Cavity cooling mechanism

Abstract

The utility model relates to the technical field of equipment cooling, and particularly discloses a cavity cooling mechanism which comprises a cooling channel assembly arranged inside the outer side of a cooling main body and provided with a cold inlet and a cold outlet. The cooling channel cover plate assembly covers the outer side of the cooling channel assembly; the inner sinking type water channel structure design is adopted, the overall three faces of the cooling channel can make contact with the cooling body, the contact area of a cooling medium and the cooling body is increased, the heat dissipation effect is improved, and space is not occupied; a communication channel design is adopted between the adjacent cooling channels of the cooling channel assembly, the cooling channels between the adjacent cooling channels on the adjacent faces are communicated, the cooling channels on the four faces form a circulation, and the structure is compact; the cooling channel assembly and the cooling channel cover plate assembly are connected in a welding mode, the welding quality can be guaranteed, the sealing strength of the cooling water channel is improved, and the strength is high.

Description

Technical Field

[0001] The utility model belongs to the technical field of equipment cooling, and in particular relates to a cavity cooling mechanism. Background Art

[0002] At present, the mainstream ALD reaction chamber cooling mechanism in the market is an external surround structure set on the outer surface of the reaction chamber, and the round tube or square tube is fixed to the outer surface of the reaction chamber by bolt connection or welding. The round tube and square tube are in line contact and surface contact with each other respectively, and at the same time, a layer of metal plate is separated from the cooling water and the outer surface of the reaction chamber. The speed and efficiency of cooling water flowing along the water pipe to reduce the temperature of the outer surface of the reaction chamber are very low; At present, the external surround cooling mechanism of the prior art includes a cooling water square tube, a water inlet joint, and a water outlet joint, and the specific arrangement is as follows Figure 7 As shown; its working principle is: one side of the cooling water square tube is fixed around the reaction chamber by welding, and two joints are respectively set at the starting point and the end point of the cooling water square tube, namely, the water inlet joint (cold inlet joint 4) and the water outlet joint (cold outlet joint 5). The cooling water enters the square tube (cooling channel as a whole 1) from the water inlet joint (cold inlet joint 4) and flows along the arrangement direction of the cooling water square tube (cooling channel as a whole 1), and flows out from the water outlet joint (cold outlet joint 5). The water flows through the contact surface of the cooling water square tube (cooling channel as a whole 1) and the reaction chamber (cooling body 7) to transfer heat, take away part of the heat of the reaction chamber, and reduce the temperature of the reaction chamber; however, the cooling water square tube and the reaction chamber are in contact with only one side of the scheme, the heat dissipation effect is poor, and the heat dissipation efficiency is low; the fixing method of the scheme adopts a transmission welding method, the stress deformation is large, and the weld is prone to pores; the scheme adopts an external surround structure, the structural space is large, the appearance is not beautiful, and it is not convenient to use. Utility Model Content

[0003] The purpose of the utility model is to provide a cavity cooling mechanism to solve the problems raised in the above background technology.

[0004] In order to achieve the above purpose, the utility model provides the following technical solutions:

[0005] A cavity cooling mechanism, comprising:

[0006] The invention comprises a cooling assembly arranged outside a cooling body, wherein the cooling assembly comprises:

[0007] The cooling channel as a whole is arranged inside the outer side of the cooling body, that is, formed in the groove inside the outer side of the cooling body, so that three of the four sides of the cooling channel as a whole are in contact with the reaction chamber of the cooling body, thereby increasing the contact area between the cooling medium and the reaction chamber of the cooling body, improving the heat dissipation effect, and having higher heat dissipation efficiency. The internally sunken water channel layout does not occupy space, has high integration, and has a beautiful appearance. The cooling channel as a whole is respectively provided with a cold inlet and a cold outlet, the cold inlet is used to pass the cooling medium, and the cold outlet is used to flow out the cooling medium, thereby realizing a cooling cycle, which is beneficial to the cooling of the cavity;

[0008] The cooling channel cover plate is arranged on the outside of the cooling channel and is used to seal the cooling channel.

[0009] Preferably, the cooling channel generally includes cooling channel 1, cooling channel 2, cooling channel 3 and cooling channel 4, wherein cooling channel 1 is arranged at the bottom end of the cooling body, cooling channel 2 is arranged at the front end of the cooling body, cooling channel 3 is arranged at the top end of the cooling body, and cooling channel 4 is arranged at the rear end of the cooling body, and each of the cooling channel 1, cooling channel 2, cooling channel 3 and cooling channel 4 is connected to each other through a connecting piece;

[0010] The cooling channel 1, the cooling channel 2, the cooling channel 3 and the cooling channel 4 are all configured as continuously curved channels, thereby increasing the moving distance of the cooling medium and improving the cooling effect.

[0011] Preferably, the connecting piece is configured as a connecting channel, which is used to connect two adjacent groups of mutually perpendicular cooling channels, so that the cooling channel 1, the cooling channel 2, the cooling channel 3 and the cooling channel 4 can be connected end to end, so that the cooling medium enters from the cold inlet, passes through the cooling channel 1, the cooling channel 2, the cooling channel 3 and the cooling channel 4 in sequence, and then flows out from the cold outlet, so as to realize the circulation of the cooling medium;

[0012] The communication channel is configured as a cross-shaped channel structure, which is conducive to the circulation of the cooling medium. The communication channel is provided with four groups of ports, two groups of ports are provided with sealing bodies, which can achieve a sealing effect, so that the communication channel has four ports, two adjacent groups of ports are used to achieve communication with two adjacent groups of cooling channels, and the other two groups of ports are provided with sealing plugs for sealing;

[0013] The sealing body is configured as a sealing plug, which can play a sealing role.

[0014] Preferably, the cooling channel cover plate generally includes four groups of cooling channel cover plates, and the four groups of cooling channel cover plates are respectively covered on the outside of cooling channel one, cooling channel two, cooling channel three and cooling channel four, so as to seal cooling channel one, cooling channel two, cooling channel three and cooling channel four.

[0015] Preferably, the four groups of cooling channel cover plates are respectively welded to the outside of cooling channel one, cooling channel two, cooling channel three and cooling channel four. The specific welding method is a stir friction welding process, which is a welding process in the prior art and is not described in detail here. The welding process has small stress deformation, high strength, and no pores. At the same time, the structure is compact and beautiful. During welding, the cooling water channel and the cooling water channel cover plate flow from the front to the rear of the welding tool under the action of the rotating friction force of the welding tool, and form a dense solid phase weld under the extrusion of the welding tool.

[0016] Preferably, the cold inlet is connected to a cold inlet joint, which is conducive to the introduction of cooling medium, and the cold outlet is connected to a cold outlet joint, which is conducive to the outflow of cooling medium.

[0017] Preferably, a positioning member is provided between the cooling channel assembly and the cooling channel cover plate assembly for positioning the cooling channel assembly and the cooling channel cover plate assembly when the cooling channel assembly and the cooling channel cover plate assembly are installed.

[0018] Preferably, the positioning member includes: a positioning groove arranged inside the cooling channel as a whole and a positioning block arranged inside the cooling channel cover plate as a whole, the positioning block matches the positioning groove, and the positioning block is installed inside the corresponding positioning groove, thereby achieving the positioning installation of the cooling channel as a whole and the cooling channel cover plate as a whole.

[0019] Preferably, the positioning member includes: a positioning block arranged inside the cooling channel as a whole and a positioning groove arranged inside the cooling channel cover plate as a whole, the positioning block matches the positioning groove, and the positioning block is installed inside the corresponding positioning groove, thereby achieving the positioning installation of the cooling channel as a whole and the cooling channel cover plate as a whole.

[0020] Compared with the prior art, the beneficial effects of the utility model are:

[0021] (1) The present application adopts an internally sunken water channel structure design: the three sides of the cooling channel can contact the cooling body, which increases the contact area between the cooling medium and the cooling body, improves the heat dissipation effect, has higher heat dissipation efficiency, does not occupy space, has high integration, and has a beautiful appearance;

[0022] (2) The present application adopts a connecting channel design: the adjacent cooling channels of the cooling channel body adopt a connecting channel design, which penetrates the cooling channels between the adjacent cooling channels of the adjacent surfaces. The cooling channels of the four surfaces form a loop, which has a compact structure and improves the cooling effect;

[0023] (3) The cooling channel assembly and the cooling channel cover assembly of the present application are connected by welding, which can ensure the welding quality, improve the sealing strength of the cooling water channel, reduce stress deformation, increase strength, and improve reliability, which is convenient for use. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0025] Figure 2 It is a top view of the utility model;

[0026] Figure 3 It is a side view of the utility model;

[0027] Figure 4 It is a bottom view of the utility model;

[0028] Figure 5 It is a schematic diagram of the overall cooling channel cover plate of the utility model;

[0029] Figure 6 It is a connection schematic diagram of the communication channel of the utility model;

[0030] Figure 7 It is a structural schematic diagram of the prior art;

[0031] In the figure: 1. Cooling channel as a whole; 2. Connecting channel; 3. Sealing plug; 4. Cold inlet joint; 5. Cold outlet joint; 6. Cooling channel cover plate as a whole; 7. Cooling body. DETAILED DESCRIPTION

[0032] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0033] Example:

[0034] See also Figure 1-Figure 6 As shown, a cavity cooling mechanism comprises:

[0035] The cooling assembly includes a cooling assembly arranged outside the cooling body 7, and the cooling assembly includes:

[0036] The cooling channel 1 is arranged inside the outer side of the cooling body 7, that is, it is formed in the groove inside the outer side of the cooling body 7, that is, the inner-sunken water channel design, so that three of the four sides of the cooling channel 1 are in contact with the reaction chamber of the cooling body 7, thereby increasing the contact area between the cooling medium and the reaction chamber of the cooling body 7, improving the heat dissipation effect, and having higher heat dissipation efficiency. The inner-sunken water channel layout does not occupy space, has high integration, and has a beautiful appearance. The cooling channel 1 is respectively provided with a cold inlet and a cold outlet, the cold inlet is used to pass the cooling medium, and the cold outlet is used to flow out the cooling medium, thereby realizing a cooling cycle, which is beneficial to the cooling of the cavity;

[0037] The cooling channel cover plate assembly 6 is disposed on the outside of the cooling channel assembly 1 to seal the cooling channel.

[0038] refer to Figure 1-Figure 6 As shown, the cooling channel 1 as a whole includes cooling channel 1, cooling channel 2, cooling channel 3 and cooling channel 4, cooling channel 1 is arranged at the bottom end of the cooling body 7, cooling channel 2 is arranged at the front end of the cooling body 7, cooling channel 3 is arranged at the top end of the cooling body 7, and cooling channel 4 is arranged at the rear end of the cooling body 7, and cooling channel 1, cooling channel 2, cooling channel 3 and cooling channel 4 are connected to each other through connecting pieces in pairs;

[0039] Cooling channel 1, cooling channel 2, cooling channel 3 and cooling channel 4 are all configured as continuously curved channels to increase the moving distance of the cooling medium and improve the cooling effect.

[0040] Furthermore, cooling channel one includes cooling channel a and cooling channel b, the head end of cooling channel a is connected to the cold inlet, the tail end of cooling channel a is connected to cooling channel two, the head end of cooling channel b is connected to cooling channel four, and the tail end of cooling channel b is connected to the cold outlet, so that the cooling medium flows in from the cold inlet and flows out from the cold outlet, forming a circulating flow, thereby playing a cooling role.

[0041] refer to Figure 1-Figure 6 As shown, the connecting piece is set as a connecting channel 2, which is used to connect two adjacent groups of mutually perpendicular cooling channels, so that cooling channel 1, cooling channel 2, cooling channel 3 and cooling channel 4 can be connected end to end, so that the cooling medium enters from the cold inlet, passes through cooling channel 1, cooling channel 2, cooling channel 3 and cooling channel 4 in sequence, and then flows out from the cold outlet, realizing the circulation of the cooling medium;

[0042] The communication channel 2 is set to a cross-shaped channel structure, which is conducive to the circulation of the cooling medium. The communication channel 2 is provided with four groups of ports, two of which are provided with sealing bodies to achieve a sealing effect, so that the communication channel 2 has four ports, two adjacent groups of ports are used to achieve communication with two adjacent groups of cooling channels, and the other two groups of ports are provided with sealing plugs 3 for sealing;

[0043] The sealing body is configured as a sealing plug 3, which can play a sealing role.

[0044] It should be noted that the connecting channel 2 is set as a cross-shaped channel structure, and the two outermost groups of ports are sealed by setting two groups of sealing bodies, rather than directly sealing the two outermost groups of ports. This is because when processing the connecting channel 2 with a cross-shaped structure, it is necessary to drill holes from the outermost side of the cooling body 7 to the inside, that is, through two drillings (one horizontal drilling and one vertical drilling, and make them intersect), so that the two drilled holes intersect and form a cross-shaped structure. In order to prevent water leakage, sealing plugs 3 are provided through the two outer groups of ports for sealing, which is beneficial to the processing of the connecting channel 2.

[0045] refer to Figure 1-Figure 6 As shown, the cooling channel cover plate assembly 6 includes four groups of cooling channel cover plates, which are respectively covered on the outside of cooling channel one, cooling channel two, cooling channel three and cooling channel four to seal cooling channel one, cooling channel two, cooling channel three and cooling channel four.

[0046] refer to Figure 1-Figure 6 As shown, four groups of cooling channel cover plates are welded on the outside of cooling channel one, cooling channel two, cooling channel three and cooling channel four respectively. The specific welding method is stir friction welding process. This welding process has small stress deformation, high strength, no pores, and compact and beautiful structure. During welding, the cooling water channel and the cooling water channel cover plate flow from the front to the rear of the welding tool under the action of the rotating friction force of the welding tool, and form a dense solid phase weld under the extrusion of the welding tool.

[0047] Specifically, the friction stir welding process is: friction stir welding refers to the use of heat generated by the friction between a high-speed rotating welding tool and a workpiece to partially melt the material to be welded. When the welding tool moves forward along the welding interface, the plasticized material flows from the front to the rear of the welding tool under the action of the rotating friction force of the welding tool, and forms a dense solid phase weld under the extrusion of the welding tool. It is a welding process in the prior art and will not be described in detail here.

[0048] refer to Figure 1-Figure 6 As shown, the cold inlet is connected to a cold inlet joint 4, which is conducive to the introduction of cooling medium, and the cold outlet is connected to a cold outlet joint 5, which is conducive to the outflow of cooling medium.

[0049] refer to Figure 1-Figure 6As shown, a positioning member is provided between the cooling channel assembly 1 and the cooling channel cover plate assembly 6 for positioning the cooling channel assembly 1 and the cooling channel cover plate assembly 6 during installation.

[0050] refer to Figure 1-Figure 6 As shown, the positioning member includes: a positioning groove arranged inside the cooling channel assembly 1 and a positioning block arranged inside the cooling channel cover assembly 6, the positioning block matches the positioning groove, and the positioning block is installed inside the corresponding positioning groove, thereby realizing the positioning installation of the cooling channel assembly 1 and the cooling channel cover assembly 6.

[0051] As another implementation of this application: Figure 1-Figure 6 As shown, the positioning member includes: a positioning block arranged inside the cooling channel assembly 1 and a positioning groove arranged inside the cooling channel cover assembly 6, the positioning block matches the positioning groove, and the positioning block is installed inside the corresponding positioning groove, thereby realizing the positioning and installation of the cooling channel assembly 1 and the cooling channel cover assembly 6.

[0052] (1) The present application adopts an inner-sunk water channel structure design: three sides of the cooling channel 1 can contact the cooling body 7, which increases the contact area between the cooling medium and the cooling body 7, improves the heat dissipation effect, has higher heat dissipation efficiency, does not occupy space, has high integration, and has a beautiful appearance;

[0053] (2) The present application adopts a connecting channel design: a connecting channel 2 is designed between adjacent cooling channels of the cooling channel assembly 1, which penetrates the cooling channels between adjacent cooling channels on adjacent surfaces. The cooling channels on the four surfaces form a loop, which has a compact structure and improves the cooling effect;

[0054] (3) The cooling channel assembly 1 and the cooling channel cover plate assembly 6 of the present application are connected by welding, which can ensure the welding quality, improve the sealing strength of the cooling water channel, reduce stress deformation, have high strength, high reliability, and are easy to use.

[0055] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A cavity cooling mechanism, characterized in that: include: A cooling assembly is arranged outside the cooling body (7), the cooling assembly comprising: A cooling channel assembly (1), wherein the cooling channel assembly (1) is arranged inside the outer side of the cooling body (7), and the cooling channel assembly (1) is respectively provided with a cold inlet and a cold outlet, wherein the cold inlet is used for introducing a cooling medium, and the cold outlet is used for discharging the cooling medium; A cooling channel cover plate assembly (6), wherein the cooling channel cover plate assembly (6) is arranged to cover the outside of the cooling channel assembly (1).

2. A cavity cooling mechanism according to claim 1, characterized in that: The cooling channel as a whole (1) comprises cooling channel 1, cooling channel 2, cooling channel 3 and cooling channel 4, wherein cooling channel 1 is arranged at the bottom end of the cooling body (7), cooling channel 2 is arranged at the front end of the cooling body (7), cooling channel 3 is arranged at the top end of the cooling body (7), and cooling channel 4 is arranged at the rear end of the cooling body (7), and each of the cooling channel 1, cooling channel 2, cooling channel 3 and cooling channel 4 is connected to each other by a connecting piece; The cooling channel 1, the cooling channel 2, the cooling channel 3 and the cooling channel 4 are all configured as continuous curved channels.

3. A cavity cooling mechanism according to claim 2, characterized in that: The connecting piece is configured as a connecting channel (2); The communication channel (2) is configured as a cross-shaped channel structure, and the communication channel (2) is provided with four groups of ports, two groups of ports being provided with sealing bodies; The sealing body is configured as a sealing plug (3).

4. A cavity cooling mechanism according to claim 3, characterized in that: The cooling channel cover plate assembly (6) comprises four groups of cooling channel cover plates, and the four groups of cooling channel cover plates are respectively arranged to cover the outer sides of cooling channel one, cooling channel two, cooling channel three and cooling channel four.

5. A cavity cooling mechanism according to claim 4, characterized in that: The four groups of cooling channel cover plates are respectively welded on the outer sides of cooling channel one, cooling channel two, cooling channel three and cooling channel four.

6. A cavity cooling mechanism according to claim 5, characterized in that: The cold inlet is connected to a cold inlet joint (4), and the cold outlet is connected to a cold outlet joint (5).

7. A cavity cooling mechanism according to claim 6, characterized in that: A positioning member is provided between the cooling channel assembly (1) and the cooling channel cover plate assembly (6).

8. A cavity cooling mechanism according to claim 7, characterized in that: The positioning parts include: A positioning groove is arranged inside the cooling channel assembly (1) and a positioning block is arranged inside the cooling channel cover plate assembly (6), wherein the positioning block matches the positioning groove.

9. A cavity cooling mechanism according to claim 7, characterized in that: The positioning parts include: A positioning block is arranged inside the cooling channel assembly (1) and a positioning groove is arranged inside the cooling channel cover plate assembly (6), wherein the positioning block matches the positioning groove.

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