Cooling single crystal furnace

Abstract

The utility model discloses a cooling single crystal furnace which comprises a furnace body and a protective shell, the upper end face of the furnace body is fixedly connected with a fixing ring, the side wall of the fixing ring is fixedly connected with four limiting blocks distributed in the circumferential direction, a protective cavity with an opening in the upper side is formed in the protective shell, and four sliding grooves corresponding to the limiting blocks in the vertical direction are distributed in the side wall of the protective cavity in the circumferential direction. The sliding grooves are slidably connected with limiting blocks. Supporting plates are arranged on the left side and the right side of the protective shell correspondingly, cooling plates are fixedly connected to the upper end faces of the supporting plates, cooling pipes penetrating through the cooling plates in a surrounding mode are arranged in the cooling plates, cooling water is introduced into the cooling pipes to cool the cooling plates, and when the furnace body is used and needs to be cooled, the cooling plates make contact with the furnace body to dissipate heat of the furnace body. And the cooling plates can be close to or far away from the furnace body through mutual approaching and far away of the cooling plates, so that the cooling plates are prevented from being damaged by heat when the furnace body is used.

Description

Technical Field

[0001] The utility model relates to the field of single crystal furnaces, in particular to a cooling single crystal furnace. Background Art

[0002] At present, a single crystal furnace is usually used to complete the pulling of silicon rods. After pulling at least one silicon rod, or when the single crystal furnace is inspected and maintained, the furnace chamber of the single crystal furnace needs to be cooled. However, natural cooling takes a lot of time, which seriously affects the production efficiency of the single crystal furnace. If contact cooling is used, it is easy to heat up when the single crystal furnace is in use, causing damage to the cooling part. Utility Model Content

[0003] The utility model aims to provide a cooling single crystal furnace to solve the problems raised in the above background technology.

[0004] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a cooling single crystal furnace, comprising a furnace body and a protective shell, wherein the upper end surface of the furnace body is fixedly connected with a fixing ring, and the side wall of the fixing ring is fixedly connected with four circumferentially distributed limit blocks, and a protection cavity with an upper opening is provided in the protective shell, and four chute grooves corresponding to the upper and lower positions of the limit blocks are circumferentially distributed on the side wall of the protection cavity, and the chute grooves are slidably connected with the limit blocks;

[0005] A support plate is respectively provided on the left and right sides of the protective shell, and a cooling plate is fixedly connected to the upper end surface of the support plate. A cooling pipe is provided in the cooling plate and surrounds and passes through the cooling plate. Cooling water is passed into the cooling pipe to cool the cooling plate. When the furnace body needs to be cooled after use, the furnace body can be cooled by bringing the cooling plate close to the furnace body.

[0006] The outer side wall of the protective shell is fixedly connected with two front-to-back symmetrical fixing blocks, and the fixing blocks are fixedly connected with two left-to-right symmetrical connecting rods.

[0007] The two front-to-back symmetrical connecting rods are fixedly connected to the same connecting plate, and the lower end surface of the connecting plate is fixedly connected to a mounting plate.

[0008] A telescopic device is fixedly arranged at one end of the mounting plates close to each other, and the telescopic device is dynamically connected to a telescopic rod.

[0009] The telescopic rods are fixedly connected to the support plate at one end face close to each other, and the telescopic rods are driven to extend and retract by the telescope, so as to drive the two cooling plates to approach or move away from each other.

[0010] Compared with the prior art, the beneficial effects of the utility model are:

[0011] The utility model provides a furnace body and a fixing ring, and a limit block fixedly connected by the fixing ring can be slidably connected with a slide groove provided by the protective shell, thereby realizing the connection between the furnace body and the protective shell. The protective shell can protect the furnace body when it is in use, avoiding safety problems caused by damage to the furnace body under high temperature and high pressure conditions.

[0012] By setting up the cooling plate, heat exchange can be carried out through the cooling tube provided in the cooling plate, and then the cooling plate is in contact with the furnace body to dissipate heat from the furnace body, and by moving the cooling plates closer to or farther away from each other, the cooling plates can be moved closer to or farther away from the furnace body, thereby avoiding damage to the cooling plates due to heat when the furnace body is in use. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 An overall three-dimensional schematic diagram of a cooling single crystal furnace proposed for the utility model;

[0014] Figure 2 A three-dimensional schematic diagram of a cooling single crystal furnace proposed in the utility model from the right side;

[0015] Figure 3 This is a schematic diagram of the structure of a cooling single crystal furnace proposed in the utility model after removing the furnace body part;

[0016] Figure 4 for Figure 3 Right view of;

[0017] Figure 5 This is a schematic diagram of the structure of a furnace body part in a cooling single crystal furnace proposed in the utility model;

[0018] In the figure: 101, furnace body; 102, fixing ring; 103, limit block; 104, protective shell; 105, protective cavity; 106, slide groove; 107, fixing block; 108, connecting rod; 109, connecting plate; 111, mounting plate; 112, telescopic device; 113, telescopic rod; 114, support plate; 115, cooling plate; 116, cooling pipe. DETAILED DESCRIPTION

[0019] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0020] Embodiment 1:

[0021] See also Figure 1-5The utility model provides a technical solution: a cooling single crystal furnace, comprising a furnace body 101 and a protective shell 104, wherein the upper end surface of the furnace body 101 is fixedly connected with a fixing ring 102, and the side wall of the fixing ring 102 is fixedly connected with four circumferentially distributed limit blocks 103, and the protective shell 104 is provided with a protection cavity 105 with an upper opening, and the side wall of the protection cavity 105 is circumferentially distributed with four slide grooves 106 corresponding to the upper and lower positions of the limit blocks 103, and the slide grooves 106 are slidably connected with the limit blocks 103;

[0022] A support plate 114 is provided on the left and right sides of the protective shell 104, and a cooling plate 115 is fixedly connected to the upper end surface of the support plate 114. A cooling pipe 116 is provided inside the cooling plate 115 and surrounds and passes through the cooling plate 115. Cooling water is passed into the cooling pipe 116 to cool the cooling plate 115. When the furnace body 101 needs to be cooled after use, the furnace body 101 can be cooled by bringing the cooling plate 115 close to the furnace body 101.

[0023] The outer side wall of the protection shell 104 is fixedly connected to two front-to-back symmetrical fixing blocks 107 , and the fixing blocks 107 are fixedly connected to two left-to-right symmetrical connecting rods 108 .

[0024] The two front-to-back symmetrical connecting rods 108 are fixedly connected to a same connecting plate 109 , and a mounting plate 111 is fixedly connected to the lower end surface of the connecting plate 109 .

[0025] A telescopic device 112 is fixedly disposed at one end of the mounting plates 111 , and the telescopic device 112 is dynamically connected to a telescopic rod 113 .

[0026] The telescopic rods 113 are fixedly connected to the support plate 114 at one end face close to each other. The telescopic rods 113 are driven to extend and retract by the telescope 112 , so as to drive the two cooling plates 115 to move closer to or away from each other.

[0027] Working principle:

[0028] When in use, raw materials are placed in the furnace body 101, and then the limiting block 103 slides in the slide groove 106 to achieve the connection between the furnace body 101 and the protective shell 104, so that the furnace body 101 is located in the protective cavity 105. At this time, the telescopic device 112 is started to drive the telescopic rod 113 to contract, thereby driving the two cooling plates 115 to move away from each other, so that the cooling plates 115 are not close to the furnace body 101, and the cooling liquid is passed into the cooling pipe 116;

[0029] When in use, the furnace body 101 is heated to complete the use of the single crystal furnace. When in use, due to the limitation of the protective shell 104, when the furnace body 101 is damaged by high temperature and high pressure, the protective shell 104 can be used for buffering to avoid causing harm to the user;

[0030] After use, the furnace body 101 can be taken out of the protective shell 104 through the limit block 103, which is convenient for taking the product. If the furnace body 101 needs to be cooled, the telescopic device 112 is started to extend the telescopic rod 113, thereby driving the two support plates 114 closer to each other, and then driving the two cooling plates 115 closer to each other, so that the cooling plates 115 are close to the furnace body 101, and cooling can be performed by the coolant passed into the cooling tube 116.

[0031] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A cooling single crystal furnace, comprising a furnace body (101) and a protective shell (104), characterized in that: The upper end surface of the furnace body (101) is fixedly connected to a fixing ring (102), and the side wall of the fixing ring (102) is fixedly connected to four circumferentially distributed limiting blocks (103); a protection cavity (105) with an upper opening is provided in the protection shell (104), and four chute grooves (106) corresponding to the upper and lower positions of the limiting blocks (103) are circumferentially distributed on the side wall of the protection cavity (105); the chute grooves (106) are slidably connected to the limiting blocks (103); A support plate (114) is provided on the left and right sides of the protective shell (104), respectively; a cooling plate (115) is fixedly connected to the upper end surface of the support plate (114); and a cooling pipe (116) is provided inside the cooling plate (115) and surrounds and passes through the cooling plate (115).

2. A cooling single crystal furnace according to claim 1, characterized in that: The outer side wall of the protective shell (104) is fixedly connected to two front-to-back symmetrical fixing blocks (107), and the fixing blocks (107) are fixedly connected to two left-to-right symmetrical connecting rods (108).

3. A cooling single crystal furnace according to claim 2, characterized in that: The two front-to-back symmetrical connecting rods (108) are fixedly connected to a same connecting plate (109), and the lower end surface of the connecting plate (109) is fixedly connected to a mounting plate (111).

4. A cooling single crystal furnace according to claim 3, characterized in that: A telescopic device (112) is fixedly provided at one end of the mounting plates (111) close to each other, and the telescopic device (112) is dynamically connected to a telescopic rod (113).

5. A cooling single crystal furnace according to claim 4, characterized in that: The telescopic rods (113) are fixedly connected to the support plate (114) at one end surface close to each other.

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