Vacuum coating device

Abstract

The utility model provides a vacuum coating device and relates to the technical field of vacuum coating equipment. The vacuum coating device disclosed by the utility model can comprise a vacuum cavity, two placing cavities and a driving device, the two placing cavities are arranged on two opposite sides of the vacuum cavity, and each placing cavity is communicated with the vacuum cavity. And the volume of each placing cavity is smaller than that of the vacuum cavity. Compared with the mode that the size of the whole vacuum cavity is directly enlarged, the device is small in size, small in occupied space and low in cost. The driving device penetrates through the vacuum cavities from one containing cavity and then extends to the other containing cavity, the two ends of the driving device are connected to the top of one vacuum cavity respectively, and the driving device is used for driving the carrying plate to do horizontal and / or vertical reciprocating motion. Therefore, the appropriate or optimal source-substrate distance can be achieved by adjusting the vertical position of the carrier plate, and meanwhile, the relation between the transmission stability of the carrier plate and the film thickness uniformity can be obtained by continuously changing the horizontal position of the carrier plate.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum evaporation devices, in particular to a vacuum coating device. Background Art

[0002] Vacuum evaporation coating is a technology that uses an evaporator to heat the film material in a vacuum environment to vaporize it, and the evaporated particle flow of the film material is directly shot toward the substrate and deposited on the substrate to form a solid thin film. Vacuum evaporation is the earliest developed and most widely used coating technology in PVD technology. Although the sputtering and ion plating that developed later are superior to vacuum evaporation in many aspects, vacuum evaporation coating technology still has many advantages. For example, the equipment and process are relatively simple. For example, vacuum evaporation coating technology can deposit very pure film layers, and can also prepare film layers with specific structures and properties. Therefore, vacuum evaporation coating technology is still an important vacuum coating technology used today.

[0003] Resistive heating vacuum evaporation is actually a resistive heater. It uses the Joule heat generated by the heating element to obtain high temperature after it is energized, so as to melt the film material to achieve the purpose of evaporation. This method has been widely used in coating technology due to its simple structure, easy operation, low cost and easy availability of materials.

[0004] With the development of technology, the subsequent dynamic coating production line will be more and more widely used. In the prior art, although there is a way to solve the problem of uneven coating by designing a driving device in the vacuum chamber to drive the carrier to move, the volume of the entire vacuum chamber is large, resulting in high cost of the entire equipment and low controllability of the coating. Utility Model Content

[0005] An object of the first aspect of the present utility model is to provide a vacuum coating device to solve the problem of high cost of vacuum coating devices in the prior art.

[0006] Another purpose of the first aspect of the utility model is to solve the problem that the controllability of coating of existing equipment is low.

[0007] In particular, the utility model provides a vacuum coating device, comprising:

[0008] Vacuum chamber;

[0009] Two placement cavities are arranged on two opposite sides of the vacuum cavity, each of the placement cavities is communicated with the vacuum cavity; the volume of each of the placement cavities is smaller than the volume of the vacuum cavity; and

[0010] The driving device extends from one of the placement chambers through the vacuum chamber to the other placement chamber, and its two ends are respectively connected to the top of one of the placement chambers, for driving the carrier to reciprocate horizontally and / or vertically.

[0011] Optionally, each of the placement cavities comprises:

[0012] A housing, fixedly connected to one side of the vacuum chamber and kept sealed; and

[0013] At least one door body is arranged on the top of the shell and / or on a side of the shell away from the vacuum chamber.

[0014] Optionally, each of the door bodies is detachably or pivotally connected to the shell, and when the door body is closed at the shell, a seal is maintained between the door body and the shell.

[0015] Optionally, each door body is provided with a handle.

[0016] Optionally, the driving device comprises a transverse driving assembly, and the transverse driving assembly comprises:

[0017] A slide rail is horizontally arranged, the slide rail is connected to the top of the vacuum chamber, and the slide rail extends from one of the placement chambers to the other placement chamber; and

[0018] The slider cooperates with the slide rail and moves back and forth along the slide rail in a controlled manner, thereby driving the carrier plate to move back and forth horizontally between the two placement cavities.

[0019] Optionally, the driving device also includes a longitudinal driving component, which connects the carrier plate to the slider and follows the slider to reciprocate horizontally; the longitudinal driving component drives the carrier plate to reciprocate in the vertical direction in a controlled manner, thereby adjusting the distance between the carrier plate and the slider in the vertical direction.

[0020] Optionally, the longitudinal drive assembly comprises:

[0021] A height adjustment column is connected between the slider and the carrier plate, and the distance between the carrier plate and the slider in the vertical direction is adjusted by adjusting the size of the height adjustment column.

[0022] Optionally, a vacuum coating line source device is further included, and the vacuum coating line source device is arranged in the middle of the bottom of the vacuum chamber.

[0023] Optionally, a cooling device is further included, and the cooling device is arranged around the vacuum coating line source device to prevent the temperature of the outer shell of the vacuum chamber from being too high due to the excessive temperature of the vacuum coating line source device.

[0024] Optionally, a vacuum pumping device is further included, which is arranged outside the vacuum chamber and is used to evacuate the vacuum chamber.

[0025] In this solution, placement chambers are arranged on both sides of the vacuum chamber, and the carrier is driven to move horizontally or / and vertically between the two placement chambers by a driving device, so that the appropriate or optimal source-substrate distance can be achieved by adjusting the vertical position of the carrier, and the relationship between the stability of the carrier transmission and the uniformity of the film thickness can be obtained by continuously changing the horizontal position of the carrier. In addition, the volume of the two placement chambers of this solution is smaller than that of the vacuum chamber. Compared with directly enlarging the volume of the entire vacuum chamber, the device of this solution is small in size, occupies less space, and has low cost.

[0026] The size of the placement cavity in the present solution matches the size of the carrier, so that the carrier can be completely moved out of the vacuum cavity and into the placement cavity, and then the carrier can be moved out of the vacuum cavity as soon as the coating time meets the requirements, which has high controllability for coating and avoids the situation in the prior art that even if the line source device is turned off in the same chamber, some film material molecules or atoms will be deposited on the carrier due to the residual temperature, thereby resulting in low controllability for coating.

[0027] The placement chamber in this solution may include a shell and a door body, and the shell is fixedly connected to the vacuum chamber, and the connection is to be sealed. The door body is arranged on the upper side of the shell or on the side away from the vacuum chamber, or both the upper side and the side away from the vacuum chamber are provided with a door body. The placement chamber of this solution is provided with a door body mainly for placing a carrier, replacing a carrier or adjusting the position of a carrier after opening, so as to avoid inconvenience caused by working directly at the vacuum chamber.

[0028] Based on the detailed description of the specific embodiments of the present invention in combination with the accompanying drawings below, those skilled in the art will become more aware of the above and other purposes, advantages and features of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] Hereinafter, some specific embodiments of the present invention will be described in detail in an exemplary and non-limiting manner with reference to the accompanying drawings. The same reference numerals in the accompanying drawings indicate the same or similar components or parts. It should be understood by those skilled in the art that these drawings are not necessarily drawn to scale. In the accompanying drawings:

[0030] Figure 1 is a schematic three-dimensional diagram of a vacuum coating device according to a specific embodiment of the utility model;

[0031] Figure 2 It is a front view of a vacuum coating device according to a specific embodiment of the utility model;

[0032] Figure 3is a top view of a vacuum coating device according to a specific embodiment of the utility model;

[0033] Figure 4 It is a schematic cross-sectional view of a vacuum coating device according to a specific embodiment of the utility model.

[0034] Description of reference numerals:

[0035] 100-vacuum coating device; 110-vacuum chamber; 120-placing chamber; 121-housing; 122-door; 123-handle; 130-driving device; 131-lateral driving assembly; 1311-slide rail; 1312-slider; 132-longitudinal driving assembly; 140-vacuum coating line source device; 150-cooling device; 160-vacuum extraction device; 200-carrier plate. DETAILED DESCRIPTION

[0036] In the description of this embodiment, it should be understood that the terms "length", "width", "height", "up", "down", "left", "right", "vertical", "horizontal", "bottom", "inside" and "outside" etc. indicating orientation or positional relationships are based on the orientation or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0037] As a specific embodiment of the present invention, Figure 1-4 As shown, this embodiment provides a vacuum coating device 100, which may include a vacuum chamber 110, two placement chambers 120 and a driving device 130. The two placement chambers 120 are arranged on two opposite sides of the vacuum chamber 110, and each placement chamber 120 is connected to the vacuum chamber 110. The volume of each placement chamber 120 is smaller than the volume of the vacuum chamber 110. The driving device 130 extends from one of the placement chambers 120 through the vacuum chamber 110 to the other placement chamber 120, and the two ends are respectively connected to the top of one of the vacuum chambers 110, so as to drive the carrier 200 to reciprocate horizontally and / or up and down.

[0038] Specifically, in this embodiment, placement chambers 120 are arranged on both sides of the vacuum chamber 110, and the carrier 200 is driven to reciprocate horizontally or / and vertically between the two placement chambers 120 by the driving device 130, so that the appropriate or optimal source-base distance (the distance between the line source and the carrier 200) can be achieved by adjusting the vertical position of the carrier 200, and at the same time, the relationship between the stability of the carrier 200 transmission and the uniformity of the film thickness can be obtained by continuously changing the horizontal position of the carrier 200. In addition, the volume of the two placement chambers 120 of this embodiment is smaller than the volume of the vacuum chamber 110. Compared with directly enlarging the volume of the entire vacuum chamber 110, this embodiment arranges smaller placement chambers 120 on both sides of the vacuum chamber 110, and the overall volume of the device is small, the occupied space is small, and the cost is low.

[0039] Specifically, the size of the vacuum chamber 110 of this embodiment can simply match the size of the carrier 200, and then a placement cavity 120 is set on two opposite sides of the vacuum chamber 110, thereby ensuring that the entire carrier 200 can be completely removed from the vacuum chamber 110, so that the coating amount of the carrier 200 is controllable, and the device is small in size and low in cost.

[0040] As a specific embodiment of the present invention, the plane where the top inner wall of each placement cavity 120 is located (such as Figure 4 The horizontal plane indicated by the middle line a) and the plane where the top inner wall of the vacuum chamber 110 is located (as shown in FIG. Figure 4 The horizontal planes shown by the middle line b) are close to or overlap each other, and the plane where the bottom inner wall of the cavity 120 is located (such as Figure 4 The height of the horizontal plane indicated by the middle line c) is higher than the plane where the bottom inner wall of the vacuum chamber 110 is located (such as Figure 4 The height of the horizontal plane (indicated by the center line d).

[0041] Specifically, the placement chamber 120 of this embodiment is connected to the vacuum chamber 110. To ensure that the carrier plate 200 can reciprocate between the two placement chambers 120 under the drive of the driving device 130, the two placement chambers 120 are both arranged near the upper half of the side wall of the vacuum chamber 110, and the plane where the top inner wall of the placement chamber 120 is located is substantially on the same horizontal plane as the plane where the top inner wall of the vacuum chamber 110 is located. The height of the plane where the inner wall of the bottom of the placement chamber 120 is located is higher than the height of the plane where the bottom inner wall of the vacuum chamber 110 is located, so that the longitudinal cross-sectional dimension of the placement chamber 120 is smaller than the longitudinal cross-sectional dimension of the vacuum chamber 110. Therefore, the design of the placement chamber 120 of this embodiment makes the longitudinal cross-sectional dimension of the vacuum chamber 110 as small as possible while satisfying the requirement that the carrier plate 200 can move up and down and horizontally, thereby reducing costs.

[0042] Of course, as a preferred embodiment, under the premise that the carrier 200 and the driving device 130 can pass through, the transverse cross-sectional dimension of the placement cavity 120 can also be smaller than the transverse cross-sectional dimension of the vacuum cavity 110, thereby making the volume of the placement cavity 120 smaller than the volume of the vacuum cavity 110.

[0043] As a specific embodiment of the present invention, the size of each placement cavity 120 in the direction in which the driving device 130 extends matches the size of the carrier plate 200 .

[0044] Specifically, the size of each placement cavity 120 in this embodiment matches the size of the carrier 200 , thereby achieving the goal of completely removing the carrier 200 from the vacuum chamber 110 while reducing the cost as much as possible.

[0045] Specifically, the size of the placement chamber 120 in this embodiment matches the size of the carrier 200, so that the carrier 200 can be completely moved out of the vacuum chamber 110 and into the placement chamber 120, and then after the coating time meets the requirements, the carrier 200 can be moved out of the vacuum chamber 110 as soon as possible, which has high controllability for coating and avoids the situation in the prior art that in the same chamber, even if the line source device is turned off, some film material molecules or atoms will be deposited on the carrier 200 due to the residual temperature, thereby resulting in low controllability for coating.

[0046] As a specific embodiment of the utility model, each placement chamber 120 of this embodiment may include a housing 121 and at least one door 122. The housing 121 is fixedly connected to one side of the vacuum chamber 110 and keeps a seal. At least one door 122 is arranged on the top of the housing 121 and / or on the side of the housing 121 away from the vacuum chamber 110.

[0047] Specifically, the placement chamber 120 in this embodiment may include a shell 121 and a door 122, and the shell 121 is fixedly connected to the vacuum chamber 110, and the connection is to be sealed. The door 122 is arranged on the upper side of the shell 121 or on the side away from the vacuum chamber 110, or the door 122 is arranged on both the upper side and the side away from the vacuum chamber 110. The placement chamber 120 of this embodiment is provided with the door 122 mainly for placing the carrier, replacing the carrier or adjusting the position of the carrier after opening, so as to avoid the inconvenience caused by working directly at the vacuum chamber 110.

[0048] Specifically, in this embodiment, a door body 122 is disposed on the upper side of the housing 121 and on the side away from the vacuum chamber 110 . In actual operation, the door body 122 can be selectively opened to facilitate operation.

[0049] As a specific embodiment of the present invention, each door body 122 of this embodiment is detachably connected or pivotally connected to the shell body 121, and when the door body 122 is closed at the shell body 121, the door body 122 and the shell body 121 are sealed.

[0050] Specifically, the door body 122 in this embodiment is detachably or pivotally connected to the shell body 121, and the door body 122 remains sealed when closed on the shell body 121, thereby preventing the vacuum degree inside the cavity from failing to meet the requirement during vacuum coating.

[0051] As a specific embodiment of the present invention, each door body 122 of this embodiment is provided with a handle 123 .

[0052] Specifically, the handle 123 is used to facilitate opening or closing the door body 122. Specifically, one or more handles 123 may be provided at each door body 122 of this embodiment. Preferably, two handles 123 are provided at each door body 122 of this embodiment. Multiple handles 123 can exert greater force on the door body 122 when acting simultaneously.

[0053] As a specific embodiment of the present invention, the driving device 130 of this embodiment may include a transverse driving assembly 131, and the transverse driving assembly 131 may include a slide rail 1311 and a slider 1312. The slide rail 1311 is horizontally arranged, connected to the top of the vacuum chamber 110, and extends from one placement chamber 120 to another placement chamber 120. The slider 1312 cooperates with the slide rail 1311 and reciprocates along the slide rail 1311 in a controlled manner, thereby driving the carrier 200 to reciprocate horizontally between the two placement chambers 120.

[0054] Generally speaking, the cooperation between the slide rail 1311 and the slider 1312 is the cooperation between a protrusion and a groove. And the slider 1312 is acted upon by an external driving force and moves along the slide rail 1311. Generally speaking, the driving structure may further include a driving source, and the driving source drives the slider 1312 to move through a driving mechanism. Specifically, the driving source of this embodiment may be a power source, a hydraulic source, and a pneumatic source, and the driving mechanism may include a screw mechanism, a cylinder mechanism, etc. The slider 1312 is driven to move through these screw mechanisms or cylinder mechanisms, etc.

[0055] The slide rail 1311 of the present embodiment extends from one placement cavity 120 to another placement cavity 120 and is arranged horizontally. Then, the slider 1312 moves horizontally back and forth under the drive of the slide rail 1311, and further drives the carrier 200 to move horizontally back and forth, so that the relationship between the transmission speed of the carrier 200 and the coating thickness and uniformity can be tested by adjusting the position and speed of the horizontal movement.

[0056] As a specific embodiment of the present invention, the driving device 130 of this embodiment may further include a longitudinal driving assembly 132, which connects the carrier 200 to the slider 1312 and reciprocates horizontally with the slider 1312. The longitudinal driving assembly 132 drives the carrier 200 to reciprocate in the vertical direction relative to the slider 1312 in a controlled manner.

[0057] Specifically, the driving device 130 of this embodiment may also include a longitudinal driving component 132, which can be connected to the slider 1312 and the carrier 200, and can follow the horizontal movement of the slider 1312 while also driving the carrier 200 to move in the vertical direction, and can adjust the vertical distance of the carrier 200 relative to the slider 1312. When the height of the slider 1312 is consistent, the height of the distance line source of the carrier 200 can be adjusted, thereby finding the optimal source-base distance of the coating, thereby ensuring the uniformity and quality of the coating.

[0058] As a specific embodiment of the present invention, the longitudinal driving assembly 132 of this embodiment may include a height adjustment column connected between the slider 1312 and the carrier 200, and the distance between the carrier 200 and the slider 1312 can be adjusted by adjusting the size of the height adjustment column.

[0059] Specifically, the longitudinal driving component 132 of this embodiment is a height adjustment column, and the distance between the carrier 200 and the slider 1312 can be adjusted by the height adjustment column. Since the height of the slider 1312 is fixed, the height of the carrier 200 will change accordingly, thereby finding the optimal source-base distance.

[0060] The number of height adjustment columns in this embodiment can be multiple, and the size of the height adjustment columns for fixing the carrier plate 200 each time is the same, so that the carrier plate 200 can be ensured to be on the same horizontal plane.

[0061] Specifically, the adjustable height difference of the carrier plate 200 of this embodiment can reach 300-600 mm, thereby achieving an adjustable source-substrate distance of 300-600 mm.

[0062] As other embodiments, the longitudinal driving assembly 132 may also be other structures similar to a cylinder or other structures that can reciprocate, thereby driving the carrier plate 200 to reciprocate in the vertical direction.

[0063] As a specific embodiment of the present invention, the vacuum coating device 100 of this embodiment may further include a vacuum coating line source device 140 . The vacuum coating line source device 140 is disposed in the middle of the bottom of the vacuum chamber 110 .

[0064] The vacuum coating device 100 of the present embodiment may further include a vacuum coating line source device 140, through which the evaporation material is heated and evaporated through a line source resistive heating wire under high vacuum conditions. When the mean free path of the vapor molecules is much larger than the linear size of the vacuum chamber, the atoms and molecules of the film material vapor escape from the surface of the evaporation source and are rarely impacted and obstructed by other atoms and molecules, and can directly reach the surface of the carrier plate 200 to be plated. Since the temperature of the carrier plate 200 is relatively low, the film material molecules condense thereon to form a film.

[0065] As a specific embodiment of the present invention, the vacuum coating device 100 of this embodiment may further include a cooling device 150, which is disposed around the vacuum coating line source device 140 to prevent the temperature of the vacuum chamber 110 shell from being too high due to the vacuum coating line source device 140 being too high.

[0066] Specifically, the cooling device 150 of this embodiment is to prevent the heat source of the vacuum coating line source device 140 from expanding outwards, causing the shell temperature of the vacuum chamber 110 to be too high, thereby avoiding harm to external operators.

[0067] As a specific embodiment of the present invention, the vacuum coating device 100 of this embodiment may further include a vacuum device 160, which is disposed outside the vacuum chamber 110 and is used to evacuate the vacuum chamber 110. Since the vacuum chamber 110 requires a certain vacuum environment when coating is performed in the vacuum chamber 110, the vacuum device 160 is required to evacuate the vacuum chamber 110, thereby satisfying the vacuum degree requirement of the vacuum coating.

[0068] At this point, those skilled in the art should recognize that, although multiple exemplary embodiments of the present invention have been shown and described in detail herein, many other variations or modifications that conform to the principles of the present invention can still be directly determined or derived from the contents disclosed in the present invention without departing from the spirit and scope of the present invention. Therefore, the scope of the present invention should be understood and recognized as covering all such other variations or modifications.

Claims

1. A vacuum coating device, characterized in that: include: Vacuum chamber; Two placement cavities are arranged on two opposite sides of the vacuum cavity, each of the placement cavities is communicated with the vacuum cavity; the volume of each of the placement cavities is smaller than the volume of the vacuum cavity; and The driving device extends from one of the placement chambers through the vacuum chamber to the other placement chamber, and its two ends are respectively connected to the top of one of the placement chambers, for driving the carrier plate to reciprocate horizontally and / or vertically.

2. The vacuum coating device according to claim 1, characterized in that: Each of the placement cavities comprises: A housing, fixedly connected to one side of the vacuum chamber and kept sealed; and At least one door body is arranged on the top of the shell and / or on a side of the shell away from the vacuum chamber.

3. The vacuum coating device according to claim 2, characterized in that: Each of the door bodies is detachably or pivotally connected to the housing, and when the door body is closed at the housing, a seal is maintained between the door body and the housing.

4. The vacuum coating device according to claim 2, characterized in that: Each door body is provided with a handle.

5. The vacuum coating device according to claim 1, characterized in that: The driving device comprises a transverse driving assembly, and the transverse driving assembly comprises: A slide rail is horizontally arranged, the slide rail is connected to the top of the vacuum chamber, and the slide rail extends from one of the placement chambers to the other placement chamber; and The slider cooperates with the slide rail and moves back and forth along the slide rail in a controlled manner, thereby driving the carrier plate to move back and forth horizontally between the two placement cavities.

6. The vacuum coating device according to claim 5, characterized in that: The driving device also includes a longitudinal driving component, which connects the carrier plate to the slider and follows the slider to reciprocate horizontally; the longitudinal driving component drives the carrier plate to reciprocate in the vertical direction in a controlled manner, thereby adjusting the distance between the carrier plate and the slider in the vertical direction.

7. The vacuum coating device according to claim 6, characterized in that: The longitudinal drive assembly comprises: A height adjustment column is connected between the slider and the carrier plate, and the distance between the carrier plate and the slider in the vertical direction is adjusted by adjusting the size of the height adjustment column.

8. The vacuum coating device according to claim 1, characterized in that: It also includes a vacuum coating line source device, which is arranged in the middle of the bottom of the vacuum chamber.

9. The vacuum coating device according to claim 8, characterized in that: It also includes a cooling device, which is arranged around the vacuum coating line source device to prevent the temperature of the outer shell of the vacuum chamber from being too high due to the over-high temperature of the vacuum coating line source device.

10. The vacuum coating device according to claim 1, characterized in that: It also includes a vacuum pumping device, which is arranged outside the vacuum chamber and is used to evacuate the vacuum chamber.

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