Exhaust cavity assembly for electric heating water washing type tail gas treatment

Abstract

The utility model discloses an electric heating water washing type exhaust cavity assembly for tail gas treatment, which comprises an exhaust cavity, and the exhaust cavity comprises a conical exhaust cavity, a first exhaust cavity, a second exhaust cavity and an acid discharge pipe; one end of the conical exhaust cavity is connected with the rear-section tee joint through a flange, and the other end of the conical exhaust cavity is fixedly connected with the first exhaust cavity through a flange; the first exhaust cavity is fixedly connected with the second exhaust cavity; and the second exhaust cavity is fixedly connected with the acid discharge pipe through a flange. According to the exhaust cavity assembly for electric heating water washing type tail gas treatment, an exhaust cavity comprises the conical exhaust cavity, the first exhaust cavity, the second exhaust cavity and the acid discharge pipe, the structural design of the second exhaust cavity enables airflow to flow along the first gap, the second gap, the third gap and an inner cavity of the second sleeve, the flowing direction of the airflow is changed, and the acid discharge pipe is arranged in the second sleeve. The airflow passing path is prolonged, and the flow speed of the tail gas is gradually reduced, so that condensation of water vapor can be ensured, and the water vapor in the tail gas is fully separated from the tail gas.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor tail gas treatment, in particular to an exhaust chamber assembly for electric heating water washing tail gas treatment. Background Art

[0002] With the smooth advancement of new infrastructure such as 5G technology, Internet of Things, artificial intelligence, big data, and cloud computing, the semiconductor industry has developed rapidly. The semiconductor industry is one of the important sub-industries of the electronic information manufacturing industry. It belongs to the high-tech industry and is often misunderstood as a "clean" industry. But in fact, a large amount of acid, alkali, organic solvents and a variety of special gases are required in the processes of cleaning, photolithography, degumming, and drying. The entire production process produces a large amount of tail gas with many types. A large amount of volatile organic pollutants entering the atmosphere will not only cause great damage to the natural ecology, but also pose a serious threat to people's physical and mental health.

[0003] Untreated tail gas emissions will cause pollution to the environment and have a great impact on advanced semiconductor processes, so tail gas emissions must be actively treated and controlled. The tail gas treatment device is an indispensable supporting device in the semiconductor industry. It purifies the toxic and harmful substances and smoke in the tail gas emitted by semiconductor factories, or makes it meet the emission standards after treatment, reducing pollution to the environment, reducing air pollution and harm to human health.

[0004] The thermal diffusion process of semiconductors refers to the reaction of doping sources (phosphine, arsine, boron trichloride, etc.) with the silicon surface at high temperature (800-1100°C) to release impurity atoms, which diffuse from the high concentration area on the surface to the low concentration area inside, and eventually become evenly distributed. It is a chemical reaction process. In this process, SiH2Cl2, NH3, Si2Cl6, Si(OC2H5)4, O2, N2O, (C2H5O)3B, C3H9B, C6H 14 O3, (C2H5O)3PO, PH3, B2H6, SiH4 and other tail gases. According to the different tail gas treatment methods, tail gas treatment devices are divided into combustion type, electric heating type, plasma type and adsorption type, but the treatment effect is not good and the treatment efficiency is not high.

[0005] The existing exhaust gas treatment equipment has a high moisture content in the exhaust process. How to design an electric heating water-washing exhaust gas treatment exhaust chamber assembly with good water vapor separation effect is the problem to be solved by the utility model. Utility Model Content

[0006] The purpose of the utility model is to solve the problems in the background technology and provide an exhaust chamber assembly for electrically heated water-washed exhaust gas treatment. The exhaust chamber assembly for electrically heated water-washed exhaust gas treatment provided by the utility model prolongs the path of airflow, and the flow rate of exhaust gas will gradually decrease, thereby ensuring the condensation of water vapor, so that the water vapor and exhaust gas in the exhaust gas are fully separated.

[0007] The above technical purpose of the utility model is achieved through the following technical solutions:

[0008] An exhaust chamber assembly for electrically heated water-washed exhaust gas treatment includes an exhaust chamber, wherein the exhaust chamber includes a conical exhaust chamber, a first exhaust chamber, a second exhaust chamber and an acid exhaust pipe; one end of the conical exhaust chamber is connected to a rear-section tee through a flange, and the other end is fixedly connected to the first exhaust chamber through a flange; the first exhaust chamber is fixedly connected to the second exhaust chamber through a flange; and the second exhaust chamber is fixedly connected to the acid exhaust pipe through a flange.

[0009] As described above, an exhaust chamber assembly for electrically heated water-washed exhaust gas treatment, the second exhaust chamber includes a first annular filter, a first sleeve, a second annular filter and a second sleeve, the first annular filter is arranged between the shell of the second exhaust chamber and the first sleeve, the bottom of the first sleeve is a first baffle for blocking the exhaust gas discharge, the top of the first sleeve abuts against the second annular filter, the second annular filter is arranged between the shell of the second exhaust chamber and the second sleeve, there is a first gap between the first sleeve and the shell of the second exhaust chamber, the bottom of the second sleeve is spaced from the first baffle, the top of the second sleeve is provided with a second baffle for blocking the exhaust gas discharge, there is a second gap between the second baffle and the second annular filter, and there is a third gap between the second sleeve and the first sleeve.

[0010] As described above, in the exhaust chamber assembly for electrically heated water-washed exhaust gas treatment, the first exhaust chamber includes a first filter screen, which is arranged at the bottom end of the first exhaust chamber and close to the conical exhaust chamber; a metal ball filler is carried above the first filter screen.

[0011] In the above-mentioned exhaust chamber assembly for electrically heated water-washed exhaust gas treatment, a fourth spray pipe is provided in the first exhaust chamber, and the fourth spray pipe is provided above the first filter screen.

[0012] In the exhaust chamber assembly for electrically heated water-washed exhaust gas treatment as described above, the height of the metal ball filler is lower than the fourth spray pipe.

[0013] In the exhaust chamber assembly for electrically heated water-washed exhaust gas treatment as described above, the first gap is filled with metal ball filler.

[0014] In the exhaust chamber assembly for electrically heated water-washed exhaust gas treatment as described above, the metal ball filler is a Raschig ring or a Ball ring made of 304, 316, 316L, carbon steel, 201, or 410 metal material.

[0015] In the above-mentioned exhaust chamber assembly for electrically heated water-washed exhaust gas treatment, the rear section tee is provided with a second spray pipe.

[0016] In the above-mentioned exhaust chamber assembly for electrically heated water-washed exhaust gas treatment, a second downpipe is provided below the rear section tee, and the second downpipe is connected to the rear section tee via a flange.

[0017] In the above-mentioned exhaust chamber assembly for electrically heated water-washed exhaust gas treatment, the acid exhaust pipe is made of corrosion-resistant stainless steel material.

[0018] Compared with the prior art, the utility model has the following advantages and beneficial effects:

[0019] 1. The utility model provides an exhaust chamber assembly for electrically heated water-washed exhaust gas treatment, wherein the exhaust chamber includes a conical exhaust chamber, a first exhaust chamber, a second exhaust chamber and an acid exhaust pipe, and in particular, the structure of the second exhaust chamber includes a first annular filter screen, a first sleeve, a second annular filter screen, a second sleeve, a first baffle plate and a second baffle plate. The above structural design enables the airflow to flow along the first gap, the second gap, the third gap and the inner cavity of the second sleeve, and the airflow changes its flow direction, thereby extending the path of the airflow, and the flow rate of the exhaust gas will gradually decrease, thereby ensuring the condensation of water vapor and making the water vapor and exhaust gas in the exhaust gas fully separated.

[0020] 2. The utility model provides an electric heating water-washing exhaust gas treatment exhaust chamber assembly, which reduces the impact force of the exhaust gas when it is discharged from the acid exhaust pipe and reduces the noise.

[0021] 3. The utility model provides an exhaust chamber assembly for electrically heated water-washed exhaust gas treatment. Due to the increase in the airflow path, the heat and mass transfer rate between the exhaust gas after water washing and the outside world is enhanced, further avoiding damage to the exhaust chamber due to high temperature and extending the service life of the exhaust chamber. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] In order to more clearly illustrate the technical solution of the utility model or the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, what is described below is only one embodiment of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0023] Figure 1 A schematic diagram of the three-dimensional structure of an electric heating water-washing exhaust gas treatment device provided by the utility model;

[0024] Figure 2 This is a left view of an electric heating water washing type exhaust gas treatment equipment provided by the utility model;

[0025] Figure 3 A schematic diagram of the internal structure of an electric heating water-washing tail gas treatment device provided by the utility model;

[0026] Figure 4 This is a front view of the internal structure of an electric heating water-washing exhaust gas treatment device provided by the utility model;

[0027] Figure 5 for Figure 4 AA section view;

[0028] Figure 6 A schematic diagram of the reaction chamber assembly structure provided by the utility model;

[0029] Figure 7 The structure of the conical water collector provided by the utility model is schematically shown Figure 1 ;

[0030] Figure 8 The structure of the conical water collector provided by the utility model is schematically shown Figure 2 ;

[0031] Fig. 9 A schematic diagram of the flip structure position structure provided by the utility model;

[0032] Fig.10 A schematic diagram of the flip structure provided by the utility model;

[0033] Fig.11 A schematic diagram of the exhaust chamber assembly provided by the utility model;

[0034] Fig.12 for Fig.11 BB cross-section diagram;

[0035] Fig.13 The internal structure of the second exhaust chamber provided by the utility model is shown in FIG. Figure 1 ;

[0036] Fig.14 The internal structure of the second exhaust chamber provided by the utility model is shown in FIG. Figure 2 ;

[0037] Fig.15 A schematic diagram of the reaction chamber structure with a spring scraper provided by the utility model;

[0038] Fig.16 A schematic diagram of the spring scraper structure provided by the utility model;

[0039] Fig.17 for Fig.16 CC cross-section diagram.

[0040] In the figure, 100-intake pipe, 110-intake port, 120-intake straight pipe, 121-pressure detection tube, 130-bellows, 140-scraper structure, 1401-scraper cylinder, 1401a-cylinder body, 1401b-cylinder intake pipe, 1401c-cylinder outlet pipe, 1402-first nut, 1403-piston tube connecting column, 1404-gasket, 1405-piston rod sealing cylinder, 1406-fixing pin gasket, 1407-spring fixing pin, 1408-spring scraper joint, 1409-scraper spring, 1410-scraper pneumatic quick Plug connector, 150-protective net, 160-heating rod, 170-main cavity, 180-reaction cavity, 181-inner reaction cavity, 182-outer reaction cavity, 190-conical water collector, 191-installation part, 1911-water inlet, 192-pad part, 1921-drainage port, 193-conical part, 200-circulation pump, 210-cooling water circulation pipeline, 220-cold and heat exchanger, 230-upper support plate, 240-lower support plate, 250-turning device, 251-fixed plate, 252-vertical plate, 253-rotating shaft, 254-turning frame, 25 5-fixed frame, 260-front section tee, 261-first spray pipe, 270-first downpipe, 280-tee connecting pipe, 282-third spray pipe, 290-second downpipe, 300-water tank, 310-rear section tee, 311-second spray pipe, 320-exhaust chamber, 321-conical exhaust chamber, 322-first exhaust chamber, 3221-first filter screen, 3222-fourth spray pipe, 323-second exhaust chamber, 3231-first annular filter screen, 3232-first sleeve, 3233-second annular filter screen, 3234-second sleeve, 3235-the first baffle, 3236-the second baffle, 3237-the first gap, 3238-the second gap, 3239-the third gap, 324-the acid discharge pipe, 330-the top door, 340-the main door, 350-the front door panel, 351-the alarm light, 352-the pressure gauge, 353-the emergency stop button, 354-the first switch button, 355-the second switch button, 356-the first flow meter, 357-the second flow meter, 358-the third flow meter, 359-the display screen, 360-the right door, 370-the left door, 380-the rear door, 390-the handle. DETAILED DESCRIPTION

[0041] In the following description, it should be understood that the terms "first", "second", etc. are only used to distinguish one element from another, without requiring or implying any actual relationship or order between these elements. In fact, the first element can also be called the second element, and vice versa. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that the structure, device or equipment including a series of elements includes not only those elements, but also other elements that are not explicitly listed, or also include elements inherent to such structure, device or equipment. In the absence of more restrictions, the elements defined by the statement "including one..." do not exclude the existence of other identical elements in the structure, device or equipment including the elements. Each embodiment is described in a progressive manner herein, and each embodiment focuses on the differences from other embodiments, and the same similar parts between the embodiments can be referred to each other. The terms "longitudinal", "lateral", "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc. in this document indicate the orientation or position relationship based on the orientation or position relationship shown in the drawings, and are only for the convenience of describing this document and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present utility model. In the description of this document, unless otherwise specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense. For example, it can be a mechanical connection or an electrical connection, or it can be the internal connection of two elements, it can be a direct connection, or it can be indirectly connected through an intermediate medium. For ordinary technicians in this field, the specific meanings of the above terms can be understood according to the specific circumstances. In this document, unless otherwise specified, the term "plurality" means two or more.

[0042] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0043] like Figure 1-2As shown, an electrically heated water-washing exhaust gas treatment device comprises a housing, the housing comprising a top door 330, a front door 340, a front door panel 350, a right door 360, a left door 370 and a rear door 380, the front door 340, the right door 360, the left door 370 and the rear door 380 are all provided with a handle 390, and the front door panel 350 is provided with an alarm light 351, a pressure gauge 352, a display screen 359, an emergency stop button 353, a first switch button 354, a second switch button 355, a first flow meter 356, a second flow meter 357 and a third flow meter 358 in order from top to bottom. The housing has a compact structure, and the setting of the handle 390 is convenient for maintenance.

[0044] like Figure 3-6 As shown, an electrically heated water-washed exhaust gas treatment device also includes an intake pipe 100, a main cavity 170, a heating rod 160, a reaction chamber 180, a conical water collector 190, a front section tee 260, a first downpipe 270, a three-way connecting pipe 280, a second downpipe 290, a water tank 300, a rear section tee 310 and an exhaust chamber 320, wherein the intake pipe 100 is connected to the main cavity 170, the heating rod 160 is arranged on the main cavity 170 and extends into the reaction chamber 180, the main cavity 170 is connected to the reaction chamber 180, and the lower end of the reaction chamber 180 is connected to the conical water collector 190. The conical water collector 190 is connected to the front section tee 260, the lower end of the front section tee 260 is connected to the first downcomer 270, the first downcomer 270 extends into the water tank 300, one side of the front section tee 260 is connected to the rear section tee 310 through the tee connecting pipe 280, the lower end of the rear section tee 310 is connected to the second downcomer 290, the second downcomer 290 extends into the water tank 300, and the rear section tee 310 is connected to the exhaust chamber 320; preferably, the length of the first downcomer 270 is longer than that of the second downcomer 290, so that the atmospheric pressure on both sides of the water tank 300 can be equal, and the water surface in the water tank 300 becomes the same height, thereby achieving the effect of balancing the air pressure in the water tank 300.

[0045] like Figure 7-8 As shown, preferably, the conical water collector 190 includes a mounting portion 191, a cushion portion 192 and a conical portion 193, and a water inlet 1911 is arranged on the outer side of the mounting portion 191, and evenly distributed water outlets 1921 are arranged on the cushion portion 192. After water enters from the water inlet 1911, it flows down the inner wall of the conical portion 193 evenly along the water outlets 1921 of the cushion portion 192, forming a water film on the inner wall thereof, which can effectively reduce the adhesion of dust or particulate matter. At the same time, the water flow can wash away some of the attached dust or particulate matter, and further cool down the temperature.

[0046] like Figure 6As shown, preferably, a circulating pump 200 is also included. The function of the circulating pump 200 is, on the one hand, to realize the self-circulation of circulating cooling water through the cooling water circulation pipeline 210, and on the other hand, to supply tap water to the water tank 300. When the water in the water tank 300 is full, the waste water is discharged.

[0047] See again Figure 3 Preferably, a protective net 150 is also provided above the reaction chamber 180. Preferably, the air intake pipe 100 is composed of an air inlet 110, a bellows 130 and an air intake straight pipe 120 from top to bottom. The air inlet 110 is connected to the exhaust gas, and a pressure detection tube 121 is provided on the air intake straight pipe 120. The pressure detection tube 121 controls the air flow pressure to maintain the stability of the air flow during the transportation process and balance the internal and external pressures. In order to be able to understand the exhaust gas pressure in the air intake pipe 100 in real time, a pressure sensor is provided at the mouth of the pressure detection tube 121. According to the display of the pressure sensor, the air intake valve can be adjusted by connecting N2 or air. Since the temperature of the reaction chamber 180 is relatively high, the bellows 130 compensates for the thermal deformation of the air intake pipe 100.

[0048] See again Figure 5-Figure 6 The reaction chamber 180 includes an inner reaction chamber 181 and an outer reaction chamber 182, a sealed chamber is formed between the inner reaction chamber 181 and the outer reaction chamber 182, and a circulating cooling water inlet and a circulating cooling water outlet are provided on the outer reaction chamber 182, and the circulating cooling water outlet is connected to the cold heat exchanger 220, and the circulating cooling water cooled by the cold heat exchanger 220 is connected to the circulating cooling water inlet on the outer reaction chamber 182 through a pipeline, and the cold heat exchanger 220 converts the hot circulating cooling water into cold circulating cooling water for recycling. The internal temperature of the reaction chamber 180 reaches above 1000°C, providing a suitable temperature condition for the chemical reaction of the tail gas, but at such a high temperature, for safety considerations, circulating cooling water is provided to cool the reaction chamber 180, cool the heating rod 160 in the reaction chamber 180, and at the same time, the conical water collector 190 cools the tail gas.

[0049] like Figure 9-10 As shown, preferably, an upper support plate 230 is provided above the heat exchanger 220, and a lower support plate 240 is provided below the heat exchanger 220, and the heat exchanger 220 is provided between the upper support plate 230 and the lower support plate 240 and is fixed to the upper support plate 230 and the lower support plate 240 respectively.

[0050] Preferably, a flipping device 250 is further included, and the flipping device 250 includes a fixed plate 251, a vertical plate 252, a rotating shaft 253, a flip frame 254 and a fixed frame 255. The fixed plate 251 is arranged above the upper support plate 230, the vertical plate 252 is perpendicular to the fixed plate 251 and is arranged at both ends of the fixed plate 251, the rotating shaft 253 is fixedly connected to the vertical plate 252, the flip frame 254 is rotatably connected to the rotating shaft 253, the flip frame 254 is fixedly connected to the fixed frame 255, and the fixed frame 255 is fixedly connected to the outer reaction chamber 182 of the reaction chamber 180. When the reaction chamber 180 needs to be cleaned, the reaction chamber 180 can be flipped along the rotating shaft 253 to facilitate cleaning.

[0051] like Figure 11-14As shown, the exhaust chamber 320 includes a conical exhaust chamber 321, a first exhaust chamber 322, a second exhaust chamber 323 and an acid exhaust pipe 324; one end of the conical exhaust chamber 321 is connected to the rear section tee 310 through a flange, and the other end is fixedly connected to the first exhaust chamber 322 through a flange; the first exhaust chamber 322 is fixedly connected to the second exhaust chamber 323 through a flange; the second exhaust chamber 323 is fixedly connected to the acid exhaust pipe 324 through a flange; the first exhaust chamber 322 includes a first filter screen 3221, which is arranged at the bottom end of the first exhaust chamber 322 and close to the conical exhaust chamber 321, and the second exhaust chamber 323 includes a first annular filter screen 3231, a first sleeve 3232, a second annular filter screen 3233 and a second sleeve 3234, and the first annular filter screen 3231 is arranged between the first exhaust chamber 322 and the second The first sleeve 3232 is located between the exhaust chamber 323 and between the shell of the second exhaust chamber 323 and the first sleeve 3232. The bottom of the first sleeve 3232 is a first baffle 3235 for blocking the exhaust gas from being discharged. The top of the first sleeve 3232 abuts against the second annular filter screen 3233. The second annular filter screen 3233 is arranged between the shell of the second exhaust chamber 323 and the second sleeve 3234. There is a first gap 3237 between the first sleeve 3232 and the shell of the second exhaust chamber 323. There is a gap between the bottom of the second sleeve 3234 and the first baffle 3235. The top of the second sleeve 3234 is provided with a second baffle 3236 for blocking the exhaust gas from being discharged. There is a second gap 3238 between the second baffle 3236 and the second annular filter screen 3233. There is a third gap 3239 between the second sleeve 3234 and the first sleeve 3232. The tail gas after washing first passes through the first filter 3221. Preferably, a metal ball filler is carried on the top of the first filter 3221. The metal ball filler is preferably a Raschig ring or a Ball ring made of metal materials such as 304, 316, 316L, carbon steel, 201, 410, etc. The height of the metal ball filler is lower than the fourth spray pipe 3222. The metal ball filler above the first filter 3221 has the following functions: first, to increase the contact area between the airflow and the metal ball filler; second, to cool the airflow so that the condensed water flows back to the water tank 300; and third, to increase the airflow resistance so that the airflow slows down.The airflow is blocked by the first baffle 3235, and part of the water vapor is liquefied under the action of the first baffle 3235. The remaining gas is blocked by the first baffle 3235 and diverted through the first annular filter 3231 to continue moving upward. In this process, the first baffle 3235 absorbs the impact force of the airflow, increases the resistance of the airflow, and further decelerates the airflow. Then, the airflow passes through the first gap 3237, which is filled with metal ball fillers, and enters the second gap 3238 after passing through the second annular filter 3233. Under the blocking of the second baffle 3236, part of the water vapor is liquefied under the action of the second baffle 3236. The airflow passes through the second annular filter 3233 and enters the third gap 3239. Then, under the blocking of the first baffle 3235, the airflow is discharged through the acid discharge pipe 324 along the inner cavity of the second sleeve 3234. The arrangement of the first annular filter 3231, the first sleeve 3232, the second annular filter 3233, the second sleeve 3234, the first baffle 3235 and the second baffle 3236 allows the airflow to flow along the first gap 3237, the second gap 3238, the third gap 3239 and the inner cavity of the second sleeve 3234. Firstly, the impact force of the exhaust gas when it is discharged from the acid discharge pipe 324 is reduced, thereby reducing the noise; secondly, the airflow changes its flow direction, extends the path of the airflow, and buffers the speed of the exhaust gas. The flow rate of the exhaust gas will gradually decrease, thereby ensuring the condensation of water vapor and fully separating the water vapor in the exhaust gas from the exhaust gas; in addition, due to the increase in the airflow path, the heat and mass transfer rate between the exhaust gas after water washing and the outside world is also enhanced, further avoiding damage to the exhaust chamber 320 due to high temperature and extending the service life of the exhaust chamber 320.

[0052] Preferably, the front section tee 260 is provided with a first spray pipe 261, and the nozzle of the first spray pipe 261 is directly opposite to the exhaust gas inlet of the tee connecting pipe 280. Preferably, the front section tee 260 is provided with a second spray pipe 311, and the nozzle of the second spray pipe 311 is directly opposite to the exhaust gas outlet of the tee connecting pipe 280. Preferably, a third spray pipe 282 is provided at the middle position above the tee connecting pipe 280, and the third spray pipe 282 is perpendicular to the first spray pipe 261 and the second spray pipe 311 respectively. A fourth spray pipe 3222 is provided in the first exhaust cavity 322, and the fourth spray pipe 3222 is provided above the first filter 3221. The setting of the first spray pipe 261, the second spray pipe 311, the third spray pipe 282 and the fourth spray pipe 3222, on the one hand, improves the water washing effect, further absorbs the soluble exhaust gas in the outflow pipe of the exhaust gas treated with high temperature and flows into the water tank 300, and on the other hand, cools the exhaust gas.

[0053] Preferably, there are six heating rods 160 axially distributed on the top surface of the main cavity 170 and extending into the middle of the reaction cavity 180 . Preferably, there are six air inlet pipes 100 axially distributed on the side of the main cavity 170 .

[0054] Preferably, the electrically heated water-washed exhaust gas treatment equipment is also provided with a smoke detector (not shown in the figure), a liquid leakage detector (not shown in the figure), and an overheating safety protection device (not shown in the figure). The smoke detector (not shown in the figure) is arranged at the inner upper end of the top door 330, the liquid leakage detector (not shown in the figure) is arranged on the water tank 300, and the overheating safety protection device (not shown in the figure) is arranged on the outside of the outer reaction chamber 182. If the smoke detector (not shown in the figure), the liquid leakage detector (not shown in the figure), and the overheating safety protection device (not shown in the figure) detect an abnormality, the alarm light 351 lights up and the emergency stop button 353 can be pressed, thereby ensuring the safety of the process.

[0055] The principle of the present invention is as follows:

[0056] The pre-treated semiconductor exhaust gas enters the main cavity 170 through the air inlet pipe 100, and then enters the reaction cavity 180. The heating rod 160 in the reaction cavity 180 heats the exhaust gas for high-temperature decomposition treatment, and the decomposition reaction is into powder or a substance soluble in water, and then enters the conical water collector 190 for flushing and cooling, and enters the water tank 300 through the first downpipe 270 for water washing and water-soluble hydrolysis. The first spray pipe 261, the second spray pipe 311, the third spray pipe 282 and the fourth spray pipe 3222 are sprayed and cooled, and the exhaust gas dissolved in water is discharged as waste water. The exhaust gas coming out of the water tank 300 enters the exhaust cavity 320 through the second downpipe 290 for water vapor separation, passes through the conical exhaust cavity 321, and then passes through the first exhaust cavity 322 and the second exhaust cavity 323 in turn for water vapor separation to prevent humidity from exceeding the standard and effectively prevent water vapor from entering the next processing link. Finally, it is discharged through the acid discharge pipe 324.

[0057] The electric heating water washing tail gas treatment equipment provided by the present invention can be specially used to treat some SiH2Cl2, NH3, Si2Cl6, Si(OC2H5)4, O2, N2O, (C2H5O)3B, C3H9B, C6H 14 O3, (C2H5O)3PO, PH3, B2H6, SiH4 and other semiconductor tail gases. At the same time, it can also handle some soluble corrosive gases such as Cl2, BCl3, HBr and other semiconductor tail gases.

[0058] SiH2Cl2+O2=SiO2(dust)+2HCl

[0059] 4NH3+3O2=2N2+6H2O

[0060] Si2Cl6+4H2O=2SiO2(dust)+6HCl+H2

[0061] Si(OC2H5)4+12O2=8CO2+SiO2(dust)+10H2O

[0062] 2(C2H5O)3B+18O2=12CO2+B2O3+15H2O

[0063] 2(C2H5O)3PO+18O2=12CO2+P2O5+15H2O

[0064] 2PH3+4O2=P2O5+3H2O

[0065] B2H6+4O2=B2O5+3H2O

[0066] SiH4+2O2=SiO2(dust)+2H2O

[0067] Embodiment 2:

[0068] like Figure 15-17As shown, the difference from Example 1 is that, preferably, the air inlet pipe 100 is further provided with a scraper structure 140, the scraper structure 140 includes a scraper cylinder 1401, a first nut 1402, a piston rod connecting column 1403, a gasket 1404, a piston rod sealing cylinder 1405, a fixing pin gasket 1406, a spring fixing pin 1407, a spring scraper joint 1408, a scraper spring 1409 and a scraper pneumatic quick-connect joint 1410, the scraper cylinder 1401 includes a cylinder body 1401a, a cylinder air inlet pipe 1401b, and a cylinder air outlet pipe 1401c, the cylinder air inlet pipe 1401b is connected to the The top of the cylinder body 1401a, the cylinder outlet pipe 1401c is connected to the bottom of the cylinder body 1401a, the piston rod of the cylinder body 1401a passes through the first nut 1402 and is fixedly connected to the piston rod connecting column 1403, the gasket 1404 is arranged below the first nut 1402, the piston rod connecting column 1403 and the piston rod sealing cylinder 1405 are connected in a sliding manner with clearance fit, the piston rod connecting column 1403 passes through the spring scraper joint 1408 and is fixedly connected to the spring fixing pin 1407, and the piston rod connecting column 1403 and the spring scraper joint 1408 are connected in a sliding manner with clearance fit. Preferably, two sealing rings are arranged at the bottom of the inner cavity of the spring scraper joint 1408. The fixing pin gasket 1406 is arranged between the spring fixing pin 1407 and the spring scraper joint 1408. One end of the spring fixing pin 1407 close to the spring scraper joint 1408 is fixedly connected to one end of the scraper spring 1409, and the other end of the scraper spring 1409 is a free end. The scraper spring 1409 is sleeved on the spring fixing pin 1407, and the spring fixing pin 1407 provides a certain supporting force when the scraper spring 1409 cleans the pipe wall at the bend. Preferably, the lower end of the piston rod sealing cylinder 1405 is inclinedly provided with a scraper pneumatic quick-connect joint 1410, and the angle with the axial direction of the cylinder body 1401a is 30 to 60 degrees, preferably 30 degrees. Such an angle setting makes it more convenient to clean the bend of the intake pipe 100. During operation, the scraper structure 140 is tiltedly arranged on the air inlet pipe 100. Under the action of the scraper cylinder 1401, the piston rod of the cylinder is pushed up, and the piston rod connecting column 1403, driven by the piston rod, drives the spring fixing pin 1407 to push down, thereby driving the scraper spring 1409 to slide in the pipe wall at the bend of the air inlet pipe 100, so as to scrape off the pipe wall attachment at the bend, thereby preventing the solid particle attachment from attaching to the inner wall of the exhaust gas treatment device during the exhaust gas treatment process, or blocking the pipe of the air inlet pipe 100. More preferably, the scraper pneumatic quick-connect connector 1410 is unplugged, and the purge gas is introduced into the inner cavity of the piston rod sealing cylinder 1405, and the purge gas sweeps the attachments scraped off by the spring into the reaction chamber 180. The setting of the scraper structure 140 completely solves the problem of easy blockage at the pipe bend of the air inlet pipe 100, improves the ventilation efficiency, and ensures process safety.

[0069] The above is only a preferred embodiment of the present invention. It should be pointed out that for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the principle of the present invention. These improvements and modifications should also be regarded as the protection scope of the present invention.

Claims

1. An exhaust chamber assembly for electrically heated water-washed exhaust gas treatment, characterized in that: The invention comprises an exhaust chamber (320), wherein the exhaust chamber (320) comprises a conical exhaust chamber (321), a first exhaust chamber (322), a second exhaust chamber (323) and an acid exhaust pipe (324); one end of the conical exhaust chamber (321) is connected to the rear section tee (310) via a flange, and the other end is fixedly connected to the first exhaust chamber (322) via a flange; the first exhaust chamber (322) is fixedly connected to the second exhaust chamber (323) via a flange; and the second exhaust chamber (323) is fixedly connected to the acid exhaust pipe (324) via a flange.

2. The electrically heated water-washed exhaust gas treatment exhaust chamber assembly according to claim 1 is characterized in that: The second exhaust chamber (323) comprises a first annular filter screen (3231), a first sleeve (3232), a second annular filter screen (3233) and a second sleeve (3234); the first annular filter screen (3231) is arranged between the shell of the second exhaust chamber (323) and the first sleeve (3232); the bottom of the first sleeve (3232) is a first baffle (3235) for blocking exhaust gas discharge; the top of the first sleeve (3232) is in contact with the second annular filter screen (3233); the second annular filter screen (3233) is arranged in the second exhaust chamber (323). A first gap (3237) is provided between the shell of the second sleeve (3232) and the shell of the second exhaust chamber (323), a gap is provided between the bottom of the second sleeve (3234) and the first baffle (3235), a second baffle (3236) is provided on the top of the second sleeve (3234) to block the exhaust gas from being discharged, a second gap (3238) is provided between the second baffle (3236) and the second annular filter (3233), and a third gap (3239) is provided between the second sleeve (3234) and the first sleeve (3232).

3. The exhaust chamber assembly for electrically heated water-washed exhaust gas treatment according to claim 1 is characterized in that: The first exhaust cavity (322) comprises a first filter screen (3221), the first filter screen (3221) being arranged at the bottom end of the first exhaust cavity (322) and close to the conical exhaust cavity (321); a metal ball filler is carried above the first filter screen (3221).

4. The electrically heated water-washed exhaust gas treatment exhaust chamber assembly according to claim 3 is characterized in that: A fourth spray pipe (3222) is provided in the first exhaust cavity (322), and the fourth spray pipe (3222) is arranged above the first filter screen (3221).

5. The electrically heated water-washed exhaust gas treatment exhaust chamber assembly according to claim 4 is characterized in that: The height of the metal ball filler is lower than the fourth spray pipe (3222).

6. The exhaust chamber assembly for electrically heated water-washed exhaust gas treatment according to claim 2 is characterized in that: The first gap (3237) is filled with metal ball filler.

7. The exhaust chamber assembly for electrically heated water-washed exhaust gas treatment according to claim 6 is characterized in that: The metal ball filler is a Raschig ring or a Pall ring made of 304, 316, 316L, carbon steel, 201, or 410 metal.

8. The electrically heated water-washed exhaust gas treatment exhaust chamber assembly according to claim 1 is characterized in that: The rear section tee (310) is provided with a second spray pipe (311).

9. The electrically heated water-washed exhaust gas treatment exhaust chamber assembly according to claim 1, characterized in that: A second downpipe (290) is provided below the rear section tee (310), and the second downpipe (290) is connected to the rear section tee (310) via a flange.

10. The electrically heated water-washed exhaust gas treatment exhaust chamber assembly according to claim 1, characterized in that: The acid discharge pipe (324) is made of corrosion-resistant stainless steel.

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