Vapor deposition furnace
By introducing a vibrating mechanism and a quietly connected vapor deposition furnace design in the CVD rotary furnace, the problems of uneven deposition of furnace walls and insufficient airtightness during the synthesis of Si/C composite materials of lithium-ion batteries are solved, and more uniform deposition is achieved and higher security.
Patent Information
- Application Number
- CN202421130334.6
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-05-23
- Publication Date
- 2024-12-31
- Estimated Expiration
- 2034-05-23
AI Technical Summary
The existing CVD rotary furnaces are difficult to ensure the airtightness caused by rotary joints during the synthesis of Si/C composite materials of lithium-ion batteries, resulting in uneven deposition of furnace walls and insufficient safety.
A vapor-phase deposition furnace including a furnace body, a heating box and a vibration mechanism is designed. The furnace body is vibrated up and down in the heating box through the vibration mechanism to avoid silicon deposition and agglomeration, and the air-tightness is improved through quiet connection.
The uniform deposition of Si/C composite materials is achieved, the airtightness and safety of the furnace body is improved, the violent reaction between silane and oxygen is avoided, and the safety of the equipment is enhanced.
Smart Images
Figure CN222274679U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of chemical vapor deposition equipment, in particular to a vapor deposition furnace. Background Art
[0002] Lithium-ion batteries are widely used in portable devices due to their high energy density and good efficiency. Graphite is used as the active material of the anode, mainly because of its high reversibility of lithium ion uptake and release and good cycle stability. For lithium batteries, it is very important to improve the energy density, such as increasing the driving range of electric vehicles. Silicon anode materials have become the most likely new generation of anode materials to replace traditional graphite anode materials due to their advantages such as high theoretical capacity, low discharge platform and abundant reserves. However, the main challenge facing silicon as an active material is the large volume change during lithium ion insertion, up to 300%, which leads to particle crushing and continuous growth of the solid electrolyte interface (SEI) layer, resulting in continuous consumption of electrolyte and active lithium, as well as its poor electrical performance. Therefore, silicon-carbon (Si / C) composites are the main technical route for silicon-based anodes, where graphite can buffer the volume change of silicon and provide a highly conductive matrix, while silicon can increase the capacity.
[0003] The performance of electrode materials depends not only on their chemical composition but also on their particle microstructure. The choice of synthesis method is the key to manufacturing commercial electrode materials. Silicon anode materials are composite materials composed of graphite and a small amount of silicon (or silicon oxide). A large amount of silane is used in the synthesis process. Silane is highly active and cannot exist in the air. It will react violently with oxygen in the air and self-ignite or explode. Therefore, the airtightness of the equipment is very high.
[0004] At present, the synthesis or molding of Si / C composite materials is generally done by CVD rotary kilns, which mix materials by rotating to promote the full mixing of materials and gases. However, silicon deposits will agglomerate on the furnace wall during the rotation of the CVD rotary kiln, resulting in uneven deposition. In addition, the CVD rotary kiln has a dynamic and static connection at the inlet and outlet because of the need to use a rotary joint, and the airtightness is difficult to ensure. The rotary joint cannot be used on large equipment because the pipe diameter is too large to ensure airtightness. Utility Model Content
[0005] The utility model aims to provide a vapor deposition furnace to solve the problems existing in the above-mentioned prior art, reduce the deposition agglomeration on the furnace wall, improve the uniformity of the Si / C composite material, and improve the airtightness and safety of the furnace body.
[0006] To achieve the above purpose, the utility model provides the following solutions:
[0007] The utility model provides a vapor deposition furnace, comprising a furnace body, a heating box and a vibration mechanism; the furnace body is fixedly connected to the vibration mechanism, part of the furnace body can be placed in the heating box, the heating box is used to heat the furnace body, there is a gap between the furnace body and the heating box, the vibration mechanism can drive the furnace body to vibrate relative to the heating box, the furnace body is provided with a material air inlet, an inert gas inlet and an air outlet, the inert gas inlet is used to be sealed and connected to an inert gas storage tank, the material air inlet is used to be sealed and connected to a gas material storage tank, and the air outlet is used to be sealed and connected to an exhaust gas absorption device.
[0008] Preferably, the inert gas inlet and the air outlet are respectively arranged at both ends of the furnace body, the number of the material air inlets is two, and the two material air inlets are respectively arranged on two opposite side walls of the furnace body close to one end of the inert gas inlet, the inert gas inlet is sealed and connected to the inert gas storage tank through a polytetrafluoroethylene gasket, and the air outlet is sealed and connected to the exhaust gas absorption equipment through the polytetrafluoroethylene gasket.
[0009] Preferably, two cooling devices are further included, which are respectively mounted on the two ends of the furnace body and placed outside the heating box. Cooling water can flow into the cooling devices to cool the two ends of the furnace body.
[0010] Preferably, the cross-section of the furnace body is rectangular, and the bottom surface of the furnace body includes a raised portion in the middle and flat portions on both sides, the raised portion and the flat portions on both sides are connected by side panels that are angled with the horizontal plane, solid materials are placed on the raised portion, and the raised portion is placed in the heating box.
[0011] Preferably, the vibration mechanism comprises a vibration base and two vibration motors, the furnace body is fixedly connected to the vibration base via a frame, the two vibration motors are fixed to the bottom surface of the vibration base, and both of the two vibration motors can rotate forward and reverse.
[0012] Preferably, the vibration mechanism further includes a vibration-damping pad and a fixed base, and the vibration base is connected to the fixed base placed on the ground via the vibration-damping pad.
[0013] Preferably, the heating box is fixed on the ground by a bracket, a height-adjustable footrest is installed under the bracket, an electric control cabinet is fixed on the bracket, and a three-color warning light is provided on the top surface of the heating box.
[0014] Preferably, through holes are provided on both sides of the heating box to allow the furnace body to extend, and the area of the through holes is larger than the cross-sectional area of the furnace body. The heating box includes a box cover and a box body, and the box cover and the box body are connected by hinges, and handles are provided on the box cover and the box body.
[0015] Preferably, the material air inlet is sealed and connected to the gas material storage tank through a feed pipe, one end of the feed pipe is sealed and connected to the gas material storage tank, and the other end of the feed pipe passes through the heating box and is sealed and connected to the material air inlet.
[0016] Compared with the prior art, the utility model has achieved the following technical effects:
[0017] The utility model provides a vapor deposition furnace. After a solid material is placed and fixed in a furnace body, an inert gas is introduced into the furnace body to make the furnace body in an oxygen-deficient state, so as to avoid the silane from contacting and reacting with oxygen in the air. A vibration mechanism can drive the furnace body to vibrate, so that the material in the furnace vibrates and floats up and down, so that the gas material and the solid material can fully contact each other for deposition and coating. In addition, the furnace body can vibrate and fall off the material deposited on the furnace wall during continuous vibration, so as to avoid silicon deposition and agglomeration on the furnace wall, and improve the uniformity of the Si / C composite material. Furthermore, the materials are mixed by the furnace body vibration. Compared with the rotation method of the CVD rotary furnace, the sealing problem of the dynamic and static connection in the rotary furnace can be solved. The vibration method connection is a static connection, which can be more effectively sealed, and improve the airtightness and safety of the furnace body. BRIEF DESCRIPTION OF THE DRAWINGS
[0018] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.
[0019] Figure 1 It is a front view of the vapor deposition furnace of the utility model;
[0020] Figure 2 It is a side view of the vapor deposition furnace of the utility model;
[0021] Figure 3 It is a front view of the furnace body and the vibration mechanism of the vapor deposition furnace of the utility model;
[0022] Figure 4 It is a side view of the furnace body and the vibration mechanism of the vapor deposition furnace of the utility model;
[0023] Figure 5 It is a schematic diagram of the forward rotation of the vibration motor of the vapor deposition furnace of the utility model;
[0024] Figure 6 It is a schematic diagram of the reversal of the vibration motor of the vapor deposition furnace of the utility model;
[0025] Figure 7 It is a schematic diagram of the heating structure of the vapor deposition furnace of the utility model;
[0026] Figure 8 It is a front view of the furnace body and the vibration mechanism of the vapor deposition furnace of the utility model;
[0027] Fig. 9 It is a side view of the furnace body and the vibration mechanism of the vapor deposition furnace of the utility model.
[0028] In the figure: 1-furnace body; 2-heating box; 3-vibration mechanism; 4-inert gas inlet; 5-material air inlet; 6-air outlet; 7-cooling device; 8-frame; 9-vibration base; 10-vibration motor; 11-vibration pad; 12-fixed base; 13-bracket; 14-foot; 15-discharge flange; 16-electric control cabinet; 17-three-color warning light; 18-through hole; 19-hinge; 20-buckle; 21-handle; 22-raised part. DETAILED DESCRIPTION
[0029] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.
[0030] The utility model aims to provide a vapor deposition furnace to solve the problems existing in the above-mentioned prior art, reduce the deposition agglomeration on the furnace wall, improve the uniformity of the Si / C composite material, and improve the airtightness and safety of the furnace body.
[0031] In order to make the above-mentioned purposes, features and advantages of the present invention more obvious and easy to understand, the present invention is further described in detail below in conjunction with the accompanying drawings and specific implementation methods.
[0032] The utility model provides a vapor deposition furnace, such as Figure 1-2As shown, it includes a furnace body 1, a heating box 2 and a vibration mechanism 3; the furnace body 1 is fixedly connected to the vibration mechanism 3, part of the furnace body 1 can be placed in the heating box 2, the heating box 2 is used to heat the furnace body 1, there is a gap between the furnace body 1 and the heating box 2, the vibration mechanism 3 can drive the furnace body 1 to vibrate relative to the heating box 2, the furnace body 1 is provided with a material air inlet 5, an inert gas inlet 4 and an air outlet 6, the inert gas inlet 4 is used to be sealed and connected to the inert gas storage tank, the material air inlet 5 is sealed and connected to the gas material storage tank, and the air outlet 6 is sealed and connected to the tail gas absorption equipment through the discharge flange 15. When using a vapor deposition furnace to synthesize Si / C composite materials, first put the solid material (porous carbon) into the furnace body 1 from the gas outlet 6 disassembled from the exhaust gas absorption device, then seal the gas outlet 6 with the exhaust gas absorption device, introduce inert gas from the inert gas inlet 4 to discharge the air in the furnace body 1 from the gas outlet 6, so that the furnace body 1 is in an oxygen-deficient state to prevent silane from contacting and reacting with oxygen in the air, then heat the furnace body 1 to the target temperature through the heating box 2, turn on the vibration mechanism 3, and drive the furnace body 1 to vibrate. Since there is a gap between the furnace body 1 and the heating box 2, the heating box 2 can remain still when the furnace body 1 vibrates, and then introduce silane gas through the material air inlet 5. The furnace body 1 vibrates to cause the material in the furnace to vibrate up and down. The furnace body 1 is in a state of floating, so that the silane gas and the porous carbon vibrating up and down can fully contact each other for deposition and coating. After the reaction of the silane gas and the porous carbon is completed, acetylene gas is introduced through the material air inlet 5. Acetylene can coat a layer of carbon on the surface of the Si / C composite material at high temperature to further avoid reaction with oxygen. The furnace body 1 can make the material deposited on the furnace wall vibrate and fall off during the continuous vibration process, so as to avoid silicon deposition and agglomeration on the furnace wall and improve the uniformity of the Si / C composite material. The materials are mixed by the vibration of the furnace body 1. Compared with the rotation method of the CVD rotary furnace, the sealing problem of the dynamic and static connection in the rotary furnace can be solved. The vibration connection is a static connection, which can be more effectively sealed and improve the airtightness and safety of the furnace body 1.
[0033] It is further preferred in the embodiment of the present invention that Figure 3-4 As shown, the inert gas inlet 4 and the air outlet 6 are respectively arranged at both ends of the furnace body 1, and the number of the material air inlet 5 is two. The two material air inlets 5 are respectively arranged on two opposite side walls of the furnace body 1 close to one end of the inert gas inlet 4. The two material air inlets 5 can ensure uniform feeding of gas materials. Since most of the fixed materials are located below the furnace body 1, the material air inlet 5 arranged below the side wall can allow the gas materials to pass into the furnace body 1 from the lower position of the furnace body 1, thereby improving the utilization rate of the gas. The port of the inert gas inlet 4 is sealed and connected to the inert gas storage tank through a polytetrafluoroethylene gasket, and the port of the air outlet 6 is sealed and connected to the tail gas absorption equipment through a polytetrafluoroethylene gasket.
[0034] In the embodiment of the utility model, it is further preferred that the vapor deposition furnace further includes two cooling devices 7, which are respectively sleeved at the two ends of the furnace body 1, and the cooling devices 7 are placed outside the heating box 2, and the cooling devices 7 include a cooling water inlet and a cooling water outlet, and the cooling water enters the cooling device 7 through the cooling water inlet to cool the two ends of the furnace body 1. The cooling devices 7 at both ends can prevent the PTFE gaskets at both ends from being damaged due to high temperature, thereby ensuring the airtightness of the furnace body 1.
[0035] In the embodiment of the present invention, it is further preferred that the cross section of the furnace body 1 is rectangular, the bottom surface of the furnace body 1 includes a raised portion 22 in the middle and flat portions on both sides, the raised portion 22 and the flat portions on both sides are connected by side plates that are angled with the horizontal plane, preferably, the angle between the side plates and the horizontal plane is 45°, the solid material is placed on the raised portion 22, and the raised portion 22 is placed in the heating box 2. The raised portion 22 can prevent the solid material from moving out of the heating zone in the heating box 2 during vibration.
[0036] In the embodiment of the present utility model, it is further preferred that the vibration mechanism 3 includes a vibration base 9 and two vibration motors 10, the furnace body 1 is fixedly connected to the vibration base 9 through the frame 8, and the two vibration motors 10 are fixed to the bottom surface of the vibration base 9. The vibration motors 10 are turned on to set a certain amplitude and frequency, so that the vibration base 9 drives the frame 8 and the furnace body 1 to vibrate up and down together, so that the porous carbon in the furnace vibrates up and down and disperses, and the two vibration motors 10 can be reversed. Figure 5-6 As shown, when the vibration motor 10 rotates forward, the material tends to move toward the left, and when the vibration motor 10 rotates reversely, the material tends to move toward the right. The alternating forward and reverse rotations of the vibration motor 10 can make the material continuously move alternately to the left and right to prevent material accumulation.
[0037] It is further preferred in the implementation of the utility model that the vibration mechanism 3 further includes a vibration-damping pad 11 and a fixed base 12 , and the vibration base 9 is connected to the fixed base 12 placed on the ground through the vibration-damping pad 11 .
[0038] It is further preferred in the embodiment of the present invention that Figure 7-9 As shown, the heating box 2 is fixed on the ground by a bracket 13, a height-adjustable foot 14 is installed under the bracket 13, an electric control cabinet 16 is fixed on the bracket 13, and a three-color warning light 17 is provided on the top surface of the heating box 2.
[0039] In the implementation manner of the utility model, it is further preferred that through holes 18 are opened on both sides of the heating box 2 to allow the furnace body 1 to extend, and the area of the through holes 18 is larger than the cross-sectional area of the furnace body 1. The heating box 2 includes a box cover and a box body, and the box cover and the box body are connected by a hinge 19, which are fixed by a buckle 20 when closed, and handles 21 are provided on the box cover and the box body to facilitate the operator to open and close the heating box.
[0040] In the implementation manner of the utility model, it is further preferred that the material air inlet 5 is sealed and connected to the gas material storage tank through a feed pipe, one end of the feed pipe is sealed and connected to the gas material storage tank, and the other end of the feed pipe passes through the heating box 2 and is sealed and connected to the material air inlet 5. The feed pipe passes through the heating box 2 to preheat the gas material that is about to enter the furnace body 1. The high-temperature gas material enters the furnace, which can ensure the uniformity of the temperature in the furnace body 1, improve the decomposition efficiency of the gas in the furnace, and make the gas and material fully mixed.
[0041] The present invention uses specific examples to illustrate the principle and implementation of the present invention. The above examples are only used to help understand the method and core idea of the present invention. At the same time, for those skilled in the art, according to the idea of the present invention, there will be changes in the specific implementation and application scope. In summary, the content of this specification should not be understood as limiting the present invention.
Claims
1. A vapor deposition furnace, characterized in that: It includes a furnace body, a heating box and a vibration mechanism; the furnace body is fixedly connected to the vibration mechanism, part of the furnace body can be placed in the heating box, the heating box is used to heat the furnace body, there is a gap between the furnace body and the heating box, the vibration mechanism can drive the furnace body to vibrate relative to the heating box, the furnace body is provided with a material air inlet, an inert gas inlet and an air outlet, the inert gas inlet is used to be sealed and connected to an inert gas storage tank, the material air inlet is used to be sealed and connected to a gas material storage tank, and the air outlet is used to be sealed and connected to an exhaust gas absorption device.
2. The vapor deposition furnace according to claim 1, characterized in that: The inert gas inlet and the air outlet are respectively arranged at both ends of the furnace body. The number of the material air inlets is two, and the two material air inlets are respectively arranged on two opposite side walls of the furnace body close to one end of the inert gas inlet. The inert gas inlet is sealed and connected to the inert gas storage tank through a polytetrafluoroethylene gasket, and the air outlet is sealed and connected to the tail gas absorption equipment through the polytetrafluoroethylene gasket.
3. The vapor deposition furnace according to claim 2, characterized in that: It also includes two cooling devices, which are respectively mounted on the two ends of the furnace body and are placed outside the heating box. Cooling water can be introduced into the cooling devices to cool the two ends of the furnace body.
4. The vapor deposition furnace according to claim 1, characterized in that: The cross-section of the furnace body is rectangular, and the bottom surface of the furnace body includes a raised portion in the middle and flat portions on both sides. The raised portion and the flat portions on both sides are connected by side plates that are angled with the horizontal plane. Solid materials are placed on the raised portion, and the raised portion is placed in the heating box.
5. The vapor deposition furnace according to claim 1, characterized in that: The vibration mechanism comprises a vibration base and two vibration motors. The furnace body is fixedly connected to the vibration base through a frame. The two vibration motors are fixed to the bottom surface of the vibration base. Both of the two vibration motors can rotate forward and reverse.
6. The vapor deposition furnace according to claim 5, characterized in that: The vibration mechanism also includes a vibration-damping pad and a fixed base, and the vibration base is connected to the fixed base placed on the ground through the vibration-damping pad.
7. The vapor deposition furnace according to claim 1, characterized in that: The heating box is fixed on the ground by a bracket, a height-adjustable footrest is installed under the bracket, an electric control cabinet is fixed on the bracket, and a three-color warning light is arranged on the top surface of the heating box.
8. The vapor deposition furnace according to claim 1, characterized in that: Through holes are provided on both sides of the heating box to allow the furnace body to extend out, and the area of the through holes is larger than the cross-sectional area of the furnace body. The heating box includes a box cover and a box body, the box cover and the box body are connected by hinges, and handles are provided on the box cover and the box body.
9. The vapor deposition furnace according to claim 1, characterized in that: The material air inlet is sealed and connected to the gas material storage tank through a feed pipe, one end of the feed pipe is sealed and connected to the gas material storage tank, and the other end of the feed pipe passes through the heating box and is sealed and connected to the material air inlet.