Silicon wafer bearing device

By designing the silicon wafer carrier device and using sliding and hinged structures to prevent the silicon wafer from tilting and extruding, the problem of silicon wafer fragmentation during handling is solved, and the stable support and safe handling of the silicon wafer is achieved.

CN222281949UActive Publication Date: 2024-12-31WUXI NANYA SCI-TECH CO LTD
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Patent Information

Application Number
CN202323496365.1
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2023-12-21
Publication Date
2024-12-31
Estimated Expiration
2033-12-21

AI Technical Summary

Technical Problem

During the production process of silicon wafers, the silicon wafer is prone to tilt, squeeze and lead to fragmentation or cracking during manual handling, seriously damaging the quality of the silicon wafer.

Method used

Design a silicon wafer bearing device, including oppositely arranged end plates, frame rods, clamp rod slots, bracket slots, sliders and support feet. Through sliding and hinged structures, the clamp rod slots are prevented from tilting and squeezing, and the clamp rod slots are from above. Retract inward from the bottom, and expand the rod groove from top to bottom to ensure the stable support of the silicon wafer.

Benefits of technology

It effectively prevents the silicon wafer from breaking during handling and can easily break away from the silicon wafer when needed, improving the handling safety and quality of the silicon wafer.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model relates to a silicon wafer bearing device which comprises two end plates which are oppositely arranged, the two end plates are connected through a frame rod, clamping rod grooves are symmetrically formed in the upper portions of the end plates, supporting rod grooves are symmetrically formed in the lower portions of the end plates, the two sides of an upper clamping rod slide in the clamping rod grooves, and the two sides of a lower supporting rod slide in the supporting rod grooves. The upper end of the transition rod is hinged to the middle of a sliding plate, and the sliding plate is vertically installed on the end plate in a sliding mode. Supporting legs are installed on the sliding plates, the rod clamping grooves contract inwards from top to bottom, and the rod supporting grooves expand outwards from top to bottom. According to the utility model, silicon wafers are effectively prevented from being broken during carrying; when the silicon wafers enter the wafer inserting state, the loader has the function of being capable of being separated from the silicon wafers.
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Description

Technical Field

[0001] The utility model belongs to the technical field of solar silicon wafer equipment and relates to a silicon wafer carrying device. Background Art

[0002] In the production process of silicon wafers, the cut silicon wafers need to be transferred between various processes.

[0003] In the prior art, the wafers are usually transported manually through material boxes. Manual transportation has low work efficiency, and the silicon wafers are prone to tilting in the material box. Multiple silicon wafers are tilted and squeezed against each other, causing the silicon wafers to break or crack, seriously damaging the quality of the silicon wafers. Summary of the invention

[0004] The utility model aims to provide a silicon wafer carrying device, which can solve the above-mentioned problems and effectively prevent the silicon wafer from being broken during the transportation process.

[0005] According to the technical solution provided by the utility model: a silicon wafer carrying device includes two end plates arranged opposite to each other, the two end plates are connected by a frame rod, the upper part of the end plate is provided with a symmetrically arranged clamping rod groove, the lower part of the end plate is provided with a symmetrically arranged supporting rod groove, the two sides of the upper clamping rod slide in the clamping rod groove, and the two sides of the lower supporting rod slide in the supporting rod groove; the end of the lower supporting rod is hinged to the lower end of the transition rod, the upper end of the transition rod is hinged to the middle of the slide plate, and the slide plate is vertically slidably installed on the end plate; the supporting foot is installed on the slide plate.

[0006] As a further improvement of the utility model, the clamping rod groove shrinks inwards from top to bottom.

[0007] As a further improvement of the utility model, the support rod groove expands outward from top to bottom.

[0008] As a further improvement of the utility model, the end of the upper clamping rod extends out of the end plate to form the upper clamping rod hanging end.

[0009] As a further improvement of the utility model, the slide plate is vertically slidably mounted on the end plate via a guide rail.

[0010] As a further improvement of the utility model, a skateboard handle is installed on the skateboard.

[0011] As a further improvement of the utility model, the skateboard handles are symmetrically mounted on the skateboard, and the supporting feet are located between the skateboard handles.

[0012] As a further improvement of the utility model, positioning ring grooves are provided on both sides of the upper clamping rod.

[0013] As a further improvement of the present invention, a limit plate is installed on the end plate.

[0014] The positive effects of this application are:

[0015] The utility model effectively prevents the silicon wafer from breaking during the transportation process; when the silicon wafer enters the inserting state, the carrier also has the function of being able to detach from the silicon wafer. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a structural schematic diagram of the utility model.

[0017] Figure 2 It is a front view of the utility model.

[0018] Figure 1-Figure 2 It includes an upper clamping rod 1, an upper clamping rod hanging end 1-1, a lower supporting rod 2, a guide slide plate 3, a guide rail 4, a slide plate 5, a lower hanging point 6, a supporting foot 7, a clamping rod groove 8, an end plate 9, a frame rod 10, a supporting rod groove 11, etc. DETAILED DESCRIPTION

[0019] It should be noted that, in the absence of conflict, the embodiments and features in the embodiments of the present invention can be combined with each other. The present invention will be described in detail below with reference to the accompanying drawings and in combination with the embodiments.

[0020] In order to enable those skilled in the art to better understand the solution of the utility model, the following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work should fall within the scope of protection of the utility model.

[0021] It should be noted that the terms "first", "second", etc. in the specification and claims of the utility model and the above-mentioned drawings are used to distinguish similar objects, and are not necessarily used to describe a specific order or sequence. It should be understood that the data used in this way can be interchanged where appropriate, so as to describe the embodiments of the utility model described herein. In addition, similar terms such as "including" and "having" mean that in addition to those contents already listed in "including" and "having", other contents that have not been listed can also be "included" and "having"; for example, a process, method, system, product or device that can include a series of steps or units is not necessarily limited to those steps or units that have been clearly listed, but can include other steps or units that are not clearly listed or inherent to these processes, methods, products or devices.

[0022] Due to the angle of the drawing, some components may not be drawn, but their positions and connection relationships can be partially understood based on the text expression.

[0023] like Figure 1-Figure 2As shown, the utility model is a silicon wafer carrying device, comprising two end plates 9 arranged opposite to each other, and the two end plates 9 are connected by a frame rod 10. The upper part of the end plate 9 is provided with a symmetrically arranged clamping rod groove 8, which shrinks inward from top to bottom; the lower part of the end plate 9 is provided with a symmetrically arranged supporting rod groove 11, which expands outward from top to bottom.

[0024] The two sides of the upper clamping rod 1 slide in the clamping rod groove 8, and the two sides of the lower supporting rod 2 slide in the supporting rod groove 11. The end of the upper clamping rod 1 extends out of the end plate 9 to form the upper clamping rod hanging end 1-1. The end of the lower supporting rod 2 is hinged to the lower end of the transition rod 12, and the upper end of the transition rod 12 is hinged to the middle of the slide plate 5. The slide plate 5 is vertically slidably installed on the end plate 9 through the guide rail 4, and the slide plate handle 6 and the support foot 7 are installed on the slide plate 5.

[0025] The skateboard handles 6 are symmetrically mounted on the skateboard 5, and the support legs 7 are located between the skateboard handles 6 so as to be evenly stressed.

[0026] Positioning ring grooves 1-2 are provided on both sides of the upper clamping rod 1, which are adapted to the clamping rod groove 8 to prevent the upper clamping rod 1 from axial movement.

[0027] In order to prevent the slide plate 5 from excessively moving upward, causing the lower support rod 2 to impact the support rod groove 11 , a limit plate is installed on the end plate 9 .

[0028] The working process of the utility model is as follows:

[0029] When the silicon wafer needs to be supported, the slide plate 5 is moved upward, and the slide plate 5 drives the lower support rod 2 to slide to the upper position of the support rod groove 11 through the transition rod 12, and the lower support rods 2 on both sides are close to each other, and the silicon wafer is placed on the lower support rod 2. The upper clamping rod 1 slides down to the lower position of the clamping rod groove 8 under the action of gravity to clamp both sides of the silicon wafer.

[0030] In order to keep the silicon wafer supported, the supporting feet 7 need to be in contact with the supporting surface to prevent the slide plate 5 from sliding down.

[0031] When the silicon wafer needs to be put down, the upper clamping rod 1 is moved upward, and the upper clamping rod 1 is moved to the upper position of the clamping rod slot 8, and the upper clamping rods 1 on both sides are separated and separated from the two sides of the silicon wafer. The slide plate 5 is moved downward and lifted, and the slide plate 5 drives the lower supporting rod 2 to slide to the lower position of the supporting rod slot 11 through the transition rod 12, and the lower supporting rods 2 on both sides are disengaged, and the silicon wafer slides down from between the lower supporting rods 2 on both sides.

[0032] It is understood that the above embodiments are merely exemplary embodiments used to illustrate the principles of the present invention, but the present invention is not limited thereto. For those skilled in the art, various modifications and improvements can be made without departing from the spirit and essence of the present invention, and these modifications and improvements are also considered to be within the scope of protection of the present invention.

Claims

1. A silicon wafer supporting device, comprising two end plates (9) arranged opposite to each other, the two end plates (9) being connected by a frame rod (10), characterized in that: The upper part of the end plate (9) is provided with symmetrically arranged clamping rod grooves (8), and the lower part of the end plate (9) is provided with symmetrically arranged supporting rod grooves (11). Both sides of the upper clamping rod (1) slide in the clamping rod grooves (8), and both sides of the lower supporting rod (2) slide in the supporting rod grooves (11); the end of the lower supporting rod (2) is hinged to the lower end of the transition rod (12), and the upper end of the transition rod (12) is hinged to the middle of the slide plate (5), and the slide plate (5) is vertically slidably installed on the end plate (9); and the supporting foot (7) is installed on the slide plate (5).

2. The silicon wafer supporting device according to claim 1, characterized in that: The clamping rod groove (8) shrinks inwards from top to bottom.

3. The silicon wafer carrying device according to claim 1, characterized in that: The support rod groove (11) expands outward from top to bottom.

4. The silicon wafer supporting device according to claim 1, characterized in that: The end of the upper clamping rod (1) extends out of the end plate (9) to form an upper clamping rod hanging end (1-1).

5. The silicon wafer supporting device according to claim 1, characterized in that: The slide plate (5) is vertically slidably mounted on the end plate (9) via the guide rail (4).

6. The silicon wafer supporting device according to claim 1, characterized in that: A skateboard handle (6) is installed on the skateboard (5).

7. The silicon wafer supporting device according to claim 1, characterized in that: The skateboard handles (6) are symmetrically mounted on the skateboard (5), and the supporting legs (7) are located between the skateboard handles (6).

8. The silicon wafer supporting device according to claim 1, characterized in that: Positioning ring grooves (1-2) are provided on both sides of the upper clamping rod (1).

9. The silicon wafer supporting device according to claim 1, characterized in that: A limit plate is installed on the end plate (9).