Reaction furnace
By setting air outlets in the reactor with a spacing of more than 100mm, the problem of air field unevenness in traditional equipment is solved and the coating quality is improved.
Patent Information
- Application Number
- CN202420867173.2
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-04-24
- Publication Date
- 2024-12-17
- Estimated Expiration
- 2034-04-24
AI Technical Summary
In traditional semiconductor or photovoltaic material processing equipment, the concentration of process air intake holes leads to uneven distribution of the air field in the cavity, affecting the uniformity of the coating and material performance.
Design a reactor, by setting at least two intake air paths in the furnace body, each air path is equipped with an air outlet, and ensuring that the spacing between the air outlets is greater than 100mm, optimizing the air flow distribution, reducing gas interference, and realizing the aura field Uniformity.
It effectively avoids gas interference between the intake air paths, improves the uniformity of the aura in the reaction chamber, and thus improves the coating quality on the material to be processed.
Smart Images
Figure CN222182433U_ABST
Abstract
Description
Technical Field
[0001] The present disclosure relates to the technical field of semiconductor or photovoltaic material processing, and in particular to a reaction furnace. Background Art
[0002] In the processing of semiconductor or photovoltaic materials, PECVD, LPCVD, APCVD, diffusion furnaces, etc. are common processing equipment. These equipment can achieve precise control of material properties by adjusting parameters such as reaction conditions, gas types and flow rates according to specific process requirements.
[0003] However, in traditional processing equipment, the process air inlets are relatively concentrated, which easily interferes with each other, resulting in uneven distribution of the gas field in the cavity. This uneven distribution of the gas field will directly affect the uniformity of the coating on the material to be processed, and further affect the performance and use effect of the material. Utility Model Content
[0004] In view of this, an embodiment of the present disclosure provides a reaction furnace, which solves the problem in traditional processing equipment that process air inlet holes are relatively concentrated and easily interfere with each other, resulting in uneven gas field distribution in the cavity.
[0005] An embodiment of the present disclosure provides a reaction furnace, comprising: a furnace body, having a reaction chamber; at least two air inlet paths, extending into the reaction chamber, each air inlet path being provided with at least one air outlet, and a distance between an air outlet of one air inlet path and an air outlet of another air inlet path being greater than 100 mm.
[0006] In some embodiments, the reaction chamber extends along a first direction, and the at least two air inlet paths include: at least one first air inlet path, the first air inlet path having a plurality of air outlet structures spaced apart along the first direction, each air outlet structure including at least one air outlet.
[0007] In some embodiments, there are multiple first air inlet passages, and a distance between an air outlet of one first air inlet passage and an air outlet of another first air inlet passage is greater than 100 mm.
[0008] In some embodiments, the reaction chamber has a symmetrical structure; wherein, there are two first air inlet paths, the two first air inlet paths are arranged on opposite inner walls of the reaction chamber, and are symmetrically arranged about the symmetry plane of the reaction chamber; or, there are multiple first air inlet paths, the multiple first air inlet paths are arranged circumferentially along the inner wall of the reaction chamber.
[0009] In some embodiments, the air outlet structure includes a plurality of air outlets, the plurality of air outlets include a first air outlet and a second air outlet, and a direction of the first air outlet intersects with a direction of the second air outlet.
[0010] In some embodiments, the angle between the orientation of the first air outlet and the orientation of the second air outlet is between 120° and 180°.
[0011] In some embodiments, the reaction chamber extends along a first direction, and at least two air inlet paths include: a second air inlet path, the second air inlet path is arranged at a first end of the furnace body in the first direction, the second air inlet path is provided with at least one third air outlet, and the distance between the third air outlet and the air outlet structure is greater than 100 mm.
[0012] In some embodiments, the distance between the third air outlet and the air outlet structure is between 200 mm and 300 mm.
[0013] In some embodiments, it also includes: an exhaust gas path, which is arranged at the second end of the furnace body in the first direction; wherein the reaction chamber has a first area close to the second air inlet gas path, a second area close to the exhaust gas path, and a middle area between the first area and the second area; wherein the spacing between adjacent air outlet structures located in the first area or the second area is greater than the spacing between adjacent air outlet structures located in the middle area.
[0014] In some embodiments, a spacing between adjacent air outlet structures located in the first region is smaller than a spacing between adjacent air outlet structures located in the second region.
[0015] In some embodiments, the reaction chamber is configured to accommodate a boat structure, and the boat structure is configured to carry a sheet material. When the boat structure is placed in the reaction chamber, the sheet material is placed at a first preset position in the reaction chamber; wherein, at least one gas outlet structure is arranged at a second preset position, and in a vertical direction perpendicular to the first direction, a projection of the first preset position on the first air inlet path overlaps with the second preset position.
[0016] In some embodiments, the reaction furnace includes a first furnace door, which is disposed at one end of the furnace body.
[0017] An embodiment of the present disclosure provides a reactor in which the spacing between the gas outlets of the gas inlet paths is greater than 100 mm, which can effectively avoid mutual interference between the gases supplied by the gas outlets of different gas inlet paths, effectively improve the uniformity of the gas field in the reaction chamber, and is beneficial to improving the quality of the coating on the material to be processed. BRIEF DESCRIPTION OF THE DRAWINGS
[0018] Figure 1 Shown is a schematic structural diagram of a reactor provided by an embodiment of the present disclosure in a use state.
[0019] Figure 2 Shown is a schematic structural diagram of a reactor provided by another embodiment of the present disclosure in a use state.
[0020] Figure 3Shown is a schematic structural diagram of a reactor provided by another embodiment of the present disclosure in a use state.
[0021] Figure 4 The figure shows a schematic diagram of a reaction furnace provided by an embodiment of the present disclosure showing the corresponding relationship between the gas structure and the sheet material.
[0022] Reference numerals:
[0023] 100, furnace body; 110, reaction chamber;
[0024] 200, first air inlet path; 210, air outlet structure;
[0025] 300, exhaust gas circuit;
[0026] 400, first furnace door;
[0027] 500, second furnace door;
[0028] 600, boat structure; 610, sheet material;
[0029] 700. Second air intake path. DETAILED DESCRIPTION
[0030] The following will be combined with the drawings in the embodiments of the present disclosure to clearly and completely describe the technical solutions in the embodiments of the present disclosure. Obviously, the described embodiments are only part of the embodiments of the present disclosure, not all of the embodiments. Based on the embodiments in the present disclosure, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present disclosure.
[0031] The specific structure of the reaction furnace is described below in conjunction with the embodiments.
[0032] Figure 1 Shown is a schematic structural diagram of a reactor provided by an embodiment of the present disclosure in a use state. Figure 2 Shown is a schematic structural diagram of a reactor provided by another embodiment of the present disclosure in a use state. Figure 3 Shown is a schematic structural diagram of a reactor provided by another embodiment of the present disclosure in a use state. Figure 4 The figure shows a schematic diagram of a reaction furnace provided by an embodiment of the present disclosure showing the corresponding relationship between the gas structure and the sheet material;
[0033] like Figures 1 to 4 As shown, the reactor includes a furnace body 100 and at least two air inlet paths, the furnace body 100 has a reaction chamber 110, the air inlet paths extend into the reaction chamber 110, each air inlet path is provided with at least one air outlet, and the distance between the air outlet of one air inlet path and the air outlet of another air inlet path is greater than 100 mm.
[0034] An embodiment of the present disclosure provides a reactor in which the spacing between the gas outlets of the gas inlet paths is greater than 100 mm, which can effectively avoid mutual interference between the gases supplied by the gas outlets of different gas inlet paths, improve the uniformity of the gas field in the reaction chamber, and is beneficial to improving the quality of the coating on the material to be processed.
[0035] In some embodiments, the reaction chamber 110 extends along the first direction X, and the at least two air inlet paths include at least one first air inlet path 200. The first air inlet path 200 is located in the reaction chamber 110 and arranged along the first direction X. The first air inlet path 200 has a plurality of air outlet structures 210 arranged at intervals along the first direction X, and each air outlet structure 210 includes at least one air outlet.
[0036] In this embodiment, the first air inlet path 200 located in the reaction chamber 110 is arranged along the first direction X, and the multiple air outlet structures 210 are arranged at intervals along the first direction X, thereby realizing multi-point gas supply in the reaction chamber 110 and increasing the gas uniformity in the reaction chamber 110.
[0037] Furthermore, in order to optimize the airflow distribution and processing effect, the spacing between adjacent air outlet structures 210 is greater than 100 mm, preferably in the range of 200 mm to 300 mm. Thus, the airflow interference between the air outlet structures 210 is minimized, and at the same time, the process gas can be evenly distributed in the processing chamber, thereby improving the processing quality and efficiency.
[0038] In a specific implementation, a specific spacing value may be selected according to actual needs. For example, 200 mm, 250 mm, 280 mm or 300 mm may be selected as the spacing between adjacent gas outlet structures 210, which may effectively improve the performance of the reactor.
[0039] In some embodiments, there are multiple first air inlet passages 200 , and the distance between the air outlet of one first air inlet passage 200 and the air outlet of another first air inlet passage 200 is greater than 100 mm.
[0040] The spacing between the outlet structures 210 between adjacent first inlet gas paths 200 is greater than 100 mm, preferably 200 mm to 300 mm, for example, 200 mm, 250 mm, 280 mm or 300 mm. When the spacing is too small, airflow interference may occur between the outlet structures 210 of different first inlet gas paths 200, resulting in turbulent airflow, which is not conducive to the uniform distribution of process gas. Therefore, setting the spacing within a range greater than 100 mm can effectively avoid this problem.
[0041] like Figure 2As shown, as one of the optional forms, two first air inlet paths 200 are provided, and the two first air inlet paths 200 are provided on two opposite sides of the inner wall of the reaction chamber 110, and are symmetrically arranged about a plane parallel to the first direction X. For example, the two first air inlet paths 200 are respectively placed on the left and right sides of the inner wall of the reaction chamber 110, or the two first air inlet paths 200 are respectively placed on the upper side and the lower side of the inner wall of the reaction chamber 110. In this way, both sides of the sheet material 610 can be supplied with gas, so that it can be more fully in contact with the process gas, and the uniformity of the gas in the reaction chamber 110 can also be increased, which helps to optimize the reaction process and improve product quality and production efficiency. In addition, the gases supplied by the two first air inlet paths 200 can also be balanced with each other to avoid blowing on one side of the sheet material 610.
[0042] like Figure 3 As shown, as another optional form, there are multiple first air inlet paths 200, and the multiple first air inlet paths 200 are arranged circumferentially along the inner wall of the reaction chamber 110. Thus, the gas distribution in the reaction chamber 110 is more uniform.
[0043] Specifically, a plurality of first air inlet paths 200 are evenly distributed around the furnace body 100, and each air inlet path is equipped with a corresponding air outlet structure 210. The process gas can enter the reaction chamber 110 from different angles and directions, effectively reducing the dead angle and eddy current phenomenon of the gas flow. At the same time, by adjusting the gas flow rate and flow rate of different air inlet paths, the gas distribution in the reaction chamber 110 can be precisely controlled to meet different process requirements.
[0044] In addition, the circumferential arrangement of the plurality of first inlet gas paths 200 also helps to improve the heating uniformity and temperature control accuracy of the reactor. Since the gas flow is more uniform, the temperature distribution in the reaction chamber 110 will also be more uniform, thereby avoiding uneven reaction or product quality problems caused by excessive temperature gradients.
[0045] For example, three first air inlet paths 200 are provided, two of which are provided on the left and right sides of the inner wall of the reaction chamber 110 and are symmetrically provided about the vertical plane parallel to the first direction X, and another first air inlet path 200 is provided on the top or bottom of the inner wall of the reaction chamber 110. The gas supplied by the three first air inlet paths 200 can supply gas to the upper side and both sides of the sheet material 610, which, on the one hand, increases the uniformity of the gas in the reaction chamber 110, helps to optimize the reaction process, and improves product quality and production efficiency. On the other hand, the gases supplied by the first air inlet paths 200 on both sides can also be balanced with each other, which can ensure the position stability of the sheet material 610 and further improve product quality.
[0046] Of course, the number of the first air intake paths 200 may be more or less as required, and different numbers of first air intake paths 200 should all be within the protection scope of the present disclosure.
[0047] In some embodiments, the air outlet structure 210 includes a plurality of air outlets, the plurality of air outlets include a first air outlet and a second air outlet, and the orientation of the first air outlet intersects with the orientation of the second air outlet.
[0048] The orientation of the first gas outlet intersects with the orientation of the second gas outlet, so that the gas discharged from the two gas outlets can form a cross flow in the reaction chamber 110, thereby realizing the multi-angle and multi-directional distribution of the gas. This cross-orientation design has many advantages. First, it helps to increase the surface area of the gas in contact with the sheet material 610, so that each part of the sheet material 610 can be more evenly exposed to the process gas. Secondly, the cross-flow of gas helps to reduce gas dead corners and prevent the gas from forming eddies or stagnation in the reaction chamber 110, thereby improving the uniformity and stability of the reaction process. Secondly, this design also helps to improve the gas exchange efficiency in the reaction chamber 110, accelerate the reaction process, and improve production efficiency. In addition, the intersection of the orientation of the first gas outlet and the orientation of the second gas outlet can also prevent the sheet material 610 from being loosened or moved due to unidirectional force.
[0049] Optionally, the angle between the orientation of the first gas outlet and the orientation of the second gas outlet is between 120° and 180°. For example, it is 120°, 140°, 160° or 180°. When the angle is between 120° and 180°, the gas discharged from the first gas outlet and the second gas outlet can form a stable and efficient cross flow in the reaction chamber 110. This cross flow can not only ensure that each part of the sheet material 610 can be evenly exposed to the process gas, improve the uniformity and consistency of the reaction, but also effectively reduce gas dead angles and eddy currents, thereby improving the stability and controllability of the reaction process.
[0050] In practical applications, the number, position, orientation, size and other parameters of the first gas outlet and the second gas outlet can be adjusted according to the specific structure and process requirements of the reactor to achieve the best gas distribution effect. At the same time, other design elements, such as the shape and size of the gas inlet path and the reaction chamber 110, can also be comprehensively considered and optimized to achieve a more efficient reaction process and higher product quality.
[0051] Combination Figure 1In some embodiments, the reaction chamber 110 extends along the first direction X, and the at least two gas inlet paths include a second gas inlet path 700, which is disposed at the first end of the furnace body 100 in the first direction X, and the second gas inlet path 700 is provided with at least one third gas outlet. The third gas outlet faces the second end of the furnace body 100 in the first direction X, and may be parallel to the first direction X or may cross the first direction X, which is not specifically limited herein.
[0052] The distance between the third gas outlet and the gas outlet structure 210 is greater than 100 mm. On the one hand, it avoids the gas interference between the second gas inlet path 700 and the first gas inlet path 200, ensuring that the two can work independently and effectively; on the other hand, by adjusting the distance, the flow path and distribution of the gas in the reaction chamber 110 can be controlled, thereby further optimizing the reaction effect.
[0053] In this embodiment, the arrangement of the third air outlets is not specifically limited, and for example, they may be arranged in a circle centered on the axis of the first furnace door 400 , or in a straight line in a horizontal or vertical direction.
[0054] In some embodiments, the distance between the third gas outlet and the adjacent gas outlet structure 210 is between 200 mm and 300 mm, for example, 200 mm, 250 mm or 300 mm. Thus, the gas discharged from the third gas outlet and the gas introduced by the first gas inlet 200 can form a stable gas flow field in the reaction chamber 110, which not only avoids direct interference between the two, but also ensures that the gas can evenly and efficiently cover the entire reaction area. Such a spacing selection will not be too large to cause uneven gas distribution, nor too small to cause gas flow disorder, thereby ensuring the stability and uniformity of the reaction.
[0055] It is worth noting that when the second air inlet passage 700 is provided, the first air inlet passage 200 in the reaction chamber 110 is not limited to Figure 1 The one shown in , can also be set to multiple as needed.
[0056] In some embodiments, the reaction furnace further includes an exhaust gas path 300, which is disposed at the second end of the furnace body 100 in the first direction X, and the exhaust gas path 300 is connected to the inner cavity of the furnace body 100. The reaction chamber 110 has a first area close to the second air inlet gas path 700, a second area close to the exhaust gas path 300, and a middle area between the first area and the second area; wherein the spacing between adjacent gas outlet structures located in the first area or the second area is greater than the spacing between adjacent gas outlet structures located in the middle area.
[0057] In this embodiment, the distance between adjacent gas outlet structures 210 in the first area or the second area is greater than the distance between adjacent gas outlet structures 210 in the middle area, which can better adapt to the situation where the boat structure 600 carrying the silicon wafer is placed in the middle of the cavity.
[0058] Further, the distance between adjacent air outlet structures 210 located in the first region is smaller than the distance between adjacent air outlet structures 210 located in the second region.
[0059] Since the gas in the reaction chamber 110 will flow toward the exhaust gas path 300 along the first direction X, based on the flow and convergence of the gas in the reaction chamber 110 toward the exhaust gas path 300, in this embodiment, the multiple gas outlet structures 210 on the first air inlet path 200 are arranged so that the spacing between adjacent gas outlet structures 210 located in the first area is smaller than the spacing between adjacent gas outlet structures 210 located in the second area, so that the gas supply volume close to the first area can be gradually increased, and then the gas in the first area flows in the direction close to the second area, and when the gas concentration on the second area side is increased, the overall gas uniformity in the reaction chamber 110 can be guaranteed, thereby ensuring the uniformity of the coating of the material to be processed and improving the processing quality.
[0060] Please combine Figure 4 In some embodiments, the reaction chamber 110 is configured to accommodate a boat structure 600, and the boat structure 600 is configured to carry a sheet material 610. When the boat structure 600 is placed in the reaction chamber 110, the sheet material 610 is placed at a first preset position in the reaction chamber 110; wherein at least one gas outlet structure 210 is arranged at a second preset position, and in a direction perpendicular to the first direction, a projection of the first preset position on the first gas inlet path 200 overlaps with the second preset position.
[0061] For example, Figure 4 As shown in , the number of first preset positions of the boat structure 600 in the reaction chamber 110 is 8, so the number of second preset positions on the first air inlet path 200 can also be set to 8, so that the multiple air outlet structures 210 on the first air inlet path 200 correspond to the sheet material 610 respectively.
[0062] Thus, the gas outlet structure 210 on the first gas inlet path 200 can correspond to the sheet material 610 in the boat structure 600, ensuring that the sheet material 610 in the boat structure 600 can be more evenly and fully contacted with the process gas, thereby improving the reaction efficiency and product quality. At the same time, this design also helps to reduce gas dead angles and vortex phenomena, further improving the stability and controllability of the reaction process.
[0063] In some embodiments, the reaction furnace further includes a first furnace door 400 , which is disposed at one end of the furnace body 100 in the first direction X.
[0064] Optionally, the reaction furnace further includes a second furnace door 500 , which is disposed at the other end of the furnace body 100 in the first direction X, and the second furnace door 500 is disposed opposite to the first furnace door 400 .
[0065] The phrases "one embodiment", "an embodiment", etc. mentioned in the specification indicate that the embodiment described may include a specific feature, structure or characteristic, but not every embodiment may include the specific feature, structure or characteristic. In addition, such phrases do not necessarily refer to the same embodiment. In addition, when a specific feature, structure or characteristic is described in conjunction with an embodiment, it is within the knowledge of those skilled in the art to implement such feature, structure or characteristic in conjunction with other embodiments, whether explicitly or not explicitly described.
[0066] It should be understood that “on,” “above,” and “over” in this disclosure should be interpreted in the broadest manner, so that “on” not only means “directly on something,” but also includes the meaning of “on something” with intervening features or layers therebetween, and “above” or “over” not only includes the meaning of “above” or “over,” but also may include the meaning of “above” or “over something” with no intervening features or layers therebetween (i.e., directly on something).
[0067] Additionally, spatially relative terms, such as "below," "below," "beneath," "above," "above," etc., may be used herein for ease of description to describe the relationship of one component or feature to other components or features as shown in the figures. The spatially relative terms are intended to encompass different orientations of the component in use or operation in addition to the orientation depicted in the figures. The device may be otherwise oriented (rotated 90 degrees or at other orientations), and the spatially relative descriptors used herein may likewise be interpreted accordingly.
[0068] It should be noted that, in this article, the terms "include", "comprises" or any other variations thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, an element defined by the sentence "comprises a ..." does not exclude the existence of other identical elements in the process, method, article or device including the element.
[0069] The above description is only a preferred embodiment of the present disclosure and is not intended to limit the present disclosure. Any modifications, equivalent substitutions, etc. made within the spirit and principles of the present disclosure should be included in the protection scope of the present disclosure.
Claims
1. A reactor, characterized in that: include: A furnace body having a reaction chamber; At least two air inlet passages extend into the reaction chamber, each of the air inlet passages is provided with at least one air outlet, and a distance between the air outlet of one air inlet passage and the air outlet of another air inlet passage is greater than 100 mm.
2. The reaction furnace according to claim 1, characterized in that: The reaction chamber extends along a first direction, and the at least two air inlet paths include: At least one first air inlet path, wherein the first air inlet path has a plurality of air outlet structures spaced apart along the first direction, and each of the air outlet structures includes at least one air outlet.
3. The reaction furnace according to claim 2, characterized in that: There are multiple first air inlet passages, and a distance between the air outlet of one first air inlet passage and the air outlet of another first air inlet passage is greater than 100 mm.
4. The reaction furnace according to claim 3, characterized in that: The reaction chamber is a symmetrical structure; Wherein, the number of the first air inlet paths is two, and the two first air inlet paths are arranged on opposite inner walls of the reaction chamber and are symmetrically arranged with respect to a symmetric plane of the reaction chamber; Alternatively, there are multiple first air inlet passages, and the multiple first air inlet passages are arranged circumferentially along the inner wall of the reaction chamber.
5. The reaction furnace according to any one of claims 2 to 4, characterized in that: The air outlet structure includes a plurality of air outlets, wherein the plurality of air outlets include a first air outlet and a second air outlet, and a direction of the first air outlet intersects with a direction of the second air outlet.
6. The reaction furnace according to claim 5, characterized in that: An included angle between the orientation of the first air outlet and the orientation of the second air outlet is between 120° and 180°.
7. The reaction furnace according to any one of claims 2 to 4, characterized in that: The at least two air inlet paths include: A second air inlet path is provided at the first end of the furnace body in the first direction, the second air inlet path is provided with at least one third air outlet, and the distance between the third air outlet and the air outlet structure is greater than 100 mm.
8. The reaction furnace according to claim 7, characterized in that: The distance between the third air outlet and the adjacent air outlet structure is between 200 mm and 300 mm.
9. The reaction furnace according to claim 7, characterized in that: Also includes: An exhaust gas path is arranged at the second end of the furnace body in the first direction; The reaction chamber has a first area close to the second air inlet path, a second area close to the exhaust path, and a middle area between the first area and the second area; Wherein, a distance between adjacent air outlet structures located in the first area or the second area is greater than a distance between adjacent air outlet structures located in the middle area.
10. The reaction furnace according to claim 9, characterized in that: A distance between adjacent air outlet structures located in the first region is smaller than a distance between adjacent air outlet structures located in the second region.
11. The reaction furnace according to any one of claims 2 to 4, characterized in that: The reaction chamber is configured to accommodate a boat structure, the boat structure is configured to carry a sheet material, and when the boat structure is placed in the reaction chamber, the sheet material is placed at a first preset position in the reaction chamber; Wherein, at least one of the air outlet structures is arranged at a second preset position, and in a vertical direction perpendicular to the first direction, a projection of the first preset position on the first air inlet path overlaps with the second preset position.
12. The reaction furnace according to claim 1, characterized in that: include: The first furnace door is arranged at one end of the furnace body.