Cooling water supply system for single crystal furnace

Abstract

The utility model relates to the technical field of semiconductor production equipment, in particular to a single crystal furnace cooling water supply system which comprises a plurality of water supply assemblies. Each water supply assembly comprises a power distribution line and an electric water pump; the distribution line comprises a power supply, a high-voltage bus section, a low-voltage bus section and a first transformer assembly; the high-voltage bus section is electrically connected with the power supply and electrically connected with the low-voltage bus section through the first transformer assembly, and the low-voltage bus section is electrically connected with the electric water pump. According to the cooling water supply system for the single crystal furnace, part of the water supply assemblies can operate to supply cooling water to a single crystal silicon rod manufacturing process, the other part of the water supply assemblies are standby, and if part of the water supply assemblies in operation break down, the standby water supply assemblies can be switched in to ensure stable supply of the cooling water, so that the cooling water supply efficiency is improved. And the cooling water supply is quickly guaranteed.

Description

Technical Field

[0001] The present application relates to the technical field of semiconductor production equipment, and in particular to a cooling water supply system for a single crystal furnace. Background Art

[0002] In the production of single crystal silicon rods, the supply stability of process cooling water is required to be very high. A water-cooled heat shield needs to be formed by cooling water, and the flow rate of the water-cooled heat shield needs to be controlled within a predetermined range. Otherwise, the wire will break or the rod will fall off due to excessive temperature.

[0003] In order to meet the cooling requirements of the single crystal silicon rod process, currently, a single electric pump is generally used in conjunction with a diesel pump to achieve a dual-guarantee water supply mode. Among them, the electric pump is generally powered by a single power supply. Once a node in the power distribution line fails, the electric pump will lose power and the diesel pump needs to be started to continue water cooling. However, during the diesel pump startup process, the process cooling water supply pressure will fluctuate, which can easily cause the single crystal silicon rod to break. Utility Model Content

[0004] The purpose of the present application is to provide a single crystal furnace cooling water supply system, so as to solve to a certain extent the technical problem existing in the prior art that in the current single crystal silicon rod manufacturing process, when the electric pump loses power and the diesel pump is started, the single crystal silicon rod is easily broken.

[0005] The present application provides a single crystal furnace cooling water supply system, comprising a plurality of water supply components;

[0006] Each of the water supply components includes a power distribution circuit and an electric water pump;

[0007] The power distribution line includes a power supply source, a high-voltage bus section, a low-voltage bus section and a first transformer assembly;

[0008] The high-voltage bus section is electrically connected to the power supply, the high-voltage bus section is electrically connected to the low-voltage bus section through the first transformer assembly, and the low-voltage bus section is electrically connected to the electric water pump.

[0009] In the above technical solution, further, the number of the water supply components is at least four, and at least some of the water supply components are grouped in pairs;

[0010] The single crystal furnace cooling water supply system also includes a busbar switch, and the low-voltage busbar sections of the two water supply components in a group are electrically connected through the busbar switch.

[0011] In any of the above technical solutions, further, the first transformer assembly includes a first transformer, a first circuit breaker and a second circuit breaker;

[0012] The first transformer is electrically connected to the high-voltage bus section through the first circuit breaker;

[0013] The first transformer is electrically connected to the low-voltage bus section through the second circuit breaker.

[0014] In any of the above technical solutions, further, the power supply includes a substation and a third circuit breaker, and the substation is electrically connected to the high-voltage bus section of the water supply component through the third circuit breaker;

[0015] The substations of each water supply assembly are independent of each other.

[0016] In any of the above technical solutions, further, the power supply source also includes a ring main unit and a fourth circuit breaker, and the ring main unit is electrically connected to the high-voltage bus section of the water supply component to which it belongs through the fourth circuit breaker;

[0017] The ring main cabinets of each water supply assembly are independent of each other.

[0018] In any of the above technical solutions, further, the single crystal furnace cooling water supply system also includes a diesel generator;

[0019] One of all the water supply components is a predetermined water supply component, and the diesel generator is electrically connected to the low-voltage bus section of the predetermined water supply component to supply power to the electric water pump of the predetermined water supply component in a power generation state.

[0020] In any of the above technical solutions, further, the single crystal furnace cooling water supply system also includes an automatic transfer switch, and the diesel generator is electrically connected to the low-voltage bus section of the predetermined water supply component through the automatic transfer switch.

[0021] In any of the above technical solutions, further, the single crystal furnace cooling water supply system also includes industrial control equipment;

[0022] Each of the electric water pumps is electrically connected to the industrial control device, and the industrial control device can control the opening and closing of each of the electric water pumps, and control the electric water pumps of at least three water supply components to be opened at the same time, and control at least one water supply component to be closed for standby.

[0023] In any of the above technical solutions, further, the single crystal furnace cooling water supply system also includes a diesel water pump and a water pressure detection component;

[0024] The diesel water pump and the water pressure detection component are both electrically connected to the industrial control equipment.

[0025] In any of the above technical solutions, further, the water supply assembly also includes a second transformer assembly;

[0026] The low-voltage busbar section of each water supply assembly is electrically connected to the electrical equipment of the single crystal furnace through the second transformer assembly.

[0027] Compared with the prior art, the beneficial effects of this application are:

[0028] The single crystal furnace cooling water supply system provided in the present application includes multiple water supply components, each of which includes a distribution line and an electric water pump. The distribution line includes a power supply source, a high-voltage bus section, a low-voltage bus section and a first transformer component. The high-voltage bus section is electrically connected to the power supply source, the high-voltage bus section is electrically connected to the low-voltage bus section through the first transformer component, and the low-voltage bus section is electrically connected to the electric water pump. Therefore, each water supply component supplies power to its electric water pump through its distribution line, so that the electric water pumps of multiple water supply components can supply process cooling water to the single crystal furnace.

[0029] The single crystal furnace cooling water supply system can operate some of the multiple water supply components to supply cooling water to the single crystal silicon rod process, and keep other water supply components on standby. If some of the operating water supply components fail, the standby water supply components can be switched in to ensure a stable supply of cooling water, thereby quickly achieving cooling water supply. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] In order to more clearly illustrate the specific implementation methods of the present application or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0031] Figure 1 This is a schematic diagram of the structure of the single crystal furnace cooling water supply system provided in an embodiment of the present application.

[0032] Reference numerals:

[0033] 1-single crystal furnace cooling water supply system; 10-water supply component; 100-power supply source; 1000-substation; 1001-third circuit breaker; 1002-ring main unit; 1003-fourth circuit breaker; 101-high-voltage bus section; 102-first transformer assembly; 1020-first circuit breaker; 1021-first transformer; 1022-second circuit breaker; 103-low-voltage bus section; 104-electric water pump; 10a-predetermined water supply component; 11-bus tie switch; 12-diesel water pump; 13-diesel generator; 14-automatic transfer switch; 15-second transformer assembly; 16-fifth circuit breaker. DETAILED DESCRIPTION

[0034] The technical solution of the utility model will be described clearly and completely below in conjunction with the accompanying drawings. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0035] In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.

[0036] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0037] See also Figure 1 As shown, an embodiment of the present application provides a single crystal furnace cooling water supply system 1, which is used to supply process cooling water to the single crystal furnace in the production of single crystal silicon rods. Specifically, the process cooling water supplied by the single crystal furnace cooling water supply system 1 can be transported to the single crystal furnace through a water supply pipeline.

[0038] The single crystal furnace cooling water supply system 1 provided in this embodiment includes a plurality of water supply components 10 .

[0039] Each water supply assembly 10 includes a power distribution line and an electric water pump 104 , wherein the electric water pump 104 is used to pump cooling water to the single crystal silicon rod process, and the power distribution line is used to supply power to the electric water pump 104 .

[0040] The power distribution line includes a power supply source 100 , a high-voltage bus section 101 , a low-voltage bus section 103 and a first transformer assembly 102 .

[0041] The high-voltage bus section 101 is electrically connected to the power supply 100 , and the high-voltage bus section 101 is electrically connected to the low-voltage bus section 103 through the first transformer assembly 102 , and the low-voltage bus section 103 is electrically connected to the electric water pump 104 , so that the distribution line can supply power to the electric water pump 104 .

[0042] Optionally, the operating voltage of the high-voltage bus section 101 is 10KV, and the operating voltage of the low-voltage bus section 103 is 400V.

[0043] The single crystal furnace cooling water supply system 1 includes a plurality of water supply components 10, so some of the water supply components 10 are in operation to supply cooling water to the single crystal silicon rod process. Another part of the water supply components 10 is in standby mode. If some of the running water supply components 10 fail, the standby water supply components 10 can be switched in to ensure a stable supply of cooling water, thereby achieving a guaranteed supply of cooling water.

[0044] It is worth emphasizing that the standby water supply assembly 10 is activated immediately, and compared with starting the standby diesel water pump 12, it can meet the cooling water supply demand more quickly and prevent the single crystal silicon rod from being disconnected.

[0045] In an optional solution of this embodiment, the number of water supply components 10 is at least four groups, for example, the water supply components 10 are configured as four, five or six.

[0046] At least some of the water supply components 10 are grouped in pairs, so that when the total number of water supply components 10 is an even number, all water supply components 10 can be configured to be grouped in pairs; and when the total number of water supply components 10 is an odd number, one water supply component 10 can be excluded and the remaining water supply components 10 can be configured to be grouped in pairs.

[0047] The single crystal furnace cooling water supply system 1 further includes a busbar switch 11, through which the low-voltage busbar sections 103 of the two water supply assemblies 10 in a group are electrically connected, wherein the busbar switch 11 is in a normally open state.

[0048] Therefore, when a power outage occurs in a distribution line of a water supply component 10 in the group, the circuit breaker of the first transformer component 102 can be cut off and the bus tie switch 11 can be switched to closed, so that the low-voltage bus section 103 of the water supply component 10 that has lost power can be electrically connected to the low-voltage bus section 103 of another water supply component 10 in the group via the closed bus tie switch 11, and power can be supplied to the power-lost distribution line through the normally powered distribution line in the group, thereby ensuring that the electric water pump 104 in the group that has lost power can also operate normally.

[0049] In an optional solution of this embodiment, the first transformer assembly 102 includes a first transformer 1021 , a first circuit breaker 1020 , and a second circuit breaker 1022 .

[0050] The first transformer 1021 is electrically connected to the high-voltage bus section 101 through the first circuit breaker 1020 , and the first transformer 1021 is electrically connected to the low-voltage bus section 103 through the second circuit breaker 1022 .

[0051] The first circuit breaker 1020 is used as the upper circuit breaker of the first transformer 1021, and the second circuit breaker 1022 is used as the lower circuit breaker of the first transformer 1021. Therefore, no matter which of the first circuit breaker 1020 or the second circuit breaker 1022 of the distribution line of the water supply component 10 fails, it will not affect the normal use of the remaining water supply components 10.

[0052] In an optional solution of this embodiment, the power supply source 100 includes a substation 1000 and a third circuit breaker 1001 .

[0053] The substation 1000 is electrically connected to the high-voltage bus section 101 of the corresponding water supply assembly 10 via the third circuit breaker 1001 , and the substation 1000 of each water supply assembly 10 is independent of each other.

[0054] Therefore, in each water supply component 10, the high-voltage bus section 101 electrically connected to the first transformer component 102 is powered by an independent substation 1000, and does not affect other water supply components 10. When the high-voltage bus section 101 of one water supply component 10 fails, the first transformer components 102 electrically connected to other high-voltage bus sections 101 can also work normally, ensuring normal power supply to the electric water pump 104 at its lower level, thereby ensuring supply.

[0055] In an optional scheme of this embodiment, the power supply source 100 also includes a ring main unit 1002 and a fourth circuit breaker 1003. The ring main unit 1002 is electrically connected to the high-voltage bus section 101 of the water supply component 10 to which it belongs via the fourth circuit breaker 1003. The ring main unit 1002 of each water supply component 10 is independent of each other.

[0056] Thus, in each water supply assembly 10, two power supply lines are realized by the substation 1000 and the ring main unit 1002. The direct supply line of the substation 1000 is used daily, and the ring main unit 1002 is used as a backup power supply line. When the direct supply line of the substation 1000 fails, the backup line of the ring main unit 1002 is cut in, thereby ensuring that the electric water pump 104 in the water supply assembly 10 does not lose power.

[0057] Among them, the high-voltage bus sections 101 electrically connected to the first transformer assembly 102 are all powered by independent ring mains cabinets 1002 for backup power supply, and do not affect the backup power supply functions of other water supply assemblies 10. When the high-voltage bus sections 101 of one of the water supply assemblies 10 fails in direct supply or backup power supply, the first transformer assemblies 102 electrically connected to other high-voltage bus sections 101 can also work normally, ensuring normal power supply to the electric water pump 104 at its lower level, thereby ensuring supply.

[0058] In an optional solution of this embodiment, the single crystal furnace cooling water supply system 1 also includes industrial control equipment.

[0059] Each electric water pump 104 is electrically connected to the industrial control device, which can control the start and stop of each electric water pump 104, and control the electric water pumps 104 of at least three water supply components 10 to start at the same time, and control at least one water supply component 10 to shut down for backup.

[0060] That is, at least three water supply components 10 opened by the industrial control equipment are used to supply cooling water together on a daily basis, and the industrial control equipment controls to close at least one water supply component 10 as a backup. When any of the water supply components 10 for daily water supply fails, the backup water supply component 10 can be activated, thereby improving the stability and reliability of cooling water supply.

[0061] Optionally, the industrial control equipment includes a PLC controller.

[0062] In an optional solution of this embodiment, the single crystal furnace cooling water supply system 1 also includes a diesel water pump 12 and a water pressure detection component.

[0063] The diesel water pump 12 and the water pressure detection component are both electrically connected to the industrial control equipment, wherein the water pressure detection component is used to detect the water pressure of the water supply pipeline, and the industrial control equipment is used to obtain the water pressure from the water pressure detection component and control the opening and closing of the diesel water pump 12 according to the water pressure.

[0064] Specifically, when the water pressure in the water supply pipeline drops to a certain proportion of the preset working pressure, it means that some distribution lines of the electric water pump 104 have failed, and the electric water pump 104 alone can no longer meet the cooling water supply demand. At this time, the industrial control equipment can control the diesel water pump 12 to start up to ensure supply.

[0065] In an optional solution of this embodiment, the single crystal furnace cooling water supply system 1 also includes a diesel generator 13.

[0066] One of all water supply components 10 is a predetermined water supply component 10a, such as Figure 1 As shown, the rightmost water supply assembly 10 is used as the predetermined water supply assembly 10a.

[0067] The diesel generator 13 is capable of generating electricity, and is electrically connected to the low-voltage busbar section 103 of the predetermined water supply component 10a, so as to supply power to the electric water pump 104 of the predetermined water supply component 10a in the power generation state, so that when all water supply components 10 are powered off and the diesel water pump 12 also fails, the diesel generator 13 is started to supply power to the electric water pump 104 of the predetermined water supply component 10a. This avoids the interruption of cooling water supply, ensures the continuous circulation supply of cooling water to continuously dissipate heat for the single crystal furnace, avoids the rapid evaporation of water in the water supply pipe leading to explosion, and ensures the safety of the single crystal furnace.

[0068] In this embodiment, in order to start the diesel generator 13 more timely, the single crystal furnace cooling water supply system 1 also includes an automatic transfer switch 14, and the diesel generator 13 is electrically connected to the low-voltage bus section 103 of the water supply component 10 through the automatic transfer switch 14. Therefore, in an emergency, the automatic transfer switch 14 can realize the power switching function, connect the diesel generator 13 to the low-voltage bus section 103 of the predetermined water supply component 10a, provide power 100 for the electric water pump 104 of the predetermined water supply component 10a, and restore the power supply of the electric water pump 104 of the predetermined water supply component 10a in time.

[0069] Optionally, the automatic transfer switch 14 may be, for example, an ATSE (Automatic Transfer Switching Equipment).

[0070] Optionally, in order to improve the safety of the electric water pump 104 , a fifth circuit breaker 16 may be provided between the low-voltage bus section 103 and the electric water pump 104 .

[0071] In an optional scheme of this embodiment, the water supply component 10 also includes a second transformer component 15, and the low-voltage bus segment 103 of each water supply component 10 is electrically connected to the electrical equipment of the single crystal furnace through the second transformer component 15, so that the electrical equipment of the single crystal furnace can share the low-voltage bus segment 103 of the water supply component 10, and there is no need to invest additionally in the construction of high-voltage bus segments and power supplies for the electrical equipment of the single crystal furnace.

[0072] In summary, combined Figure 1 The working principle of the cooling water supply system for the single crystal silicon rod process is explained as follows:

[0073] Figure 1 The single crystal furnace cooling water supply system 1 shown in the figure includes four water supply components 10. Under normal circumstances, the industrial control equipment controls three of the water supply components 10 to start up, and controls another water supply component 10 to shut down as a backup, thereby achieving the first level of protection for the cooling water supply.

[0074] The two water supply components 10 in a group are electrically connected via a busbar switch 11, thereby providing a second level of protection for the cooling water supply.

[0075] Each water supply assembly 10 includes an independent substation 1000 for daily direct supply, providing a third level of protection for cooling water supply.

[0076] The high-voltage bus section 101 and the low-voltage bus section 103 of each water supply assembly 10 are electrically connected via an independent first transformer assembly 102, thereby achieving a fourth level of protection for cooling water supply.

[0077] Each water supply assembly 10 includes an independent ring main unit 1002 as a backup, providing a fifth level of protection for cooling water supply.

[0078] When the water pressure in the water supply pipeline is insufficient, the diesel water pump 12 is started to supply water, thereby achieving the sixth guarantee for the cooling water supply.

[0079] When all the substations 1000 and ring main units 1002 of the water supply components 10 are out of power, the diesel water pump 12 is started to supply water, thereby achieving the seventh level of protection for the cooling water supply.

[0080] When the substation 1000 and the ring main unit 1002 of all water supply components 10 are out of power and the diesel water pump 12 fails, the diesel generator 13 is started to supply power to the predetermined water supply component 10a, so that the predetermined water supply component 10a continues to supply water, thereby realizing the eighth guarantee for cooling water supply.

[0081] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the utility model, rather than to limit them; although the utility model is described in detail with reference to the above embodiments, those skilled in the art should understand that they can still modify the technical solutions recorded in the above embodiments, or replace some or all of the technical features therein by equivalent; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the various embodiments of the utility model. In addition, those skilled in the art can understand that although some embodiments described herein include certain features included in other embodiments instead of other features, the combination of features of different embodiments means that they are within the scope of the utility model and form different embodiments. For example, any one of the embodiments claimed for protection can be used in any combination. The information disclosed in this background technology section is only intended to deepen the understanding of the overall background technology of the utility model, and should not be regarded as an admission or in any form of implication that the information constitutes prior art known to those skilled in the art.

Claims

1. A single crystal furnace cooling water supply system, characterized in that: including a plurality of water supply components; Each of the water supply components includes a power distribution circuit and an electric water pump; The power distribution line includes a power supply source, a high-voltage bus section, a low-voltage bus section and a first transformer assembly; The high-voltage bus section is electrically connected to the power supply, the high-voltage bus section is electrically connected to the low-voltage bus section through the first transformer assembly, and the low-voltage bus section is electrically connected to the electric water pump.

2. The single crystal furnace cooling water supply system according to claim 1, characterized in that: The number of the water supply components is at least four, and at least some of the water supply components are grouped in pairs; The single crystal furnace cooling water supply system also includes a busbar switch, and the low-voltage busbar sections of the two water supply components in a group are electrically connected through the busbar switch.

3. The single crystal furnace cooling water supply system according to claim 1, characterized in that: The first transformer assembly includes a first transformer, a first circuit breaker, and a second circuit breaker; The first transformer is electrically connected to the high-voltage bus section through the first circuit breaker; The first transformer is electrically connected to the low-voltage bus section through the second circuit breaker.

4. The single crystal furnace cooling water supply system according to claim 1, characterized in that: The power supply source includes a transformer substation and a third circuit breaker, and the transformer substation is electrically connected to the high-voltage bus section of the water supply component through the third circuit breaker; The substations of each water supply assembly are independent of each other.

5. The single crystal furnace cooling water supply system according to claim 4, characterized in that: The power supply also includes a ring main unit and a fourth circuit breaker, and the ring main unit is electrically connected to the high-voltage bus section of the water supply assembly through the fourth circuit breaker; The ring main cabinets of each water supply assembly are independent of each other.

6. The single crystal furnace cooling water supply system according to claim 1, characterized in that: Also included are diesel generators; One of all the water supply components is a predetermined water supply component, and the diesel generator is electrically connected to the low-voltage bus section of the predetermined water supply component to supply power to the electric water pump of the predetermined water supply component in a power generation state.

7. The single crystal furnace cooling water supply system according to claim 6, characterized in that: It also includes an automatic transfer switch, through which the diesel generator is electrically connected to the low-voltage bus section of the predetermined water supply component.

8. The single crystal furnace cooling water supply system according to claim 1, characterized in that: It also includes industrial control equipment; Each of the electric water pumps is electrically connected to the industrial control device, and the industrial control device can control the opening and closing of each of the electric water pumps, and control the electric water pumps of at least three water supply components to be opened at the same time, and control at least one water supply component to be closed for standby.

9. The single crystal furnace cooling water supply system according to claim 8, characterized in that: Also included are diesel water pumps and water pressure detection components; The diesel water pump and the water pressure detection component are both electrically connected to the industrial control equipment.

10. The single crystal furnace cooling water supply system according to claim 1, characterized in that: The water supply assembly also includes a second transformer assembly; The low-voltage busbar section of each water supply assembly is electrically connected to the electrical equipment of the single crystal furnace through the second transformer assembly.

Images