Feeding device of single crystal furnace

Abstract

The utility model relates to the technical field of semiconductor production equipment, and discloses a feeding device of a single crystal furnace, the feeding device is used for feeding of a crucible, and the upper part of the crucible is provided with a positioning convex block; the feeding device comprises a feeding table, at least one clamping tool and at least one positioning tool. The positioning tool comprises a positioning block arranged above the feeding table, and the positioning block is provided with a positioning groove matched with the positioning protruding block. And the clamping tool is arranged on the feeding table, the clamping tool is used for placing a crucible, and after the positioning convex block of the crucible is matched with the positioning groove of the positioning block, the clamping tool is further used for clamping the crucible. In actual use, the crucible is placed on the clamping tool, the clamping tool clamps the crucible, the positioning protruding block on the crucible is matched with the positioning groove of the positioning block, accurate feeding of the crucible can be achieved, the problem that an existing crucible feeding device is insufficient in positioning precision is solved, and meanwhile the difficulty of manual operation and positioning is greatly lowered.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor production equipment, in particular to a feeding device for a single crystal furnace. Background Art

[0002] Silicon carbide (SiC) is a typical representative of the third generation of semiconductor materials. It is considered to be one of the ideal materials for making high-temperature, high-frequency, high-power and high-voltage devices because of its advantages such as wide band gap, high thermal conductivity, high breakdown electric field and large electron migration rate. As the core material for manufacturing power devices, the equipment used for silicon carbide crystal growth is the key. Before growing silicon carbide crystals, the crucible containing the single crystal growth raw materials needs to be placed in the single crystal growth furnace. Before the crucible is placed in the single crystal growth furnace, it is necessary to move the crucible to the loading platform first, and at the same time, the crucible and the loading platform have a certain relative position, so that the robot can grab the crucible from the loading platform to the single crystal growth furnace.

[0003] When the existing crucible is transported to the loading platform, it is necessary to use the naked eye to position and fix the crucible. The difficulty of manual operation and positioning is relatively large, and the positioning accuracy is difficult to control, which brings great inconvenience to the equipment operator. Especially when the 8-inch crucible is filled with seed crystals and insulation cotton, it weighs about 25KG, which makes it more difficult to operate. Utility Model Content

[0004] In view of the above problems, the utility model provides a feeding device for a single crystal furnace.

[0005] The technical solution adopted by the utility model is as follows:

[0006] The present application provides a loading device for a single crystal furnace, which is used for loading a crucible, wherein a positioning protrusion is provided on the upper portion of the crucible; the loading device comprises a loading platform, at least one clamping fixture and at least one positioning fixture;

[0007] The positioning fixture comprises a positioning block arranged above the loading platform, and the positioning block has a positioning groove matched with the positioning protrusion;

[0008] The clamping tool is arranged on the loading platform, and is used to place the crucible. When the positioning protrusion of the crucible is matched with the positioning groove of the positioning block, the clamping tool is also used to clamp the crucible.

[0009] In actual use, the crucible is placed on the clamping fixture, the clamping fixture clamps the crucible, and the positioning protrusion on the crucible cooperates with the positioning groove of the positioning block, so that the crucible can be accurately loaded, which overcomes the problem of insufficient positioning accuracy of the existing crucible loading device. At the same time, the difficulty of manual operation and positioning is also greatly reduced.

[0010] Furthermore, the positioning groove has a guiding groove portion for guiding the positioning protrusion to cooperate with the positioning groove.

[0011] The guide groove portion is an arc-shaped guide groove portion, and the arc-shaped guide groove portion and the positioning groove are smoothly transitioned. The arrangement of the arc-shaped guide groove portion makes it easier for the positioning protrusion to slide into the positioning groove and cooperate with it.

[0012] Furthermore, the clamping tool comprises a first base, a second base, a telescopic element and an electromagnetic element.

[0013] The first base and the second base are respectively slidably arranged on the loading platform, the two ends of the telescopic element are respectively a fixed end and a telescopic end, the fixed end is arranged on the first base, and the telescopic end is fixed on the second base, and the telescopic element is used to control the first base and the second base to produce relative movement to realize the clamping of the crucible;

[0014] The electromagnetic element is arranged on a side of the first base away from the second base. When the crucible is placed on the first base, the electromagnetic element works to generate a magnetic attraction to move the first base toward the electromagnetic element, so that the positioning protrusion of the crucible and the positioning groove of the positioning block are closely matched.

[0015] When the positioning protrusion of the crucible is matched with the positioning groove of the positioning block, the telescopic element works to move the second base toward the first base, thereby clamping the crucible.

[0016] The clamping tool realizes the clamping and locking of the crucible while realizing the matching positioning of the positioning protrusion and the positioning groove of the crucible. The magnetic sensor detects whether the clamping is in place, which greatly improves the automation degree of the loading device and makes the loading device stable and convenient.

[0017] Furthermore, the electromagnetic element is fixed on the loading platform. In actual use, the first base has a metal part for cooperating with the electromagnetic element, or the first base is made of metal.

[0018] Furthermore, there is an angle between the longitudinal section of the positioning groove and the vertical direction;

[0019] The first base has a first mounting wall and a second mounting wall for respectively cooperating with the bottom wall and the side wall of the crucible;

[0020] The first mounting wall or the cross section of the first mounting wall is perpendicular to the second mounting wall or the longitudinal section of the second mounting wall;

[0021] The second mounting wall or a longitudinal section of the second mounting wall is parallel to or coincides with a longitudinal section of the positioning groove.

[0022] In actual use, the first installation wall can be a plane wall or a curved wall adapted to the bottom wall of the crucible; the second installation wall can be a curved wall adapted to the outer wall of the crucible.

[0023] Furthermore, the angle is between 8° and 15°.

[0024] In actual use, the longitudinal section of the positioning groove is inclined toward the side close to the rotation axis of the loading platform, that is, the closer to the table surface of the loading platform, the greater the distance between the positioning groove and the rotation axis of the loading platform. When the crucible is installed on the loading device, the top of the crucible is inclined toward the side of the rotation axis of the loading platform, and the second installation wall or the longitudinal section of the second installation wall is parallel to or coincides with the longitudinal section of the positioning groove, so that the first base and the second base can better adapt to and clamp the crucible.

[0025] Further, the second base has a third mounting wall and a fourth mounting wall respectively used to cooperate with the bottom wall and the side wall of the crucible;

[0026] The third mounting wall or a cross section of the third mounting wall coincides with or is parallel to the first mounting wall or a cross section of the first mounting wall;

[0027] The fourth mounting wall or a longitudinal section of the fourth mounting wall is perpendicular to the third mounting wall or a cross section of the third mounting wall.

[0028] In actual use, the third installation wall can be a plane wall or a curved wall adapted to the bottom wall of the crucible; the fourth installation wall can be a curved wall adapted to the outer wall of the crucible.

[0029] In actual use, the second base is spaced apart from the first base so as to accommodate crucibles with different outer diameters.

[0030] Furthermore, the clamping fixture further comprises a mounting plate, a slide rail and a slider slidably matched with the slide rail, the slide rail is fixed on the loading platform, and the slider is fixed to the first base and the second base through the mounting plate;

[0031] The clamping tool also includes a magnetic sensor, which is used to sense the magnitude of the magnetic force exerted on the second base to determine whether the second base and the first base clamp the crucible.

[0032] In actual use, when the magnetic force sensed by the magnetic sensor does not reach the set value, an early warning check will be issued or the clamping tool will be re-clamped to further improve the automated control of clamping.

[0033] Further, the bottom of the crucible has an identification code;

[0034] The first base and the loading platform are respectively provided with code scanning through holes, and the code scanning through holes are used to expose the identification code at the bottom of the crucible;

[0035] The feeding device further comprises a code scanning device, which is arranged below the feeding platform and is used for identifying the identification code at the bottom of the crucible through the code scanning through hole.

[0036] Furthermore, the diameter of the code scanning through hole is 90 mm.

[0037] Furthermore, the loading platform is connected to a power element for driving the loading platform to rotate;

[0038] The clamping fixtures include four, and the four clamping fixtures are arranged in a circle on the loading platform. As the loading platform rotates, the clamping fixtures form a loading work station, a code scanning work station, a unloading work station, and a cache work station;

[0039] When the clamping tool is located at the loading work position, the crucible is moved to the clamping tool and the clamping tool clamps the crucible;

[0040] When the clamping tool is located at the code scanning work position, the code scanning device is used to scan the crucible on the clamping tool;

[0041] When the clamping fixture is located at the unloading work position, the manipulator moves the crucible away from the clamping fixture; the unloading work position is also a grasping position waiting for the six-axis manipulator to grasp;

[0042] When the manipulator does not carry away the crucible from the clamping fixture, the clamping fixture and the crucible rotate along with the loading platform and enter the buffer work position.

[0043] The loading station, code scanning station, unloading station and buffer station can repeatedly position the graphite crucible loading and unloading device, which can improve the product quality and the production efficiency of the operators.

[0044] Furthermore, the feeding device also includes a rotary indexer, which is arranged between the feeding platform and the power element, and the rotary indexer is used to control the angle of rotation of the feeding platform and the clamping tooling.

[0045] Furthermore, the feeding device further comprises a support column, the support column is fixed at the center position of the feeding platform, and the four clamping tools are respectively arranged around the support column;

[0046] The top end of the support column is connected to a support arm, the support arm is in a cross-shaped structure, and the four ends of the cross-shaped support arm are respectively connected to the positioning blocks;

[0047] The telescopic element is a cylinder;

[0048] A rotating air path distributor is installed inside the support column, and the rotating air path distributor is used to supply air to the cylinder when the loading platform rotates to avoid line tangling.

[0049] In actual use, the positioning block can also be suspended inside the upper frame.

[0050] Furthermore, the feeding device also includes a cover plate, a light curtain, an upper frame and a lower frame;

[0051] The upper frame is arranged on the upper frame, the cover plate is installed on the lower frame and is located inside the upper frame, and the cover plate is used to install the loading platform;

[0052] The light curtain is arranged on the upper frame and is located at the loading work station. When there is someone at the loading work station, the light curtain is used to stop the loading platform from rotating;

[0053] A sealed space is formed between the upper frame and the lower frame, and the cover plate, the loading platform, the positioning tool, the clamping tool and the crucible are all arranged in the sealed space;

[0054] The feeding device further comprises a negative pressure element, which is used to provide negative pressure to the sealed space, so as to make the crucible easier to clamp and position.

[0055] Furthermore, the negative pressure element is an FFU, and the wind blown out by the FFU is blown into the sealed space after being filtered.

[0056] Furthermore, it also includes a first button, a second button and a third button arranged on the cover plate;

[0057] The first button is used to connect with the power element to control the rotation and stop of the loading platform;

[0058] The second button is used to connect with the telescopic element to control the position of the second base relative to the first base to clamp the crucible;

[0059] The third button is used to connect with the electromagnetic element to control the position of the first base relative to the electromagnetic element to achieve the positioning of the crucible.

[0060] Furthermore, the second button is a solenoid valve switch.

[0061] The beneficial effects of the utility model are:

[0062] (1) The positioning protrusion on the crucible cooperates with the positioning groove of the positioning block to realize accurate loading of the crucible, thus overcoming the problem of insufficient positioning accuracy of the existing crucible loading device. At the same time, the difficulty of manual operation and positioning is also greatly reduced.

[0063] (2) The clamping tool realizes the clamping and locking of the crucible while realizing the coordinated positioning of the positioning protrusion and the positioning groove of the crucible. The magnetic sensor detects whether the clamping is in place, which greatly improves the automation degree of the loading device and makes the loading device stable and convenient.

[0064] (3) The loading station, code scanning station, unloading station and buffer station can repeatedly position the graphite crucible loading and unloading device, which can improve the product quality and the production efficiency of the operator. BRIEF DESCRIPTION OF THE DRAWINGS

[0065] Figure 1 It is a schematic cross-sectional structure diagram of the feeding device in the main viewing direction of the embodiment of the utility model;

[0066] Figure 2 It is a schematic diagram of the structure of the feeding device of the embodiment of the utility model in the axial direction (hiding the negative pressure element and the upper frame);

[0067] Figure 3 yes Figure 2 A is a schematic diagram of the partially enlarged structure of the middle part;

[0068] Figure 4 It is a schematic diagram of the structure of the feeding device of the embodiment of the utility model in the axial direction (hiding the negative pressure element, the upper frame and the lower frame);

[0069] Figure 5 yes Figure 4 A schematic diagram of the partially enlarged structure of B in the middle;

[0070] Figure 6 It is a schematic diagram of the structure of the feeding device of the embodiment of the utility model when viewed from above (the negative pressure element and the upper frame are hidden);

[0071] Figure 7 It is a schematic diagram of the axial side structure of the clamping tooling of the embodiment of the utility model;

[0072] Figure 8 It is a schematic diagram of the top view of the clamping tooling of the embodiment of the utility model;

[0073] Fig. 9 yes Figure 8 Schematic diagram of the cross-sectional structure of AA.

[0074] The reference numerals in the figures are:

[0075] 10. Crucible; 101. Positioning convex block; 20. Loading platform; 201. Loading workstation; 202. Scanning workstation; 203. Unloading workstation; 204. Cache workstation; 30. Clamping tool; 310. First base; 311. First mounting wall; 312. Second mounting wall; 313. Scanning through hole; 320. Second base; 321. Third mounting wall; 322. Fourth mounting wall; 330. Telescopic element; 340. Electromagnetic element; 3 50. Slide rail; 360. Slider; 40. Positioning fixture; 410. Positioning block; 411. Positioning groove; 412. Guide groove; 50. Code scanning device; 60. Power element; 70. Rotary indexer; 80. Support column; 810. Support arm; 90. Rotary air distributor; 100. Cover plate; 110. Negative pressure element; 120. Upper frame; 130. Lower frame; 140. First button; 150. Second button; 160. Third button. DETAILED DESCRIPTION

[0076] The utility model is described in detail below in conjunction with the accompanying drawings.

[0077] Example 1

[0078] like Figures 1 to 9 As shown, the present application provides a loading device for a single crystal furnace, which is used for loading a crucible 10, and a positioning protrusion 101 is provided on the upper part of the crucible 10; the loading device includes a loading platform 20, at least one clamping fixture 30 and at least one positioning fixture 40;

[0079] The positioning tool 40 includes a positioning block 410 disposed above the loading platform 20 , and the positioning block 410 has a positioning groove 411 that cooperates with the positioning protrusion 101 ;

[0080] The clamping tool 30 is disposed on the loading platform 20 . The clamping tool 30 is used to place the crucible 10 . When the positioning protrusion 101 of the crucible 10 is matched with the positioning groove 411 of the positioning block 410 , the clamping tool 30 is also used to clamp the crucible 10 .

[0081] During actual use, the crucible 10 is placed on the clamping fixture 30, and the clamping fixture 30 clamps the crucible 10. The positioning protrusion 101 on the crucible 10 cooperates with the positioning groove 411 of the positioning block 410, so that the crucible 10 can be accurately loaded, which overcomes the problem of insufficient positioning accuracy of the existing crucible 10 loading device. At the same time, the difficulty of manual operation and positioning is also greatly reduced.

[0082] In this embodiment, the positioning groove 411 has a guiding groove portion 412 for guiding the positioning protrusion 101 to cooperate with the positioning groove 411 .

[0083] The guide groove portion 412 is an arc-shaped guide groove portion, and the arc-shaped guide groove portion 412 and the positioning groove 411 are smoothly transitioned. The arrangement of the arc-shaped guide groove portion 412 makes it easier for the positioning protrusion 101 to slide into the positioning groove 411 and cooperate therewith.

[0084] In this embodiment, the clamping tool 30 includes a first base 310, a second base 320, a telescopic element 330 and an electromagnetic element 340.

[0085] The first base 310 and the second base 320 are respectively slidably disposed on the loading platform 20, and the two ends of the telescopic element 330 are respectively a fixed end and a telescopic end, the fixed end is disposed on the first base 310, and the telescopic end is fixed on the second base 320, and the telescopic element 330 is used to control the first base 310 and the second base 320 to generate relative movement to achieve the clamping of the crucible 10;

[0086] The electromagnetic element 340 is disposed on the side of the first base 310 away from the second base 320. When the crucible 10 is placed on the first base 310, the electromagnetic element 340 works to generate a magnetic attraction to move the first base 310 toward the electromagnetic element 340, so that the positioning protrusion 101 of the crucible 10 is tightly matched with the positioning groove 411 of the positioning block 410.

[0087] When the positioning protrusion 101 of the crucible 10 is matched with the positioning groove 411 of the positioning block 410 , the telescopic element 330 works to move the second base 320 toward the first base 310 , thereby clamping the crucible 10 .

[0088] The clamping tool 30 realizes the clamping and locking of the crucible 10 while realizing the matching positioning of the positioning protrusion 101 and the positioning groove 411 of the crucible 10. The magnetic sensor detects whether the clamping is in place, which greatly improves the automation degree of the loading device and makes the loading device stable and convenient.

[0089] In this embodiment, the electromagnetic element 340 is fixed on the loading platform 20. In actual use, the first base 310 has a metal part for cooperating with the electromagnetic element 340, or the first base 310 is made of metal.

[0090] In this embodiment, there is an angle between the longitudinal section of the positioning groove 411 and the vertical direction;

[0091] The first base 310 has a first mounting wall 311 and a second mounting wall 312 for respectively cooperating with the bottom wall and the side wall of the crucible 10;

[0092] The first installation wall 311 or the cross section of the first installation wall 311 is perpendicular to the second installation wall 312 or the longitudinal section of the second installation wall 312;

[0093] The second installation wall 312 or a longitudinal section of the second installation wall 312 is parallel to or coincides with a longitudinal section of the positioning groove 411 .

[0094] In actual use, the first installation wall 311 may be a plane wall or a curved wall adapted to the bottom wall of the crucible 10 ; the second installation wall 312 may be a curved wall adapted to the outer wall of the crucible 10 .

[0095] In this embodiment, the included angle is 10°.

[0096] In actual use, the longitudinal section of the positioning groove 411 is inclined toward the side close to the rotation axis of the loading platform 20, that is, the closer to the table surface of the loading platform 20, the greater the distance between the positioning groove 411 and the rotation axis of the loading platform 20. After the crucible 10 is installed on the loading device, the top of the crucible 10 is inclined toward the side of the rotation axis of the loading platform 20, and the second installation wall 312 or the longitudinal section of the second installation wall 312 is parallel to or coincides with the longitudinal section of the positioning groove 411, so that the first base 310 and the second base 320 can better adapt to and clamp the crucible 10.

[0097] In this embodiment, the second base 320 has a third mounting wall 321 and a fourth mounting wall 322 for respectively cooperating with the bottom wall and the side wall of the crucible 10;

[0098] The third installation wall 321 or the cross section of the third installation wall 321 coincides with or is parallel to the first installation wall 311 or the cross section of the first installation wall 311;

[0099] The fourth installation wall 322 or a longitudinal section of the fourth installation wall 322 is perpendicular to the third installation wall 321 or a cross section of the third installation wall 321 .

[0100] In actual use, the third installation wall 321 may be a plane wall or a curved wall adapted to the bottom wall of the crucible 10 ; the fourth installation wall 322 may be a curved wall adapted to the outer wall of the crucible 10 .

[0101] In actual use, the second base 320 is spaced apart from the first base 310 to accommodate crucibles 10 with different outer diameters.

[0102] In this embodiment, the clamping fixture 30 further includes a mounting plate, a slide rail 350 and a slider 360 slidably matched with the slide rail 350. The slide rail 350 is fixed on the loading platform 20, and the slider 360 is fixed to the first base 310 and the second base 320 through the mounting plate;

[0103] The clamping tool 30 further includes a magnetic sensor, which is used to sense the magnitude of the magnetic force exerted on the second base 320 to determine whether the second base 320 and the first base 310 clamp the crucible 10 .

[0104] In other embodiments, the slide rail 350 may be fixed on the first base 310 and the second base 320 , and the slider 360 may be fixed on the loading platform 20 .

[0105] In actual use, when the magnetic force sensed by the magnetic sensor does not reach the set value, an early warning check will be issued or the clamping tool 30 will be re-clamped, further improving the automated control of the clamping.

[0106] In this embodiment, the bottom of the crucible 10 has an identification code;

[0107] The first base 310 and the loading platform 20 are respectively provided with a code scanning through hole 313, and the code scanning through hole 313 is used to expose the identification code at the bottom of the crucible 10;

[0108] The loading device further includes a code scanning device 50 , which is disposed below the loading platform 20 . The code scanning device 50 is used to identify the identification code at the bottom of the crucible 10 through the code scanning through hole 313 .

[0109] In this embodiment, the diameter of the code scanning through hole 313 is 90 mm.

[0110] In this embodiment, the loading platform 20 is connected to a power element 60 that drives the loading platform 20 to rotate;

[0111] The clamping fixtures 30 include four, and the four clamping fixtures 30 are arranged in a circle on the loading platform 20. As the loading platform 20 rotates, the clamping fixtures 30 form a loading work station 201, a code scanning work station 202, a material unloading work station 203, and a cache work station 204;

[0112] When the clamping tool 30 is located at the loading work position 201, the crucible 10 is moved to the clamping tool 30 and the clamping tool 30 clamps the crucible 10;

[0113] When the clamping tool 30 is located at the code scanning work position 202, the code scanning device 50 scans the crucible 10 on the clamping tool 30;

[0114] When the clamping fixture 30 is located at the unloading work position 203, the manipulator moves the crucible 10 from the clamping fixture 30; the unloading work position 203 is also a grasping position waiting for the six-axis manipulator to grasp;

[0115] When the robot arm does not carry away the crucible 10 from the clamping fixture 30 , the clamping fixture 30 and the crucible 10 rotate along with the loading platform 20 and enter the buffer work position 204 .

[0116] The loading station 201, the code scanning station 202, the unloading station 203 and the buffering station 204 can repeatedly position the loading and unloading devices of the graphite crucible 10, which can improve the quality of the product and the production efficiency of the operators.

[0117] In this embodiment, the power element 60 is a motor.

[0118] In this embodiment, the loading device further includes a rotary indexer 70 , which is disposed between the loading platform 20 and the power element 60 . The rotary indexer 70 is used to control the angle of rotation of the loading platform 20 and the clamping fixture 30 .

[0119] In this embodiment, the rotary indexer 70 controls the loading platform 20 and the clamping fixture 30 to rotate 90° once.

[0120] In this embodiment, the loading device further includes a support column 80, which is fixed at the center of the loading platform 20, and four clamping fixtures 30 are respectively arranged around the support column 80;

[0121] The top of the support column 80 is connected to a support arm 810, and the support arm 810 is a cross-shaped structure, and the four ends of the cross-shaped support arm 810 are respectively connected to positioning blocks 410;

[0122] The telescopic element 330 is a cylinder;

[0123] A rotating air path distributor 90 is installed inside the support column 80. The rotating air path distributor 90 is used to supply air to the cylinder when the loading platform 20 rotates to avoid line tangling.

[0124] In actual use, the support column 80 and the support arm 810 are detachably connected via fasteners, and the positioning fixture 40 can be adapted to crucibles 10 of different specifications and sizes by replacing the support arm 810 or the positioning block 410 of different lengths.

[0125] In other embodiments, the support column 80 and the support arm 810 may be integrally formed.

[0126] In this embodiment, the loading device further includes a cover plate 100, a light curtain, an upper frame 120 and a lower frame 130;

[0127] The upper frame 120 is disposed on the upper frame 120 , the cover plate 100 is mounted on the lower frame 130 and is located inside the upper frame 120 , and the cover plate 100 is used to install the loading platform 20 ;

[0128] The light curtain is arranged on the upper frame 120 and is located at the loading workstation 201. When there is someone at the loading workstation 201, the light curtain is used to stop the loading platform 20 from rotating;

[0129] A sealed space is formed between the upper frame 120 and the lower frame 130, and the cover plate 100, the loading platform 20, the positioning tool 40, the clamping tool 30 and the crucible 10 are all arranged in the sealed space;

[0130] The loading device further comprises a negative pressure element 110, which is used to provide negative pressure to the sealed space so as to make it easier to clamp and position the crucible 10.

[0131] In this embodiment, the negative pressure element 110 is a FFU, and the air blown out by the FFU is filtered and then blown into the sealed space.

[0132] In this embodiment, a first button 140, a second button 150 and a third button 160 are further included on the cover plate 100;

[0133] The first button 140 is used to connect with the power element 60 to control the rotation and stop of the loading platform 20;

[0134] The second button 150 is used to connect with the telescopic element 330 to control the position of the second base 320 relative to the first base 310 to clamp the crucible 10;

[0135] The third button 160 is used to connect with the electromagnetic element 340 to control the position of the first base 310 relative to the electromagnetic element 340 to achieve the positioning of the crucible 10 .

[0136] In this embodiment, the second button 150 is a solenoid valve switch.

[0137] Example 2

[0138] The difference between this embodiment and embodiment 1 is that the height of the positioning block relative to the surface of the loading platform and the distance of the positioning groove relative to the rotation axis of the loading platform are both adjustable. Specifically, the support column may have a first telescopic unit, and the positioning block may have a second telescopic unit. The support column can adjust the height position of the positioning block relative to the surface of the loading platform through the first telescopic unit, and the positioning block can adjust the spacing distance of the positioning groove relative to the rotation axis of the loading platform through the second telescopic unit. This allows the loading device provided in this application to be suitable for crucibles of different sizes.

[0139] The above description is only a preferred embodiment of the utility model, and does not limit the patent protection scope of the utility model. Any equivalent structural transformation made using the contents of the utility model specification and drawings, directly or indirectly used in other related technical fields, is also included in the protection scope of the utility model.

Claims

1. A feeding device for a single crystal furnace, used for feeding a crucible, characterized in that: The upper part of the crucible is provided with a positioning protrusion; the feeding device comprises a feeding platform, at least one clamping fixture and at least one positioning fixture; The positioning fixture comprises a positioning block arranged above the loading platform, and the positioning block has a positioning groove matched with the positioning protrusion; The clamping tool is arranged on the loading platform, and is used to place the crucible. When the positioning protrusion of the crucible is matched with the positioning groove of the positioning block, the clamping tool is also used to clamp the crucible.

2. A feeding device for a single crystal furnace according to claim 1, characterized in that: The clamping tool comprises a first base, a second base, a telescopic element and an electromagnetic element. The first base and the second base are respectively slidably arranged on the loading platform, the two ends of the telescopic element are respectively a fixed end and a telescopic end, the fixed end is arranged on the first base, and the telescopic end is fixed on the second base, and the telescopic element is used to control the first base and the second base to produce relative movement to realize the clamping of the crucible; The electromagnetic element is arranged on a side of the first base away from the second base. When the crucible is placed on the first base, the electromagnetic element works to generate a magnetic attraction to move the first base toward the electromagnetic element, so that the positioning protrusion of the crucible and the positioning groove of the positioning block are closely matched. When the positioning protrusion of the crucible is matched with the positioning groove of the positioning block, the telescopic element works to move the second base toward the first base, thereby clamping the crucible.

3. A feeding device for a single crystal furnace as claimed in claim 2, characterized in that: There is an angle between the longitudinal section of the positioning groove and the vertical direction; The first base has a first mounting wall and a second mounting wall for respectively cooperating with the bottom wall and the side wall of the crucible; The first mounting wall or the cross section of the first mounting wall is perpendicular to the second mounting wall or the longitudinal section of the second mounting wall; The second mounting wall or a longitudinal section of the second mounting wall is parallel to or coincides with a longitudinal section of the positioning groove.

4. A feeding device for a single crystal furnace as claimed in claim 3, characterized in that: The angle is between 8° and 15°.

5. A feeding device for a single crystal furnace as claimed in claim 3, characterized in that: The second base has a third mounting wall and a fourth mounting wall respectively used to cooperate with the bottom wall and the side wall of the crucible; The third mounting wall or a cross section of the third mounting wall coincides with or is parallel to the first mounting wall or a cross section of the first mounting wall; The fourth mounting wall or a longitudinal section of the fourth mounting wall is perpendicular to the third mounting wall or a cross section of the third mounting wall.

6. A feeding device for a single crystal furnace as claimed in claim 2, characterized in that: The clamping fixture further includes a mounting plate, a slide rail, and a slider slidably matched with the slide rail, the slide rail is fixed to the loading platform, and the slider is fixed to the first base and the second base through the mounting plate; The clamping tool also includes a magnetic sensor, which is used to sense the magnitude of the magnetic force exerted on the second base to determine whether the second base and the first base clamp the crucible.

7. A feeding device for a single crystal furnace as claimed in claim 2, characterized in that: The bottom of the crucible has an identification code; The first base and the loading platform are respectively provided with code scanning through holes, and the code scanning through holes are used to expose the identification code at the bottom of the crucible; The feeding device further comprises a code scanning device, which is arranged below the feeding platform and is used for identifying the identification code at the bottom of the crucible through the code scanning through hole.

8. A feeding device for a single crystal furnace as claimed in claim 7, characterized in that: The loading platform is connected to a power element for driving the loading platform to rotate; The clamping fixtures include four, and the four clamping fixtures are arranged in a circle on the loading platform. As the loading platform rotates, the clamping fixtures form a loading work station, a code scanning work station, a unloading work station, and a cache work station; When the clamping tool is located at the loading work position, the crucible is moved to the clamping tool and the clamping tool clamps the crucible; When the clamping tool is located at the code scanning work position, the code scanning device is used to scan the crucible on the clamping tool; When the clamping tool is located at the unloading work position, the manipulator moves the crucible away from the clamping tool; When the manipulator does not carry away the crucible from the clamping fixture, the clamping fixture and the crucible rotate along with the loading platform and enter the buffer work position.

9. A feeding device for a single crystal furnace as claimed in claim 8, characterized in that: The feeding device further comprises a support column, the support column is fixed at the center position of the feeding platform, and the four clamping tools are respectively arranged around the support column; The top end of the support column is connected to a support arm, the support arm is in a cross-shaped structure, and the four ends of the cross-shaped support arm are respectively connected to the positioning blocks; The telescopic element is a cylinder; A rotating air path distributor is installed inside the support column, and the rotating air path distributor is used to supply air to the cylinder when the loading platform rotates to avoid line tangling.

10. A feeding device for a single crystal furnace according to claim 8, characterized in that: The feeding device also includes a cover plate, a light curtain, an upper frame and a lower frame; The upper frame is arranged on the upper frame, the cover plate is installed on the lower frame and is located inside the upper frame, and the cover plate is used to install the loading platform; The light curtain is arranged on the upper frame and is located at the loading work station. When there is someone at the loading work station, the light curtain is used to stop the loading platform from rotating; A sealed space is formed between the upper frame and the lower frame, and the cover plate, the loading platform, the positioning tool, the clamping tool and the crucible are all arranged in the sealed space; The feeding device further comprises a negative pressure element, which is used to provide negative pressure to the sealed space, so as to make the crucible easier to clamp and position.

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