Silicon wafer guiding and arranging device

Abstract

The utility model relates to the technical field of silicon wafer transportation, in particular to a silicon wafer guiding and normalizing device which comprises a workbench, mounting seats, a driving wheel, a normalizing wheel, a conveying mechanism and a normalizing belt, the two sides of the top end of the workbench are each provided with one mounting seat in a sliding mode, the output ends of transmission mechanisms on the mounting seats are connected with the driving wheel, and the workbench is provided with the conveying mechanism. A plurality of regulating wheels are arranged on the two sides of the conveying mechanism, the regulating wheels are rotationally connected with the mounting base, the driving wheel is in transmission connection with the regulating wheels through a regulating belt, and the regulating wheels and the regulating belt are arranged, so that silicon wafers can be guided, and the silicon wafers are kept in a proper stress state in the moving process; subfissure, edge breakage, corner breakage and breakage of the silicon wafer in the moving process are prevented.

Description

Technical Field

[0001] The utility model relates to the technical field of silicon wafer transportation, in particular to a silicon wafer guiding and regularizing device. Background Art

[0002] Silicon wafer is a semiconductor material used to make the core components of solar panels, integrated circuits, microwave devices and other electronic components. The main component of silicon wafer is high-purity single-crystal silicon (Si), which has good conductivity and high strength. In the semiconductor industry, silicon wafer is one of the most basic production materials.

[0003] When the silicon wafer is driven by the transmission belt of the silicon wafer flow channel, it may become skewed, which may cause hidden cracks, broken edges or missing corners, or even directly lead to fragmentation during the subsequent steps. In this case, it is necessary to use a straightener to adjust the transmission state of the silicon wafer to keep it in an appropriate state to adapt to the production and processing process of the subsequent steps. Utility Model Content

[0004] The utility model aims to provide a silicon wafer guiding and regularizing device to solve the problem raised in the background technology.

[0005] To achieve the above-mentioned purpose, the utility model provides the following technical solution: a silicon wafer guiding and tidying device, comprising: a workbench, a mounting seat, a driving wheel, a tidying wheel, a conveying mechanism and a tidying belt, wherein a mounting seat is slidably arranged on each side of the top of the workbench, and a driving wheel is connected to the output end of the transmission mechanism on the mounting seat. A conveying mechanism is installed on the workbench, and a plurality of tidying wheels are arranged on both sides of the conveying mechanism. The tidying wheel is rotatably connected to the mounting seat, and the driving wheel is transmission-connected to the tidying wheel through the tidying belt.

[0006] Preferably, an angle is formed between the input end of the regular belt and the conveying mechanism, a second angle is formed between the output end of the regular belt and the conveying mechanism, the angle is greater than the second angle, and the middle part of the regular belt is arranged parallel to the conveying mechanism.

[0007] Preferably, the transmission mechanism comprises: a motor and a rotating shaft, the mounting seat is equipped with a motor, the output end of the motor extending through the top surface of the mounting seat is connected to the bottom end of the rotating shaft, and the top end of the rotating shaft is connected to a driving wheel.

[0008] Preferably, the mounting seat is provided with a plurality of transverse grooves, the bottom wall of the transverse grooves is provided with transverse through grooves, and the top openings of the transverse grooves are larger than the top openings of the transverse through grooves.

[0009] Preferably, the top surface of the workbench is provided with a plurality of screw holes, the inner walls of the screw holes are arranged tangent to the inner walls of the transverse through slots, the inner threads of the screw holes are connected with bolts, the bolts are placed in the transverse through slots, the top surfaces of the bolts are connected with nuts, and the bottom surfaces of the nuts are in contact with and fit with the bottom walls of the transverse slots.

[0010] Preferably, the top surface of the nut is placed above the top surface of the mounting seat.

[0011] Preferably, it also includes: a tensioning mechanism; the tensioning mechanism includes: a mounting shaft, a slider, a tensioning wheel and a locking mechanism, the mounting seat has a longitudinal groove on the bottom surface, a longitudinal through groove on the top wall of the longitudinal groove, the top opening of the longitudinal groove is larger than the opening at the bottom end of the longitudinal through groove, two sliders are slidably connected in the longitudinal groove, both sliders are connected to the locking mechanism, a mounting shaft is installed on the top surface of the slider, the mounting shaft is placed in the longitudinal through groove, a tensioning wheel is connected to the end of the mounting shaft placed on the top surface of the mounting seat, and the side walls of the two tensioning wheels are respectively frictionally matched with the side walls of the regular belt.

[0012] Preferably, the locking mechanism includes: a bidirectional screw and a knob, one end of the bidirectional screw is rotatably connected to the inner wall of the longitudinal groove, the bidirectional screw is threadedly connected to two sliders, and the end of the bidirectional screw that passes through the side wall of the mounting seat is equipped with a knob.

[0013] Preferably, scale lines are provided on the workbench.

[0014] Preferably, the conveying mechanism includes: a pulley, a conveyor belt and a guide wheel, the bottom wall of the groove of the workbench is equipped with a mounting block, both ends of the mounting block are rotatably connected to a transmission shaft, both ends of the transmission shaft are equipped with a pulley, the two pulleys on the same side of the mounting block are connected through a conveyor belt transmission, a transmission motor is installed in the mounting block, and a guide wheel is installed at the output end of the transmission motor that passes through the side wall of the mounting block, and the side wall of the guide wheel is frictionally matched with the side wall of the conveyor belt.

[0015] The beneficial effects of the utility model are as follows:

[0016] By setting the regularizing wheels and regularizing belts, the silicon wafers can be guided so that they maintain an appropriate stress state during movement, preventing the silicon wafers from cracking, collapsing edges, chipping corners and breaking during movement. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a schematic diagram of the main structure of the utility model;

[0018] Figure 2 This is a schematic diagram of the installation position of the rotating shaft of the utility model;

[0019] Figure 3 It is a schematic diagram of the locking mechanism structure of the utility model.

[0020] In the figure: workbench 1, mounting base 2, driving wheel 3, tidying wheel 4, conveying mechanism 5, tidying belt 6, motor 7, rotating shaft 8, transverse groove 9, transverse through groove 10, nut 11, tensioning mechanism 12, mounting shaft 13, slider 14, tensioning wheel 15, locking mechanism 16, bidirectional screw 17, knob 18, pulley 19, conveyor belt 20, guide wheel 21. DETAILED DESCRIPTION

[0021] In order to make the purpose, technical solution and advantages of the embodiment of the utility model clearer, the technical solution in the embodiment of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiment of the utility model. Obviously, the described embodiment is a part of the embodiment of the utility model, not all the embodiments. Based on the embodiment of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0022] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0023] Example: Reference Figure 1-Figure 3 A silicon wafer guiding and tidying device comprises: a workbench 1, a mounting seat 2, a driving wheel 3, a tidying wheel 4, a conveying mechanism 5 and a tidying belt 6, wherein a mounting seat 2 is slidably provided on both sides of the top of the workbench 1, and a driving wheel 3 is connected to the output end of the transmission mechanism on the mounting seat 2. A conveying mechanism 5 is installed on the workbench 1, and a plurality of tidying wheels 4 are arranged on both sides of the conveying mechanism 5. The tidying wheel 4 is rotatably connected to the mounting seat 2, and the driving wheel 3 is transmission-connected to the tidying wheel 4 through the tidying belt 6.

[0024] The principles and beneficial effects of the above scheme are:

[0025] Adjust the relative positions of the two mounting seats 2 on the workbench 1 so that the spacing between the tidying wheels 4 on the two mounting seats 2 is equal to the width of the silicon wafer. After placing the silicon wafer on the conveying mechanism 5, start the conveying mechanism 5 to convey the silicon wafer. When the end of the silicon wafer moves to the first pair of tidying wheels 4, start the driving wheel 3. The driving wheel 3 rotates to drive the tidying belt 6 to move. The tidying wheels 4 guide the tidying belt 6 and the silicon wafer. By setting the tidying wheels 4 and the tidying belt 6, the silicon wafer can be guided so that the silicon wafer maintains an appropriate stress state during the movement, thereby preventing the silicon wafer from cracking, collapsing edges, missing corners and breaking during the movement.

[0026] An angle is formed between the input end of the regular belt 6 and the conveying mechanism 5 , and a second angle is formed between the output end of the regular belt 6 and the conveying mechanism 5 . The angle is greater than the second angle, and the middle part of the regular belt 6 is arranged parallel to the conveying mechanism 5 .

[0027] The principles and beneficial effects of the above scheme are:

[0028] An angle is formed between the input end of the regular belt 6 and the conveying mechanism 5, and a second angle is formed between the output end of the regular belt 6 and the conveying mechanism 5. The angle is greater than the second angle. When the conveying mechanism 5 transports silicon wafers, the spacing between the two input ends of the regular belts 6 is large, and sufficient space is reserved for guiding the silicon wafers to prevent the silicon wafers from breaking. The middle part of the regular belt 6 is arranged parallel to the conveying mechanism 5 to prevent the silicon wafers from moving during the guidance process, thereby improving the stability of silicon wafer transportation. The spacing between the output ends of the two regular belts 6 is smaller than the spacing between the input ends of the two regular belts 6. The output end of the regular belt 6 slowly breaks away from contact with the silicon wafer to prevent the silicon wafer from breaking due to the sudden disappearance of the force applied to it during transportation.

[0029] The transmission mechanism includes: a motor 7 and a rotating shaft 8. The mounting seat 2 is equipped with the motor 7. The output end of the motor 7 extending through the top surface of the mounting seat 2 is connected to the bottom end of the rotating shaft 8. The top end of the rotating shaft 8 is connected to the driving wheel 3.

[0030] The principles and beneficial effects of the above scheme are:

[0031] The rotation of the motor 7 drives the rotating shaft 8 to rotate, and the rotation of the rotating shaft 8 drives the driving wheel 3 to rotate. The motor 7 is arranged in the mounting seat 2 to fully utilize the space of the device.

[0032] The mounting seat 2 is provided with a plurality of transverse grooves 9 , the bottom wall of the transverse grooves 9 is provided with transverse through grooves 10 , and the top openings of the transverse grooves 9 are larger than the top openings of the transverse through grooves 10 .

[0033] The principles and beneficial effects of the above scheme are:

[0034] By providing the transverse groove 9 on the mounting seat 2 and providing the transverse through groove 10 on the bottom wall of the transverse groove 9 , the weight of the mounting seat 2 can be effectively reduced, and the relative positions of the two mounting seats 2 can be adjusted efficiently.

[0035] The top surface of the workbench 1 is provided with a plurality of screw holes, the inner walls of the screw holes are tangent to the inner walls of the transverse through slots 10 , the inner threads of the screw holes are connected with bolts, the bolts are placed in the transverse through slots 10 , the top surfaces of the bolts are connected with nuts 11 , and the bottom surfaces of the nuts 11 are in contact with the bottom walls of the transverse slots 9 .

[0036] The principles and beneficial effects of the above scheme are:

[0037] A screw hole is opened on the top surface of the workbench 1, and the inner wall of the screw hole is tangent to the inner wall of the transverse through groove 10. A bolt is connected to the inner thread of the screw hole. The bolt is placed in the transverse through groove 10, and the bolt can guide the mounting seat 2; a nut 11 is connected to the top surface of the bolt, and the bottom surface of the nut 11 contacts and cooperates with the bottom wall of the transverse groove 9, and the nut 11 can position the mounting seat 2.

[0038] The top surface of the nut 11 is placed above the top surface of the mounting seat 2 .

[0039] The principles and beneficial effects of the above scheme are:

[0040] The top surface of the nut 11 is placed above the top surface of the mounting seat 2 , so that when the mounting seat 2 needs to be adjusted in position, it is convenient for an operator to use a tool to screw the nut 11 .

[0041] It also includes: a tensioning mechanism 12; the tensioning mechanism 12 includes: a mounting shaft 13, a slider 14, a tensioning wheel 15 and a locking mechanism 16, the bottom surface of the mounting seat 2 is provided with a longitudinal groove, the top wall of the longitudinal groove is provided with a longitudinal through groove, the top opening of the longitudinal groove is larger than the opening at the bottom end of the longitudinal through groove, two sliders 14 are slidably connected in the longitudinal groove, the two sliders 14 are both connected to the locking mechanism 16, the top surface of the slider 14 is provided with a mounting shaft 13, the mounting shaft 13 is placed in the longitudinal through groove, the end of the mounting shaft 13 placed on the top surface of the mounting seat 2 is connected with a tensioning wheel 15, and the side walls of the two tensioning wheels 15 are respectively frictionally matched with the side walls of the regular belt 6.

[0042] The principles and beneficial effects of the above scheme are:

[0043] By adjusting the locking mechanism 16 in the positive direction, the two sliders 14 move toward each other, the slider 14 drives the installation shaft 13 to move, and the tensioning wheel 15 on the installation shaft 13 clamps the regular belt 6; by adjusting the locking mechanism 16 in the reverse direction, the slider 14 drives the installation shaft 13 to move in the opposite direction, and the tensioning wheel 15 on the installation shaft 13 reduces the clamping force on the regular belt 6. By setting the locking mechanism 16 to drive the slider 14 to move, the slider 14 drives the installation shaft 13 and the tensioning wheel 15 to move, the force applied by the tensioning mechanism 12 to the regular belt 6 can be controlled, the tightness of the regular belt 6 can be quickly adjusted, and the tensioning wheel 15 is set on the installation shaft 13, so that the tensioning wheel 15 can guide the regular belt 6.

[0044] The locking mechanism 16 includes: a bidirectional screw 17 and a knob 18. One end of the bidirectional screw 17 is rotatably connected to the inner wall of the longitudinal groove. The bidirectional screw 17 is threadedly connected to two sliders 14. The end of the bidirectional screw 17 that passes through the side wall of the mounting seat 2 is equipped with a knob 18.

[0045] The principles and beneficial effects of the above scheme are:

[0046] When it is necessary to clamp the regular belt 6, the knob 18 is turned forward, and the knob 18 drives the bidirectional screw 17 to rotate forward, and the bidirectional screw 17 drives the two sliders 14 to move closer; when it is necessary to loosen the regular belt 6, the knob 18 is turned reversely, and the knob 18 drives the bidirectional screw 17 to rotate reversely, and the bidirectional screw 17 drives the two sliders 14 to move in opposite directions. The bidirectional screw 17 can quickly adjust the tension and relaxation of the regular belt 6. The knob 18 is arranged outside the side wall of the mounting seat 2, which makes full use of the space of the device and is convenient for the operator to turn the knob 18.

[0047] The workbench 1 is provided with scale lines.

[0048] The principles and beneficial effects of the above scheme are:

[0049] The mounting seat 2 can be accurately positioned by setting scale lines on the workbench 1 .

[0050] The conveying mechanism 5 includes: a pulley 19, a conveyor belt 20 and a guide wheel 21. The bottom wall of the groove of the workbench 1 is equipped with a mounting block, and each end of the mounting block is rotatably connected to a transmission shaft, and each end of the transmission shaft is equipped with a pulley 19. The two pulleys 19 on the same side of the mounting block are connected through the conveyor belt 20. A transmission motor is installed in the mounting block, and a guide wheel 21 is installed at the output end of the transmission motor that passes through the side wall of the mounting block. The side wall of the guide wheel 21 is frictionally matched with the side wall of the conveyor belt 20.

[0051] The principles and beneficial effects of the above scheme are:

[0052] When the silicon wafer needs to be transported, the transmission motor is started to reverse, and the reverse rotation of the transmission motor drives the guide wheel 21 to reverse, and the reverse rotation of the guide wheel 21 drives one side of the conveyor belt 20 to rotate forward, and the conveyor belt 20 drives the other pulley 19 to rotate through the pulley 19 and the transmission shaft connected thereto, and the other pulley 19 drives the other conveyor belt 20 to rotate forward; the stability of silicon wafer transportation is improved by setting two conveyor belts 20; the two ends of the conveyor belt 20 are respectively connected to a guide wheel 21 for transmission, and the guide wheel 21 is connected to the transmission shaft, and the transmission shaft drives the other guide wheel 21 to rotate, thereby improving the efficiency of synchronous movement of the device.

[0053] It is obvious to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above, and that the present invention can be implemented in other specific forms without departing from the spirit or basic features of the present invention. Therefore, no matter from which point of view, the embodiments should be regarded as exemplary and non-restrictive, and the scope of the present invention is defined by the appended claims rather than the above description, and it is intended that all changes falling within the meaning and scope of the equivalent elements of the claims are included in the present invention, and any figure mark in the claims should not be regarded as limiting the claims involved.

Claims

1. A silicon wafer guiding and regularizing device, characterized in that: include: A workbench (1), a mounting seat (2), a driving wheel (3), a tidying wheel (4), a conveying mechanism (5) and a tidying belt (6), wherein a mounting seat (2) is slidably mounted on both sides of the top of the workbench (1), the output end of the transmission mechanism on the mounting seat (2) is connected to the driving wheel (3), the workbench (1) is equipped with a conveying mechanism (5), a plurality of tidying wheels (4) are arranged on both sides of the conveying mechanism (5), the tidying wheels (4) are rotatably connected to the mounting seat (2), and the driving wheel (3) is transmission-connected to the tidying wheel (4) via the tidying belt (6).

2. A silicon wafer guiding and aligning device according to claim 1, characterized in that: An angle is formed between the input end of the regular belt (6) and the conveying mechanism (5), and a second angle is formed between the output end of the regular belt (6) and the conveying mechanism (5). The angle is greater than the second angle, and the middle part of the regular belt (6) is arranged parallel to the conveying mechanism (5).

3. The silicon wafer guiding and aligning device according to claim 1, characterized in that: The transmission mechanism comprises: a motor (7) and a rotating shaft (8); the mounting seat (2) is provided with the motor (7); the output end of the motor (7) extending through the top surface of the mounting seat (2) is connected to the bottom end of the rotating shaft (8); and the top end of the rotating shaft (8) is connected to the driving wheel (3).

4. The silicon wafer guiding and aligning device according to claim 3, characterized in that: The mounting seat (2) is provided with a plurality of transverse grooves (9), the bottom wall of the transverse grooves (9) is provided with transverse through grooves (10), and the top opening of the transverse grooves (9) is larger than the top opening of the transverse through grooves (10).

5. The silicon wafer guiding and aligning device according to claim 4, characterized in that: The top surface of the workbench (1) is provided with a plurality of screw holes, the inner walls of the screw holes are arranged tangent to the inner walls of the transverse through slots (10), the inner threads of the screw holes are connected with bolts, the bolts are placed in the transverse through slots (10), the top surfaces of the bolts are connected with nuts (11), and the bottom surfaces of the nuts (11) are in contact with the bottom walls of the transverse slots (9).

6. The silicon wafer guiding and aligning device according to claim 5, characterized in that: The top surface of the nut (11) is placed above the top surface of the mounting seat (2).

7. The silicon wafer guiding and aligning device according to claim 6, characterized in that: Also includes: A tensioning mechanism (12); the tensioning mechanism (12) comprises: a mounting shaft (13), a slider (14), a tensioning wheel (15) and a locking mechanism (16); the mounting seat (2) has a bottom surface with a longitudinal groove, the top wall of the longitudinal groove has a longitudinal through groove, the top opening of the longitudinal groove is larger than the bottom opening of the longitudinal through groove, two sliders (14) are slidably connected in the longitudinal groove, both sliders (14) are connected to the locking mechanism (16), the top surface of the slider (14) is equipped with a mounting shaft (13), the mounting shaft (13) is placed in the longitudinal through groove, the end of the mounting shaft (13) placed on the top surface of the mounting seat (2) is connected to the tensioning wheel (15), and the side walls of the two tensioning wheels (15) are respectively frictionally matched with the side walls of the regular belt (6).

8. The silicon wafer guiding and aligning device according to claim 7, characterized in that: The locking mechanism (16) comprises: a bidirectional screw (17) and a knob (18); one end of the bidirectional screw (17) is rotatably connected to the inner wall of the longitudinal groove; the bidirectional screw (17) is threadedly connected to two sliders (14); and the end of the bidirectional screw (17) that passes through the side wall of the mounting seat (2) is provided with a knob (18).

9. The silicon wafer guiding and aligning device according to claim 5, characterized in that: The workbench (1) is provided with scale lines.

10. The silicon wafer guiding and aligning device according to claim 8, characterized in that: The conveying mechanism (5) comprises: a pulley (19), a conveyor belt (20) and a guide wheel (21); a mounting block is mounted on the bottom wall of the groove of the workbench (1); two ends of the mounting block are rotatably connected to a transmission shaft; two ends of the transmission shaft are respectively mounted with a pulley (19); two pulleys (19) on the same side of the mounting block are connected by transmission through the conveyor belt (20); a transmission motor is mounted in the mounting block; a guide wheel (21) is mounted on the output end of the transmission motor extending out of the side wall of the mounting block; the side wall of the guide wheel (21) is frictionally matched with the side wall of the conveyor belt (20).

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