Thermal field device of vertical high-temperature furnace

Abstract

The utility model relates to a vertical high-temperature furnace thermal field device which sequentially comprises a heat insulation cage, a heat preservation layer and a heater arranged in the heat preservation layer from outside to inside, an upper heat preservation layer is arranged on the top of the heat insulation cage, a lower heat preservation layer is arranged at the bottom of the heat insulation cage, and graphite supporting plates are arranged on the upper surface and the lower surface of the upper heat preservation layer. The top of the heat insulation cage is provided with an electrode connecting seat connected with the heater, a net-shaped protective layer is arranged between the heat insulation cage and the heat preservation layer and used for fixing the heat preservation layer, the top of the heater is hung on the electrode connecting seat and fixed through a first carbon-carbon screw, and the bottoms of the adjacent heaters are connected through a clamping groove and fixed through a second carbon-carbon screw. A reflecting layer is arranged on the side, close to the heater, of the heat preservation layer. The bottoms of the adjacent heaters are connected through the clamping grooves and then fixed through the second carbon-carbon screws, therefore, the adjacent heaters make more sufficient contact, the probability of virtual connection ignition is reduced, the heater machining consistency is reduced, the heat preservation layer is made of the viscose-based graphite felt, compared with a traditional curing felt, the production cost is reduced, and meanwhile the heat preservation layer is made of the viscose-based graphite felt. The structure of the viscose-based graphite felt enables the thermal insulation performance of a thermal field to be better, reduces the thermal loss of the thermal field, and is lower in power consumption and more suitable for industrial use at the same heating temperature.

Description

Technical Field

[0001] The utility model belongs to the field of carbon material processing, in particular to a vertical high-temperature furnace thermal field device. Background Art

[0002] The thermal field structure of a high-temperature furnace is used in vertical high-temperature furnaces with temperatures exceeding 1200°C. Vertical high-temperature furnaces are widely used in industry, especially in the semiconductor industry, which has high requirements for the use of high-temperature furnace thermal fields. In the current existing thermal field design structure, the connection between heaters is prone to virtual connection, resulting in heater ignition; and the requirements for heater processing consistency are high, and the thermal insulation performance of the thermal field cannot be well guaranteed, which will cause a lot of energy waste. At the same time, the existing structure of curing felt thermal field materials has certain limitations in service life under high temperature conditions. Therefore, a thermal field device is needed that can make the contact between heaters more sufficient and reduce the consistency of heater processing. Utility Model Content

[0003] In view of various deficiencies in the prior art, a vertical high-temperature furnace thermal field device is proposed which can reduce the ignition phenomenon of the heater and increase the thermal insulation performance of the thermal field.

[0004] In order to achieve the above purpose, the utility model provides the following technical solutions:

[0005] A vertical high-temperature furnace thermal field device comprises, from outside to inside, a heat insulation cage, a heat insulation layer and a heater arranged in the heat insulation layer, an upper heat insulation layer is arranged on the top of the heat insulation cage, a lower heat insulation layer is arranged on the bottom thereof, graphite support plates are arranged on the upper and lower surfaces of the upper heat insulation layer, an electrode connection seat connected to the heater is arranged on the top of the heat insulation cage, a mesh-shaped protective layer is arranged between the heat insulation cage and the heat insulation layer for fixing the heat insulation layer, a plurality of carbon-carbon plates are arranged in the heat insulation layer in a direction perpendicular to the heat insulation layer, the plurality of carbon-carbon plates are fixed in the heat insulation layer at intervals, the top of the heater is hung on the electrode connection seat and fixed by a carbon-carbon screw 1, the bottoms of adjacent heaters are connected by a slot and fixed by a carbon-carbon screw 2, and a reflecting layer is arranged on the side of the heat insulation layer close to the heater.

[0006] Furthermore, the electrode connection seat includes a fixed seat and an adjustable seat, the fixed seat is fixedly connected to the adjustable seat, the adjustable seat is connected to the graphite support plate on the upper surface of the upper insulation layer by threads, and the position of the heater in the thermal field is adjusted by screwing in and out of the threads.

[0007] Furthermore, a card slot is provided on one side of the bottom of the heater, and a fitting portion matching the card slot is provided on the other side opposite to the card slot, and adjacent heaters are fixed by the card slot and the fitting portion.

[0008] Furthermore, the protective layer is made of stainless steel to better fix the thermal insulation layer.

[0009] Furthermore, the reflective layer is made of carbon cloth.

[0010] Furthermore, the thermal insulation layer is made of viscose-based graphite felt.

[0011] The beneficial effects of the utility model are:

[0012] 1. The bottoms of adjacent heaters are connected through slots and then fixed with carbon-carbon screws. Therefore, the contact between adjacent heaters is more complete, which reduces the probability of false connection and sparking, and reduces the consistency of heater processing.

[0013] 2. Compared with the existing technology, the use of viscose-based graphite felt as the insulation layer reduces the production cost compared to traditional cured felt. At the same time, the structure of the viscose-based graphite felt makes the thermal insulation performance of the thermal field better, reduces the heat loss of the thermal field, and consumes less power at the same heating temperature, making it more suitable for industrial use.

[0014] 3. A mesh-shaped protective layer is arranged between the heat insulation cage and the thermal insulation layer to ensure that the thermal insulation layer is smooth after installation, which is conducive to thermal insulation.

[0015] 4. A reflective layer is provided on the side of the insulation layer close to the heater. The reflective layer is made of carbon cloth to increase the diffuse reflection of heat in the thermal field. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0017] Figure 2 It is a structural diagram of the heater.

[0018] In the attached drawings: 1-insulation cage, 2-insulation layer, 3-heater, 4-upper insulation layer, 5-lower insulation layer, 6-graphite support plate, 7-electrode connecting seat, 71-fixed seat, 72-adjustable seat, 8-protective layer, 9-carbon-carbon plate, 10-reflection layer. DETAILED DESCRIPTION

[0019] In order to enable those skilled in the art to better understand the technical solution of the present invention, the technical solution of the present invention is clearly and completely described below in conjunction with the drawings of the present invention. Based on the embodiments in this application, other similar embodiments obtained by ordinary technicians in this field without making creative work should all fall within the scope of protection of this application. In addition, the directional words mentioned in the following embodiments, such as "up", "down", "left", "right", etc., are only referenced to the directions of the drawings. Therefore, the directional words used are used to illustrate rather than limit the invention.

[0020] The utility model is further described below in conjunction with the accompanying drawings and preferred embodiments.

[0021] like Figure 1-2 As shown, a vertical high-temperature furnace thermal field device includes, from outside to inside, a heat insulation cage 1, a heat insulation layer 2 and a heater 3, wherein the heater 3 is arranged inside the heat insulation layer 2. In this embodiment, the cross section of the heat insulation cage 1 is arranged in a circular shape, and the heat insulation layer 2 and the heater 3 are arranged along the circumference of the heat insulation cage 1. An upper heat insulation layer 4 is arranged on the top of the heat insulation cage 1, and a lower heat insulation layer 5 is arranged on the bottom thereof. Graphite support plates 6 are arranged on the upper and lower sides of the upper heat insulation layer 4, and the graphite support plates 6 are fixed to the upper heat insulation layer 4. An electrode connection seat 7 is arranged on the top of the heat insulation cage 1. Specifically, the electrode connection seat 7 is fixed to the graphite support plate 6 on the upper side of the upper heat insulation layer 4. The electrode connection seat 7 is arranged in the vertical direction, and includes a fixed seat 71 and an adjustable seat 72. The lower part of the fixed seat 71 is fixedly connected to the upper part of the adjustable seat 72, and the lower part of the adjustable seat 72 is threadedly connected to the graphite support plate 6 on the upper insulation layer 4. The top of the heater 3 is hung on the bottom of the adjustable seat 72 and is further fixed by a carbon-carbon screw. The position of the heater 3 in the thermal field is adjusted by screwing in and out of the thread at the lower part of the adjustable seat 72, so that the heaters 3 of different heights can be adjusted to the same height, which can reduce the requirements for the processing consistency of the heater 3. In addition, the bottoms of adjacent heaters 3 are connected through a slot and then fixed with a carbon-carbon screw. Specifically, a slot is provided on one side of the bottom of the heater 3, and a fitting portion matching the slot is provided on the other side opposite to the slot. Adjacent heaters 3 are fixed by the cooperation between the slot and the fitting portion. The fitting portion and the slot are fixed by cooperation and then further fixed by a carbon-carbon screw. In this embodiment, the slot and the fitting portion are both arranged in a rectangular shape, the fitting portion protrudes from the plane of the heater 3, and the slot is in a groove shape and lower than the plane of the heater 3. The cooperation between the slot and the protruding portion can more firmly fix the adjacent heaters.

[0022] A mesh-shaped protective layer 8 is provided between the heat insulation cage 1 and the insulation layer 2, which is used to fix the insulation layer 2 and ensure that the insulation layer 2 is smooth after installation. In this embodiment, the heat insulation cage 1 and the protective layer 8 are both made of stainless steel, and the protective layer 8 is welded and fixed to the heat insulation cage 1. The heat insulation layer 2 uses multiple layers of viscose-based graphite felt, and the multiple layers of viscose-based graphite felt are overlapped. A plurality of carbon-carbon plates 9 are arranged at intervals between the multiple layers of viscose-based graphite felt, and the carbon-carbon plates 9 and carbon-carbon bolts are passed through the viscose-based graphite felt and fixed to the heat insulation cage 1. The carbon-carbon plates 9 are arranged in a direction perpendicular to the insulation layer 2, which can effectively increase the heat insulation performance and service life of the thermal field. At the same time, a reflective layer 10 is provided on the inner side of the insulation layer 2, that is, the side of the insulation layer 2 close to the heater 3, and a carbon rope is used to fix the reflective layer 10 between the reflective layer 10 and the heat insulation cage 1 to ensure that the reflective layer 10 is flat and smooth. In this embodiment, the reflective layer 10 uses carbon cloth, which can effectively increase the diffuse reflection of heat in the heat field.

[0023] The present invention has been described in detail above. The above description is only a preferred embodiment of the present invention and should not limit the scope of implementation of the present invention. That is, all equivalent changes and modifications made within the scope of this application should still fall within the scope of the present invention.

Claims

1. A vertical high-temperature furnace thermal field device, which includes, from outside to inside, a heat insulation cage, a heat insulation layer, and a heater arranged in the heat insulation layer. The top of the heat insulation cage is provided with an upper heat insulation layer, and the bottom thereof is provided with a lower heat insulation layer. The upper and lower surfaces of the upper heat insulation layer are provided with graphite support plates. The top of the heat insulation cage is provided with an electrode connection seat connected to the heater, characterized in that: A mesh-shaped protective layer is provided between the heat-insulating cage and the thermal insulation layer for fixing the thermal insulation layer, a plurality of carbon-carbon plates are provided in the thermal insulation layer along a direction perpendicular to the thermal insulation layer, and the plurality of carbon-carbon plates are fixed in the thermal insulation layer at intervals, the top of the heater is hung on the electrode connecting seat and fixed by a carbon-carbon screw 1, the bottoms of adjacent heaters are connected by a slot and fixed by a carbon-carbon screw 2, and a reflective layer is provided on the side of the thermal insulation layer close to the heater.

2. A vertical high temperature furnace thermal field device according to claim 1, characterized in that: The electrode connection seat includes a fixed seat and an adjustable seat, the fixed seat is fixedly connected to the adjustable seat, the adjustable seat is connected to the graphite support plate on the upper surface of the upper insulation layer through threads, and the position of the heater in the thermal field is adjusted by screwing in and out of the threads.

3. A vertical high temperature furnace thermal field device according to claim 2, characterized in that: A card slot is arranged on one side of the bottom of the heater, and a fitting part matching the card slot is arranged on the other side opposite to the card slot. Adjacent heaters are fixed by matching the card slot and the fitting part.

4. A vertical high temperature furnace thermal field device according to claim 3, characterized in that: The protective layer is made of stainless steel and is used to better fix the thermal insulation layer.

5. A vertical high temperature furnace thermal field device according to claim 4, characterized in that: The reflective layer is made of carbon cloth.

6. A vertical high temperature furnace thermal field device according to any one of claims 1 to 5, characterized in that: The thermal insulation layer is made of viscose-based graphite felt.

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