Vacuum coating device

Abstract

The utility model discloses a vacuum coating device. The vacuum coating device comprises a reaction cavity, a transmission structure and a driving module, a hot wire is arranged in the reaction cavity and is provided with a movable end; the transmission structure penetrates through the cavity wall of the reaction cavity and is connected with the movable end of the hot wire; the driving module is arranged on the outer side of the reaction cavity and connected with the part, extending out of the reaction cavity, of the transmission structure, and the driving module can drive the movable end to move through the transmission structure so as to straighten the hot wire. According to the vacuum coating device disclosed by the utility model, the driving module is connected with the hot wire through the transmission structure, so that the driving module can be arranged outside the reaction cavity, and when the vacuum coating device works, the driving module is arranged outside the reaction cavity; according to the vacuum coating device, the driving module is arranged in the reaction cavity, so that a worker can directly control the driving module to adjust the tensile force of the hot wire in the reaction cavity, the tensile force of the hot wire in the reaction cavity can be adjusted on the premise that the reaction cavity is not opened, and the convenience of adjusting the tensile force of the hot wire in the vacuum coating device is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of vapor phase deposition diamond coating, in particular to a vacuum coating device. Background Art

[0002] Diamond films prepared using chemical vapor deposition technology have broad application prospects because of their performance comparable to natural diamonds. Among them, the hot wire method is widely used in the preparation of diamond coatings on workpiece surfaces due to its advantages of low equipment cost and large-area deposition. In the process of depositing diamond coatings on the workpiece surface using the hot wire method, the hot wire often needs to be processed to above 2000°C. At this temperature, the hot wire is prone to sag during long-term operation, affecting the quality of the deposited diamond coating.

[0003] In the prior art, the wire drawing device that keeps the hot wire straight is set in the reaction chamber, and generally uses the elastic force of the spring or the weight of the weight to draw the wire, so that the hot wire is always kept in a straightened state. However, the elastic force of the spring is limited, the weight of the weight is difficult to choose, and both need to be set in the reaction chamber. Each time the tension is adjusted, the coating needs to be stopped or the reaction chamber needs to be opened after the coating is completed, and the staff has to adjust it manually, so the convenience of adjusting the hot wire tension is low. Utility Model Content

[0004] The purpose of the utility model is to solve at least one of the technical problems existing in the prior art. The utility model provides a vacuum coating device, which can adjust the tension of the hot wire without opening the reaction chamber during the coating process.

[0005] According to the vacuum coating device provided by the embodiment of the utility model, it includes a reaction chamber, a transmission structure and a driving module; a hot wire is arranged in the reaction chamber, and the hot wire has a movable end; the transmission structure is passed through the cavity wall of the reaction chamber and is connected to the movable end of the hot wire; the driving module is arranged outside the reaction chamber and is connected to the part of the transmission structure extending to the outside of the reaction chamber, and the driving module can drive the movable end to move through the transmission structure to straighten the hot wire.

[0006] The vacuum coating device described in the utility model has at least the following beneficial effects: in the vacuum coating device of the utility model, the driving module and the hot wire are connected through a transmission structure, so that the driving module can be arranged outside the reaction chamber. When the vacuum coating device is working, since the driving module is arranged outside the reaction chamber, during the coating process, the staff can directly control the driving module to adjust the tension of the hot wire in the reaction chamber. Furthermore, without opening the reaction chamber, the tension of the hot wire in the reaction chamber can be adjusted, thereby improving the convenience of adjusting the tension of the hot wire in the vacuum coating device of the present application.

[0007] According to the vacuum coating device described in the embodiment of the utility model, it also includes a first electrode arranged in the reaction chamber, the first electrode is connected to the transmission structure and can move with the transmission structure, and the movable end of the hot wire is connected to the first electrode.

[0008] According to the vacuum coating device described in the embodiment of the utility model, it also includes a first conductive structure, one end of the first conductive structure is electrically connected to the first electrode, and the other end of the first conductive structure extends to the outside and is used to be electrically connected to an external power supply. The first conductive structure includes a flexible conductive segment made of a flexible conductive material, and the flexible conductive segment is at least partially arranged in the reaction chamber so that the first conductive structure can adapt to the movement of the first electrode.

[0009] According to the vacuum coating device described in an embodiment of the utility model, the first conductive structure also includes a fixed conductive segment, which is penetrated through the cavity wall of the reaction chamber and is used to be electrically connected to an external power supply, one end of the flexible conductive segment is connected to the fixed conductive segment, and the other end of the flexible conductive segment is connected to the first electrode.

[0010] According to the vacuum coating device described in the embodiment of the utility model, a limiting groove is provided on the first electrode, and the hot wire is inserted into the limiting groove.

[0011] According to the vacuum coating device described in the embodiment of the utility model, it also includes a first electrode strip, which is connected to the first electrode and is located at the notch of the limiting groove. The first electrode strip is used to cooperate with the groove wall of the limiting groove to clamp the hot wire.

[0012] According to the vacuum coating device described in the embodiment of the utility model, the first electrode includes a conductive part and a fixed part, the limiting groove is provided on the conductive part, and the movable end of the hot wire is fixedly connected to the fixed part.

[0013] According to the vacuum coating device described in the embodiment of the utility model, the transmission structure includes a slider, a pull rod and a slide rail. The slider is slidably arranged on the slide rail and is connected to the hot wire. The extension direction of the slide rail is arranged parallel to the extension direction of the hot wire. The pull rod is penetrated on the cavity wall of the reaction chamber, and the opposite ends of the pull rod are respectively connected to the slider and the driving module.

[0014] According to the vacuum coating device described in the embodiment of the utility model, a cavity wall on one side of the reaction cavity is recessed toward the outside of the reaction cavity to form a containing structure, a containing cavity connected to the reaction cavity is formed in the containing structure, and the transmission structure is arranged in the containing cavity.

[0015] According to the vacuum coating device described in the embodiment of the utility model, the driving module is an electrical driver.

[0016] Additional aspects and advantages of the present invention will be given in part in the following description, and in part will become apparent from the following description, or will be learned through the practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] The utility model is further described below in conjunction with the accompanying drawings and embodiments;

[0018] Figure 1 This is a schematic structural diagram of a vacuum coating device according to an embodiment of the utility model;

[0019] Figure 2 for Figure 1 A partial enlarged view of the structure at location A of the vacuum coating device shown.

[0020] Reference numerals:

[0021] Reaction chamber 100; air inlet 101; air extraction port 102; hot wire 110; first electrode 120; fixing portion 121; conductive portion 122; first electrode strip 130; first conductive structure 140; flexible conductive segment 141; fixed conductive segment 142; second electrode 150; second electrode strip 160; second conductive structure 170; containing structure 180; containing chamber 181; skeleton oil seal 190;

[0022] Transmission structure 200; slider 210; pull rod 220; slide rail 230;

[0023] Driving module 300;

[0024] External power supply 400;

[0025] Workbench 500. DETAILED DESCRIPTION

[0026] This section will describe in detail the specific embodiments of the utility model. The preferred embodiments of the utility model are shown in the accompanying drawings. The purpose of the accompanying drawings is to supplement the description of the text part of the specification with graphics, so that people can intuitively and vividly understand each technical feature and the overall technical solution of the utility model, but it cannot be understood as a limitation on the protection scope of the utility model.

[0027] In the description of the present invention, it should be understood that descriptions involving orientation, such as up, down, front, back, left, right, etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0028] In the description of the present utility model, "several" means one or more, "more" means more than two, "greater than", "less than", "exceed" etc. are understood to exclude the number itself, and "above", "below", "within" etc. are understood to include the number itself. If there is a description of "first" or "second", it is only used for the purpose of distinguishing the technical features, and cannot be understood as indicating or implying the relative importance or implicitly indicating the number of the indicated technical features or implicitly indicating the order of the indicated technical features.

[0029] In the description of the present invention, unless otherwise clearly defined, terms such as setting, installing, connecting, etc. should be understood in a broad sense, and technicians in the relevant technical field can reasonably determine the specific meanings of the above terms in the present invention based on the specific content of the technical solution.

[0030] Reference below Figure 1 and Figure 2 The vacuum coating device of the utility model is described in detail.

[0031] The vacuum coating device is mainly used to coat a layer of diamond coating on the surface of a substrate material. A reaction chamber 100 is formed in the vacuum coating device. A workbench 500 and a hot wire 110 are arranged in the reaction chamber 100. When the vacuum coating device is working, the substrate material is placed on the workbench 500 in advance, and then the reaction chamber 100 is evacuated. Then, the hot wire 110 is powered to increase the temperature of the hot wire 110 itself to a set value. Then, a reaction gas can be introduced into the reaction chamber 100. The reaction gas is pyrolyzed under the high temperature of the hot wire 110 to form reaction activated products. These reaction activated products are deposited on the surface of the substrate material to form a diamond coating.

[0032] The single working time of the vacuum coating device generally reaches dozens or even hundreds of hours, and the hot wire 110 will sag during the long working process, thereby affecting the quality of the diamond coating formed on the surface of the substrate material.

[0033] In the prior art, a spring or a weight block is usually arranged in the reaction chamber 100, and the spring or the weight block is connected to the movable end of the hot wire 110 to apply a pulling force to the hot wire 110, so that the hot wire 110 can be kept in a straightened state during the working process. However, during the working process of the hot wire 110, the pulling force required to keep the hot wire 110 in a straightened state is constantly changing, and the pulling force applied to the hot wire 110 by the spring or the weight is difficult to keep the hot wire 110 in a straightened state all the time. When the hot wire 110 sags, the staff needs to shut down the vacuum coating device, and the vacuum coating device can only be started again after the staff adjusts the elongation of the spring or the number of weight blocks. The adjustment of the pulling force on the hot wire 110 is very inconvenient.

[0034] In order to facilitate the staff to adjust the tension of the hot wire 110, refer to Figure 1 According to an embodiment of the utility model, the vacuum coating device includes a reaction chamber 100, a transmission structure 200 and a driving module 300; a horizontally extending hot wire 110 is provided in the reaction chamber 100, and the hot wire 110 has an active end. The driving module 300 is arranged on the outside of the reaction chamber 100, and the transmission structure 200 is penetrated on the cavity wall of the reaction chamber 100, and the part of the transmission structure 200 located in the reaction chamber 100 is connected to the active end of the hot wire 110, and the part of the transmission structure 200 located outside the reaction chamber 100 is connected to the driving module 300.

[0035] It is understandable that, since the driving module 300 is disposed outside the reaction chamber 100, when the hot wire 110 sags, the magnitude of the pulling force applied by the driving module 300 to the transmission structure 200 can be adjusted directly outside the reaction chamber 100, and then the magnitude of the pulling force on the active end of the hot wire 110 is adjusted through the transmission structure 200 to straighten the sagging hot wire 110. Therefore, when adjusting the pulling force on the hot wire 110, the staff does not need to open the reaction chamber 100, and the adjustment of the pulling force on the hot wire 110 is more convenient; at the same time, since the reaction chamber 100 does not need to be opened during the process of adjusting the pulling force on the hot wire 110, correspondingly, the process of coating on the substrate material in the reaction chamber 100 does not need to be interrupted, thereby improving the quality of the diamond coating plated on the surface of the substrate material.

[0036] Specifically, in order to facilitate the staff to adjust the tension exerted on the hot wire 110 through the driving module 300, in some embodiments, the driving module 300 may include an electrical driver such as a cylinder or a motor. At this time, the staff controls the tension exerted on the hot wire 110 by adjusting the driving force output by the cylinder or the motor.

[0037] It should be noted that in some other embodiments, without considering the precision of the driving module 300 in adjusting the tension on the hot wire 110, the driving module 300 may also include a spring or a weight. In this case, the staff adjusts the tension on the hot wire 110 by adjusting the stretching length of the spring or the number of weights.

[0038] In some embodiments of the present invention, reference Figure 1 The vacuum coating device also includes a first electrode 120, a second electrode 150 and an external power supply 400 arranged outside the reaction chamber 100. The left and right ends of the hot wire 110 are electrically connected to the first electrode 120 and the second electrode 150 respectively. The left end of the hot wire 110 can be a movable end, and the right end of the hot wire 110 can be a fixed end. The first electrode 120 and the second electrode 150 are electrically connected to the positive electrode and the negative electrode of the external power supply 400 respectively, so that the external power supply 400 can energize the hot wire 110.

[0039] Since the hot wire 110 needs to have the characteristics of being conductive and resistant to high temperatures, the hot wire 110 generally uses a tungsten wire or a tantalum wire, and the hot wire 110 is in direct contact with the first electrode 120 and the second electrode 150. When the vacuum coating device is working, the hot wire 110 is in an energized and high-temperature environment. At this time, welding is likely to occur between the hot wire 110 and the first electrode 120, and welding is also likely to occur between the hot wire 110 and the second electrode 150. When welding occurs between the hot wire 110 and the first electrode 120, it is difficult for the active end of the hot wire 110 to move relative to the first electrode 120. When the first electrode 120 is fixedly installed in the reaction chamber 100, it is difficult for the driving module 300 to pull the active end of the hot wire 110.

[0040] When welding occurs between the hot wire 110 and the first electrode 120, in order to enable the movable end of the hot wire 110 to still move, in some embodiments of the present invention, the first electrode 120 is connected to the transmission structure 200. Further, under the drive of the driving module 300, the movable ends of the first electrode 120 and the hot wire 110 can move with the transmission structure 200. Even if welding occurs between the first electrode 120 and the hot wire 110, the driving module 300 can still drive the movable end of the hot wire 110 to move, thereby adjusting the tension on the hot wire 110.

[0041] Optionally, in other embodiments of the present invention, both left and right ends of the hot wire 110 can be movable ends. In this case, the driving module 300 and the transmission structure 200 can be cooperated to have two groups, one of which is connected to the left end of the hot wire 110, and the other is connected to the right end of the hot wire 110.

[0042] refer to Figure 1 In some embodiments of the present invention, the vacuum coating device further includes a first conductive structure 140 and a second conductive structure 170. The first conductive structure 140 and the second conductive structure 170 are both disposed on the cavity wall of the reaction chamber 100. The portion of the first conductive structure 140 located inside the reaction chamber 100 is electrically connected to the first electrode 120, and the portion of the first conductive structure 140 located outside the reaction chamber 100 is electrically connected to an external power supply 400. The portion of the second conductive structure 170 located inside the reaction chamber 100 is electrically connected to the second electrode 150, and the portion of the second conductive structure 170 located outside the reaction chamber 100 is electrically connected to the external power supply 400.

[0043] It is understandable that since the first electrode 120 can move with the transmission structure 200, when the first electrode 120 moves, the connection between the first conductive structure 140 and the first electrode 120 may be disconnected, resulting in poor electrical contact between the first electrode 120 and the first conductive structure 140.

[0044] In order to make the electrical connection between the first conductive structure 140 and the first electrode 120 more stable, Figure 1 In some embodiments of the present invention, the first conductive structure 140 includes a flexible conductive segment 141 made of a flexible conductive material, and the flexible conductive segment 141 is at least partially disposed in the reaction chamber 100 .

[0045] It can be understood that, due to the presence of the flexible conductive segment 141, when the first electrode 120 moves left and right following the transmission structure 200, the flexible conductive segment 141 can be deformed to swing left and right, so that the end of the first conductive structure 140 in contact with the first electrode 120 can move left and right following the first electrode 120, so as to reduce the probability of disconnection of the connection between the first conductive structure 140 and the first electrode 120, and the electrical connection between the first conductive structure 140 and the first electrode 120 is more stable.

[0046] For further reference, Figure 1 The first conductive structure 140 also includes a fixed conductive segment 142 made of a rigid material. The fixed conductive segment 142 is penetrated on the cavity wall of the reaction chamber 100. The portion of the fixed conductive segment 142 extending outside the reaction chamber 100 is used to be electrically connected to the external power supply 400. The portion of the fixed conductive segment 142 located inside the reaction chamber 100 is electrically connected to the flexible conductive segment 141. One end of the flexible conductive segment 141 away from the fixed conductive segment 142 is electrically connected to the first electrode 120.

[0047] Specifically, the flexible conductive segment 141 may be a copper strip, which is cheap, has good conductivity, and is resistant to high temperatures.

[0048] It should be noted that, without considering the price, the flexible conductive segment 141 may also be made of a silver ribbon or a gold ribbon.

[0049] Optionally, in some other embodiments, the first conductive structure 140 may also be completely composed of a flexible conductive segment 141. In this case, the flexible conductive segment 141 is penetrated through the cavity wall of the reaction chamber 100, and one end of the flexible conductive segment 141 located outside the reaction chamber 100 is used for electrical connection with an external power supply 400, and one end of the flexible conductive segment 141 located inside the reaction chamber 100 is electrically connected to the first electrode 120.

[0050] When the vacuum coating device coats the substrate material, a plurality of hot wires 110 are often arranged in the reaction chamber 100. The hot wires 110 are arranged parallel to each other, and the interval between any two adjacent hot wires 110 is the same. In this case, the staff only manually installs the hot wires 110 in the reaction chamber 100 based on experience, and it is often difficult to keep the distance between any two adjacent hot wires 110 the same.

[0051] In order to enable the staff to more accurately install the hot wire 110 in the reaction chamber 100, in some embodiments of the present invention, the first electrode 120 and the second electrode 150 are both provided with horizontally extending limiting grooves, and the opposite ends of the hot wire 110 are respectively inserted into the limiting grooves of the first electrode 120 and the second electrode 150.

[0052] The setting of the limiting grooves on the first electrode 120 and the second electrode 150 makes it convenient for the staff to install the two ends of the hot wire 110 on the first electrode 120 and the second electrode 150 respectively; at the same time, the groove wall of the limiting groove can limit the hot wire 110, so that the hot wire 110 can be installed in the reaction chamber 100 more accurately.

[0053] Specifically, the extending direction of the limiting groove is the same as the extending direction of the heating wire 110. For example, when the heating wire 110 extends in the left-right direction, the limiting groove also extends in the left-right direction.

[0054] In some embodiments, in order to achieve a fixed connection between the hot wire 110 and the first electrode 120, refer to Figure 1 The vacuum coating device also includes a first electrode strip 130, which is arranged at the notch of the limiting groove of the first electrode 120, and the first electrode strip 130 and the groove wall of the limiting groove cooperate to press and fix the hot wire 110 passing through the limiting groove.

[0055] Specifically, refer to Figure 1 The notch of the limiting groove on the first electrode 120 can face upward, the first electrode strip 130 can be arranged above the first electrode 120, and the first electrode strip 130 is connected to the first electrode 120 through a threaded connector, and the lower end surface of the first electrode strip 130 cooperates with the groove wall of the limiting groove to press and fix the hot wire 110.

[0056] Optionally, in other embodiments of the present invention, the notch of the limiting groove on the first electrode 120 may also face downward. In this case, the first electrode strip 130 is disposed below the first electrode 120, and the first electrode strip 130 is connected to the first electrode 120 through a threaded connector, and the upper end surface of the first electrode strip 130 cooperates with the groove wall of the limiting groove to press and fix the hot wire 110.

[0057] Although the first electrode strip 130 and the first electrode 120 can cooperate to clamp and fix the hot wire 110, when the hot wire 110 needs to withstand a large tensile force, the hot wire 110 may still slide in the limiting groove of the first electrode 120. At this time, under the drive of the driving module 300, the hot wire 110 is difficult to be straightened.

[0058] In order to reduce the probability of the hot wire 110 slipping in the limiting groove of the first electrode 120, in some embodiments of the present invention, reference is made to Figure 2 The first electrode 120 includes a fixing portion 121 and a conductive portion 122 . A limiting groove is provided on the conductive portion 122 . The fixing portion 121 can be located at the left end of the conductive portion 122 . The hot wire 110 is fixedly connected to the fixing portion 121 after passing through the limiting groove.

[0059] Specifically, the hot wire 110 can be wound and fixed on the fixing portion 121 .

[0060] It is understandable that, similarly, in order to achieve a fixed connection between the hot wire 110 and the second electrode 150, refer to Figure 1 The vacuum coating device also includes a second electrode strip 160, which is arranged at the notch of the limiting groove of the second electrode 150. The second electrode strip 160 is fixedly connected to the second electrode 150 through a threaded connector, and the second electrode strip 160 cooperates with the groove wall of the limiting groove to clamp and fix the hot wire 110.

[0061] In some embodiments of the present invention, reference Figure 1 The transmission structure 200 includes a slide rail 230, a slider 210 and a pull rod 220; the slide rail 230 is arranged in the reaction chamber 100, and the extension direction of the slide rail 230 is the same as the extension direction of the hot wire 110. For example, when the hot wire 110 extends in the left-right direction, the slide rail 230 also extends in the left-right direction; the slider 210 is slidably arranged on the slide rail 230, and the slider 210 is fixedly connected to the first electrode 120; the pull rod 220 is passed through the reaction chamber 100, the part of the pull rod 220 located inside the reaction chamber 100 is connected to the slider 210, and the part of the pull rod 220 located outside the reaction chamber 100 is connected to the driving module 300. Driven by the driving module 300, the pull rod 220 can drive the slider 210 to move along the extension direction of the slide rail 230. Since the slider 210 is connected to the active ends of the first electrode 120 and the hot wire 110, the slider 210 can simultaneously drive the active ends of the first electrode 120 and the hot wire 110 to move along the extension direction of the slide rail 230.

[0062] It is understandable that in order to facilitate the installation of the slide rail 230, in some embodiments of the present invention, reference is made to Figure 1 The cavity wall on the left side of the reaction chamber 100 is recessed toward the outside of the reaction chamber 100 to form a containing structure 180. A containing cavity 181 connected to the reaction chamber 100 is formed in the containing structure 180. The slide rail 230 is arranged on the bottom wall of the containing cavity 181.

[0063] In order to improve the sealing performance in the reaction chamber 100 , a skeleton oil seal 190 is provided between the pull rod 220 and the wall of the accommodating chamber 181 .

[0064] Optionally, in other embodiments of the present invention, the transmission structure 200 may also include meshing gears and racks. In this case, the driving module 300 is connected to the gear, and the rack is connected to the movable end of the hot wire 110. Driven by the driving module 300, the gear can rotate, thereby driving the rack to move horizontally, and then the rack can drive the movable end of the hot wire 110 to move horizontally.

[0065] refer to Figure 1 In some embodiments of the utility model, an air inlet 101 and an air exhaust port 102 are provided on the cavity wall of the reaction chamber 100; the air inlet 101 can be connected to a gas supply device, and the gas supply device can input reaction gas into the reaction chamber 100 through the air inlet 101; the air exhaust port 102 can be connected to a vacuum pumping device, and the vacuum pumping device can vacuum the reaction chamber 100 through the air exhaust port 102.

[0066] Although the embodiments of the present invention have been shown and described, those skilled in the art will appreciate that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the claims and their equivalents.

Claims

1. A vacuum coating device, characterized in that: include: A reaction chamber, wherein a hot wire is disposed in the reaction chamber, and the hot wire has a movable end; A transmission structure, the transmission structure is passed through the cavity wall of the reaction cavity and connected to the movable end of the hot wire; The driving module is arranged outside the reaction chamber and connected to the portion of the transmission structure extending to the outside of the reaction chamber. The driving module can drive the movable end to move through the transmission structure to straighten the hot wire.

2. A vacuum coating device according to claim 1, characterized in that: It also includes a first electrode arranged in the reaction chamber, the first electrode is connected to the transmission structure and can move with the transmission structure, and the movable end of the hot wire is connected to the first electrode.

3. A vacuum coating device according to claim 2, characterized in that: It also includes a first conductive structure, one end of which is electrically connected to the first electrode, and the other end of the first conductive structure extends to the outside and is used to be electrically connected to an external power supply, and the first conductive structure includes a flexible conductive segment made of a flexible conductive material, and the flexible conductive segment is at least partially arranged in the reaction chamber so that the first conductive structure can adapt to the movement of the first electrode.

4. A vacuum coating device according to claim 3, characterized in that: The first conductive structure also includes a fixed conductive segment, which is penetrated through the cavity wall of the reaction cavity and is used to be electrically connected to the external power supply. One end of the flexible conductive segment is connected to the fixed conductive segment, and the other end of the flexible conductive segment is connected to the first electrode.

5. The vacuum coating device according to claim 2, characterized in that: The first electrode is provided with a limiting groove, and the heating wire is inserted into the limiting groove.

6. A vacuum coating device according to claim 5, characterized in that: It also includes a first electrode strip, which is connected to the first electrode and is located at the notch of the limiting groove. The first electrode strip is used to cooperate with the groove wall of the limiting groove to clamp the hot wire.

7. The vacuum coating device according to claim 6, characterized in that: The first electrode comprises a conductive part and a fixed part, the limiting groove is arranged on the conductive part, and the movable end of the hot wire is fixedly connected to the fixed part.

8. The vacuum coating device according to claim 1, characterized in that: The transmission structure includes a slider, a pull rod and a slide rail. The slider is slidably disposed on the slide rail and is connected to the hot wire. The extension direction of the slide rail is parallel to the extension direction of the hot wire. The pull rod is penetrated on the cavity wall of the reaction chamber, and the opposite ends of the pull rod are respectively connected to the slider and the driving module.

9. The vacuum coating device according to claim 8, characterized in that: A cavity wall on one side of the reaction cavity is recessed toward the outside of the reaction cavity to form a containing structure, a containing cavity communicating with the reaction cavity is formed in the containing structure, and the transmission structure is arranged in the containing cavity.

10. The vacuum coating device according to claim 1, characterized in that: The drive module is an electric drive.

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