Floating and adsorption control gas circuit and gas floating device thereof

Abstract

The utility model discloses a floating and adsorption control air path and an air floating device thereof, relates to the technical field of wafer grinding machines, and aims to solve the problems that a rotary table cannot be fixed and a wafer grinding workbench cannot be switched during wafer grinding in the prior art. The output end of the air source triple piece is communicated with the air floatation guide rail set through a vacuum pipeline, a pressure adjusting assembly and a valve body are arranged on the vacuum pipeline, the pressure adjusting assembly is used for adjusting the pressure of air treated by the air source triple piece, and the valve body is used for controlling different pressure states of an air path so that the air path can be alternately switched to be in a positive pressure state and a negative pressure state. The vacuum assembly is connected to the vacuum pipeline in parallel, the input end of the vacuum assembly is connected with the output end of the air source triple piece, the output end of the vacuum assembly is connected with the other port of the valve body, the flow adjusting assembly is arranged on the vacuum pipeline, the input end of the flow adjusting assembly is connected with the output end of the valve body, and the output end of the flow adjusting assembly is connected with the air floatation guide rail set.

Description

Technical Field

[0001] The utility model relates to the technical field of wafer grinding machines, and more specifically to a floating and adsorption control air path and an air floating device thereof. Background Art

[0002] During the wafer grinding process, all our workbenches need to be switched, but the turntable is relatively large and weighs up to 250kg. It is very laborious to use a motor to rotate it. At the same time, due to the heavy weight, it is impossible to complete the rotation by using guide rails. At the same time, during the wafer grinding process, we need to ensure that the turntable is stable and does not swing.

[0003] At present, the rotation of the turntable mainly relies on bearings, and various parts of the turntable are mainly in a suspended state. At the same time, the turntable cannot be stably fixed during the wafer grinding process. This is mainly because the turntable is too heavy, so it can only be suspended around. However, this will cause the turntable to be unstable and cause the turntable to tilt, resulting in damage to parts and unstable performance of the wafer grinder in the later stage.

[0004] During the wafer grinding process, the high-speed rotation of the grinding wheel will generate huge radial force, and the wafer will also rotate on the turntable to generate radial force. If the turntable is not fixed at this time, it will cause the turntable to vibrate and shift, thereby affecting the grinding quality of the wafer surface.

[0005] Therefore, how to solve the problem that the turntable cannot be fixed and the wafer grinding worktable cannot be switched during the existing wafer grinding is an urgent problem to be solved by technical personnel in this field. Utility Model Content

[0006] In view of this, the purpose of the utility model is to provide a floating and adsorption control gas path, through which the turntable is fixed during wafer grinding.

[0007] Another object of the utility model is to provide an air flotation device including the above-mentioned floating and adsorption control air circuit, which floats the turntable through the air flotation guide rail so that the turntable is not affected by friction during rotation and the worktable is switched under the drive of the motor.

[0008] In order to achieve the above purpose, the utility model provides the following technical solutions:

[0009] A floating and adsorption control gas circuit, comprising:

[0010] An air source triplex, the input end of which is connected to the air source, and the output end of which is connected to the air flotation guide rail assembly through a vacuum pipeline. A pressure regulating assembly and a valve body are provided on the vacuum pipeline. The pressure regulating assembly is used to adjust the pressure of the gas processed by the air source triplex, and the valve body is used to control different pressure states of the air circuit, so that the air circuit can alternately switch between a positive pressure state and a negative pressure state;

[0011] A vacuum component is connected in parallel to the vacuum pipeline, the input end of the vacuum component is connected to the output end of the gas source triplex, and the output end of the vacuum component is connected to another port of the valve body;

[0012] The flow regulating component is arranged in the vacuum pipeline, the input end of the flow regulating component is connected with the output end of the valve body, and the output end of the flow regulating component is connected with the air floating guide rail group.

[0013] Preferably, the vacuum assembly comprises:

[0014] An air solenoid valve, the input end of which is connected to the output end of the air source triplex;

[0015] A vacuum generator, the input end of the vacuum generator is connected to the output end of the air solenoid valve, and the output end of the vacuum generator is connected to another port of the valve body.

[0016] Preferably, the flow regulating assembly includes at least three groups of electronic air flow meters, any group of electronic air flow meters is connected to the corresponding flow regulator, the air floating guide rail group includes at least three air floating guide rails, and the electronic air flow meters are connected to the air floating guide rails in a one-to-one correspondence.

[0017] Preferably, a micro-mist separator is provided on the vacuum pipe, and the micro-mist separator is located between the valve body and the electronic air flow meter.

[0018] Preferably, the pressure regulating assembly includes a pressure gauge and a pressure regulating valve, the pressure regulating valve is located between the gas source triplex and the valve body, and the pressure gauge is located between the valve body and the micro-mist separator.

[0019] Preferably, the air solenoid valve is a normally closed solenoid valve.

[0020] An air flotation device, comprising any one of the above-mentioned floating and adsorption control air circuits, the air flotation device comprising:

[0021] The frame has a cylindrical air-floating platform, the top of the air-floating platform is evenly provided with air-floating guide rails, and the top of the air-floating guide rails is provided with corresponding air-floating blocks;

[0022] The turntable is sleeved on the fixed shaft in the middle of the air flotation table, the bottom end surface of the turntable abuts against the top end surface of the air flotation block, and the top of the turntable is provided with a clamping groove for installing the workbench;

[0023] The driving device is arranged on the frame and is used for driving the turntable to rotate along the axial direction of the fixed axis.

[0024] Preferably, the driving device comprises:

[0025] A motor, arranged on the frame;

[0026] A transmission wheel connected to an output end of the motor;

[0027] The synchronous belt is wound around the outer circumference of the turntable and the transmission wheel so that the synchronous belt forms a closed loop between the transmission wheel and the turntable.

[0028] Preferably, a bearing is provided on the outer periphery of the fixed shaft, the turntable is sleeved on the outer periphery of the bearing, and the bearing is pressed against the fixed shaft by a locking member.

[0029] Preferably, a guide structure is provided on the frame, and the guide structure is used to limit the movement of the synchronous belt.

[0030] The floating and adsorption control air circuit provided by the utility model includes an air source triplet, an air flotation guide rail group, a pressure regulating component, a valve body, a vacuum component and a flow regulating component. Specifically, the input end of the air source triplet is connected to the air source, and the air source is in a normally open state so that the air circuit is always unobstructed. The air output by the air source can be preliminarily processed through the air source triplet, and the output end of the air source triplet is connected to the air flotation guide rail group through a vacuum pipeline. A pressure regulating component and a valve body are provided on the vacuum pipeline. The pressure regulating component is used to adjust the pressure of the gas processed by the air source triplet, and the valve body is used to control different pressure states of the air circuit so that the air circuit alternately switches between positive pressure state and negative pressure state. The air preliminarily processed by the air source triplet is pressure-regulated by the pressure regulating component and output to the air flotation guide rail group through the vacuum pipeline.

[0031] A flow regulating component is arranged in the vacuum pipeline, the input end of the flow regulating component is connected to the output end of the valve body, and the output end of the flow regulating component is connected to the air flotation guide rail group. The flow of air in the vacuum pipeline can be displayed and adjusted through the flow regulating component. The vacuum component is connected in parallel to the vacuum pipeline, the input end of the vacuum component is connected to the output end of the air source triplet, and the output end of the vacuum component is connected to another port of the valve body. The positive pressure and negative pressure states of the air path are switched by setting the valve body. When the valve body controls the air path to switch to a negative pressure state, the air flotation guide rail group can adsorb the turntable thereon. When the valve body controls the air path to switch to a positive pressure state, the turntable can float on the air flotation guide rail group. The flow of gas is adjusted by the flow regulating component to control the floating height of the turntable on the air flotation guide rail group.

[0032] The floating and adsorption control air circuit set up in the above manner has two alternating working states. Through the control of the valve body, the air circuit can freely switch between the positive pressure state and the negative pressure state, so that the turntable can float and be adsorbed on the air floating guide rail group. When the valve body controls the air circuit to switch to the negative pressure state, the turntable is adsorbed on the air floating guide rail group, thereby achieving the fixation of the turntable when grinding the wafer. BRIEF DESCRIPTION OF THE DRAWINGS

[0033] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings in the following description are only embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on the provided drawings without paying creative work.

[0034] Figure 1 This is a schematic diagram of the structure of the floating and adsorption control gas circuit provided by the utility model;

[0035] Figure 2 A schematic diagram of the structure of the air flotation device provided by the utility model;

[0036] Figure 3 This is a schematic structural diagram of the air flotation device provided by the utility model when it is working.

[0037] Reference numerals:

[0038] 1-Air source triplex;

[0039] 2-air floating guide rail set;

[0040] 3-pressure regulating assembly, 31-pressure regulating valve, 32-pressure gauge;

[0041] 4-valve body;

[0042] 5-vacuum assembly, 51-air solenoid valve, 52-vacuum generator;

[0043] 6-Flow regulating component;

[0044] 7-micro mist separator;

[0045] 8- rack;

[0046] 9-air flotation platform;

[0047] 10-air flotation block;

[0048] 11-Turntable;

[0049] 12-Fixed shaft;

[0050] 13-driving device, 131-motor, 132-transmission wheel, 133-synchronous belt;

[0051] 14- bearing;

[0052] 15-locking piece;

[0053] 16-Guide structure. DETAILED DESCRIPTION

[0054] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0055] The core of the utility model is to provide a floating and adsorption control gas path, through which the turntable 11 is fixed during wafer grinding.

[0056] Another core of the utility model is to provide an air flotation device including the above-mentioned floating and adsorption control air circuit, which floats the turntable 11 through the air flotation guide rail so that the turntable 11 is not affected by friction during rotation, and the workbench is switched under the drive of the motor 131.

[0057] Please refer to Figure 1 and Figure 2 A floating and adsorption control gas circuit includes an air source triplet 1, an air floating guide rail group 2, a pressure regulating component 3, a valve body 4, a vacuum component 5 and a flow regulating component 6.

[0058] Specifically, the input end of the air source triplet 1 is connected to the air source, and the air source is in a normally open state so that the air path is always unobstructed. The air output by the air source can be preliminarily processed through the air source triplet 1. The output end of the air source triplet 1 is connected to the air flotation guide rail group 2 through a vacuum pipe. A pressure regulating component 3 and a valve body 4 are provided on the vacuum pipe. The pressure regulating component 3 is used to adjust the pressure of the gas treated by the air source triplet 1, and the valve body 4 is used to control different pressure states of the air path so that the air path alternately switches between positive pressure and negative pressure states. The air preliminarily treated by the air source triplet 1 is pressure-regulated by the pressure regulating component 3 and output to the air flotation guide rail group 2 through the vacuum pipe.

[0059] The flow regulating component 6 is arranged in the vacuum pipeline, the input end of the flow regulating component 6 is connected to the output end of the valve body 4, and the output end of the flow regulating component 6 is connected to the air flotation guide rail group 2. The flow regulating component 6 can display and adjust the flow of air in the vacuum pipeline. The vacuum component 5 is connected in parallel to the vacuum pipeline, the input end of the vacuum component 5 is connected to the output end of the air source triplet 1, and the output end of the vacuum component 5 is connected to another port of the valve body 4. The valve body 4 is set to realize the switching of the positive pressure and negative pressure states of the air path. When the valve body 4 controls the air path to switch to the negative pressure state, the air flotation guide rail group 2 can adsorb the turntable 11 thereon. When the valve body 4 controls the air path to switch to the positive pressure state, the turntable 11 can float on the air flotation guide rail group 2. The flow of gas is adjusted by the flow regulating component 6 to control the floating height of the turntable 11 on the air flotation guide rail group 2.

[0060] The floating and adsorption control air circuit set up in the above manner has two alternating working states. Through the control of the valve body 4, the air circuit can freely switch between the positive pressure state and the negative pressure state, so that the turntable 11 can float and be adsorbed on the air floating guide rail group 2. When the valve body 4 controls the air circuit to switch to the negative pressure state, the turntable 11 is adsorbed on the air floating guide rail group 2, thereby realizing the fixation of the turntable 11 when grinding the wafer.

[0061] In the above embodiment, the vacuum assembly 5 includes an air solenoid valve 51 and a vacuum generator 52, the input end of the air solenoid valve 51 is connected to the output end of the air source triplex 1, the input end of the vacuum generator 52 is connected to the output end of the air solenoid valve 51, and the output end of the vacuum generator 52 is connected to another port of the valve body 4.

[0062] It should be noted that a negative pressure vacuum adsorption channel is formed between the air source triplex 1, the air solenoid valve 51, the vacuum generator 52 and the valve body 4, and the positive pressure air path and the negative pressure air path are effectively switched by switching the valve body 4. Figure 1 As shown, the valve body 4 has two access ports, namely port A and port B. When port A of the valve body 4 is connected, the air path formed among the air source triplet 1, the pressure regulating assembly 3 and the valve body 4, the flow regulating assembly 6 and the air floating guide rail group 2 is in a positive pressure state, so that the turntable 11 floats on the air floating guide rail group 2. When port B of the valve body 4 is connected, the air path formed among the air source triplet 1, the air solenoid valve 51, the vacuum generator 52, the valve body 4, the flow regulating assembly 6 and the air floating guide rail group 2 is in a negative pressure state, so that the turntable 11 is adsorbed on the air floating guide rail group 2 to fix the turntable 11, thereby ensuring the fixation of the turntable 11 during wafer grinding.

[0063] That is to say, air is always supplied by the air source, and the coil is switched to port A through the valve body 4. At this time, the pressure regulating component 3 displays a positive pressure floating state; when the coil is switched to port B, the air solenoid valve 51 and the vacuum generator 52 are opened, and the vacuum generator 52 converts the high-speed and high-pressure positive pressure airflow into a negative pressure vacuum adsorption state. At this time, the pressure regulating component 3 displays a negative pressure vacuum adsorption state.

[0064] In this embodiment, the valve body 4 is a two-position five-way solenoid valve. However, in practical applications, there is no limitation to this as long as the above-mentioned technical effects can be achieved.

[0065] In this embodiment, the vacuum assembly 5 includes an air solenoid valve 51 and a vacuum generator 52, but in practical applications, there is no limitation thereto as long as the above-mentioned technical effects can be achieved.

[0066] In the above case, the flow regulating assembly 6 includes at least three groups of electronic air flow meters, any group of electronic air flow meters is connected to the corresponding flow regulator, the air floating guide rail group 2 includes at least three air floating guide rails, and the electronic air flow meters are connected to the air floating guide rails one by one.

[0067] It can be understood that when the turntable 11 is installed, air enters the electronic air flow meter, and we adjust the air intake volume by adjusting the flow regulator. At this time, we can use the micrometer to test the floating height of the turntable 11 at the three air flotation guide rail positions respectively, and control the stability of the floating height of the turntable 11 by adjusting the flow regulator. The values ​​of the three electronic air flow meters are fixed, and the air volume of the electronic flow meter is monitored to control the three floating points of the turntable 11 to be consistent, thereby controlling the height stability of the three positions of the turntable 11.

[0068] Furthermore, a micro mist separator 7 is provided on the vacuum pipe, and the micro mist separator 7 is located between the valve body 4 and the electronic air flow meter.

[0069] It should be noted that the airflow passes through the micro-mist separator 7 to filter the oil mist in the air path, preventing the oil mist from entering the air flotation guide rail, which may block the air flotation device in the later stage, causing insufficient air flow and thus causing the turntable 11 to tilt or the turntable 11 to be insufficient in height.

[0070] In the above embodiment, the pressure regulating assembly 3 includes a pressure gauge 32 and a pressure regulating valve 31 . The pressure regulating valve 31 is located between the gas source triplex 1 and the valve body 4 , and the pressure gauge 32 is located between the valve body 4 and the fine mist separator 7 .

[0071] It can be understood that pressure sensing is performed through the spring diaphragm inside the pressure transformer, and the pressure value is converted into analog current transmission. The air is initially processed through the air source triplet 1. At this time, the air pressure is initially stabilized within a range, and secondary precise pressure regulation is performed through the pressure regulating valve 31 to facilitate the stabilization of the air source pressure.

[0072] On the basis of the above-mentioned embodiment, the air solenoid valve 51 is a normally closed solenoid valve.

[0073] Please refer to Figure 2 and Figure 3 , an air flotation device, including the above-mentioned floating and adsorption control air circuit, the air flotation device includes a frame 8, an air flotation table 9, an air flotation block 10, a turntable 11 and a driving device 13. Specifically, the frame 8 has a cylindrical air flotation table 9, the top of the air flotation table 9 is evenly provided with air flotation guide rails, the top of the air flotation guide rails is provided with corresponding air flotation blocks 10, the turntable 11 is sleeved on a fixed shaft 12 in the middle of the air flotation table 9, the bottom end surface of the turntable 11 is in contact with the top end surface of the air flotation block 10, the top of the turntable 11 is provided with a clamping groove for installing a workbench, the driving device 13 is arranged on the frame 8, and the driving device 13 is used to drive the turntable 11 to rotate along the axial direction of the fixed shaft 12.

[0074] It can be understood that the turntable 11 is floated by the air flotation block 10 so that the turntable 11 is not affected by friction during the rotation process. The turntable 11 is adsorbed on the air flotation block 10 by adopting the vacuum switching function of the air flotation block 10. Due to the effect of the vacuum adsorption force, the radial force of the turntable 11 will not be offset during wafer grinding, thereby ensuring the stability of the wafer grinding process. The turntable 11 is driven to rotate by the driving device 13, so that the workbench on the turntable 11 can be smoothly switched.

[0075] In this embodiment, the driving device 13 drives the turntable 11 to switch one workbench every time it rotates 120 degrees. However, in practical applications, there is no limitation to this as long as the above technical effects can be achieved.

[0076] Furthermore, due to the limitation of the flatness of the machining surface of the turntable 11, the air flotation height of the turntable 11 needs to be adjusted. At this time, it is necessary to monitor and adjust the air flow rate, so that the air flow rate is adjusted to the vicinity of the set value every time during the installation and commissioning stage of the new machine, and then fine-tuning is performed according to the three-point air flotation height of the turntable 11. In addition to the air flow rate, the flotation pressure needs to be stabilized to ensure the flotation height of the turntable 11. By simply controlling the flow rate and pressure values ​​stably, the flotation force output by the air flotation block 10 can be controlled to ensure the stability of the air flotation height of the turntable 11, so as not to wear the air flotation block 10 and the bottom surface of the turntable 11.

[0077] In one embodiment, the turntable 11 can be electromagnetically controlled to float and rotate, mainly by transforming the three air-floating blocks 10 into electromagnets, and magnetically levitating through the metal below the turntable 11 to achieve magnetic adsorption and anti-magnetic effect. The height of the magnetic levitation is controlled by controlling the magnitude of the input current. At the same time, the driving component that controls the rotation of the turntable 11 can be placed under the turntable 11. When rotation is required, the motor 131 shaft extends a claw to control the rotation to complete the rotation of the turntable 11.

[0078] On the basis of the above embodiment, the driving device 13 includes a motor 131, a transmission wheel 132 and a synchronous belt 133. The motor 131 is arranged on the frame 8, the transmission wheel 132 is connected to the output end of the motor 131, and the synchronous belt 133 is wound around the outer periphery of the turntable 11 and the transmission wheel 132 so that the synchronous belt 133 forms a closed loop between the transmission wheel 132 and the turntable 11.

[0079] It should be noted that the motor 131 drives the transmission wheel 132 to rotate, driving the synchronous belt 133 wound around the transmission wheel 132 to rotate, so as to drive the turntable 11 to rotate, thereby completing the switching of the workbench on the turntable 11. Specifically, the air flotation height of the turntable 11 is controlled by controlling the air path, and the turntable 11 is fixed by vacuum when the motor 131 stops, so as to prevent the turntable 11 from being offset due to the radial force during the equipment processing. At the same time, through the mechanical structure design, the turntable 11 is mainly fixed on the fixed shaft 12, and the bearing 14 is in the middle. The turntable 11 can be subjected to the air flotation force to complete the floating and falling actions, and at the same time, the motor 131 drives the synchronous belt 133 to pull the turntable 11 to complete the rotation and transposition operation.

[0080] In the above case, a bearing 14 is provided on the outer periphery of the fixed shaft 12 , the turntable 11 is sleeved on the outer periphery of the bearing 14 , and the bearing 14 is pressed against the fixed shaft 12 through a locking member 15 .

[0081] It can be understood that the bearing 14 is provided to realize the rotation of the turntable 11 , and the locking member 15 is provided to prevent the turntable 11 from being separated from the fixed shaft 12 during the rotation process.

[0082] In the above embodiment, a guide structure 16 is provided on the frame 8 , and the guide structure 16 is used to limit the movement of the synchronous belt 133 .

[0083] It should be noted that the guide structure 16 is arranged on both sides of the synchronous belt 133, which can effectively limit the movement state of the synchronous belt 133. In practical applications, there is no restriction on the structure, type and installation position of the guide structure 16, as long as the above-mentioned technical effect can be achieved.

[0084] In summary, the floating and adsorption control air circuit provided by the utility model, the air source triplet 1 performs preliminary processing on the air to make the air pressure initially stabilized within a range, and performs secondary precise pressure regulation through the pressure regulating valve 31 to facilitate the stabilization of the air source pressure. The pressure-regulated air is controlled and switched through the valve body 4 to complete the floating and adsorption actions of the turntable 11. Then, the airflow passes through the micro-mist separator 7 to complete the filtration of the oil mist in the air circuit to prevent the oil mist from entering the air flotation block 10, which may block the air flotation device in the later stage, causing insufficient air flow and thus tilting the turntable 11 or insufficient height of the turntable 11 and wearing the air flotation block 10. The subsequent air enters the electronic air flow meter, and the air intake is adjusted by adjusting the flow regulator, so that the floating height of the turntable 11 at the three air flotation blocks 10 is consistent, thereby controlling the stability of the floating height of the turntable 11 and ensuring that there is no risk of scratching the air flotation block 10 during the rotation of the turntable 11. After the turntable 11 floats, the motor 131 drives the transmission wheel 132 and the synchronous belt 133 to complete power transmission to realize the rotation action of the turntable 11.

[0085] In addition to the floating and adsorption control air circuits disclosed in the above embodiments, the present invention also provides an air flotation device including the above floating and adsorption control air circuits. For the structures of other parts of the air flotation device, please refer to the prior art and will not be described in detail herein.

[0086] The various embodiments in this specification are described in a progressive manner, and each embodiment focuses on the differences from other embodiments. The same or similar parts between the various embodiments can be referenced to each other.

[0087] The above is a detailed introduction to a floating and adsorption control air circuit and its flotation device provided by the utility model. This article uses specific examples to illustrate the principle and implementation method of the utility model. The description of the above embodiment is only used to help understand the method and core idea of ​​the utility model. It should be pointed out that for ordinary technicians in this technical field, without departing from the principle of the utility model, the utility model can also be improved and modified, and these improvements and modifications also fall within the scope of protection of the claims of the utility model.

Claims

1. A floating and adsorption control gas circuit, characterized in that: include: An air source triplex (1), wherein the input end of the air source triplex (1) is connected to an air source, and the output end of the air source triplex (1) is connected to an air flotation guide rail assembly (2) via a vacuum pipeline, and a pressure regulating component (3) and a valve body (4) are provided on the vacuum pipeline, wherein the pressure regulating component (3) is used to regulate the pressure of the gas treated by the air source triplex (1), and the valve body (4) is used to control different pressure states of the air circuit, so that the air circuit alternately switches between a positive pressure state and a negative pressure state; A vacuum component (5) is connected in parallel to the vacuum pipeline, the input end of the vacuum component (5) is connected to the output end of the gas source triplex (1), and the output end of the vacuum component (5) is connected to another port of the valve body (4); A flow regulating component (6) is arranged in the vacuum pipeline, the input end of the flow regulating component (6) is connected to the output end of the valve body (4), and the output end of the flow regulating component (6) is connected to the air floating guide rail group (2).

2. The floating and adsorption control gas circuit according to claim 1 is characterized in that: The vacuum component (5) comprises: An air solenoid valve (51), wherein an input end of the air solenoid valve (51) is connected to an output end of the air source triplex (1); A vacuum generator (52), wherein an input end of the vacuum generator (52) is connected to an output end of the air solenoid valve (51), and an output end of the vacuum generator (52) is connected to another port of the valve body (4).

3. The floating and adsorption control gas circuit according to claim 2 is characterized in that: The flow regulating assembly (6) comprises at least three groups of electronic air flow meters, any group of the electronic air flow meters is connected to a corresponding flow regulator, and the air floating guide rail group (2) comprises at least three air floating guide rails, and the electronic air flow meters are connected to the air floating guide rails in a one-to-one correspondence.

4. The floating and adsorption control gas circuit according to claim 3 is characterized in that: A micro-mist separator (7) is provided on the vacuum pipeline, and the micro-mist separator (7) is located between the valve body (4) and the electronic air flow meter.

5. The floating and adsorption control gas circuit according to claim 4 is characterized in that: The pressure regulating assembly (3) comprises a pressure regulating valve (31) and a pressure gauge (32); the pressure regulating valve (31) is located between the gas source triplex (1) and the valve body (4); and the pressure gauge (32) is located between the valve body (4) and the fine mist separator (7).

6. The floating and adsorption control gas circuit according to claim 5, characterized in that: The air solenoid valve (51) is a normally closed solenoid valve.

7. An air flotation device, characterized in that: The floating and adsorption control gas circuit comprises the floating and adsorption control gas circuit according to any one of claims 1 to 6, wherein the air flotation device comprises: A frame (8), the frame (8) having a cylindrical air-floating platform (9), the top of the air-floating platform (9) being evenly provided with the air-floating guide rails, and the top of the air-floating guide rails being provided with corresponding air-floating blocks (10); A turntable (11) is sleeved on a fixed shaft (12) in the middle of the air flotation table (9), the bottom end surface of the turntable (11) abuts against the top end surface of the air flotation block (10), and the top of the turntable (11) is provided with a clamping groove for mounting a workbench; A driving device (13) is provided on the frame (8), and the driving device (13) is used to drive the turntable (11) to rotate along the axial direction of the fixed axis (12).

8. The air flotation device according to claim 7, characterized in that: The driving device (13) comprises: A motor (131) is arranged on the frame (8); A transmission wheel (132) connected to an output end of the motor (131); A synchronous belt (133) is wound around the outer circumference of the turntable (11) and the transmission wheel (132), so that the synchronous belt (133) forms a closed loop between the transmission wheel (132) and the turntable (11).

9. The air flotation device according to claim 8, characterized in that: A bearing (14) is provided on the outer periphery of the fixed shaft (12); the turntable (11) is sleeved on the outer periphery of the bearing (14); and the bearing (14) is pressed against the fixed shaft (12) via a locking member (15).

10. The air flotation device according to claim 9, characterized in that: The frame (8) is provided with a guide structure (16), and the guide structure (16) is used to limit the movement of the synchronous belt (133).

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