Liquid level detection device and liquid supply tank

Abstract

The utility model discloses a liquid level detection device and a liquid supply tank. The liquid level detection device comprises a ventilation device and a detection device, an air inlet through hole is formed above the liquid supply tank, and the output end of the ventilation device is connected with the air inlet through hole through a three-way pipeline; one end of the detection device is connected with the output end of the ventilation device through the three-way pipeline, and the other end of the detection device is fixedly connected with the bottom of the liquid supply tank; inert gas is input into the ventilation device through the input end of the ventilation device, and is respectively input into the liquid supply tank and the detection device through the output end of the ventilation device. According to the utility model, the liquid level in the liquid supply tank and the detection device is stabilized through inert gas, and the high-pressure influence on the liquid level is avoided; meanwhile, the size of the detection device is moderate, and the working efficiency and the reliability of the whole equipment are not affected.

Description

Technical Field

[0001] The utility model relates to the field of wafer manufacturing, in particular to a liquid level detection device and a liquid supply tank. Background Art

[0002] In the semiconductor manufacturing process, cleaning equipment plays a vital role in removing residues and contaminants from the surface of wafers, chips and other microelectronic components to ensure the quality and yield of subsequent processing. Such cleaning processes usually involve precise control and management of multiple liquid media, so the application of liquid level detection devices in these devices is particularly critical.

[0003] The liquid level detection device is mainly used to monitor the liquid level height in the liquid storage container inside the cleaning equipment in real time. It is not only the basis for controlling the addition or discharge of liquid, but also an important basis for triggering the switching of different functional states of the equipment.

[0004] For example, by accurately detecting the liquid level of cleaning agents, pure water or other solvents, the liquid replenishment program can be automatically started or liquid discharge can be stopped to prevent adverse conditions such as overflow or drying up, thereby ensuring the continuity and stability of the entire cleaning process.

[0005] However, as the semiconductor industry's demand for miniaturization and precision of equipment continues to increase, existing liquid level detection equipment faces severe challenges. Due to its large size, traditional liquid level detection devices are difficult to adapt to the increasingly compact internal space layout requirements of cleaning equipment. This not only limits its integrated application in new cleaning equipment, but may also affect the overall equipment's working efficiency and reliability. Therefore, the development of a liquid level detection device that can meet miniaturization requirements and has high precision and reliability has become a technical problem that needs to be solved in the current field of semiconductor cleaning equipment technology innovation. Utility Model Content

[0006] In view of the above problems existing in the prior art, a liquid level detection device and a liquid supply tank are now provided.

[0007] The specific technical solution is as follows: A liquid level detection device is applied to a liquid supply tank in a wafer cleaning device; the characteristic is that the liquid level detection device comprises a ventilation device and a detection device;

[0008] An air inlet hole is provided above the liquid supply tank, and the output end of the ventilation device is connected to the air inlet hole through a three-way pipe;

[0009] One end of the detection device is connected to the output end of the ventilation device through the three-way pipe, and the other end of the detection device is fixedly connected to the bottom of the liquid supply tank;

[0010] The inert gas is input into the ventilation device through the input end of the ventilation device, and is respectively input into the liquid supply tank and the detection device through the output end of the ventilation device.

[0011] Preferably, an air supply line is provided between the input end and the output end of the ventilation device, and a manual valve, a pneumatic valve, a pressure regulating valve, a flow meter and a filter are sequentially connected to the air supply line, the manual valve is provided close to the input end of the ventilation device, and the filter is provided close to the output end of the ventilation device;

[0012] The ventilation device is also provided with a pressure gauge, and the pressure gauge is electrically connected to the pressure regulating valve.

[0013] Preferably, the inert gas is nitrogen.

[0014] Preferably, a through hole is provided at the bottom of the liquid supply tank, and the detection device comprises:

[0015] A liquid level tube, the liquid level tube being arranged at one side of the liquid supply tank, one end of the liquid level tube being connected to the output end of the ventilation device, and the other end of the liquid level tube being fixedly connected to the through hole through a connecting tube;

[0016] A plurality of liquid level sensors, wherein the liquid level sensors are fixed at preset positions on the connecting pipe;

[0017] A scale is arranged on one side of the liquid supply tank and is located on the same side as the liquid level tube, and the scale is parallel to the liquid level tube.

[0018] Preferably, the position of the liquid level sensor matches the scale position of the scale in a one-to-one correspondence.

[0019] Preferably, a bead-in fitting is provided at the connection between the liquid level tube and the connecting tube, and the bead-in fitting is provided in the connecting tube.

[0020] Preferably, the bead connector is a reduced diameter bead connector of preset specifications.

[0021] Preferably, a mounting through hole is provided above the liquid supply tank, and the detection device further comprises a pressure gauge head, the pressure gauge head is fixedly connected to the liquid supply tank via the mounting through hole, and the detection end of the pressure gauge head is extended into the liquid supply tank via the through hole.

[0022] A liquid supply tank, comprising any one of the liquid level detection devices described above.

[0023] The above technical solution has the following advantages or beneficial effects:

[0024] In the utility model, the liquid level in the liquid supply tank and the detection device is stabilized by inert gas, and the high pressure effect on the liquid level is not caused;

[0025] At the same time, the detection device in the utility model has a moderate size and does not affect the working efficiency and reliability of the overall equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] The embodiments of the present invention will be described more fully with reference to the attached drawings, which are however only used for illustration and description and are not intended to limit the scope of the present invention.

[0027] Figure 1 This is a schematic diagram of the overall structure of a liquid level detection device in a preferred embodiment of the utility model;

[0028] Figure 2 This is a simplified structural diagram of a ventilation device in a liquid level detection device in a preferred embodiment of the utility model;

[0029] Figure 3 This is a schematic diagram of the overall structure of a liquid level detection device in a preferred embodiment of the present utility model. DETAILED DESCRIPTION

[0030] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0031] It should be noted that, in the absence of conflict, the embodiments of the present invention and the features in the embodiments can be combined with each other.

[0032] The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments, but they are not intended to limit the present invention.

[0033] In a preferred embodiment of the utility model, a liquid level detection device is provided, which is applied to a liquid supply tank in a wafer cleaning device;

[0034] Among them, Figure 1 As shown, the liquid level detection device 2 includes a ventilation device 1 and a detection device 2;

[0035] An air inlet hole is provided above the liquid supply tank 3, and the output end of the ventilation device 1 is connected to the air inlet hole through a three-way pipe;

[0036] One end of the detection device 2 is connected to the output end of the ventilation device 1 through a three-way pipe, and the other end of the detection device 2 is fixedly connected to the bottom of the liquid supply tank 3;

[0037] The inert gas is input into the ventilation device 1 through the input end of the ventilation device 1 , and is respectively input into the liquid supply tank 3 and the detection device 2 through the output end of the ventilation device 1 .

[0038] Specifically, in the prior art, the existing liquid level detection equipment faces severe challenges. The traditional liquid level detection device 2 is large in size and difficult to adapt to the increasingly compact internal space layout requirements of the cleaning equipment, which not only limits its integrated application in the new cleaning equipment, but also may affect the working efficiency and reliability of the overall equipment.

[0039] In the above embodiment, the liquid level detection device 2 includes two key parts: a ventilation device 1 and a detection device 2 .

[0040] First, an air inlet hole is preset above the liquid supply tank 3, and the output port of the ventilation device 1 is connected to the air inlet hole through a three-way pipe, so that the inert gas can be input through the ventilation device 1 and diverted from the output port into the liquid supply tank 3.

[0041] The detection device 2 is designed to have one end connected to the output end of the ventilation device 1 through the same three-way pipe, and the other end directly fixedly connected to the bottom of the liquid supply tank 3.

[0042] In this way, when the inert gas enters the liquid supply tank 3 through the ventilation device 1, it also flows through the detection device 2. The inert gas can stabilize the liquid level in the liquid supply tank 3 and the liquid level in the detection device 2, so that the detection device 2 can accurately detect the liquid level height in the liquid supply tank 3.

[0043] Compared with the traditional large-scale liquid level detection device 2, the utility model adopts a compact and structurally optimized design, so that the entire liquid level detection device 2 can adapt to the increasingly refined spatial layout requirements inside the cleaning equipment. It is not only convenient for integrated installation, but also can effectively avoid affecting other functional components inside the equipment, thereby ensuring the working efficiency and operational reliability of the overall equipment.

[0044] In addition, the method of liquid level detection using inert gas can also reduce the interference of liquid differences on the detection process, further improving the accuracy and stability of detection.

[0045] In a preferred embodiment of the present invention, Figure 2As shown, an air supply line is arranged between the input end and the output end of the ventilation device 1, and a manual valve 11, a pneumatic valve 12, a pressure regulating valve 13, a flow meter 14 and a filter 15 are sequentially connected to the air supply line. The manual valve 11 is arranged near the input end of the ventilation device 1, and the filter 15 is arranged near the output end of the ventilation device 1;

[0046] A pressure gauge 131 is also provided in the ventilation device 1 , and the pressure gauge 131 is electrically connected to the pressure regulating valve 13 .

[0047] Specifically, in the above embodiment, the gas supply line starts from the input end of the ventilation device 1 and is first connected to a manual valve 11, the purpose of which is to facilitate the operator to manually control the on-off or flow adjustment of the gas according to actual needs.

[0048] A pneumatic valve 12 is installed immediately after the manual valve 11, and an air pressure signal is used for automatic on-off control to meet the flexible control requirements in automated operation scenarios.

[0049] Next, a pressure regulating valve 13 is connected in series to the gas supply line. The function of the pressure regulating valve 13 is to accurately regulate the pressure of the inert gas input into the liquid supply tank 3 and the detection device 2 to ensure that the gas always flows stably within a preset pressure range.

[0050] Furthermore, in order to monitor and feedback the gas pressure status in real time, the pressure regulating valve 13 is also electrically connected to a pressure gauge 131 , which can accurately display the current gas pressure value in the pipeline, providing the operator with intuitive and timely pressure information.

[0051] Continuing along the gas supply line, a flow meter 14 is arranged to accurately measure and record the flow of the inert gas through the pipeline.

[0052] Finally, a filter 15 is installed near the output end of the ventilation device 1 to filter out impurities and particles that may be present in the inert gas to ensure the safety and reliability of the operation of the entire cleaning device, while also effectively protecting downstream equipment from contamination damage.

[0053] In summary, the ventilation device 1 in this embodiment is not only compact in structure and highly integrated, but also has a control method that combines manual and automatic control, which can achieve precise control of the flow and pressure of the inert gas, and provide real-time monitoring data through the pressure gauge 131 and the flow meter 14, fully meeting the requirements of compact internal space and efficient and safe operation of the wafer cleaning device.

[0054] In a preferred embodiment of the present invention, the inert gas is nitrogen.

[0055] Specifically, in the above embodiment, the selected inert gas is nitrogen. As a common inert gas, nitrogen has the characteristics of stable chemical properties and is not easy to react with other substances. It is particularly suitable for use in the liquid level detection device 2 to avoid any unnecessary interference with the liquid components or environment in the liquid supply tank 3.

[0056] By using nitrogen as the transmission medium, this embodiment not only ensures that no other chemical reaction factors are introduced during the liquid level detection process, but also fully utilizes the physical properties of nitrogen to achieve an efficient, accurate and safe liquid level detection function.

[0057] In a preferred embodiment of the present invention, a through hole is provided at the bottom of the liquid supply tank 3. Figure 3 As shown, the detection device 2 includes:

[0058] A liquid level tube 21, which is disposed on one side of the liquid supply tank 3, one end of the liquid level tube 21 is connected to the output end of the ventilation device 1, and the other end of the liquid level tube 21 is fixedly connected to the through hole through a connecting pipe;

[0059] A plurality of liquid level sensors 22, wherein the liquid level sensors 22 are fixed at preset positions on the connecting pipe;

[0060] The scale 23 is disposed on one side of the liquid supply tank 3 and is located on the same side as the liquid level tube 21 . The scale 23 is parallel to the liquid level tube 21 .

[0061] Specifically, in the above embodiment, a liquid level tube 21 is installed on one side of the liquid supply tank 3, and one end of the liquid level tube 21 is tightly connected to the output end of the above-mentioned ventilation device 1 through a three-way pipe, so that the inert gas (such as nitrogen) can enter the detection device 2 from the ventilation device 1 through the liquid level tube 21.

[0062] The other end of the liquid level tube 21 is fixedly connected to the through hole at the bottom of the liquid supply tank 3 through a connecting tube, so as to ensure that the liquid in the liquid supply tank 3 can flow smoothly between the liquid level tube 21 and the liquid supply tank 3 .

[0063] Furthermore, a plurality of specific positions are preset on the connecting pipe, and liquid level sensors 22 are fixedly installed at these positions respectively.

[0064] These liquid level sensors 22 can monitor and accurately measure different liquid level heights in the liquid level tube 21 in real time, thereby directly reflecting the actual liquid level of the liquid in the liquid supply tank 3 .

[0065] In order to facilitate operators to intuitively read and calibrate the liquid level data, a scale 23 parallel to the liquid level tube 21 is also provided on the same side of the liquid supply tank 3 .

[0066] The zero point position of the scale 23 corresponds to the lowest liquid level in the liquid supply tank 3. As the liquid level rises, the pressure or flow value detected by the liquid level sensor 22 will also change accordingly. The operator can directly read the pre-calibrated scale 23 to accurately grasp the current liquid level status of the liquid in the liquid supply tank 3.

[0067] In summary, the liquid level detection device 2 in this embodiment cleverly combines the designs of the liquid level tube 21, the liquid level sensor 22 and the scale 23, which not only realizes high-precision detection of the liquid level in the liquid supply tank 3, but also provides a simple and intuitive operation interface.

[0068] In a preferred embodiment of the present invention, Figure 3 As shown, the position of the liquid level sensor 22 matches the scale position of the scale 23 in a one-to-one correspondence.

[0069] Specifically, in the above embodiment, the specific installation position of each liquid level sensor 22 matches the scale on the scale 23 in a one-to-one correspondence to ensure that the readings match.

[0070] In a preferred embodiment of the present invention, a bead-inlet joint 24 is provided at the connection between the liquid level pipe 21 and the connecting pipe, and the bead-inlet joint 24 is provided in the connecting pipe.

[0071] Furthermore, in a preferred embodiment of the present invention, the bead connector 24 is a reduced diameter bead connector of a preset specification.

[0072] In the above embodiment, on the basis of the traditional structure, the original bead component is replaced and upgraded, and a reduced diameter bead of special specifications is used instead.

[0073] This type of reduced diameter bead has more precise diameter control and better fluid passing performance. It can effectively reduce the local resistance encountered by the fluid when passing through the joint without blocking the flow of liquid, thereby ensuring that the liquid flow from the liquid supply tank 3 to the liquid level tube 21 remains stable.

[0074] Since the liquid level sensor 22 indirectly determines the height of the liquid level inside the liquid supply tank 3 based on the change in the liquid level, ensuring the stability of the liquid level in the liquid level tube 21 is equivalent to indirectly ensuring the accuracy of the liquid level measurement result.

[0075] By adopting a special reduced diameter bead-in connector 24 design, the utility model not only optimizes the internal fluid transmission efficiency of the equipment, but also significantly improves the overall performance of the liquid level detection device 2, providing a more reliable technical guarantee for liquid level control during wafer cleaning.

[0076] In a preferred embodiment of the present invention, Figure 1As shown, a mounting through hole is provided above the liquid supply tank 3, and the detection device 2 further comprises a pressure gauge head 25, which is fixedly connected to the liquid supply tank 3 via the mounting through hole, and the detection end of the pressure gauge head 25 is extended into the liquid supply tank 3 via the through hole.

[0077] Specifically, in the above embodiment, the detection device 2 further includes a pressure gauge head 25 assembly, and the pressure gauge head 25 is firmly connected to the liquid supply tank 3 through the above installation through hole.

[0078] During the specific installation, the pressure gauge head 25 is passed through the installation through hole, and its detection end is ensured to be able to penetrate into the liquid supply tank 3 .

[0079] In this way, the pressure gauge head 25 can directly sense and measure the change in the gas or liquid pressure in the liquid supply tank 3 , thereby reflecting the liquid level inside the liquid supply tank 3 in real time.

[0080] In addition, since the pressure gauge head 25 and the liquid supply tank 3 are fixedly connected, not only the stability and accuracy of the measurement data are guaranteed, but also the reliability and durability of the entire liquid level detection system are greatly enhanced.

[0081] Through this ingenious design, the operator can intuitively read the data displayed on the pressure gauge head 25 and make precise adjustments according to actual needs, effectively improving the safety and efficiency of the wafer cleaning equipment during operation.

[0082] In a preferred embodiment of the utility model, a liquid supply tank is also provided, which includes any one of the above-mentioned liquid level detection devices.

[0083] The above are only preferred embodiments of the present invention, and do not limit the implementation mode and protection scope of the present invention. Those skilled in the art should be aware that all solutions obtained by equivalent substitutions and obvious changes made using the description and illustrations of the present invention should be included in the protection scope of the present invention.

Claims

1. A liquid level detection device, applied to a liquid supply tank in a wafer cleaning device; characterized in that: The liquid level detection device comprises a ventilation device and a detection device; An air inlet hole is provided above the liquid supply tank, and the output end of the ventilation device is connected to the air inlet hole through a three-way pipe; One end of the detection device is connected to the output end of the ventilation device through the three-way pipe, and the other end of the detection device is fixedly connected to the bottom of the liquid supply tank; The inert gas is input into the ventilation device through the input end of the ventilation device, and is respectively input into the liquid supply tank and the detection device through the output end of the ventilation device.

2. The liquid level detection device according to claim 1, characterized in that: An air supply line is arranged between the input end and the output end of the ventilation device, and a manual valve, a pneumatic valve, a pressure regulating valve, a flow meter and a filter are sequentially connected to the air supply line, the manual valve is arranged near the input end of the ventilation device, and the filter is arranged near the output end of the ventilation device; The ventilation device is also provided with a pressure gauge, and the pressure gauge is electrically connected to the pressure regulating valve.

3. The liquid level detection device according to claim 1, characterized in that: The inert gas is nitrogen.

4. The liquid level detection device according to claim 1, characterized in that: The bottom of the liquid supply tank is provided with a through hole, and the detection device comprises: A liquid level tube, the liquid level tube being arranged at one side of the liquid supply tank, one end of the liquid level tube being connected to the output end of the ventilation device, and the other end of the liquid level tube being fixedly connected to the through hole through a connecting tube; A plurality of liquid level sensors, wherein the liquid level sensors are fixed at preset positions on the connecting pipe; A scale is arranged on one side of the liquid supply tank and is located on the same side as the liquid level tube, and the scale is parallel to the liquid level tube.

5. The liquid level detection device according to claim 4, characterized in that: The position of the liquid level sensor matches the scale position of the scale in a one-to-one correspondence.

6. The liquid level detection device according to claim 4, characterized in that: A bead inlet joint is arranged at the connection between the liquid level pipe and the connecting pipe, and the bead inlet joint is arranged in the connecting pipe.

7. The liquid level detection device according to claim 6, characterized in that: The bead-in joint is a reduced diameter bead-in joint of preset specifications.

8. The liquid level detection device according to claim 1, characterized in that: A mounting through hole is provided above the liquid supply tank, and the detection device further comprises a pressure gauge head, which is fixedly connected to the liquid supply tank via the mounting through hole, and the detection end of the pressure gauge head is extended into the liquid supply tank via the through hole.

9. A liquid supply tank, characterized in that: It comprises a liquid level detection device as described in any one of claims 1 to 8.

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