Silicon rod crack detection device
By designing a detection device that drives the silicon rod to rotate about the axis, using infrared light sources and cameras for full coverage photography and detection, the overcut and infrared light blind spot problems caused by relying on experience in the prior art are solved, and the accuracy of silicon rod crack detection is improved Sex and efficiency.
Patent Information
- Application Number
- CN202420454517.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-03-08
- Publication Date
- 2024-12-13
- Estimated Expiration
- 2034-03-08
AI Technical Summary
The existing silicon rod crack detection methods rely too much on empirical formulas, resulting in overcut and multiple cuts, resulting in waste of processing; infrared cameras have blind spots during detection, and some cracks in the crystalline area cannot be detected.
A detection device including a support structure, a rolling module, a sliding module, a light source module and an imaging module is designed. Through the cooperation of the light source module and the imaging module, the silicon rod is driven to rotate about the axis, and the infrared light source and infrared camera are used for full coverage. Take photos and detect, combine image processing to identify crack depth.
It improves the accuracy of crack defect detection, reduces the cost of repair and claim, and avoids overcut phenomena and infrared light blind spots caused by experience dependence.
Smart Images
Figure CN222166901U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of detection devices, in particular to a detection device for silicon rod cracks. Background Art
[0002] On the one hand, silicon rods will produce crack defects of different shapes and severity during the drawing, cooling and processing process, which need to be removed through multiple recuts. The amount of each recut is entirely based on personal experience, and it is difficult to avoid overcutting, resulting in low processing efficiency and cost waste due to overcutting. In addition, some cracks are too fine to be identified by naked eye inspection, resulting in silicon rods being reworked after squaring, or products with microcrack defects being shipped to customers after slicing, causing a certain amount of processing cost waste and claims for the company.
[0003] On the other hand, silicon rods are usually cut and truncated with steel wires to become silicon rods, and there will be knife marks of varying degrees on the end faces of silicon rods. At the same time, in order to prevent the steel wire from melting due to excessive temperature during the steel wire cutting process, the steel wire needs to be continuously flushed and cooled with water, resulting in watermarks of varying degrees on the end faces of silicon rods. On-site measurements have found that the crack morphology of the silicon rod end face can be captured by directly taking photos with a high-definition camera, but it is difficult to distinguish between knife marks, watermarks and cracks.
[0004] At present, the detection method of judging whether there are crack defects on the surface and inside of the crystal ingot detection area by using infrared light to penetrate the crystal ingot and using an infrared camera to capture the infrared light penetration and imaging situation can effectively guide the processing procedures to remove the crack defect position in time, so as to avoid the crack defect from spreading and causing a significant increase in subsequent processing costs or customer claims. There are two main detection methods:
[0005] In the first method, the infrared light source and the infrared camera are set on the two cross-section surfaces of the silicon rod. The infrared light is emitted along the axial direction of the silicon rod to detect the radial length and position of the crack. The axial depth of the crack is determined according to the empirical formula to guide the processing and removal.
[0006] The second method is to set the infrared light source and infrared camera opposite to each other on both sides of the arc surface. The infrared light is emitted radially along the silicon rod to directly detect the actual depth value of the crack in the axial direction, thereby guiding the processing and removal.
[0007] However, the first method relies too much on empirical formulas, resulting in overcutting and multiple cutting, which leads to processing waste, and the relative position of cracks and crystal lines cannot be output. The second method cannot detect some cracks in the crystal line area because infrared light cannot penetrate the crystal line area and the infrared camera has a blind spot. Utility Model Content
[0008] The purpose of the utility model is to provide a silicon rod crack detection device to solve the technical problems that the current detection method is too dependent on empirical formulas, has overcutting and multiple cutting phenomena resulting in processing waste, and cannot output the relative position of cracks and crystal lines, and because infrared light cannot penetrate the crystal line area, the infrared camera has a blind spot, resulting in the inability to detect some cracks in the crystal line area. The many technical effects that can be produced by the preferred technical solution among the many technical solutions provided by the utility model are described in detail below.
[0009] In order to achieve the above purpose, the utility model provides the following technical solutions:
[0010] The utility model provides a silicon rod crack detection device, comprising a support structure, a rolling module, a sliding module, a light source module and a camera module, wherein:
[0011] The silicon rod to be tested is placed on the rolling module;
[0012] The sliding module is installed on the supporting structure, and the light source module and the camera module are both installed on the sliding module. The light source module is used to emit light to illuminate the silicon rod to be inspected, and the camera module is used to take pictures of the silicon rod to be inspected.
[0013] Preferably, the light source module and the camera module are located on the same side of the silicon rod, and the center point of the light source module, the center point of the camera module and the axis of the silicon rod are in the same plane.
[0014] Preferably, the shooting direction of the camera module forms an angle of 45° with the axis of the silicon rod to be detected.
[0015] Preferably, the distance between the camera module and the silicon rod is 150-200 mm.
[0016] Preferably, the rolling module includes a first rolling component and a second rolling component, the first rolling component / the second rolling component is connected to a power device, and the second rolling component / the first rolling component serves as a driven rolling component and is driven to rotate by the first rolling component / the second rolling component.
[0017] Preferably, the supporting structure adopts a rectangular supporting frame, an inner bracket is arranged at the bottom of the rolling module, and the inner bracket is located inside the supporting frame.
[0018] Preferably, the sliding module comprises a first sliding module and a second sliding module, the first sliding module and the second sliding module are respectively located on both sides of the silicon rod, wherein:
[0019] The light source module is installed on the first sliding module, the camera module is installed on the second sliding module, and the first sliding module and the second sliding module move synchronously.
[0020] Preferably, it further comprises a first photovoltaic module and a second photovoltaic module, wherein:
[0021] The first photoelectric module is installed on the first sliding module, and the second photoelectric module is installed on the second sliding module.
[0022] Preferably, the camera module adopts an infrared camera.
[0023] Preferably, the light source module adopts an infrared light source.
[0024] The utility model provides a silicon rod crack detection device. Through the cooperation of a supporting structure, a rolling module, a sliding module, a light source module and a camera module, the sliding module is installed on the supporting structure, the light source module and the camera module are both installed on the sliding module, the sliding module drives the light source module and the camera module to move back and forth, the silicon rod to be detected is placed on the rolling module, and the rolling module is used to drive the silicon rod to rotate around the axis when the rolling module rotates, and photographing and detection are completed during the rotation of the silicon rod, thereby effectively improving the accuracy of crack defect detection and greatly reducing the cost of rework and claim. BRIEF DESCRIPTION OF THE DRAWINGS
[0025] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.
[0026] Figure 1 This is a schematic structural diagram of a first embodiment of a silicon rod crack detection device of the utility model;
[0027] Figure 2 It is a structural schematic diagram of a second embodiment of the silicon rod crack detection device of the utility model.
[0028] In the figure: 1. Support structure; 2. Inner bracket; 3. Silicon rod; 4. Sliding module; 41. First sliding module; 42. Second sliding module; 5. Light source module; 6. Camera module; 7. Rolling module; 71. First rolling assembly; 72. Second rolling assembly; 81. First photoelectric module; 82. Second photoelectric module. DETAILED DESCRIPTION
[0029] In order to make the purpose, technical solution and advantages of the utility model clearer, the technical solution of the utility model will be described in detail below. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other implementation methods obtained by ordinary technicians in this field without creative work belong to the scope of protection of the utility model.
[0030] In the description of the present invention, it should be understood that the terms "center", "lateral", "length", "width", "height", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "side" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.
[0031] In the description of the present invention, it is also necessary to explain that, unless otherwise clearly specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to the specific circumstances.
[0032] Embodiment 1
[0033] This embodiment provides a silicon rod crack detection device. Figure 1 Schematic diagram of the structure of this embodiment. Figure 1 As shown, it includes a supporting structure 1, a rolling module 7, a sliding module 4, a light source module 5 and a camera module 6.
[0034] The silicon rod 3 to be inspected is placed on the rolling module 7, which is used to drive the silicon rod 3 to rotate around the axis when the rolling module 7 rotates, and completes the photography and inspection during the rotation of the silicon rod 3.
[0035] The sliding module 4 is installed on the supporting structure 1 , the light source module 5 and the camera module 6 are both installed on the sliding module 4 , and the supporting structure 1 is used to support the detection part. In this embodiment, a supporting frame structure is also provided at the bottom of the rolling module 7 for effectively supporting the silicon rod 3 .
[0036] When in use, the sliding module 4 drives the light source module 5 and the camera module 6 to move forward and backward. The light source module 5 is used to emit light to illuminate the silicon rod to be detected, and the camera module 6 is used to take pictures of the silicon rod 3 to be detected. The rolling module 7 rotates to drive the silicon rod 3 to rotate around the axis, and the picture taking and detection are completed during the rotation of the silicon rod 3.
[0037] The silicon rod crack detection device is characterized in that the sliding module 4 is installed on the supporting structure 1 through the cooperation of the supporting structure 1, the rolling module 7, the sliding module 4, the light source module 5 and the camera module 6. The sliding module 4 drives the light source module 5 and the camera module 6 to move forward and backward. The silicon rod 3 to be detected is placed on the rolling module 7, which is used to drive the silicon rod 3 to rotate around the axis when the rolling module 7 rotates. Photographing and detection are completed during the rotation of the silicon rod 3, which effectively improves the accuracy of crack defect detection and greatly reduces the cost of rework and claims.
[0038] As an optional implementation, the light source module 5 and the camera module 6 are located on the same side of the silicon rod 3, and the center points of the light source module 5 and the camera module 6 are in the same plane as the axis of the silicon rod 3, and the light emitted by the light source module 5 can pass through the axis of the silicon rod 3.
[0039] Specifically, in this embodiment, the shooting direction of the camera module 6 is set to form an angle of 45° with the axis of the silicon rod 3 to be detected.
[0040] By arranging the light source module 5 and the camera module on the same side of the silicon rod 3, the light source module 5 emits light and the camera module 6 continuously takes pictures when the silicon rod 3 rotates around the axis, so as to detect the peripheral area of the end surface of the silicon rod 3, and achieve full coverage photography of the peripheral area of the silicon rod 3. After the photography is completed, the image processing is performed to finally identify whether there is a crack in the peripheral area of the end surface of the silicon rod 3.
[0041] In this embodiment, a silicon rod with a length of 150 to 900 mm and a diameter of 290 to 330 mm is taken as an example. The light source module 5 adopts an infrared light source with a power of 50 W. The camera module 6 adopts an infrared camera. The distance between the camera module 6 and the silicon rod 3 is 150-200 mm, so that the field of view of the camera module 6 includes the end face and arc surface of the silicon rod 3, so that the silicon rod 3 can be fully covered and photographed along the circumference.
[0042] As an optional embodiment, the rolling module 7 includes a first rolling component 71 and a second rolling component 72. The first rolling component 71 / the second rolling component 72 is connected to the power device, and the second rolling component 72 / the first rolling component 71 serves as a driven rolling component and is driven to rotate by the first rolling component 71 / the second rolling component 72.
[0043] In this embodiment, the supporting structure 1 adopts a rectangular supporting frame, and an inner bracket 2 is arranged at the bottom of the rolling module 7, and the inner bracket 2 is located inside the supporting frame.
[0044] As an optional implementation, the travel of the sliding module 4 is 500 mm and the moving speed is 0.1 m / s, which can adapt to the detection of silicon rods 3 of different lengths.
[0045] The working process of this embodiment is as follows: the sliding module 4 moves forward and backward, driving the light source module 5 and the camera module 6 to move to the set position, the first rolling assembly 71 located on one side starts to rotate, driving the silicon rod 3 and the driven second rolling assembly 72 to rotate, the light source module 5 starts to emit light, the camera module 6 starts to take pictures continuously, and the image processing software identifies the crack depth and outputs the detection value.
[0046] Embodiment 2
[0047] Different from the first embodiment, in this embodiment, the sliding module 4 includes a first sliding module 41 and a second sliding module 42 , and the first sliding module 41 and the second sliding module 42 are respectively located on two sides of the silicon rod 3 .
[0048] The light source module 5 is installed on the first sliding module 41 , the camera module 6 is installed on the second sliding module 42 , and the first sliding module 41 and the second sliding module 42 move synchronously.
[0049] By arranging the light source module 5 and the camera module 6 on both sides of the axis of the silicon rod 3, the near surface of the silicon rod 3 on the side where the camera module 6 is located is continuously photographed by emitting light on one side and photographing on the other side, and at the same time, the silicon rod 3 starts to rotate 360° around the axis to achieve full coverage photography along the circumference of the silicon rod 3. After the photography is completed, the crack defect and the specific depth value of the crack are finally identified through image processing.
[0050] In this embodiment, a first photoelectric module 81 and a second photoelectric module 82 are further included. The first photoelectric module 81 is installed on the first sliding module 41 , and the second photoelectric module 82 is installed on the second sliding module 42 .
[0051] The working principle of this embodiment is as follows: the first sliding module 41 can drive the first photoelectric module 81 to move forward and backward, the second sliding module 42 can drive the second photoelectric module 82 to move forward and backward, and the first sliding module 41 and the second sliding module 42 keep moving synchronously, the first photoelectric module 81 and the second photoelectric module 82 find the position of the tail end face of the silicon rod 3 by shooting during the movement, and according to the position of the tail end face of the silicon rod 3, the first sliding module 41 and the second sliding module 42 move forward and backward, so that the center line of the camera module 6 and the light source module 5 coincides with the tail end face of the silicon rod 3, and the light source module 5 and the camera module 6 start to work; at the same time, the rolling module 7 starts to rotate, thereby driving the silicon rod to rotate 360° to complete the image taking and photography.
[0052] The working process of this embodiment is as follows: first, the first sliding module 41 and the second sliding module 42 start to move forward and backward synchronously, driving the first photoelectric module 81 and the second photoelectric module 82 to move forward and backward to find the tail end surface position of the silicon rod 3; then, the first sliding module 41 and the second sliding module 42 respectively drive the light source module 5 and the camera module 6 to move to the detection position, at this time, the light source module 5 starts to emit infrared light, and the camera module 6 starts to take pictures; the first rolling assembly 71 located on one side starts to rotate, driving the silicon rod 3 and the driven second rolling assembly 72 to rotate, completing the circumferential photography; finally, the photographed picture is processed to identify the crack and output the crack depth value.
[0053] The above is only a specific implementation of the utility model, but the protection scope of the utility model is not limited thereto. Any technician familiar with the technical field can easily think of changes or substitutions within the technical scope disclosed by the utility model, which should be included in the protection scope of the utility model. Therefore, the protection scope of the utility model should be based on the protection scope of the claims.
Claims
1. A silicon rod crack detection device, characterized in that: It includes a supporting structure, a rolling module, a sliding module, a light source module and a camera module, wherein: The silicon rod to be tested is placed on the rolling module; The sliding module is installed on the supporting structure. The light source module and the camera module are both installed on the sliding module. The light source module is used to emit light to illuminate the silicon rod to be inspected, and the camera module is used to take pictures of the silicon rod to be inspected.
2. A silicon rod crack detection device according to claim 1, characterized in that: The light source module and the camera module are located on the same side of the silicon rod, and the center point of the light source module, the center point of the camera module and the axis of the silicon rod are in the same plane.
3. A silicon rod crack detection device according to claim 2, characterized in that: The shooting direction of the camera module forms an angle of 45° with the axis of the silicon rod.
4. A silicon rod crack detection device according to claim 2 or 3, characterized in that: The distance between the camera module and the silicon rod is 150-200 mm.
5. A silicon rod crack detection device according to any one of claims 1 to 3, characterized in that: The rolling module includes a first rolling component and a second rolling component. The first rolling component / the second rolling component is connected to a power device. The second rolling component / the first rolling component serves as a driven rolling component and is driven to rotate by the first rolling component / the second rolling component.
6. The silicon rod crack detection device according to claim 5, characterized in that: The supporting structure adopts a rectangular supporting frame, an inner bracket is arranged at the bottom of the rolling module, and the inner bracket is located inside the supporting frame.
7. The silicon rod crack detection device according to claim 1, characterized in that: The sliding module comprises a first sliding module and a second sliding module, wherein the first sliding module and the second sliding module are respectively located on two sides of the silicon rod, wherein: The light source module is installed on the first sliding module, the camera module is installed on the second sliding module, and the first sliding module and the second sliding module move synchronously.
8. The silicon rod crack detection device according to claim 7, characterized in that: Also included is a first photovoltaic module and a second photovoltaic module, wherein: The first photoelectric module is installed on the first sliding module, and the second photoelectric module is installed on the second sliding module.
9. A silicon rod crack detection device according to claim 2 or 7, characterized in that: The camera module adopts an infrared camera.
10. The silicon rod crack detection device according to claim 9, characterized in that: The light source module adopts an infrared light source.