the meshing transmission with the worm wheel 7 to make the rotating shaft 3 rotate, and then the rotating shaft 3 drives the correction plate 8 to rotate, so that the evaporation source is partially blocked by the correction plate 8. When the coating material and the coating conditions change, the motor 5 is controlled to rotate different numbers of circles, so that the inclination angle of the correction plate 8 is changed through the transmission of the worm wheel 7 and the worm 6 to adapt to the changes in the conditions of the machine.

[0027] The above-mentioned specific embodiments are only several preferred embodiments of the present invention. Based on the technical solution of the present invention and the relevant inspiration of the above-mentioned embodiments, those skilled in the art can make various alternative improvements and combinations to the above-mentioned specific embodiments.

Claims

1. An electron beam evaporation table correction plate angle adjustment mechanism, comprising an evaporation table housing (4), a rotating shaft (3) passing through the evaporation table housing (4), Features: The rotating shaft (3) is rotatably arranged relative to the evaporation table shell (4) by means of a bearing, a connecting piece (9) is sleeved on the outer circumferential surface of the middle section of the rotating shaft (3), and a correction plate (8) is fixedly connected to the top end surface of the connecting piece (9) by means of bolts. A transmission device is installed at one end of the rotating shaft (3) that passes through the outer side of the evaporation table shell (4), and an angle display device is arranged at the other end.

2. The electron beam evaporation stage correction plate angle adjustment mechanism according to claim 1, Features: The correction plates (8) are arranged inside the evaporation table housing (4), and a plurality of groups are provided. The correction plates (8) are fixedly connected to the rotating shaft (3) via a connecting member (9).

3. The electron beam evaporation stage correction plate angle adjustment mechanism according to claim 1, Features: The transmission device comprises a worm wheel (7) sleeved on a rotating shaft (3), a worm (6) arranged below the worm wheel (7) and meshing with the worm wheel (7), a motor (5) being mounted on one end of the worm wheel (6), and the motor (5) being drivingly connected to the worm wheel (6) via a coupling.

4. The electron beam evaporation stage correction plate angle adjustment mechanism according to claim 1, Features: The angle display device comprises a scale plate (1) and a pointer (2); the scale plate (1) is mounted on the outside of an evaporation table housing (4) and is coaxial with a rotating shaft (3); the pointer (2) is mounted on a side of the rotating shaft (3) away from a transmission device and rotates synchronously with the rotating shaft (3); scale values ​​(101) are engraved on the scale plate (1) along a circumferential direction, and a sharp end of the pointer (2) points to the scale value (101).

5. The electron beam evaporation stage correction plate angle adjustment mechanism according to claim 4, Features: The scale value (101) is an angle value, and the initial scale of the scale and the initial angle of the correction plate (8) are on the same horizontal line.

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