Battery piece feeding and discharging device for exposure machine
The battery cell loading and unloading device for exposure machines addresses low efficiency and accuracy issues by implementing automated detection and correction units, improving production efficiency and product quality through precise cell handling and screening.
Patent Information
- Application Number
- CN202323658026.9
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2023-12-29
- Publication Date
- 2024-12-13
- Estimated Expiration
- 2033-12-29
AI Technical Summary
Existing exposure machines suffer from low production efficiency due to manual loading and unloading, poor loading accuracy, and inadequate screening of unqualified battery cells, leading to low product qualification rates.
A battery cell loading and unloading device for exposure machines, comprising multiple detection and correction units, including PL detection, AOI detection, lifting and rotating devices, and high-precision multi-axis correction platforms, to automate and ensure accurate positioning, screening, and removal of unqualified cells.
The device enhances production efficiency and product qualification rates by automating the loading process, ensuring high loading accuracy, and effectively screening out unqualified cells.
Smart Images
Figure CN222167414U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of exposure machine equipment, in particular to a battery cell loading and unloading device used for an exposure machine. Background Art
[0002] The exposure machine is a complex semiconductor processing equipment that integrates electronic optics, electrical, mechanical, vacuum, and computer technology. It has been widely used in the semiconductor integrated circuit manufacturing industry since the 1970s. It uses a focused electron beam to expose organic polymers (usually called electronic resists or photoresists) under the control of a computer. It is commonly used in semiconductor manufacturing, optoelectronics, flat panels, radio frequency microwaves, diffraction optics, micro-electromechanical systems, concave-convex or flip-chip equipment and other fields requiring fine printing.
[0003] At present, most exposure machines are operated by manual loading and unloading, which is slow and leads to low production efficiency. Therefore, there has appeared a utility model patent with announcement number CN211628004U, which discloses an automatic loading and unloading device for an exposure machine, including a support table, a lifting unit, a mounting block, a moving unit, a vacuum unit and a controller. The top surface of the support table is provided with a finished product collection slot and an unfinished product collection slot, the back plate of the lifting unit is slidably connected to the sliding hole on the right top surface of the support table, the mounting block is fixed to the top of the back plate, the moving unit is installed on the side of the mounting block, the vacuum unit is installed at the bottom of the moving unit, the controller is fixed to the side of the support table, and the input end of the controller is electrically connected to the output end of the external power supply.
[0004] There are at least the following problems in the prior art: first, the loading and unloading speeds of manual operation and existing loading and unloading devices are slow, resulting in low production efficiency; second, the loading accuracy of manual operation and existing loading and unloading devices is poor, errors are very likely to occur, and the reliability is low; third, the screening effect of unqualified battery cells by manual operation and existing loading and unloading devices is poor, resulting in a low product qualification rate. Utility Model Content
[0005] In view of the deficiencies in the prior art, the utility model develops a battery cell loading and unloading device for an exposure machine. The utility model can not only replace manual loading and unloading of battery cells, but also ensure loading accuracy and accurately screen and remove unqualified battery cells, effectively improving production efficiency and product qualification rate.
[0006] The technical solution to the technical problem solved by the utility model is: a battery cell loading and unloading device for an exposure machine, comprising two groups of exposure machine bodies, and also comprising a P-side loading and unloading unit and an N-side loading and unloading unit, the feeding end of the P-side loading and unloading unit is provided with a front-end adjustment detection unit, the discharging end of the P-side loading and unloading unit is connected with the feeding end of the N-side loading and unloading unit through a middle-end adjustment detection unit, the discharging end of the N-side loading and unloading unit is provided with a rear-end detection unit, one side of the P-side loading and unloading unit is connected with one group of exposure machine bodies, and one side of the N-side loading and unloading unit is connected with the other group of exposure machine bodies.
[0007] As an optimization, the front-end adjustment detection unit includes a PL detection device, a first AOI detection device, a long side correction device and a first lifting and rotating device which are sequentially arranged along the conveying direction. By setting up the PL detection device, infrared technology can be used to detect cracks, holes, microcrystals, impurities and other hard points on the battery cell; by setting up the first AOI detection device, the detection welding points on the battery cell can be scanned, images can be collected, and compared with qualified parameters in the database, and defects on the battery cell can be checked after image processing; by setting up the long side correction device, the battery cell can be corrected in the length direction to achieve pre-positioning of the battery cell; by setting up the first lifting and rotating device, the battery cell can be horizontally rotated 90° to facilitate the battery cell to enter the P-surface loading and unloading unit.
[0008] As an optimization, the P-surface loading and unloading unit includes a positioning photoelectric detection device, a short-side correction device, a cross module, a four-station rotary loading and unloading device and a steering device arranged in sequence along the conveying direction, and a camera positioning device is provided above the cross module. By setting the positioning photoelectric detection device, the battery cell can be detected and positioned by a photoelectric sensor, thereby compensating for the front and rear positions of the battery cell; by setting the short-side correction device, the battery cell can be corrected in the width direction to achieve pre-positioning of the battery cell; by setting the cross module, the cell can be taken from the conveyor belt crosswise, and after the battery cell leaves the belt surface and reaches a preset height, the camera positioning device takes a photo to further correct the position of the battery cell; by setting the four-station rotary loading and unloading device, the four stations can coordinate operations to achieve simultaneous loading and unloading of the exposure machine body, and the loading and unloading accuracy is high to meet the loading and unloading requirements; by setting the steering device, the forward direction of the battery cell can be changed by 90°, which is convenient for entering the mid-end adjustment detection unit.
[0009] As an optimization, the mid-end adjustment detection unit includes a first NG rejection device, a second lifting and rotating device, a long-side feed flipping device, and a second AOI detection device, which are sequentially arranged along the conveying direction. By setting up the first NG rejection device, unqualified battery cells can be rejected; by setting up the second lifting and rotating device, the battery cells can be horizontally rotated 90° and sent to the next station; by setting up the long-side feed flipping device, the battery cells can be flipped 180° and sent to the next station; by setting up the second AOI detection device, the flipped battery cell solder joints can be scanned, images can be collected, and compared with qualified parameters in the database. After image processing, defects on the battery cells can be checked and unqualified battery cells can be rejected.
[0010] As an optimization, the N-side loading and unloading unit is exactly the same as the P-side loading and unloading unit.
[0011] As an optimization, the back-end inspection unit includes a second NG rejection device and a third AOI inspection device arranged in sequence along the conveying direction. By setting up the second NG rejection device, unqualified cells can be rejected; by setting up the third AOI inspection device, the N-side exposed cells can be scanned, images can be collected, and compared with qualified parameters in the database. After image processing, defects on the cells can be checked and unqualified cells can be rejected.
[0012] As an optimization, the cross module includes a module body, both sides of which are provided with sliding devices, the slider of the sliding device is provided with a lifting device, and the top loading platform of the lifting end of the lifting device is provided with a high-precision multi-axis correction platform. By setting the module body, the sliding device and the lifting device can be carried; by setting the sliding device, the horizontally movable lifting device can be made to drive the high-precision multi-axis correction platform to move horizontally between the short-side correction device and the four-station rotary loading and unloading device for feeding and resetting; by setting the lifting device, the high-precision multi-axis correction platform can be lifted and lowered, so that the high-precision multi-axis correction platform can take the cell from the short-side correction device and raise the cell to a preset height, so that the high-precision industrial CCD camera on the camera positioning device can take pictures and position the cell; by setting the high-precision multi-axis correction platform, the position of the cell can be finally corrected according to the cell position data transmitted by the camera positioning device, so as to meet the high-precision requirements of the exposure machine body for loading.
[0013] Compared with the prior art, the utility model has the following beneficial effects:
[0014] By setting up the front-end adjustment and detection unit, the battery cells can be inspected before exposure, so as to remove unqualified battery cells, and the qualified battery cells can be corrected and turned to facilitate entering the P-side loading and unloading unit; by setting up the P-side loading and unloading unit, the battery cells can be further positioned and corrected, and the qualified battery cells can be loaded onto the exposure machine body for P-side exposure of the battery cells, and the battery cells after P-side exposure can be transferred from the unloading position of the exposure machine body to the conveyor to enter the mid-end adjustment and detection unit; by setting up the mid-end adjustment and detection unit, the position of the battery cells after P-side exposure can be adjusted and the quality can be inspected. The battery cells with unqualified P-side exposure are removed, and the battery cells are sent to the N-side loading and unloading unit; by setting the N-side loading and unloading unit, the battery cells can be further positioned and corrected, and the battery cells are loaded to the exposure machine body to expose the N-side of the battery cells, and the battery cells that have finished N-side exposure can be transferred from the unloading position of the exposure machine body to the conveyor and enter the rear-end detection unit; by setting the rear-end detection unit, the battery cells after N-side exposure can be detected and detected, and the battery cells with unqualified N-side exposure can be removed; by setting multiple inspection devices, the quality of the exposed battery cells can be guaranteed to be qualified. The utility model can replace manual loading and unloading of battery cells, and can also ensure the loading accuracy and accurately screen and remove unqualified battery cells, effectively improving the production efficiency and the qualified rate of products. BRIEF DESCRIPTION OF THE DRAWINGS
[0015] Figure 1 This is a top view of the overall device of an embodiment of the utility model.
[0016] Figure 2 It is a structural schematic diagram of the P-surface loading and unloading unit in one embodiment of the utility model.
[0017] Figure 3 It is a structural schematic diagram of a cross module in an embodiment of the utility model.
[0018] In the figure, 1 is the exposure machine body; 2 is the front-end adjustment and detection unit; 3 is the P-side loading and unloading unit; 4 is the middle-end adjustment and detection unit; 5 is the N-side loading and unloading unit; 6 is the rear-end detection unit; 7 is the PL detection device; 8 is the first AOI detection device; 9 is the long-side alignment device; 10 is the first lifting and rotating device; 11 is the positioning photoelectric detection device; 12 is the short-side alignment device; 13 is the cross module; 14 is the four-station rotating loading and unloading device; 15 is the steering device; 16 is the camera positioning device; 17 is the first NG rejection device; 18 is the second lifting and rotating device; 19 is the long-side feed flipping device; 20 is the second AOI detection device; 21 is the second NG rejection device; 22 is the third AOI detection device;
[0019] 131. Module body; 132. Sliding device; 133. Lifting device; 134. High-precision multi-axis deviation correction platform. DETAILED DESCRIPTION
[0020] In order to clearly illustrate the technical features of the present invention, the present invention is described in detail below through specific implementation methods and in conjunction with the accompanying drawings.
[0021] Example 1
[0022] Figures 1 to 3 An embodiment of the present utility model is as follows: Figures 1 to 3 As shown, a cell loading and unloading device for an exposure machine includes two groups of exposure machine bodies 1 and several groups of conveyors, and also includes a P-side loading and unloading unit 3 and an N-side loading and unloading unit 5. The feeding end of the P-side loading and unloading unit 3 is provided with a front-end adjustment detection unit 2, the discharging end of the P-side loading and unloading unit 3 is connected with the feeding end of the N-side loading and unloading unit 5 through a middle-end adjustment detection unit 4, the discharging end of the N-side loading and unloading unit 5 is provided with a rear-end detection unit 6, one side of the P-side loading and unloading unit 3 is connected with one group of exposure machine bodies 1, and one side of the N-side loading and unloading unit 5 is connected with another group of exposure machine bodies 1, and the front-end adjustment detection unit 2, the P-side loading and unloading unit 3, the middle-end adjustment detection unit 4, the N-side loading and unloading unit 5 and the rear-end detection unit 6 are arranged in sequence along the conveying direction of the conveyor.
[0023] By setting up the front-end adjustment and detection unit 2, the battery cells can be inspected before exposure, so as to remove unqualified battery cells, and the qualified battery cells can be corrected and turned to facilitate entering the P-side loading and unloading unit 3; by setting up the P-side loading and unloading unit 3, the battery cells can be further positioned and corrected, and the qualified battery cells can be loaded onto the exposure machine body 1 to expose the battery cells on the P side, and the battery cells after the P-side exposure can be transferred from the unloading position of the exposure machine body 1 to the conveyor to enter the mid-end adjustment and detection unit 4; by setting up the mid-end adjustment and detection unit 4, the position of the battery cells after the P-side exposure can be adjusted and the quality can be inspected. By setting the N-side loading and unloading unit 5, the battery cells can be further positioned and corrected, and the battery cells can be loaded onto the exposure machine body 1 to expose the N-side of the battery cells, and the battery cells after the N-side exposure can be transferred from the unloading position of the exposure machine body 1 to the conveyor and enter the back-end detection unit 6; by setting the back-end detection unit 6, the battery cells after the N-side exposure can be detected and the battery cells with unqualified N-side exposure can be removed; by setting multiple inspection devices, the quality of the exposed battery cells can be guaranteed to be qualified.
[0024] The front-end adjustment detection unit 2 includes a PL detection device 7, a first AOI detection device 8, a long side correction device 9 and a first lifting and rotating device 10 which are sequentially arranged along the conveying direction. By setting the PL detection device 7, infrared technology can be used to detect cracks, holes, microcrystallization, impurities and other hard points on the battery cell; by setting the first AOI detection device 8, the detection welding points on the battery cell can be scanned, images can be collected, and compared with qualified parameters in the database, and defects on the battery cell can be checked after image processing; by setting the long side correction device 9, the battery cell can be corrected in the length direction to achieve pre-positioning of the battery cell; by setting the first lifting and rotating device 10, the battery cell can be horizontally rotated 90° to facilitate the battery cell to enter the P-surface loading and unloading unit 3.
[0025] like Figure 1 , Figure 2 and Figure 3 As shown, the P-surface loading and unloading unit 3 includes a positioning photoelectric detection device 11, a short edge correcting device 12, a cross module 13, a four-station rotary loading and unloading device 14 and a steering device 15 which are arranged in sequence along the conveying direction. A camera positioning device 16 is provided above the cross module 13. The four-station rotary loading and unloading device 14 includes four groups of suction cup clamps distributed in a "cross" shape. The four groups of suction cup clamps flow in sequence in a clockwise direction between the four stations. The four stations are the unloading position of the cross module 13, the loading position of the exposure machine body 1, the unloading position of the exposure machine body 1 and the loading position of the steering device 15 in a clockwise direction. The suction cup clamps perform the corresponding actions of each station when they flow through the station. By setting up a positioning photoelectric detection device 11, the battery cell can be detected and positioned by a photoelectric sensor, so as to compensate for the front and rear positions of the battery cell; by setting up a short-side correcting device 12, the battery cell can be corrected in the width direction to achieve pre-positioning of the battery cell; by setting up a cross module 13, the cell can be taken from the conveyor belt in a cross manner, and after the battery cell leaves the belt surface and reaches a preset height, the camera positioning device 16 takes a picture to further correct the position of the battery cell; by setting up a four-station rotating loading and unloading device 14, the four stations can coordinate operations to achieve simultaneous loading and unloading of the exposure machine body 1, and the loading and unloading accuracy is high to meet the loading and unloading requirements; by setting up a steering device 15, the forward direction of the battery cell can be changed by 90°, so as to facilitate entry into the mid-end adjustment detection unit 4.
[0026] The mid-end adjustment detection unit 4 includes a first NG rejection device 17, a second lifting and rotating device 18, a long-side feed flipping device 19, and a second AOI detection device 20, which are sequentially arranged along the conveying direction. By setting the first NG rejection device 17, unqualified battery cells can be rejected; by setting the second lifting and rotating device 18, the battery cells can be horizontally rotated 90° and then sent to the next station; by setting the long-side feed flipping device 19, the battery cells can be flipped 180° and then sent to the next station; by setting the second AOI detection device 20, the flipped battery cell solder joints can be scanned, images can be collected, and compared with qualified parameters in the database. After image processing, defects on the battery cells can be checked, and unqualified battery cells can be rejected.
[0027] The N-side loading and unloading unit 5 is exactly the same as the P-side loading and unloading unit 3. By setting the N-side loading and unloading unit 5, the flipped cell can be positioned and corrected, and the cell can be loaded onto the exposure machine body 1 to perform N-side exposure on the cell, and the cell after N-side exposure can be transferred from the unloading position of the exposure machine body 1 to the conveyor, and finally enter the rear-end detection unit 6.
[0028] The rear-end detection unit 6 includes a second NG rejection device 21 and a third AOI detection device 22 which are sequentially arranged along the conveying direction. By setting the second NG rejection device 21, unqualified cells can be rejected; by setting the third AOI detection device 22, the N-side exposed cells can be scanned, images can be collected, and compared with qualified parameters in the database. After image processing, defects on the cells can be detected and unqualified cells can be rejected.
[0029] like Figure 3 As shown, the cross module 13 includes a module body 131, and sliding devices 132 are provided on both sides of the module body 131. A lifting device 133 is provided on the slider of the sliding device 132, and a high-precision multi-axis correction platform 134 is provided on the top loading platform of the lifting end of the lifting device 133. By setting up the module body 131, the sliding device 132 and the lifting device 133 can be mounted; by setting up the sliding device 132, the lifting device 133 can be moved horizontally, thereby driving the high-precision multi-axis correction platform 134 to move horizontally between the short-side correction device 12 and the four-station rotary loading and unloading device 14 to perform feeding and resetting; by setting up the lifting device 133, the high-precision multi-axis correction platform 134 can be lifted and lowered, so that the high-precision multi-axis correction platform 134 can take the cell from the short-side correction device 12, and lift the cell to a preset height, so that the high-precision industrial CCD camera on the camera positioning device 16 can be used to take pictures and position the cell; by setting up the high-precision multi-axis correction platform 134, the position of the cell can be finally corrected according to the cell position data transmitted by the camera positioning device 16, so as to meet the high-precision requirements of the exposure machine body 1 for loading.
[0030] When in use, the battery cell is conveyed forward along the conveyor belt, and after one station is processed, it enters the next station, and the conveyor belts between each station operate independently of each other; first, the battery cell is sent to the PL detection device 7 by the conveyor belt, and the PL detection device 7 detects cracks, holes, microcrystals, impurities and other hard points on the battery cell. After the detection is completed, it is sent to the first AOI detection device 8 for further detection, and then the battery cell is sent to the station of the long edge correction device 9 for length direction correction, and then rotated horizontally 90° by the first jacking and rotating device 10, and flows out of the front end adjustment detection unit 2; the battery cell flows into the P surface loading and unloading unit 3, and first the positioning photoelectric detection device 11 detects and positions the battery cell, so as to adjust the front of the battery cell. After the correction, a set of lifting devices 133 drives the high-precision multi-axis correction platform 134 to take the cell from the short-side correction device 12, and lift the cell to a preset height, and the high-precision industrial CCD camera on the camera positioning device 16 takes a picture of the cell and positions it, and the high-precision multi-axis correction platform 134 makes the final correction to the position of the cell according to the cell position data transmitted by the camera positioning device 16, so as to meet the high-precision requirements of the exposure machine body 1 for loading, and with the operation of the sliding device 132, the cell is sent to the unloading position of the cross module 13; at this time, the four-station The rotary loading and unloading device 14 descends in height, and the suction cup fixture corresponding to the unloading position of the cross module 13 absorbs the battery cell to be exposed, and the suction cup fixture corresponding to the loading position of the exposure machine body 1 releases the battery cell to be exposed to the loading position of the exposure machine body 1. The suction cup fixture corresponding to the unloading position of the exposure machine body 1 absorbs the battery cell after P surface exposure, and the suction cup fixture corresponding to the loading position of the steering device 15 releases the battery cell after P surface exposure to the loading position of the steering device 15; then the four-station rotary loading and unloading device 14 rises in height and rotates, so that the four groups of suction cup fixtures flow to the next station, and execute the set action corresponding to the station, and continuously perform loading and unloading steps for the exposure machine body 1; the battery cell completes P After the surface exposure, the steering device 15 changes the forward direction of the battery cell by 90°, so that it is transported to the middle-end adjustment and detection unit 4; after entering the middle-end adjustment and detection unit 4, the first NG rejection device 17 rejects unqualified battery cells, and then the second lifting and rotating device 18 rotates the battery cell horizontally by 90° and sends it to the long-side feeding flipping device 19, and the long-side feeding flipping device 19 flips the battery cell 180° and sends it to the second AOI detection device 20, and the second AOI detection device 20 inspects the defects of the battery cell again and rejects unqualified battery cells, and qualified battery cells flow out of the middle-end adjustment and detection unit 4 and flow into the N-side loading and unloading unit 5 for N-side exposure. The loading and unloading process of N-side exposure is the same as that of P-side exposure;After the N-side exposure is completed, the cell enters the rear-end inspection unit 6, the third AOI inspection device 22 inspects the cell again, and the second NG rejection device 21 rejects unqualified cells; the utility model can replace manual loading and unloading of cells, and can ensure loading accuracy and accurately screen and reject unqualified cells, effectively improving production efficiency and product qualification rate. ;
[0031] The descriptions of the orientation or relative position relationship of the structure in the present invention, such as the orientation or relative position relationship indicated by "center", "up", "down", "left", "right", "vertical", "horizontal", "inside", "outside", etc., are based on the orientation or position relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the structure referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.
Claims
1. A cell loading and unloading device for an exposure machine, comprising two sets of exposure machine bodies (1), characterized in that: It also comprises a P-side loading and unloading unit (3) and an N-side loading and unloading unit (5); the feeding end of the P-side loading and unloading unit (3) is provided with a front-end adjustment detection unit (2); the discharging end of the P-side loading and unloading unit (3) is connected to the feeding end of the N-side loading and unloading unit (5) via a middle-end adjustment detection unit (4); the discharging end of the N-side loading and unloading unit (5) is provided with a rear-end detection unit (6); one side of the P-side loading and unloading unit (3) is connected to a group of exposure machine bodies (1); and one side of the N-side loading and unloading unit (5) is connected to another group of exposure machine bodies (1).
2. The cell loading and unloading device for an exposure machine according to claim 1, characterized in that: the front end The adjustment detection unit (2) comprises a PL detection device (7), a first AOI detection device (8), a long edge alignment device (9) and a first lifting and rotating device (10) which are sequentially arranged along the conveying direction.
3. The cell loading and unloading device for an exposure machine according to claim 2, characterized in that: The surface loading and unloading unit (3) comprises a positioning photoelectric detection device (11), a short side correction device (12), a cross module (13), a four-station rotary loading and unloading device (14) and a steering device (15) which are sequentially arranged along the conveying direction, and a camera positioning device (16) is arranged above the cross module (13).
4. The cell loading and unloading device for an exposure machine according to claim 3, characterized in that: The mid-end adjustment detection unit (4) comprises a first NG rejection device (17), a second lifting and rotating device (18), a long-side feed flipping device (19), and a second AOI detection device (20) which are sequentially arranged along the conveying direction.
5. The cell loading and unloading device for an exposure machine according to claim 4, characterized in that: The N-side loading and unloading unit (5) is completely the same as the P-side loading and unloading unit (3).
6. The cell loading and unloading device for an exposure machine according to claim 5, characterized in that: The rear end detection unit (6) comprises a second NG rejection device (21) and a third AOI detection device (22) which are sequentially arranged along the conveying direction.
7. The cell loading and unloading device for an exposure machine according to any one of claims 1 to 6, characterized in that: The cross module (13) comprises a module body (131), both sides of the module body (131) are provided with sliding devices (132), the slider of the sliding device (132) is provided with a lifting device (133), and the top loading platform of the lifting end of the lifting device (133) is provided with a high-precision multi-axis deviation correction platform (134).