Novel lower heat preservation cylinder capable of increasing heat reflection

By designing the curved inner wall and installing a reflective coating in the CZ straight drawing method, the problem of heat loss is solved, the concentration of heat and energy consumption are achieved, and the thermal field temperature gradient is stabilized.

CN222182543UActive Publication Date: 2024-12-17LESHAN JINGYUNTONG SEMICON MATERIALS CO LTD
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Patent Information

Application Number
CN202420881347.0
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-04-26
Publication Date
2024-12-17
Estimated Expiration
2034-04-26

AI Technical Summary

Technical Problem

In the CZ straight-pull process, heat enters the cooling water of the furnace wall through the insulation cylinder, resulting in heat loss. The prior art mainly reduces energy consumption in the outer wall structure, and has limited effect.

Method used

A new type of lower insulation cylinder is designed, with its inner wall adopting a curved surface shape with convex and concave surfaces intertwined, and a pit and reflective coating are provided on the inner wall, and a soft felt is installed around the outer wall to reduce heat entering the furnace wall.

Benefits of technology

By increasing heat reflection, concentrating heat, reducing heat loss, reducing energy consumption, and stabilizing the heat field temperature gradient.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model provides a novel lower thermal insulation cylinder capable of increasing heat reflection, which comprises a cylinder body, the cylinder body is positioned below a crucible and sleeved on the outer side of the crucible, the cylinder body comprises an inner wall and an outer wall surrounding the outer side of the inner wall, the inner wall is formed by connecting convex surfaces and concave surfaces in a staggered manner in the vertical direction, and the outer wall is arranged on the outer side of the inner wall. The concave surface is a curved surface which is concave in the direction away from the central axis of the barrel body, the convex surface is a curved surface which is convex in the direction close to the central axis of the barrel body, the inner wall close to the opening in the upper end of the barrel body is a concave surface, and the inner wall close to the opening in the lower end of the barrel body is a concave surface, so that the opening of the barrel body is necked down.
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Description

Technical Field

[0001] The utility model relates to the technical field of single crystal furnaces, in particular to a novel lower heat-insulating cylinder capable of increasing heat reflection. Background Art

[0002] In the CZ straight pulling method, the heat generated by the heater is mainly used to heat the crucible, but a part of it may still pass through the insulation tube, enter between the insulation tube and the furnace wall, and be absorbed by the cooling water in the furnace wall, thereby causing heat loss.

[0003] As an important thermal insulation component in a CZ single crystal furnace, the insulation tube can be divided into an outer wall and an inner wall. The outer wall is composed of multiple layers of soft felt, which mainly plays a role of thermal insulation; the inner wall is composed of carbon-carbon composite materials. At present, in the existing technology, the research on reducing energy consumption of the insulation tube is mainly focused on the outer wall structure, such as increasing the number of soft felt layers and changing the soft felt material. The above methods mainly reduce energy consumption by reducing heat loss. Utility Model Content

[0004] The purpose of the utility model is to provide a new lower insulation tube which can increase heat reflection. The inner wall of the lower insulation tube adopts a curved surface shape to increase heat reflection, thereby reducing the heat absorbed by the cooling water in the furnace wall, that is, reducing the heat entering the insulation tube and reducing energy consumption.

[0005] In order to solve the above technical problems, the utility model adopts the following solutions:

[0006] A new type of lower insulation cylinder capable of increasing heat reflection comprises a cylinder body, wherein the cylinder body is located below a crucible and is sleeved on the outside of the crucible, the cylinder body comprises an inner wall and an outer wall surrounding the outer side of the inner wall, the inner wall is formed by staggered connection of convex surfaces and concave surfaces in the vertical direction, the concave surface is a curved surface that is sunken in a direction away from the central axis of the cylinder body, the convex surface is a curved surface that is raised in a direction close to the central axis of the cylinder body, the inner wall close to the upper opening of the cylinder body is a concave surface, and the inner wall close to the lower opening of the cylinder body is a concave surface, so that the opening of the cylinder body is a necked portion.

[0007] Furthermore, a plurality of pits are evenly arranged on the inner wall, and the pits are sunken toward the outer wall, and the circumferential outer sides of the pits are connected to the inner wall.

[0008] Furthermore, a pit A is arranged on the convex surface, a pit B is arranged on the concave surface, and a depth value of the pit A sunken toward the outer wall is greater than a depth value of the pit B sunken toward the outer wall.

[0009] Furthermore, the cross-sectional shape of the pit in the vertical direction is circular, and the diameter of the circle is 30-50 mm.

[0010] Furthermore, the radians of the concave surface and the convex surface are 5-10 rad, so that the cross-sectional shape of the inner wall in the vertical direction is wavy.

[0011] Furthermore, the inner wall is coated with a reflective coating, and the reflective coating comprises.

[0012] Furthermore, the outer wall is surrounded by soft felt for heat preservation.

[0013] Beneficial effects of the utility model:

[0014] The utility model provides a new lower heat-insulating tube that can increase heat reflection, and changes the original straight heat-insulating tube into a heat-insulating tube with a curved inner wall, and forms a curved surface by staggered connection of concave and convex surfaces, and at the same time, the upper and lower openings of the heat-insulating tube are set as necks through the concave surface, so that the heat in the lower heat-insulating tube can be more concentrated. In addition, pits and reflective coatings are used on the inner wall, which can not only make the heat more concentrated, but also reduce heat loss by increasing heat reflection, and ensure the stability of the temperature gradient in the thermal field. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is a cross-sectional structural schematic diagram of a new lower heat-insulating cylinder capable of increasing heat reflection in Example 1 of the utility model;

[0016] Figure 2 This is a schematic diagram of the structure in which a pit is arranged on the inner wall in Example 1 of the utility model;

[0017] Figure 3 This is a schematic diagram of the structure in which pits A and pits B are arranged on the inner wall in Example 1 of the utility model;

[0018] Explanation of the reference numerals: 1 - outer wall, 2 - inner wall, 21 - concave surface, 22 - convex surface, 3 - reflective coating, 4 - pit, 41 - pit A, 42 - pit B. DETAILED DESCRIPTION

[0019] In order to enable those skilled in the art to better understand the technical solution of the present invention, the present invention is further described in detail below in conjunction with the accompanying drawings and specific implementation methods, but the implementation methods of the present invention are not limited thereto.

[0020] In the description of the present utility model, it should be noted that the terms "center", "up", "down", "left", "right", "vertical", "longitudinal", "lateral", "horizontal", "inside", "outside", "front", "back", "top", "bottom", etc. indicate directions or positional relationships based on the directions or positional relationships shown in the accompanying drawings, or are the directions or positional relationships in which the utility model product is usually placed when in use. They are only for the convenience of describing the present utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore cannot be understood as a limitation on the present utility model.

[0021] In the description of the present invention, it is also necessary to explain that, unless otherwise clearly specified and limited, the terms "set", "open", "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0022] The present invention is described in detail below with reference to the accompanying drawings and in combination with embodiments:

[0023] Example 1

[0024] As an important thermal insulation component in a CZ single crystal furnace, the insulation tube can be divided into an outer wall 1 and an inner wall 2. The outer wall 1 is composed of multiple layers of soft felt, which mainly plays a role of thermal insulation; the inner wall 2 is composed of a carbon-carbon composite material. At present, in the prior art, the research on reducing energy consumption of the insulation tube is mainly focused on the structure of the outer wall 1, such as increasing the number of soft felt layers and changing the soft felt material. The above methods mainly reduce energy consumption by reducing heat loss. However, as the thermal field becomes larger and larger, the internal space of the thermal field becomes larger and larger. If only soft felt for thermal insulation is set outside the insulation tube to reduce heat loss, the effect is not very good in actual use.

[0025] Therefore, the utility model provides a new lower insulation tube that can increase heat reflection. The inner wall 2 of the lower insulation tube adopts a curved shape to increase heat reflection through the curved surface, thereby reducing the heat absorbed by the cooling water in the furnace wall, that is, reducing the heat entering the insulation tube and reducing energy consumption.

[0026] Specifically, Figure 1As shown, a new type of lower insulation cylinder capable of increasing heat reflection comprises a cylinder body, the cylinder body is located below the crucible and is sleeved on the outside of the crucible, the cylinder body comprises an inner wall 2 and an outer wall 1 surrounding the outer side of the inner wall 2, the inner wall 2 is formed by a convex surface 22 and a concave surface 21 connected alternately in the vertical direction, the concave surface 21 is a curved surface that is sunken in a direction away from the central axis of the cylinder body, the convex surface 22 is a curved surface that is raised in a direction close to the central axis of the cylinder body, the inner wall 2 near the upper opening of the cylinder body is the concave surface 21, and the inner wall 2 near the lower opening of the cylinder body is the concave surface 21, so that the opening of the cylinder body is a neck.

[0027] In this embodiment, the original straight insulation tube is changed into an insulation tube with a curved inner wall 2. The wall thickness between the outer wall 1 and the inner wall 2 is more appropriately 20 mm, and the inner diameter of the insulation tube can be determined according to its own thermal field. The insulation tube mainly forms a curved surface by staggeredly connecting the inner wall 2 with a concave surface 21 and a convex surface 22. At the same time, the upper and lower openings of the insulation tube are set to be necked through the concave surface 21, so that the heat in the lower insulation tube can be more concentrated.

[0028] Preferably, the arc value of the concave surface 21 and the convex surface 22 is 5-10 rad, so that the cross-sectional shape of the inner wall 2 in the vertical direction is wavy. The purpose is to increase the heat reflection in the insulation tube through the arc curve.

[0029] Preferably, the inner wall 2 is coated with a reflective coating 3, and the reflective coating 3 includes. The purpose is that the heat in the insulation tube can be reflected on the inner wall 2 of the insulation tube through the reflective coating 3, and the inner wall 2 of the insulation tube is a curve, so that the heat in the insulation tube is reflected at different reflection angles on the concave surface 21 and the convex surface 22, thereby increasing the heat reflection in the insulation tube and reducing the heat absorbed by the cooling water in the furnace wall.

[0030] Preferably, the outer wall 1 is surrounded by soft felt for heat preservation.

[0031] Preferably, the inner wall 2 is evenly provided with a plurality of pits 4, and the pits 4 are sunken toward the outer wall 1, and the outer circumferential sides of the pits 4 are connected to the inner wall 2. The purpose is to allow the heat reflected on the inner wall 2 of the heat preservation tube to be concentrated in the pits 4, and the heat is concentrated in the pits 4 to reduce heat loss.

[0032] Preferably, the convex surface 22 is provided with a pit A41, the concave surface 21 is provided with a pit B42, and the depth value of the pit A41 sunken toward the outer wall 1 is greater than the depth value of the pit B42 sunken toward the outer wall 1. The depth of the pit A41 on the convex surface 22 is greater than the depth of the pit B42, which is set according to the different curved surfaces where the pit 4 is located. Since the convex surface 22 is closer to the central axis of the heat preservation tube than the concave surface 21, the depth of the pit A41 on the convex surface 22 is larger, so that the heat can be concentrated in the pit A41, and the concave surface 21 is farther away from the central axis of the heat preservation tube than the convex surface 22, so the depth of the pit B42 on the concave surface 21 is smaller, so that the pit B42 can be closer to the central axis of the heat preservation tube, which is convenient for increasing the heat reflection on the concave surface 21.

[0033] In one embodiment, specifically, Figure 2 , Figure 3 As shown, the cross-sectional shape of the pit 4 in the vertical direction is circular, and the diameter of the circle is 30-50 mm. The diameter of the circle can be 30 mm, 35 mm, 40 mm, 45 mm, or 50 mm. The depth of the pit 4 is determined according to the curved surface on which the pit 4 is located.

[0034] It is understood that the above embodiments are merely exemplary embodiments used to illustrate the principles of the present invention, but the present invention is not limited thereto. For those skilled in the art, various modifications and improvements can be made without departing from the spirit and essence of the present invention, and these modifications and improvements are also considered to be within the scope of protection of the present invention.

Claims

1. A new lower heat preservation tube capable of increasing heat reflection, characterized in that: The invention comprises a cylinder, wherein the cylinder is located below the crucible and is sleeved on the outside of the crucible. The cylinder comprises an inner wall (2) and an outer wall (1) surrounding the outer side of the inner wall (2). The inner wall (2) is formed by a convex surface (22) and a concave surface (21) connected in an alternating manner in the vertical direction. The concave surface (21) is a curved surface that is concave in a direction away from the central axis of the cylinder, and the convex surface (22) is a curved surface that is convex in a direction close to the central axis of the cylinder. The inner wall (2) close to the upper opening of the cylinder is a concave surface (21), and the inner wall (2) close to the lower opening of the cylinder is a concave surface (21), so that the opening of the cylinder is a necked portion.

2. A new lower heat-insulating cylinder capable of increasing heat reflection according to claim 1, characterized in that: The inner wall (2) is evenly provided with a plurality of pits (4), and the pits (4) are recessed toward the outer wall (1), and the outer circumferential sides of the pits (4) are connected to the inner wall (2).

3. A new lower heat-insulating cylinder capable of increasing heat reflection according to claim 2, characterized in that: The convex surface (22) is provided with a pit A (41), the concave surface (21) is provided with a pit B (42), and the depth value of the pit A (41) being sunken toward the outer wall (1) is greater than the depth value of the pit B (42) being sunken toward the outer wall (1).

4. A new lower heat-insulating cylinder capable of increasing heat reflection according to claim 2, characterized in that: The cross-sectional shape of the pit (4) in the vertical direction is circular, and the diameter of the circle is 30-50 mm.

5. The novel lower heat-insulating cylinder capable of increasing heat reflection according to claim 1 is characterized in that: The radians of the concave surface (21) and the convex surface (22) are 5-10 rad, so that the cross-sectional shape of the inner wall (2) in the vertical direction is wavy.

6. The novel lower heat-insulating cylinder capable of increasing heat reflection according to claim 1 is characterized in that: The inner wall (2) is coated with a reflective coating (3).

7. The novel lower heat-insulating cylinder capable of increasing heat reflection according to claim 1 is characterized in that: The outer wall (1) is surrounded by soft felt for heat preservation.