Workpiece heating device for ion beam sputtering coating machine

Abstract

The utility model relates to the technical field of workpiece heating, in particular to a workpiece heating device for an ion beam sputtering coating machine, which comprises a base, a workbench, a fixing groove, a contact type socket, a heating gasket and a mounting mechanism, the workbench is fixedly arranged on the base, the fixing groove is arranged on the workbench, the contact type socket is arranged at the bottom of the fixing groove, and the heating gasket is arranged on the base. The heating gasket is arranged in the fixing groove, a contact type plug is arranged at the position, corresponding to the contact type socket, of the heating gasket, the heating gasket is made of ceramic materials, and the installation mechanism is arranged on the workbench and used for fixing the heating gasket in the fixing groove. The problems that in the prior art, heating of the substrate easily conflicts with subsequent cooling, and the heating efficiency is low are solved.

Description

Technical Field

[0001] The utility model relates to the technical field of workpiece heating, in particular to a workpiece heating device for an ion beam sputtering coating machine. Background Art

[0002] The ion beam sputtering coating machine uses an ion source to emit ions, which are extracted, accelerated, and focused to form a beam. This ion beam is used to bombard a target placed in a high vacuum, and the sputtered atoms are coated. Ion beam sputtering coating optical components can help demanding laser optical applications achieve the highest possible performance. Before the substrate is processed by the ion beam sputtering coating machine, the substrate needs to be preheated by a heating device, which can improve the processing efficiency of the ion beam sputtering coating machine on the substrate.

[0003] The existing workpiece heating device mainly relies on baking or a heater on the workpiece table, but the ion beam sputtering coating process also requires cooling the substrate through the workbench. Heating and cooling will interfere with each other, which is not convenient for achieving the requirements of preheating and cooling during processing. If the substrate is heated by baking, it is necessary to transfer the substrate between the baking rack and the workbench before and after baking, which affects work efficiency. Utility Model Content

[0004] The utility model provides a workpiece heating device for an ion beam sputtering coating machine, which solves the problems in the prior art that heating of a substrate easily conflicts with subsequent cooling and the heating efficiency is low.

[0005] The technical solution of the utility model is as follows: A workpiece heating device for an ion beam sputtering coating machine comprises a base, a workbench, a fixing slot, a contact-type socket, a heating lining and a mounting mechanism;

[0006] The workbench is fixedly arranged on the base;

[0007] The fixing groove is arranged on the workbench;

[0008] The contact-type socket is arranged at the bottom of the fixing groove;

[0009] The heating lining is arranged in the fixing groove, a contact plug is arranged at a position corresponding to the heating lining and the contact socket, and the heating lining is made of ceramic material;

[0010] The mounting mechanism is arranged on the workbench and is used for fixing the heating lining in the fixing groove.

[0011] Preferably, the mounting mechanism comprises:

[0012] A first mounting groove, wherein two first mounting grooves are provided, and the two first mounting grooves are opened on the side wall of the workbench;

[0013] a second mounting groove, wherein the second mounting groove is disposed at the bottom of the first mounting groove;

[0014] a first mounting block, the first mounting block being slidably disposed in the first mounting groove;

[0015] a second mounting block, the second mounting block being fixedly disposed on the first mounting block and slidably disposed in the second mounting groove;

[0016] A mounting plate, the mounting plate being fixedly disposed on the first mounting block;

[0017] A positioning mechanism is arranged in the second mounting block and is used for positioning the second mounting block.

[0018] Furthermore, the positioning mechanism includes:

[0019] a first positioning groove, wherein the first positioning groove is formed on the second mounting block;

[0020] A positioning column, wherein the positioning column is rotatably disposed at the bottom of the first positioning groove;

[0021] A positioning seat, the positioning seat is arranged in a ring shape, and the positioning seat is fixedly arranged on the positioning column;

[0022] a second positioning groove, wherein the second positioning groove is arranged on the positioning seat;

[0023] A first limiting through groove, wherein the first limiting through groove is formed on a side wall of the second positioning groove;

[0024] a second limiting through groove, wherein the second limiting through groove is formed on a side wall of the first limiting through groove;

[0025] A limiting column, wherein the limiting column is fixedly arranged at the bottom of the second mounting groove corresponding to the second positioning groove;

[0026] A limiting block, wherein the limiting block is fixedly arranged on the limiting column corresponding to the second limiting through slot;

[0027] A driving mechanism is arranged on the first mounting block and is used to control the rotation of the positioning column.

[0028] Furthermore, the driving mechanism comprises:

[0029] A driving groove, the driving groove corresponding to the positioning column is opened on the first mounting block;

[0030] A hexagonal countersunk head, the hexagonal countersunk head is rotatably arranged at the bottom of the driving groove;

[0031] Wherein, the positioning column is fixedly connected to the hexagonal countersunk head.

[0032] Furthermore, a torsion spring is included. The torsion spring is sleeved on the positioning column, and two ends of the torsion spring are respectively fixedly connected to the positioning seat and the bottom of the first positioning groove.

[0033] On the basis of the above solution, a plurality of positioning openings are arranged at the bottom of the fixing groove, and positioning rods are fixedly arranged on the heating lining at positions corresponding to the positioning openings, and the positioning rods are adapted to the shapes of the positioning openings.

[0034] The working principle and beneficial effects of the utility model are:

[0035] 1. In the present invention, by providing a heating lining, it is convenient to heat the substrate by the heating lining, and at the same time, the thermal conductivity of the heating lining can avoid affecting the cooling of the workbench;

[0036] 2. In the present invention, through the setting of the installation mechanism, after the operator realizes the positioning of the second installation block through the positioning mechanism, the heating lining can be clamped and fixed by the installation plate and the fixing groove, thereby realizing the installation of the heating lining;

[0037] 3. In the utility model, through the setting of the positioning mechanism, when the second mounting block is extended into the second mounting groove, the limit block can be extended into the first limit slot, and then the operator uses the hexagonal wrench to rotate the hexagonal countersunk head to drive the positioning seat to rotate through the positioning column, so that the limit block is extended into the second limit slot, and the second mounting block is fixed by the cooperation between the limit block and the second limit slot;

[0038] 4. In the utility model, through the arrangement of the base, the workbench, the fixing groove, the contact socket, the heating lining and the mounting mechanism, it is convenient to install and fix the heating lining through the mounting mechanism, and at the same time, the substrate is directly preheated through the operation of the heating lining, thereby avoiding the inconvenience caused by baking the substrate. During the processing, the thermal conductivity of the heating lining can also be used to cool the substrate by the processing table, thereby solving the problem in the prior art that the heating of the substrate is easily conflicted with the subsequent cooling and the heating efficiency is low. BRIEF DESCRIPTION OF THE DRAWINGS

[0039] The utility model is further described in detail below in conjunction with the accompanying drawings and specific implementation methods.

[0040] Figure 1 It is a schematic diagram of the structure of the utility model;

[0041] Figure 2 This is a schematic diagram of the exploded structure of the workbench and the mounting mechanism of the utility model;

[0042] Figure 3 This is a schematic diagram of the installation mechanism structure of the utility model;

[0043] Figure 4 It is a schematic cross-sectional structure diagram of the positioning mechanism of the utility model.

[0044] In the figure: 1. base; 2. workbench; 3. fixing groove; 4. contact socket; 5. heating lining; 6. first mounting block; 7. second mounting block; 8. mounting plate; 9. positioning column; 10. positioning seat; 11. first limiting through groove; 12. second limiting through groove; 13. limiting column; 14. limiting block; 15. hexagon socket countersunk head; 16. torsion spring; 17. positioning rod. DETAILED DESCRIPTION

[0045] The following will be combined with the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0046] like Figure 1 to Figure 4 As shown, this embodiment proposes a workpiece heating device for an ion beam sputtering coating machine, including a base 1, a workbench 2, a fixed groove 3, a contact socket 4, a heating lining 5 and a mounting mechanism. The workbench 2 is fixedly arranged on the base 1, the fixed groove 3 is opened on the workbench 2, the contact socket 4 is opened at the bottom of the fixed groove 3, the heating lining 5 is arranged in the fixed groove 3, and the contact socket 4 is arranged at a position corresponding to the heating lining 5 and the contact socket 4. The heating lining 5 is made of ceramic material, and the mounting mechanism is arranged on the workbench 2 for fixing the heating lining 5 in the fixed groove 3.

[0047] Among them, the mounting mechanism includes a first mounting groove, a second mounting groove, a first mounting block 6, a second mounting block 7, a mounting plate 8 and a positioning mechanism. The first mounting groove is set in two, and the two first mounting grooves are opened on the side walls of the workbench 2. The second mounting groove is opened at the bottom of the first mounting groove. The first mounting block 6 is slidably set in the first mounting groove, the second mounting block 7 is fixedly set on the first mounting block 6, the second mounting block 7 is slidably set in the second mounting groove, the mounting plate 8 is fixedly set on the first mounting block 6, and the positioning mechanism is set in the second mounting block 7 for positioning the second mounting block 7.

[0048] Specifically, after the operator realizes the positioning of the second mounting block 7 by means of the positioning mechanism, the operator can clamp and fix the heating lining 5 by means of the mounting plate 8 in cooperation with the fixing groove 3 , thereby realizing the installation of the heating lining 5 .

[0049] Among them, the positioning mechanism includes a first positioning groove, a positioning column 9, a positioning seat 10, a second positioning groove, a first limiting groove 11, a second limiting groove 12, a limiting column 13, a limiting block 14 and a driving mechanism, the first positioning groove is arranged on the second mounting block 7, the positioning column 9 is rotatably arranged at the bottom of the first positioning groove, the positioning seat 10 is arranged in an annular shape, the positioning seat 10 is fixedly arranged on the positioning column 9, the second positioning groove is arranged on the positioning seat 10, the first limiting groove 11 is arranged on the side wall of the second positioning groove, the second limiting groove 12 is arranged on the side wall of the first limiting groove 11, and the limiting column 13 corresponds to the second positioning groove It is fixedly arranged at the bottom of the second mounting groove, and the limit block 14 is fixedly arranged on the limit column 13 corresponding to the second limit through groove 12. The driving mechanism is arranged on the first mounting block 6 for controlling the rotation of the positioning column 9. The driving mechanism includes a driving groove and a hexagonal countersunk head 15. The driving groove is opened on the first mounting block 6 corresponding to the positioning column 9. The hexagonal countersunk head 15 is rotatably arranged at the bottom of the driving groove, wherein the positioning column 9 is fixedly connected to the hexagonal countersunk head 15, and also includes a torsion spring 16, which is sleeved on the positioning column 9, and the two ends of the torsion spring 16 are respectively fixedly connected to the positioning seat 10 and the bottom of the first positioning groove.

[0050] Specifically, the operator uses the hexagonal wrench to rotate the hexagonal countersunk head 15 to drive the positioning seat 10 to rotate through the positioning column 9, so that the first limit slot 11 is aligned with the limit block 14, and then the operator extends the second mounting block 7 into the second mounting slot, so that the limit block 14 extends into the first limit slot 11, and then the operator releases the hexagonal wrench, so that the positioning seat 10 is reset under the action of the torsion spring 16, and then the limit block 14 extends into the second limit slot 12, and at the same time, the second mounting block 7 is fixed by the cooperation between the limit block 14 and the second limit slot 12.

[0051] The bottom of the fixing groove 3 is provided with a plurality of positioning openings, and a positioning rod 17 is fixedly provided on the heating lining 5 at a position corresponding to the positioning opening, and the positioning rod 17 is adapted to the shape of the positioning opening.

[0052] Specifically, the heating lining 5 can be positioned by extending the positioning rod 17 into the positioning opening, thereby preventing the heating lining 5 from being offset from the workbench 2 .

[0053] In this embodiment, the operator places the heating lining 5 in the fixing groove 3 and makes the positioning rod 17 extend into the positioning opening. Then, the operator uses the hexagonal wrench to rotate the hexagonal countersunk 15 to drive the positioning seat 10 to rotate through the positioning column 9, so that the first limiting slot 11 is aligned with the limiting block 14. Then, the operator extends the second mounting block 7 into the second mounting groove, so that the limiting block 14 extends into the first limiting slot 11. Then, the operator releases the hexagonal wrench, so that the positioning seat 10 is reset under the action of the torsion spring 16, and the limiting block 14 extends into the second limiting slot 12. At the same time, the second mounting block 7 is fixed by the cooperation of the limiting block 14 and the second limiting slot 12, and then the heating lining 5 is clamped and fixed by the mounting plate 8 in cooperation with the fixing groove 3, so as to realize the installation of the heating lining 5, so as to facilitate heating of the substrate by the heating lining 5.

[0054] The above are only preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A workpiece heating device for an ion beam sputtering coating machine, characterized in that: include: Base (1); A workbench (2), wherein the workbench (2) is fixedly arranged on the base (1); A fixing groove (3), wherein the fixing groove (3) is provided on the workbench (2); A contact-type socket (4), wherein the contact-type socket (4) is arranged at the bottom of the fixing groove (3); A heating lining (5), the heating lining (5) being arranged in the fixing groove (3), and a contact-type socket (4) being arranged at a position corresponding to the heating lining (5) and the contact-type socket (4); A mounting mechanism is arranged on the workbench (2) and is used to fix the heating lining (5) in the fixing groove (3).

2. The workpiece heating device for an ion beam sputtering coating machine according to claim 1, characterized in that: The mounting mechanism comprises: A first mounting groove, wherein two first mounting grooves are provided, and the two first mounting grooves are arranged on the side wall of the workbench (2); A second mounting groove, wherein the second mounting groove is disposed at the bottom of the first mounting groove; A first mounting block (6), the first mounting block (6) being slidably disposed in the first mounting groove; a second mounting block (7), the second mounting block (7) being fixedly arranged on the first mounting block (6), and the second mounting block (7) being slidably arranged in the second mounting groove; A mounting plate (8), the mounting plate (8) being fixedly arranged on the first mounting block (6); A positioning mechanism, wherein the positioning mechanism is arranged in the second mounting block (7) and is used for positioning the second mounting block (7).

3. The workpiece heating device for an ion beam sputtering coating machine according to claim 2, characterized in that: The positioning mechanism comprises: a first positioning groove, the first positioning groove being formed on the second mounting block (7); A positioning column (9), wherein the positioning column (9) is rotatably arranged at the bottom of the first positioning groove; A positioning seat (10), the positioning seat (10) is arranged in a ring shape, and the positioning seat (10) is fixedly arranged on the positioning column (9); A second positioning groove, wherein the second positioning groove is arranged on the positioning seat (10); A first limiting through groove (11), wherein the first limiting through groove (11) is formed on a side wall of the second positioning groove; A second limiting through groove (12), wherein the second limiting through groove (12) is formed on a side wall of the first limiting through groove (11); A limiting column (13), the limiting column (13) being fixedly arranged at the bottom of the second mounting groove corresponding to the second positioning groove; a limiting block (14), the limiting block (14) being fixedly arranged on the limiting column (13) corresponding to the second limiting through slot (12); A driving mechanism is arranged on the first mounting block (6) and is used to control the rotation of the positioning column (9).

4. The workpiece heating device for an ion beam sputtering coating machine according to claim 3, characterized in that: The driving mechanism comprises: a driving groove, the driving groove being arranged on the first mounting block (6) corresponding to the positioning column (9); A hexagonal countersunk head (15), the hexagonal countersunk head (15) being rotatably disposed at the bottom of the driving groove; Wherein, the positioning column (9) is fixedly connected to the hexagonal countersunk head (15).

5. The workpiece heating device for an ion beam sputtering coating machine according to claim 4, characterized in that: It also includes a torsion spring (16), which is sleeved on the positioning column (9), and the two ends of the torsion spring (16) are respectively fixedly connected to the positioning seat (10) and the bottom of the first positioning groove.

6. The workpiece heating device for an ion beam sputtering coating machine according to claim 5, characterized in that: The bottom of the fixing groove (3) is provided with a plurality of positioning openings, and a positioning rod (17) is fixedly provided on the heating lining (5) at a position corresponding to the positioning opening, and the positioning rod (17) is adapted in shape to the positioning opening.

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