Substrate polishing apparatus

Abstract

The utility model belongs to the technical field of ceramic machining, and discloses a substrate grinding device which comprises a conveying assembly, a positioning assembly, a grinding assembly and an abutting assembly. The conveying assembly comprises a conveying belt for conveying the substrate; the positioning assembly comprises a stop block and a positioning part, and the stop block is arranged on a conveying path of the conveying belt; the positioning part is configured to position the substrate blocked by the blocking block; the two grinding assemblies are arranged on the two sides of the conveying belt, each grinding assembly comprises a grinding driving part, and a grinding head is arranged at the output end of each grinding driving part; the output end of the abutting assembly abuts against the conveying belt to drive the conveying belt to ascend and descend relative to the stop block. The conveying belt is jacked to the position above the stopping block through the jacking assembly, so that the ground base plate can cross the stopping block, after the base plate crosses the stopping block, the jacking assembly and the conveying belt are reset, and therefore a carrying component used for carrying away the stopping block can be omitted, and cost is saved; and the operation of the conveying belt is not stopped in the process, so that the processing efficiency is ensured.

Description

Technical Field

[0001] The utility model relates to the technical field of ceramic processing, in particular to a substrate grinding device. Background Art

[0002] The four sharp corners of the ceramic substrate after edge grinding are relatively sharp. When the substrate is loaded into the basket in the clean room, it is easy to get stuck on both sides of the basket, making it difficult to load the basket. When loading, the sharp corners of the substrate are also particularly easy to scratch the side of the basket, which is easy to drop dust and residue, causing an increase in dust and foreign matter in the workshop, so chamfering is very necessary;

[0003] In the process of grinding the four corners of the ceramic substrate, the ceramic substrate needs to be first transferred to the positioning assembly for positioning. The positioning assembly is provided with a blocking block to stop the substrate, and then positioning and grinding are performed. After grinding is completed, the ceramic substrate needs to be transferred from the positioning assembly. In the prior art, a set of conveying components is required to transfer the ceramic substrate to the blocking block of the positioning assembly; another set of conveying components is also required to transfer the ceramic substrate over the blocking block to be transferred out, thereby improving efficiency, but this method is relatively costly. Utility Model Content

[0004] The utility model aims to provide a substrate grinding device, which can complete the transfer of a ceramic substrate into a positioning component and transfer it out of the positioning component over a blocking block by using a set of conveying components, thereby reducing costs without reducing efficiency.

[0005] To achieve this purpose, the utility model adopts the following technical solutions:

[0006] A substrate polishing device, comprising:

[0007] a conveyor assembly, the conveyor assembly comprising a conveyor belt, the conveyor belt being configured to convey a substrate;

[0008] A positioning assembly, the positioning assembly comprising a blocking block and a positioning portion, the blocking block being arranged on a conveying path of the conveyor belt so as to be able to block the substrate conveyed by the conveyor belt; the positioning portion being configured to position the substrate blocked by the blocking block;

[0009] A grinding assembly, wherein two groups of the grinding assemblies are arranged on both sides of the conveyor belt, and the grinding assembly comprises a grinding drive member, and a grinding head is arranged at the output end of the grinding drive member so as to grind the substrate positioned by the positioning assembly;

[0010] A butting assembly, the output end of which butts against the conveyor belt, and the butting assembly can drive the conveyor belt to rise and fall relative to the blocking block.

[0011] Preferably, the abutting assembly comprises an abutting driving member, an output end of which is provided with a fixing plate, a fixing plate is provided on which a abutting wheel corresponding to the conveyor belt is provided, and the abutting wheel abuts against the conveyor belt.

[0012] Preferably, two groups of the abutting components are provided, and the two groups of the abutting components are respectively located upstream and downstream of the positioning component.

[0013] Preferably, it also includes a height detection sensor, which can detect the height change of the conveyor belt.

[0014] Preferably, the positioning assembly includes a first positioning drive and a first positioning block, the first positioning block is arranged opposite to the blocking block and upstream of the blocking block, the first positioning block is arranged at the output end of the first positioning drive, and the first positioning drive can drive the first positioning block to rise and fall and approach or move away from the blocking block.

[0015] Preferably, the positioning assembly also includes two opposite second positioning blocks and a second positioning drive, the two second positioning blocks are arranged on both sides of the conveyor belt, the second positioning block is arranged at the output end of the second positioning drive, and the second positioning drive drives the second positioning block to move closer to or away from the substrate.

[0016] Preferably, it further comprises an incoming material detection sensor, wherein the incoming material detection sensor is located upstream of the first positioning block.

[0017] Preferably, the grinding assembly includes a traveling drive member and a cooling nozzle, a grinding cover is provided at the output end of the traveling drive member, and a first through hole is provided on the side of the grinding cover facing the conveyor belt for the substrate to extend into; the grinding drive member is provided at the output end of the traveling drive member, and a second through hole is provided on the grinding cover, and the grinding drive member can drive the grinding head to extend into the grinding cover through the second through hole, and the cooling nozzle can be aligned with the grinding head, and the cooling nozzle is connected to a liquid supply device.

[0018] Preferably, a pre-cleaning component is further included, which includes a cleaning cover arranged downstream of the positioning component, the cleaning cover is provided with a through groove extending along the conveying direction of the conveyor belt, the conveyor belt passes through the through groove, and a liquid spray nozzle and / or a blowing nozzle is provided in the cleaning cover.

[0019] Preferably, a plurality of groups of the liquid spray nozzles are arranged at relatively intervals on the upper and lower sides of the conveyor belt; and the air blowing nozzle is located downstream of the liquid spray nozzle.

[0020] Beneficial effects of the utility model:

[0021] The blocking block blocks the substrate on the conveyor belt and is positioned by the positioning part. The grinding assembly performs grinding, and then the conveyor belt can be lifted above the blocking block by the abutting assembly, so that the ground substrate can pass over the blocking block. After passing over the blocking block, the abutting assembly and the conveyor belt are reset, thereby saving the transport parts used to move away the blocking block and saving costs; and this process can continue without stopping the operation of the conveyor belt, that is, the next substrate to be ground is continuously conveyed during the entire process, thereby ensuring the processing efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 It is a schematic diagram of the substrate grinding device of the utility model;

[0023] Figure 2 It is a top view of the transmission component, the positioning component and the abutment component in the utility model;

[0024] Figure 3 It is a side view of the transmission component, the positioning component and the abutment component in the utility model;

[0025] Figure 4 It is a schematic diagram of the grinding assembly in the utility model;

[0026] Figure 5 It is a schematic diagram of the pre-cleaning component in the utility model;

[0027] Figure 6 It is a top view of the pre-cleaning component in the utility model.

[0028] In the figure:

[0029] 1. Frame;

[0030] 2. Conveying assembly; 21. Conveying belt; 22. Tensioning roller;

[0031] 3. Positioning assembly; 31. Clamping workbench; 32. Stop block; 33. Positioning part; 331. First positioning drive member; 332. First positioning block; 333. Second positioning block; 334. Second positioning drive member; 34. Incoming material detection sensor;

[0032] 4. Grinding assembly; 41. Grinding drive; 42. Grinding head; 43. Travel drive; 44. Grinding cover; 441. First through hole; 442. Second through hole; 443. Water outlet; 45. Protective cover; 46. Horizontal slide; 47. Display dial indicator; 48. Moving plate; 49. Cooling nozzle;

[0033] 5. abutting assembly; 51. abutting driving member; 52. a fixing plate; 53. abutting wheel;

[0034] 6. Pre-cleaning assembly; 61. Cleaning cover; 62. Through slot; 63. Liquid spray nozzle; 64. Blowing nozzle;

[0035] 7. Collection tank. DETAILED DESCRIPTION

[0036] The present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. It is to be understood that the specific embodiments described herein are only used to explain the present invention, rather than to limit the present invention. It should also be noted that, for ease of description, only the parts related to the present invention, rather than all structures, are shown in the accompanying drawings.

[0037] In the description of the present invention, unless otherwise clearly specified and limited, the terms "connected", "connected", and "fixed" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0038] In the present utility model, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may include that the first and second features are in direct contact, or may include that the first and second features are not in direct contact but are in contact through another feature between them. Moreover, a first feature being "above", "above" and "above" a second feature includes that the first feature is directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature. A first feature being "below", "below" and "below" a second feature includes that the first feature is directly below and obliquely below the second feature, or simply indicates that the first feature is lower in level than the second feature.

[0039] In the description of this embodiment, the terms "upper", "lower", "left", "right", etc., and the orientation or position relationship are based on the orientation or position relationship shown in the drawings, and are only for the convenience of description and simplified operation, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operate in a specific orientation, and therefore cannot be understood as a limitation of the present invention. In addition, the terms "first" and "second" are only used to distinguish in the description and have no special meaning.

[0040] like Figures 1 to 6As shown, the utility model provides a substrate grinding device, which includes a conveying component 2, a positioning component 3, a grinding component 4 and a resisting component 5; the conveying component 2 includes a conveyor belt 21, and the conveyor belt 21 is configured to convey a substrate; the positioning component 3 includes a blocking block 32 and a positioning portion 33, the blocking block 32 is arranged on the conveying path of the conveyor belt 21, so as to be able to block the substrate conveyed by the conveyor belt 21; the positioning portion 33 is configured to position the substrate blocked by the blocking block 32; two groups of grinding components 4 are arranged on both sides of the conveyor belt 21, the grinding component 4 includes a grinding drive 41, and a grinding head 42 is arranged at the output end of the grinding drive 41, so as to be able to grind the substrate positioned by the positioning component 3; the output end of the resisting component 5 resists the conveyor belt 21, and the resisting component 5 can drive the conveyor belt 21 to rise and fall relative to the blocking block 32.

[0041] Through the above structure, when the substrate on the conveyor belt 21 is blocked by the blocking block 32 and positioned by the positioning portion 33, the grinding component 4 can grind it, and then the conveyor belt 21 can be lifted above the blocking block 32 by the abutting component 5, so that the ground substrate can pass over the blocking block 32. After the substrate passes over the blocking block 32, the abutting component 5 and the conveyor belt 21 are reset, thereby saving the transport components used to move away from the blocking block 32 and saving costs; and this process can be carried out without stopping the operation of the conveyor belt 21, that is, the next substrate to be ground is continuously conveyed during the entire process, thereby ensuring the processing efficiency.

[0042] like Figure 1 As shown, the grinding device at the four corners of the substrate includes a frame 1 for support, and the conveying component 2, the positioning component 3, the grinding component 4 and the top component 5 are all located on the frame 1; a collecting tank 7 is provided on the frame 1, and the collecting tank 7 is located below the grinding component 4, the positioning component 3 and the top component 5, so as to receive the coolant and the cleaning liquid used for grinding to avoid splashing of the liquid; it can be understood that the collecting tank 7 is connected to the filtering device, so as to filter the collected coolant and the cleaning liquid, and can be recycled. The filtering device is not the focus of the present invention and will not be described in detail.

[0043] like Figure 3 As shown, in some embodiments, the transmission component 2 includes transmission wheels at intervals arranged on the frame 1, and a transmission belt 21 is driven on the transmission wheel. At least two transmission belts 21 are arranged at intervals to ensure stability during transmission. At the same time, during the grinding process, splashing of cooling liquid and cleaning liquid is inevitable. In this embodiment, the transmission belt 21 adopts a polyurethane round belt to avoid liquid corrosion, extend service life and transmission stability. It can be understood that the transmission component 2 also includes a transmission drive and a tensioning roller 22 for tensioning the transmission belt 21. The above adopts the existing technology and will not be repeated.

[0044] like Figure 2 and Figure 3 As shown, in some embodiments, the positioning component 3 includes a clamping workbench 31 arranged on the frame 1, and a blocking block 32 and a positioning portion 33 are arranged on the clamping workbench 31. The blocking block 32 is located on the conveying path of the conveyor belt 21 and is arranged adjacent to the conveyor belt 21; that is, the blocking block 32 is located on the conveying path of the substrate, so that the substrate conveyed by the conveyor belt 21 can be blocked by the blocking block 32, so that the substrate stays at the position of the positioning component 3; it should be noted here that the height of the conveyor belt 21 is 2mm-3mm higher than the height of the clamping workbench 31, so that the conveyor belt 21 is cantilevered to avoid unnecessary interference. The positioning portion 33 includes a first positioning drive member 331 and a first positioning block 332. The first positioning block 332 is arranged opposite to the blocking block 32 and is located upstream of the blocking block 32. In this embodiment, the upstream and downstream are distinguished by the conveying direction of the conveyor belt 21, that is, the first positioning block 332 faces the side of the initial direction of the conveyor belt 21. The first positioning block 332 is arranged at the output end of the first positioning drive member 331. The first positioning drive member 331 can drive the first positioning block 332 to perform a lifting movement relative to the upper end surface of the conveyor belt 21, so that the first positioning block 332 is located below the conveyor belt 21 during the conveying process of the substrate, and when the substrate hits the blocking block 32, the first positioning block 332 protrudes from the conveyor belt 21; and the first positioning drive member 331 can also drive the first positioning block 332 to move closer to the blocking block 32 so as to fix the substrate together with the blocking block 32, and when the grinding is completed, the first positioning drive member 331 can also drive the first positioning block 332 to move away from the blocking block 32, thereby releasing the substrate. Exemplarily, the first positioning drive member 331 can be, but is not limited to, a rotary clamping cylinder. Further, in order to ensure the stability of the substrate during grinding, the positioning portion 33 also includes a relative second positioning block 333 and a second positioning drive member 334, the second positioning drive member 334 is arranged on the clamping workbench 31, the two second positioning blocks 333 are arranged on both sides of the conveyor belt 21, the second positioning block 333 is arranged at the output end of the second positioning drive member 334, and the second positioning drive member 334 drives the second positioning block 333 to approach or move away from the substrate, so that the substrate can be fixed in the direction of both sides of the first positioning block 332, and the substrate is further stabilized. Exemplarily, the second positioning drive member 334 is a cylinder. Further, in order to determine the time to raise the first positioning block 332 and ensure that the first positioning block 332 is raised from the bottom of the conveyor belt 21 after the substrate passes, an incoming material detection sensor 34 is also arranged on the frame 1, and the incoming material detection sensor 34 is located upstream of the first positioning block 332, and is electrically connected to the first positioning drive member 331, so as to avoid interference.

[0045] like Figure 1 and Figure 4As shown, two groups of grinding components 4 are arranged on both sides of the conveyor belt 21, and the grinding components 4 include a travel drive 43, and a grinding cover 44 is arranged at the output end of the travel drive 43, and a first through port 441 is arranged on the side of the grinding cover 44 facing the conveyor belt 21, so that the travel drive 43 can drive the grinding cover 44 to approach or move away from the substrate positioned by the positioning component 3, so that the four corners of the substrate extend into the grinding cover 44 for grinding, thereby avoiding the splashing of residues during grinding. Further, a protective cover 45 is also arranged on the outside of the travel drive 43 to avoid rust. The travel drive 43 adopts a travel slide to avoid the rust problem in a long-term humid environment. Further, a transverse slide 46 is arranged at the output end of the travel drive 43, and the grinding cover 44 is arranged at the output end of the transverse slide 46. The driving direction of the transverse slide 46 is perpendicular to the conveying direction of the travel drive 43 and is the same as the conveying direction of the conveyor belt 21, so that the position of the grinding cover 44 can be adjusted by the transverse slide 46, so that the substrate can be accurately docked with the first through port 441. In addition, the horizontal slide 46 is connected to a display dial indicator 47 to make the movement more accurate. A moving plate 48 is provided at the output end of the horizontal slide 46, and the grinding cover 44 is fixed on the moving plate 48; and a grinding drive 41 is provided on the moving plate 48, and the grinding drive 41 is located above the grinding cover 44. A grinding head 42 is provided at the output end of the grinding drive 41 to drive the grinding head 42 to rise and fall, and a second through hole 442 corresponding to the grinding head 42 is provided on the grinding cover 44, and the grinding head 42 extends into the grinding cover 44 through the second through hole 442. After the grinding head 42 is used for a long time, the grinding head 42 can be driven to rise and fall by the grinding drive 41 to change the grinding position and increase the service life of the grinding head 42. Exemplarily, the grinding head 42 is made of a grinding wheel, and the grinding cover 44 is made of PVC material. The grinding assembly 4 is also provided with a cooling nozzle 49 to align with the grinding head 42. The cooling nozzle 49 is connected to a liquid supply device to provide a coolant during grinding. In this embodiment, the coolant is cooling water. It should be noted that the cooling nozzle 49 can be disposed in the grinding cover 44; or it can be disposed on the clamping workbench 31, so that when the grinding cover 44 approaches, the cooling nozzle 49 extends into the grinding cover 44 through the first through port 441. In order to facilitate the discharge of cooling water, the grinding cover 44 is provided with a water outlet 443. When the substrate is located in the grinding cover 44, the water outlet 443 is located above the collecting tank 7, so that the cooling water used during grinding can enter the collecting tank 7.

[0046] like Figure 2 and Figure 3As shown, after the grinding is completed, the ground substrate needs to be transferred out of the positioning assembly 3, that is, the substrate needs to be separated from the above-mentioned blocking block 32. In this embodiment, the above-mentioned abutting assembly 5 is used to abut the conveyor belt 21, so that the height of the upper end surface of the conveyor belt 21 is higher than the upper end surface of the blocking block 32, so that the substrate located on the conveyor belt 21 continues to be transmitted downstream. In the current embodiment, two groups of abutting assemblies 5 are provided, and the two groups of abutting assemblies 5 are respectively located upstream and downstream of the positioning assembly 3, so as to ensure the stability of transmission. In addition, the abutting assembly 5 includes an abutting driving member 51 arranged on the frame 1 or the clamping workbench 31, and the output end of the abutting driving member 51 is provided with a fixed plate 52, and the fixed plate 52 is provided with an abutting wheel corresponding to the conveyor belt 21, so as to abut the above-mentioned conveyor belt 21 through the abutting wheel 53. After the abutting wheel 53 abuts the conveyor belt 21, since the conveyor belt 21 maintains continuous transportation, the abutting wheel 53 can reduce the friction between the two, thereby extending the service life of the conveyor belt 21. Exemplarily, the abutting driving member 51 is a cylinder. In other embodiments, a group of abutting components 5 can also be arranged downstream of the positioning component 3.

[0047] Furthermore, in order to monitor the height of the conveyor belt 21 and avoid large changes in the upper end surface of the conveyor belt 21 during normal transportation, causing the transported substrate to hit the clamping workbench 31 or rub against the clamping workbench 31, and avoiding the abnormal height of the conveyor belt 21 caused by the abutting component 5; a height detection sensor (not shown in the figure) is arranged on the frame 1 to detect the height change of the conveyor belt 21 located at the blocking block 32. When the height of the conveyor belt 21 is too low due to long-term wear and frequent lifting of the conveyor belt 21, an alarm will be issued in time to prevent abnormal accidents.

[0048] like Figure 1 , Figure 5 and Figure 6 As shown, in some embodiments, the frame 1 is further provided with a pre-cleaning component 6, which includes a cleaning cover 61 disposed downstream of the positioning component 3, and a through slot 62 extending along the conveying direction of the conveyor belt 21 is disposed on the cleaning cover 61, and the conveyor belt 21 passes through the through slot 62, so that the substrate that has passed the blocking block 32 can be delivered to the cleaning cover 61 through the conveyor belt 21, and a liquid spray nozzle 63 and / or an air blowing nozzle 64 are disposed in the cleaning cover 61, so that the substrate is cleaned by the liquid spray nozzle 63 and / or the air blowing nozzle 64 in the cleaning cover 61. Exemplarily, the cleaning cover 61 is made of transparent PVC material to avoid rust and to observe the internal cleaning condition. Figure 6As shown, in some embodiments, a liquid spray nozzle 63 and an air blowing nozzle 64 are provided in the cleaning cover 61, so that liquid cleaning and air drying are performed simultaneously. Specifically, multiple groups of liquid spray nozzles 63 are arranged along the conveying direction of the conveyor belt 21 and at relatively intervals on the upper and lower sides of the conveyor belt 21, so that liquid spray cleaning is performed on the upper and lower sides of the substrate; illustratively, each group of liquid spray nozzles 63 includes multiple liquid spray nozzles 63 arranged at intervals along the vertical conveying direction, and the liquid spray nozzles 63 are connected to an external liquid supply device. In this embodiment, the cleaning liquid is water. The air blowing nozzle 64 is located downstream of the liquid spray nozzle 63, so that the substrate is air-dried by the air blowing nozzle 64 after cleaning. Exemplarily, the air blowing nozzle 64 is tubular, and the extension direction of the tubular air blowing nozzle 64 is perpendicular to the conveying direction; in addition, the number of air blowing nozzles 64 can be set to multiple, and multiple air blowing nozzles 64 are transverse to the upper and lower sides of the conveyor belt 21, so that the upper and lower sides of the substrate can be air-dried. The grinding dust residue on the substrate is then removed by the pre-cleaning component 6, so that after the substrate enters the subsequent cleaning machine, the grinding dust is prevented from entering the cleaning machine, thereby avoiding blockage problems and ensuring production efficiency.

[0049] Obviously, the above embodiments of the present invention are merely examples for the purpose of clearly illustrating the present invention, and are not intended to limit the implementation methods of the present invention. For those skilled in the art, various obvious changes, readjustments and substitutions can be made without departing from the scope of protection of the present invention. It is not necessary and impossible to list all implementation methods here. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention shall be included in the scope of protection of the claims of the present invention.

Claims

1. A substrate polishing device, characterized in that: include: A conveying assembly (2), the conveying assembly (2) comprising a conveying belt (21), the conveying belt (21) being configured to convey a substrate; A positioning assembly (3), the positioning assembly (3) comprising a blocking block (32) and a positioning portion (33), the blocking block (32) being arranged on a conveying path of the conveyor belt (21) so as to be able to block the substrate conveyed by the conveyor belt (21); the positioning portion (33) being configured to position the substrate blocked by the blocking block (32); A grinding assembly (4), two groups of the grinding assemblies (4) are arranged on both sides of the conveyor belt (21), the grinding assembly (4) comprises a grinding drive (41), and a grinding head (42) is arranged at the output end of the grinding drive (41) so as to grind the substrate positioned by the positioning assembly (3); A butting assembly (5), wherein the output end of the butting assembly (5) butts against the conveyor belt (21), and the butting assembly (5) can drive the conveyor belt (21) to rise and fall relative to the blocking block (32).

2. The substrate polishing device according to claim 1, characterized in that: The abutting assembly (5) comprises an abutting driving member (51), an output end of the abutting driving member (51) is provided with a fixing plate (52), the fixing plate (52) is provided with an abutting wheel (53) corresponding to the conveyor belt (21), and the abutting wheel (53) abuts against the conveyor belt (21).

3. The substrate polishing device according to claim 1, characterized in that: The abutting components (5) are provided in two groups, and the two groups of the abutting components (5) are respectively located upstream and downstream of the positioning component (3).

4. The substrate polishing device according to claim 1, characterized in that: It also includes a height detection sensor, which can detect the height change of the conveyor belt (21).

5. The substrate polishing device according to claim 1, characterized in that: The positioning assembly (3) comprises a first positioning drive member (331) and a first positioning block (332); the first positioning block (332) is arranged opposite to the blocking block (32) and is arranged upstream of the blocking block (32); the first positioning block (332) is arranged at the output end of the first positioning drive member (331); the first positioning drive member (331) can drive the first positioning block (332) to rise and fall and to move closer to or away from the blocking block (32).

6. The substrate polishing device according to claim 5, characterized in that: The positioning assembly (3) further comprises two opposite second positioning blocks (333) and a second positioning driving member (334), wherein the two second positioning blocks (333) are arranged on both sides of the conveyor belt (21), the second positioning block (333) is arranged at the output end of the second positioning driving member (334), and the second positioning driving member (334) drives the second positioning block (333) to approach or move away from the substrate.

7. The substrate polishing device according to claim 5, characterized in that: It also includes an incoming material detection sensor (34), which is located upstream of the first positioning block (332).

8. The substrate polishing device according to claim 1, characterized in that: The grinding assembly (4) comprises a travel drive member (43) and a cooling nozzle (49); a grinding cover (44) is provided at the output end of the travel drive member (43); a first through hole (441) is provided on the side of the grinding cover (44) facing the conveyor belt (21) for the substrate to extend into; the grinding drive member (41) is provided at the output end of the travel drive member (43); a second through hole (442) is provided on the grinding cover (44); the grinding drive member (41) can drive the grinding head (42) to extend into the grinding cover (44) through the second through hole (442); the cooling nozzle (49) can be aligned with the grinding head (42); and the cooling nozzle (49) is connected to a liquid supply device.

9. The substrate polishing device according to claim 1, characterized in that: The invention also comprises a pre-cleaning component (6), wherein the pre-cleaning component (6) comprises a cleaning cover (61) arranged downstream of the positioning component (3), wherein the cleaning cover (61) is provided with a through groove (62) extending along the conveying direction of the conveyor belt (21), and the conveyor belt (21) passes through the through groove (62), and a liquid spray nozzle (63) and / or an air blowing nozzle (64) are arranged in the cleaning cover (61).

10. The substrate polishing device according to claim 9, characterized in that: A plurality of groups of the liquid spraying nozzles (63) are arranged at relatively intervals on the upper and lower sides of the conveyor belt (21); and the air blowing nozzle (64) is located downstream of the liquid spraying nozzle (63).

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