Ceramic target density testing device

Abstract

The utility model relates to a ceramic target material density testing device which comprises a water tank and a water control area fixedly communicated with the inner side of the water tank, the water control area is of a linear extension structure, the section of the water control area is uniform, a piston plate is arranged in the water control area, and the piston plate is provided with driving force; the bearing plate is arranged in the water tank at a fixed point, and the weighing assembly is used for detecting the weight of the bearing plate; and the positioning line is fixedly arranged in the water tank and is higher than the top surface of the bearing plate. The water control area is matched with the piston plate, so that the movement of the liquid level in the water tank is controlled, the volume of the ceramic target material is measured, the weight of the ceramic target material is measured synchronously through the matching of the weighing assembly, and the density value of the ceramic target material is obtained according to data. Compared with the prior art, the testing device provided by the utility model has the advantages that the density value of the target material can be quickly measured, so that the measuring efficiency is effectively improved.

Description

Technical Field

[0001] The utility model belongs to the technical field of target material testing equipment, in particular to a ceramic target material density testing device. Background Art

[0002] In the process of magnetron sputtering coating, a flat ceramic target is used as the cathode material, and the density of the target directly determines the final quality of the coating. At present, for the produced ceramic target, it is usually necessary to perform a density test on it. The density test of the target generally adopts the water displacement method, by measuring its mass, and then measuring the volume by water displacement for calculation. When testing some large-sized ceramic target materials, due to the volume and weight of the target material, some target materials usually weigh more than tens of kilograms, and it is difficult to complete it directly relying on existing equipment. The process needs to be carried out in multiple steps, which makes it relatively cumbersome. Therefore, the purpose of this patent is to provide a ceramic target density testing device, so that the density testing process of large-sized ceramic targets can be simplified, thereby improving the convenience of the testing process, thereby improving the efficiency of the current testing work. Utility Model Content

[0003] The purpose of this section is to summarize some aspects of the embodiments of the utility model and briefly introduce some preferred embodiments. Some simplifications or omissions may be made in this section and the specification abstract and utility model name of this application to avoid blurring the purpose of this section, specification abstract and utility model name, and such simplifications or omissions cannot be used to limit the scope of the utility model.

[0004] In view of the following technical problems in the prior art: currently, when conducting density tests on large-sized ceramic targets, the steps are numerous, the process is cumbersome, and the test efficiency is low. To solve this technical problem, the utility model provides the following technical solutions:

[0005] A ceramic target density testing device, comprising:

[0006] A water tank and a water control area fixedly connected to the inner side of the water tank, wherein the water control area is a linear extension structure and has a uniform cross section, and a piston plate is disposed inside the water control area, and the piston plate is provided with a driving force;

[0007] A weighing assembly and a bearing plate fixedly arranged inside the water tank, wherein the weighing assembly is used to detect the weight of the object carried on the bearing plate;

[0008] A positioning line is fixedly arranged in the water tank, and its height is higher than the top surface of the bearing plate.

[0009] As a preferred technical solution for a ceramic target density testing device, the weighing assembly is fixedly arranged relative to the water tank, and a plurality of support rods are fixedly connected to the bottom of the supporting plate, which movably penetrate the bottom wall of the water tank and overlap the weighing assembly.

[0010] As a preferred technical solution for a ceramic target density testing device, an empty area parallel to the water control area is provided below the water tank, and the weighing assembly is located in the empty area.

[0011] As a preferred technical solution for a ceramic target density testing device, the outer wall of the water control area is fixedly connected to a support block, one end of which is fixedly connected to the water tank, and the weighing assembly is fixedly connected to the support block.

[0012] As a preferred technical solution for the ceramic target density testing device, it also includes an electric push rod fixedly arranged in the empty area, whose movable end slides into the water control area and is connected to the piston plate.

[0013] The ceramic target density testing device provided by the utility model has the beneficial effects of: through the cooperation of the water control area and the piston plate, the movement of the liquid level in the water tank is controlled, so as to measure the volume of the ceramic target material, and the weight of the ceramic target material is synchronously measured through the cooperation of the weighing component, so as to obtain its density value based on the data. Compared with the prior art, the testing device provided by the utility model can quickly measure the density value of the target material, thereby effectively improving the measurement efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] In order to more clearly illustrate the technical solutions of the embodiments of the present utility model, the following briefly introduces the drawings required for the description of the embodiments. Obviously, the drawings described below are only some embodiments of the present utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative labor. Among them:

[0015] Figure 1 It is a three-dimensional diagram of the utility model.

[0016] Figure 2 It is another three-dimensional diagram of the utility model.

[0017] Figure 3 It is a plan front view of the utility model.

[0018] Figure 4 For the utility model Figure 3 Perspective drawing of perspective.

[0019] Figure numerals: 1, water tank; 2, water control area; 3, piston plate; 4, weighing assembly; 5, load-bearing plate; 6, positioning line; 7, support rod; 8, vacant area; 9, support block; 10, electric push rod. DETAILED DESCRIPTION

[0020] In order to make the above-mentioned purposes, features and advantages of the present invention more obvious and easy to understand, the specific implementation methods of the present invention are described in detail below in conjunction with the accompanying drawings.

[0021] In the following description, many specific details are set forth to facilitate a full understanding of the present invention, but the present invention may also be implemented in other ways different from those described herein, and those skilled in the art may make similar generalizations without violating the connotation of the present invention. Therefore, the present invention is not limited to the specific embodiments disclosed below.

[0022] Secondly, the term "one embodiment" or "embodiment" as used herein refers to a specific feature, structure or characteristic that may be included in at least one implementation of the present invention. The term "in one embodiment" that appears in different places in this specification does not necessarily refer to the same embodiment, nor does it refer to a separate or selective embodiment that is mutually exclusive with other embodiments.

[0023] Secondly, the present invention is described in detail with reference to the schematic diagram. When describing the embodiments of the present invention, for the sake of convenience, the cross-sectional diagrams showing the device structure will not be partially enlarged according to the general scale, and the schematic diagrams are only examples, which should not limit the scope of protection of the present invention. In addition, in actual production, the three-dimensional dimensions of length, width and depth should be included.

[0024] Reference Figure 1-4 An embodiment of the utility model provides a ceramic target density testing device for measuring the density of a large-size ceramic target, which includes the following parts:

[0025] A water tank 1 and a water control area 2 fixedly connected to the inner side of the water tank 1. The water control area 2 is a linear extension structure with a uniform cross section. A piston plate 3 is disposed inside the water control area 2. The size of the space in the water tank 1 can be controlled by moving the piston plate 3, thereby controlling the height of the liquid level in the water tank 1. The piston plate 3 is also configured with a driving force, thereby realizing movement control.

[0026] A weighing assembly 4 and a carrying plate 5 fixedly arranged inside the water tank 1, the carrying plate 5 is used to carry the ceramic target to be tested, and the weighing assembly 4 is used to detect the weight of the target carried on the carrying plate 5;

[0027] A positioning line 6 fixedly arranged in the water tank 1, whose height is higher than the top surface of the carrying plate 5;

[0028] Based on the above, in the present invention, the outer wall of the water tank 1 and the water control area 2 can be made of transparent materials, such as glass and other materials. The capacity value of the water control area 2 along its own extension direction can be marked on the outer wall of the water control area 2 in the form of a scale to observe the moving position of the piston plate 3. It is now known that the volume of the space from the height of the top surface of the bearing plate 5 to the height of the positioning line 6 in the water tank 1 is a known number, and the volume value corresponds to the distance that the piston plate 3 needs to move to sweep the same size of volume when moving in the water control area 2. It is also a known number. The distance value is now recorded as the standard distance;

[0029] According to this, when the utility model is used, water is filled in the water tank 1, and the water can also be replaced by other liquids. Figure 4 With the perspective as a reference, when the piston is controlled to move to the right, the space in the water control area 2 increases, so that the liquid level in the water tank 1 is reduced to below the carrier plate 5, so that the target material to be tested can be placed on the carrier plate 5, and the weight of the target material can be immediately obtained through the weighing component 4. Then, the piston plate 3 is controlled to move to the left, so as to push the water into the water tank 1. When the liquid level is flush with the top surface of the carrier plate 5, the scale value at which the piston plate 3 is located at this time is recorded, which can be recorded as the first scale value. Then, the piston plate 3 is controlled to move to the left. At this time, the liquid level completely overflows the target material, and finally when When the liquid level is flush with the positioning line 6, the movement of the piston plate 3 is stopped, and the scale value at the position of the piston plate 3 at this time is recorded as the second scale value. Then, by calculating the difference between the first scale value and the second scale value, it is possible to obtain the volume swept by the piston plate 3 in the water control area 2, and the standard distance is subtracted from the difference to obtain the volume value of the target material, thereby calculating the density in combination with the weight value. It is worth noting that the measurement methods listed above are not the only ones, and all the results measured by the device can be understood as embodiments of the present utility model.

[0030] Compared with the prior art, the utility model does not need to move the target material to be measured multiple times during the measurement process, and the measurement result can be obtained only by controlling the movement of the liquid surface. Therefore, the utility model has the characteristics of simple measurement steps and high efficiency.

[0031] Further, see Figure 1-4 The weighing assembly 4 is relatively fixedly arranged with the water tank 1. The weighing assembly 4 can be specifically configured as an electronic scale or a floor pump. A plurality of support rods 7 are fixedly connected to the bottom of the carrying plate 5. The support rods 7 vertically penetrate the bottom wall of the water tank 1 and overlap the upper top of the weighing assembly 4, so that weighing can be performed by the weighing assembly 4. Since the weight of the carrying plate 5 and the support rods 7 is a fixed value, the weight of the target material carried can be obtained when the carrying plate 5 is weighed.

[0032] Further, see Figure 1-4An empty area 8 is provided below the water tank 1 and is parallel to the water control area 2. The weighing assembly 4 is located in the empty area 8, so that the volume of the entire device can be fully reduced to reduce space occupancy and correspondingly improve the aesthetics of the device.

[0033] Further, see Figure 1-4 The bottom of the outer wall of the water control area 2 is fixedly connected with a support block 9, and there are multiple support blocks 9. The other end of the support block 9 is fixedly connected to the water tank 1, thereby increasing the structural strength of the entire device. The bottom of the weighing component 4 is fixedly connected to the support block 9, thereby further improving the relative fixed stability effect between the weighing component 4 and the water tank 1, thereby improving the accuracy of weighing.

[0034] Further, see Figure 1-4 Regarding the power configuration of the piston plate 3, the utility model also includes an electric push rod 10 fixedly arranged at the vacant area 8, whose movable end slides through the water control area 2 and is connected to the piston plate 3, so that the piston plate 3 can be driven to move through its own movement, so as to facilitate the user to control the movement process of the piston plate 3.

[0035] It will be appreciated that in the development of any actual implementation, as in any engineering or design project, numerous implementation-specific decisions may be made. Such a development effort may be complex and time-consuming, but will be a routine task of design, fabrication, and production for those of ordinary skill having the benefit of this disclosure without undue experimentation.

[0036] It should be noted that the above embodiments are only used to illustrate the technical solution of the utility model rather than to limit it. Although the utility model has been described in detail with reference to the preferred embodiments, ordinary technicians in the field should understand that the technical solution of the utility model can be modified or replaced by equivalents without departing from the spirit and scope of the technical solution of the utility model, which should be included in the scope of the claims of the utility model.

Claims

1. A ceramic target density testing device, characterized in that: include: A water tank (1) and a water control area (2) fixedly connected to the inner side of the water tank (1), wherein the water control area (2) is a linear extension structure with a uniform cross section, and a piston plate (3) is arranged inside the water control area, and the piston plate (3) is provided with a driving force; A weighing assembly (4) and a bearing plate (5) fixedly arranged inside the water tank (1), wherein the weighing assembly (4) is used to detect the weight of the object carried by the bearing plate (5); A positioning line (6) is fixedly arranged in the water tank (1) and has a height higher than the top surface of the supporting plate (5).

2. The ceramic target density testing device according to claim 1, characterized in that: The weighing assembly (4) and the water tank (1) are fixedly arranged relative to each other, and a plurality of support rods (7) are fixedly connected to the bottom of the bearing plate (5), which movably penetrate the bottom wall of the water tank (1) and overlap the weighing assembly (4).

3. The ceramic target density testing device according to claim 2, characterized in that: An empty area (8) is arranged below the water tank (1) and is arranged side by side with the water control area (2), and the weighing component (4) is located in the empty area (8).

4. The ceramic target density testing device according to claim 3, characterized in that: A support block (9) is fixedly connected to the outer wall of the water control area (2), one end of which is fixedly connected to the water tank (1), and the weighing assembly (4) is fixedly connected to the support block (9).

5. The ceramic target density testing device according to claim 3, characterized in that: It also includes an electric push rod (10) fixedly arranged at the vacant area (8), the movable end of which slides through the water control area (2) and is connected to the piston plate (3).

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