Adsorption table and laser lift-off equipment

Abstract

The utility model discloses an adsorption table and a laser lift-off device, and relates to the technical field of display devices, the adsorption table comprises an adsorption surface and a plurality of adsorption areas; the multiple adsorption areas are distributed from the center to the edge of the adsorption table, an independent adsorption air channel is arranged in any adsorption area, and the adsorption air channels are evenly arranged in the corresponding adsorption areas in a winding mode and extend in the direction away from the center of the adsorption table; the adsorption surface is provided with a plurality of adsorption holes communicated with the adsorption air channels, the adsorption holes are distributed in the extending direction of the corresponding adsorption air channels, and the adsorption surface is used for adsorbing a workpiece to be stripped. According to the technical scheme, the gas between the adsorption table and the to-be-stripped workpiece is exhausted, the flatness of the to-be-stripped workpiece is guaranteed, and the to-be-stripped workpiece is prevented from being damaged due to wrinkles in the stripping process.

Description

Technical Field

[0001] The utility model relates to the technical field of display devices, in particular to an adsorption platform and laser stripping equipment. Background Art

[0002] At present, the manufacturing process of flexible displays is mostly to form flexible displays on a carrier board, and in the manufacturing process of flexible display devices, a laser peeling process is required to separate the flexible display device from the carrier board. In the related technology, the flexible display device and the carrier board are usually fixed on an adsorption table by vacuum adsorption, and then the flexible display device is peeled off by a laser emitting device. However, it is difficult for the existing adsorption table to exhaust the air between the flexible display device and the adsorption table, resulting in insufficient flatness of the flexible display device, which leads to damage of the flexible display device due to wrinkles during the process of peeling the carrier board and the flexible display device. Utility Model Content

[0003] The main purpose of the utility model is to provide an adsorption table and a laser peeling device, which are intended to exhaust the gas between the adsorption table and the workpiece to be peeled, ensure the flatness of the workpiece to be peeled, and avoid damage to the workpiece to be peeled due to wrinkles during the peeling process.

[0004] To achieve the above purpose, the adsorption platform proposed by the utility model includes:

[0005] A plurality of adsorption areas, wherein the plurality of adsorption areas are distributed from the center to the edge of the adsorption platform, and an independent adsorption air channel is provided in any of the adsorption areas, and the adsorption air channel is evenly arranged in the corresponding adsorption area and extends in a direction away from the center of the adsorption platform; and

[0006] The adsorption surface is provided with a plurality of adsorption holes connected to the adsorption air channel, the plurality of adsorption holes are distributed along the extension direction of the corresponding adsorption air channel, and the adsorption surface is used for adsorbing the workpiece to be peeled.

[0007] In one embodiment, the plurality of adsorption zones include an inner adsorption zone and an outer adsorption zone, the inner adsorption zone is located at the center of the adsorption platform, and the outer adsorption zone is disposed around the outer periphery of the inner adsorption zone.

[0008] In one embodiment, the adsorption air channel of the inner adsorption zone is spirally arranged from the center to the edge of the inner adsorption zone.

[0009] In one embodiment, the adsorption air channel of the outer adsorption zone is spirally arranged from the inner periphery to the outer periphery of the outer adsorption zone.

[0010] In one embodiment, the adsorption platform is configured in a long strip shape, and the plurality of adsorption areas are distributed in the length direction of the adsorption platform.

[0011] In one embodiment, the plurality of adsorption zones include side adsorption zones disposed at both ends of the adsorption platform, and the adsorption air channels of the side adsorption zones extend in a serpentine shape in the length direction of the adsorption platform.

[0012] In one embodiment, the adsorption platform is provided with a plurality of air suction ports, the plurality of air suction ports are connected to the plurality of adsorption air channels in a one-to-one correspondence, and the air suction ports are located at one end of the corresponding adsorption air channel away from the center of the adsorption platform.

[0013] In one embodiment, the plurality of adsorption holes are evenly spaced or gradually distributed in the extension direction of the corresponding adsorption air channel.

[0014] In one embodiment, the adsorption platform includes an adsorption lower plate and an adsorption upper plate stacked on each other, opposite sides of the adsorption upper plate and the adsorption lower plate are respectively recessed to form the adsorption air channel, and the adsorption surface is located on the adsorption upper plate.

[0015] In one embodiment, the adsorption upper plate and the adsorption lower plate are stacked and sealed by adhesive, and the adsorption upper plate and the adsorption lower plate are tightly bonded to the side wall of the adsorption airway.

[0016] In one embodiment, the adsorption platform further includes a plurality of air extraction connectors, which are disposed on the adsorption lower plate and are connected to the plurality of adsorption air channels one by one through air extraction ports, and the air extraction connectors are used to connect to an external pump body.

[0017] The utility model also provides a laser stripping device, which includes a laser emitting device and an adsorption platform as described above, wherein the adsorption platform is used to carry the workpiece to be stripped, and the laser emitting device is used to scan the workpiece to be stripped.

[0018] The technical solution of the utility model is to distribute the adsorption areas from the center to the edge of the adsorption platform, and the adsorption air channel of each adsorption area is evenly distributed over the corresponding adsorption area, and each adsorption area is only provided with an independent adsorption air channel, and a plurality of adsorption holes connected to the adsorption surface are distributed in the extension direction of the adsorption air channel. In this way, in the process of peeling the workpiece to be peeled, the adsorption area at the center of the adsorption surface works first to form a negative pressure, so that the corresponding adsorption hole adsorbs the workpiece to be peeled. At this time, the center of the workpiece to be peeled is adsorbed to the center of the adsorption surface, and then, toward the edge of the adsorption platform, a plurality of adsorption areas work in sequence to form a negative pressure, so that the corresponding adsorption holes adsorb the workpiece to be peeled, and then the workpiece to be peeled is adsorbed as a whole to the adsorption surface. It can be understood that in the entire adsorption process, the workpiece to be peeled is gradually adsorbed in the direction from the center to the edge of the adsorption surface, so that the gas between the adsorption surface and the workpiece to be peeled is discharged from the center to the edge of the adsorption platform, thereby effectively emptying the air between the adsorption surface and the workpiece to be peeled, ensuring the flatness of the workpiece to be peeled, reducing the possibility of bubbles forming between the workpiece to be peeled and the adsorption platform during the peeling process, and avoiding the workpiece to be peeled from wrinkling to be damaged. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on the structures shown in these drawings without paying creative work.

[0020] Figure 1 A schematic structural diagram of an embodiment of an adsorption platform provided by the utility model;

[0021] Figure 2 for Figure 1 A partial enlarged view of the middle A;

[0022] Figure 3 for Figure 1 Front view of the middle adsorption platform;

[0023] Figure 4 for Figure 1 A schematic diagram of the side structure of the middle adsorption platform;

[0024] Figure 5 for Figure 4 Schematic diagram of the structure of the upper adsorption plate;

[0025] Figure 6 for Figure 4 Schematic diagram of the structure of the lower adsorption plate.

[0026] Description of Figure Numbers:

[0027] 110, inner adsorption zone; 120, outer adsorption zone; 130, side adsorption zone;

[0028] 200, adsorption airway; 210, adsorption hole; 220, air extraction port;

[0029] 310, adsorption upper plate; 311, airway upper groove; 312, adsorption surface; 320, adsorption lower plate; 321, airway lower groove;

[0030] 400. Vacuum connector.

[0031] The realization of the purpose, functional features and advantages of the utility model will be further explained in conjunction with embodiments and with reference to the accompanying drawings. DETAILED DESCRIPTION

[0032] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0033] It should be noted that if the embodiments of the present invention involve directional indications (such as up, down, left, right, front, back...), the directional indications are only used to explain the relative position relationship, movement status, etc. between the components in a certain specific posture. If the specific posture changes, the directional indications will also change accordingly.

[0034] In addition, if there are descriptions involving "first", "second", etc. in the embodiments of the utility model, the descriptions of "first", "second", etc. are only used for descriptive purposes and cannot be understood as indicating or implying their relative importance or implicitly indicating the number of technical features indicated. Therefore, the features limited to "first" and "second" may explicitly or implicitly include at least one of the features. In addition, if "and / or" or "and / or" appears in the full text, its meaning includes three parallel solutions. Taking "A and / or B" as an example, it includes solution A, solution B, or solutions that satisfy both A and B. In addition, the technical solutions between the various embodiments can be combined with each other, but it must be based on the ability of ordinary technicians in this field to implement. When the combination of technical solutions is contradictory or cannot be implemented, it should be deemed that such combination of technical solutions does not exist and is not within the scope of protection required by the utility model.

[0035] In the prior art, flexible display devices are usually formed by processing on a carrier. After the carrier is irradiated with a laser of a specific wavelength, the viscosity of the carrier will change significantly. The flexible display device can be separated from the carrier by a laser stripping process to obtain a flexible display device. However, during the laser stripping process, the carrier will react when irradiated with a laser of a specific wavelength. This reaction will release the stress of the carrier. The flexible display device is easily affected by these stresses and shrinks, which in turn produces wrinkles. The wrinkles will be ablated due to laser scanning, which will eventually damage the flexible display device. In order to improve the wrinkling problem of the flexible display device during the peeling process, the flexible display device and the carrier are usually adsorbed on the adsorption table by vacuum adsorption, and the flexible display device is flatly adsorbed on the adsorption table by vacuum pressure, and the flexible display device is prevented from having space for shrinkage and wrinkling during the peeling process. However, since the flexible display device is in a sheet shape, bubbles are likely to appear between the flexible display device and the adsorption table during the process of adsorbing the flexible display device on the adsorption table. These bubbles affect the flatness of the flexible display device on the adsorption table, resulting in space for shrinkage and wrinkling of the flexible display device during the peeling process, which in turn makes the flexible display device wrinkled and uneven, causing the flexible display device to be ablated and damaged during laser scanning, seriously affecting the product yield.

[0036] The utility model provides an adsorption platform.

[0037] Please refer to Figures 1 to 4 In one embodiment of the present invention, the adsorption platform comprises:

[0038] A plurality of adsorption zones, the plurality of adsorption zones are distributed from the center to the edge of the adsorption platform, and an independent adsorption air channel 200 is provided in any adsorption zone, and the adsorption air channel 200 is evenly arranged in the corresponding adsorption zone and extends in a direction away from the center of the adsorption platform; and

[0039] The adsorption surface 312 is provided with a plurality of adsorption holes 210 connected to the adsorption air channel 200 . The plurality of adsorption holes 210 are distributed along the extension direction of the corresponding adsorption air channel 200 . The adsorption surface 312 is used for adsorbing the workpiece to be peeled.

[0040] The technical solution of the present invention is to distribute the adsorption area from the center to the edge of the adsorption platform, and the adsorption air channel 200 of each adsorption area is evenly distributed in the corresponding adsorption area, and each adsorption area is only provided with an independent adsorption air channel 200, and a plurality of adsorption holes 210 connected to the adsorption surface 312 are distributed in the extension direction of the adsorption air channel 200. In this way, in the process of peeling the workpiece to be peeled, the adsorption area at the center of the adsorption surface 312 works first to form a negative pressure, so that the corresponding adsorption hole 210 adsorbs the workpiece to be peeled. At this time, the center of the workpiece to be peeled is adsorbed on the center of the adsorption surface 312, and then, the adsorption hole 210 toward the edge of the adsorption platform is moved to the center of the adsorption surface 312. In the direction, multiple adsorption areas work in sequence to form a negative pressure, so that the corresponding adsorption holes 210 adsorb the workpiece to be peeled, and then adsorb the workpiece to be peeled as a whole to the adsorption surface 312. It can be understood that during the entire adsorption process, the workpiece to be peeled is gradually adsorbed in the direction from the center to the edge of the adsorption surface 312, so that the gas between the adsorption surface 312 and the workpiece to be peeled is discharged from the center to the edge of the adsorption table, thereby effectively emptying the air between the adsorption surface 312 and the workpiece to be peeled, ensuring the flatness of the workpiece to be peeled, reducing the possibility of bubbles forming between the workpiece to be peeled and the adsorption table during the peeling process, and avoiding the workpiece to be peeled from wrinkles and eventually damaged.

[0041] It should be noted that the workpiece to be peeled refers to a flexible display device, and may also be other workpieces that need to be peeled by a peeling process, such as an FPC board, a flexible screen, etc. Multiple adsorption areas can be arranged in sequence from the center to the edge of the adsorption platform, or can be distributed in sequence in a surrounding and surrounded manner. For any adsorption area, the adsorption air channel 200 is evenly distributed in the corresponding adsorption area, so that the suction force on the workpiece to be peeled at various locations on the adsorption surface 312 corresponding to the adsorption area tends to be consistent, and the adsorption air channel 200 extends from the center to the edge of the adsorption platform, which is manifested as: in any adsorption area, the adsorption hole 210 close to the center of the adsorption surface 312 first absorbs the workpiece to be peeled, and then the adsorption hole 210 away from the center of the adsorption surface 312 absorbs the workpiece to be peeled, thereby ensuring that the workpiece to be peeled is gradually flatly attached to the adsorption surface 312 in the direction from the center to the edge of the adsorption surface 312, which is conducive to emptying the air between the workpiece to be peeled and the adsorption surface 312. In addition, the center and edge of the adsorption platform referred to in this solution are both referenced to the adsorption surface 312 , that is, the direction from the center to the edge of the adsorption platform is equal to the direction from the center to the edge of the adsorption surface 312 .

[0042] In one embodiment, please refer to Figure 1 , Figure 5 and Figure 6, the multiple adsorption areas include an inner adsorption area 110 and an outer adsorption area 120, the inner adsorption area 110 is located at the center of the adsorption platform, and the outer adsorption area 120 is arranged around the outer periphery of the inner adsorption area 110. It can be understood that the inner adsorption area 110 is located in the middle of the adsorption surface 312, and the outer adsorption area 120 is arranged around the outer periphery of the inner adsorption area 110 and extends toward the edge of the adsorption surface 312, that is, the outer adsorption area 120 is continuous on the outer periphery of the inner adsorption area 110. In this way, in the process of adsorbing the workpiece to be peeled, the inner adsorption area 110 first adsorbs the workpiece to be peeled, and then the outer adsorption area 120 adsorbs the workpiece to be peeled, showing a trend of gradually adsorbing the workpiece to be peeled from the center of the adsorption surface 312 to the edge, which is conducive to exhausting the air between the adsorption surface 312 and the workpiece to be peeled. It should be noted that there can be multiple outer adsorption areas 120, and they are arranged around the outer periphery of the inner adsorption area 110 in sequence in the direction close to the edge of the adsorption surface 312. Of course, in other embodiments, multiple adsorption zones may be independently configured in the circumferential direction from the periphery of the inner adsorption zone 110 to the edge of the adsorption surface 312 to flexibly control the adsorption effect on the workpiece to be peeled off in various directions of the edge of the adsorption surface 312 on the periphery of the inner adsorption zone 110.

[0043] Further, in this embodiment, please continue to refer to Figure 1 , Figure 5 and Figure 6 , the adsorption air channel 200 of the inner adsorption zone 110 is spirally wound from the center to the edge of the inner adsorption zone 110. It can be understood that the adsorption air channel 200 in the inner adsorption zone 110 is circumferentially wound from the center of the adsorption surface 312 and wound to the edge of the inner adsorption zone 110. At this time, the adsorption holes 210 on the adsorption air channel 200 are distributed in a single row parallel to the extension direction of the adsorption air channel 200. While ensuring that the adsorption force on the workpiece to be peeled off is uniform at various locations in the inner adsorption zone 110, the workpiece to be peeled off is gradually sucked from the inside to the outside in the inner adsorption zone 110, thereby improving the effect of exhausting the air between the workpiece to be peeled off and the inner adsorption zone 110. It should be noted that the adsorption air channel 200 can be spirally wound in a quasi-circular shape or in a polygonal shape.

[0044] Similarly, in this embodiment, please continue to refer to Figure 1 , Figure 5 and Figure 6, the adsorption air channel 200 of the outer adsorption zone 120 is spirally arranged from the inner periphery to the outer periphery of the outer adsorption zone 120. Referring to the arrangement of the adsorption air channel 200 of the inner adsorption zone 110, the adsorption air channel 200 of the outer adsorption zone 120 is inherited from the adsorption air channel 200 of the inner adsorption zone 110, and is spirally arranged around the outer periphery of the inner adsorption zone 110, and extends toward the edge of the adsorption surface 312, which is manifested as: the adsorption air channel 200 extends spirally from the inner periphery of the outer adsorption zone 120 to the outer periphery of the outer adsorption zone 120; after the inner adsorption zone 110 adsorbs the corresponding part of the workpiece to be peeled off, the outer adsorption zone 120 can immediately adsorb the corresponding part of the workpiece to be peeled off by the inner adsorption zone 110, thereby ensuring the flatness of the workpiece to be peeled off on the adsorption surface 312. Of course, in other embodiments, the adsorption air ducts 200 within the inner adsorption zone 110 and the outer adsorption zone 120 may also extend alternately from the center to the edge of the adsorption surface 312, or the inner adsorption zone 110 may be configured with multiple adsorption air ducts 200, which are distributed circumferentially at the center of the adsorption surface 312, and the outer adsorption surface 312 is adjacent to the outer periphery of the corresponding inner adsorption zone 110 and distributed toward the edge of the adsorption surface 312.

[0045] In one embodiment, please refer to Figure 1 , Figure 5 and Figure 6 , the adsorption table is configured as a long strip, and multiple adsorption areas are distributed in the length direction of the adsorption table. It can be understood that the adsorption table is configured as a long table, and the multiple sections of the adsorption table in the length direction are configured as multiple adsorption areas. In this way, the air path formed by the adsorption airway 200 can be avoided to be too long, and the flatness of the workpiece to be peeled off on the adsorption surface 312 can be guaranteed. Specifically, during the adsorption process, the adsorption area located in the middle of the long side of the adsorption table first adsorbs the workpiece to be peeled off, and then the adsorption area located at the end of the long side of the adsorption table adsorbs the workpiece to be peeled off, showing a trend of adsorption from the middle of the adsorption surface 312 to the edge, so as to evacuate the air between the adsorption surface 312 and the workpiece to be peeled off, and avoid the workpiece to be peeled off from being damaged due to wrinkles. Of course, in other embodiments, when the adsorption table is rectangular or circular, multiple adsorption areas are distributed in sequence from the center to the edge of the adsorption surface 312.

[0046] Further, in this embodiment, please refer to Figure 1 , Figure 5 and Figure 6, multiple adsorption areas include side adsorption areas 130 respectively arranged at both ends of the adsorption platform, and the adsorption air channel 200 of the side adsorption area 130 extends in a serpentine shape in the length direction of the adsorption platform. It can be understood that in the process of adsorbing the workpiece to be peeled off, the side adsorption area 130 forms the negative pressure last, and the adsorption air channel 200 of the side adsorption area 130 alternately turns back in the width direction of the adsorption platform, and extends in the direction away from the middle of the long side of the adsorption surface 312, forming a shape that extends in a serpentine shape in the direction away from the middle of the adsorption platform. In this way, in the process of the side adsorption area 130 adsorbing the workpiece to be peeled off, the adsorption hole 210 of the adsorption air channel 200 near the middle of the adsorption platform first absorbs the workpiece to be peeled off, and then gradually absorbs the workpiece to be peeled off in the direction away from the middle of the adsorption platform along the length direction of the adsorption platform, thereby improving the effect of emptying the air between the adsorption surface 312 and the workpiece to be peeled off.

[0047] Specifically, in this embodiment, please continue to refer to Figure 1 The adsorption platform is in the shape of a long platform, and the adsorption area in the middle of the long side of the adsorption surface 312 is configured as an inner adsorption area 110 and an outer adsorption area 120 arranged outside the inner adsorption area 110, and a side adsorption area 130 is arranged on both sides of the outer adsorption area 120 along the long side of the adsorption platform, wherein the adsorption air channels 200 in the inner adsorption area 110 and the outer adsorption area 120 are distributed in a spiral shape, and the outer port of the adsorption air channel 200 of the inner adsorption area 110 is adjacent to the inner port of the adsorption air channel 200 of the outer adsorption area 120; the adsorption air channel 200 of the side adsorption area 130 generally extends in a serpentine shape as described above, and the inner port of the adsorption air channel 200 of one of the side adsorption areas 130 is adjacent to the outer port of the adsorption air channel 200 of the outer adsorption area 120, and the outer port of the adsorption air channel 200 of the side adsorption area 130 is arranged close to the two ends of the adsorption platform in the length direction. In this way, not only can each adsorption area form a continuous adsorption effect on the workpiece to be peeled, but also gradually adsorb the workpiece to be peeled in the direction from the center to the edge of the adsorption surface 312, thereby effectively exhausting the air between the workpiece to be peeled and the adsorption surface 312. It should be noted that the inner port and the outer port of the adsorption air channel 200 refer to the center and the edge of the adsorption surface 312, the port close to the center of the adsorption surface 312 is the inner port, and the port close to the edge of the adsorption surface 312 is the outer port.

[0048] In one embodiment, please refer to Figure 1 and Figure 6The adsorption platform is provided with a plurality of air suction ports 220, and the plurality of air suction ports 220 are connected to the plurality of adsorption air channels 200 in a one-to-one correspondence, and the air suction ports 220 are located at one end of the corresponding adsorption air channel 200 away from the center of the adsorption platform. It can be understood that, referring to the above definition, the air suction ports 220 of any adsorption zone are located at the outer end of the corresponding adsorption air channel 200, so that in the process of forming negative pressure in any adsorption zone, the adsorption holes 210 in the adsorption air channel 200 away from the air suction ports 220 first form a larger negative pressure to absorb the workpiece to be peeled off, and then gradually absorb the workpiece to be peeled off along the extension direction of the adsorption air channel 200 toward the direction close to the corresponding air suction ports 220, so as to form the effect of gradually adsorbing the workpiece to be peeled off from the center to the edge of the adsorption surface 312, which is conducive to exhausting the air between the workpiece to be peeled off and the adsorption surface 312, and ensuring the flatness of the workpiece to be peeled off on the adsorption surface 312. In addition, in the direction from the inner port to the outer port of the adsorption air duct 200, the suction force of each adsorption hole 210 gradually weakens, so that each adsorption area presents a larger negative pressure in the adsorption hole 210 near the middle of the adsorption surface 312, thereby ensuring the effect of exhausting the air from the workpiece to be peeled and the adsorption surface 312.

[0049] Without loss of generality, in this embodiment, please refer to Figure 1 , multiple adsorption holes 210 are evenly spaced or gradually distributed in the extension direction of the corresponding adsorption air channel 200. For an adsorption air channel 200, when multiple adsorption holes 210 are evenly distributed in its extension direction, the negative pressure effect of each adsorption hole 210 on the adsorption air channel 200 on the workpiece to be peeled tends to be uniform, ensuring the flatness of the workpiece to be peeled on the adsorption surface 312; when the arrangement density of multiple adsorption holes 210 in its extension direction is gradually distributed, for example, in the direction away from the center of the adsorption surface 312, the arrangement density of multiple adsorption holes 210 gradually decreases, so that each adsorption area presents a larger negative pressure of the adsorption holes 210 close to the middle of the adsorption surface 312, ensuring the effect of exhausting the air from the workpiece to be peeled and the adsorption surface 312, or, in the direction away from the center of the adsorption surface 312, the arrangement density of multiple adsorption holes 210 gradually increases, so that each adsorption area presents a larger negative pressure of the adsorption holes 210 close to the edge of the adsorption surface 312, ensuring the stability of the workpiece to be peeled on the adsorption surface 312.

[0050] In one embodiment, please refer to Figures 4 to 6, the adsorption platform includes an adsorption lower plate 320 and an adsorption upper plate 310 which are stacked with each other, and the opposite sides of the adsorption upper plate 310 and the adsorption lower plate 320 are respectively recessed to form an adsorption airway 200, and the adsorption surface 312 is located on the adsorption upper plate 310. It can be understood that in the process of manufacturing the adsorption platform, the adsorption upper plate 310 and the adsorption lower plate 320 are first produced, and then the upper groove 311 of the airway is recessed on the adsorption upper plate 310, and the lower groove 321 of the airway is recessed on the adsorption lower plate 320. The adsorption lower plate 320 and the adsorption upper plate 310 are stacked so that the upper groove 311 of the airway and the lower groove 321 of the airway are relatively overlapped to form the adsorption airway 200. In this way, the adsorption platform is easily formed, and the yield and production efficiency of the adsorption platform are improved. Of course, in other embodiments, the adsorption platform is integrally formed, and each adsorption airway 200 is formed in the adsorption platform through the adsorption holes 210.

[0051] Further, in this embodiment, please refer to Figure 1 and Figure 4 , the adsorption upper plate 310 and the adsorption lower plate 320 are stacked and sealed by adhesive, and the adsorption upper plate 310 and the adsorption lower plate 320 are tightly bonded to the side wall of the adsorption airway 200. Without loss of generality, the peripheries of the adsorption upper plate 310 and the adsorption lower plate 320 are relatively abutted, which can ensure that after the adsorption upper plate 310 and the adsorption upper plate 310 are stacked, the interior of the adsorption platform has good sealing on its side periphery, and the adsorption upper plate 310 and the adsorption lower plate 320 are sealed and abutted on the side wall of any adsorption airway 200, so that the negative pressure formed by the adsorption airway 200 can absorb the workpiece to be peeled off through the adsorption hole 210, thereby ensuring the stability of the workpiece to be peeled off on the adsorption surface 312. In addition, the adsorption upper plate 310 and the adsorption lower plate 320 are connected by gluing, which improves the assembly convenience and efficiency of the adsorption platform. Of course, in other embodiments, sealing rings can also be provided on the periphery of the adsorption lower plate 320 and the adsorption upper plate 310. Similarly, sealing rings are also provided on the side walls of the adsorption air duct 200. The two are connected by screwing, so that the adsorption air duct 200 can only be connected to the outside world through the adsorption hole 210 and the air exhaust port 220, thereby ensuring the adsorption effect of the adsorption hole 210 on the workpiece to be peeled off.

[0052] In one embodiment, please refer to Figure 1 and Figure 6The adsorption platform also includes a plurality of air extraction connectors 400, which are arranged on the adsorption lower plate 320 and are connected to the plurality of adsorption air channels 200 one by one through the air extraction port 220. The air extraction connectors 400 are used to connect to an external pump body. In this way, when the adsorption platform is used, the air extraction connector 400 is connected to an external pipeline, and the pump body on the external pipeline is started, so that a negative pressure can be formed on each adsorption air channel 200 to improve the convenience of use of the adsorption platform. Specifically, each air extraction connector 400 is independently connected to a pump body. First, the pump body connected to the inner adsorption area 110 works so that the inner adsorption area 110 absorbs the workpiece to be peeled off, and then the pump body connected to the outer adsorption area 120 works so that the outer adsorption area 120 absorbs the workpiece to be peeled off, and then the pump body connected to the side adsorption area 130 works so that the side adsorption area 130 absorbs the workpiece to be peeled off. In addition, the suction port 220 and the suction connector 400 are disposed on the adsorption lower plate 320 , the adsorption hole 210 and the adsorption surface 312 are disposed on the adsorption upper plate 310 , and the adsorption hole 210 is used to connect the airway upper groove 311 and the adsorption surface 312 .

[0053] The utility model also proposes a laser peeling device, which includes an adsorption table. The specific structure of the adsorption table refers to the above embodiment. Since the laser peeling device adopts all the technical solutions of all the above embodiments, it has at least all the beneficial effects brought by the technical solutions of the above embodiments, which will not be described one by one here.

[0054] Among them, the laser peeling equipment also includes a laser emitting device. The adsorption table is used to carry the workpiece to be peeled, and when the adsorption table absorbs the workpiece to be peeled so that the workpiece to be peeled is flatly attached to the adsorption surface, the laser emitting device scans the workpiece to be peeled to peel the workpiece to be peeled.

[0055] The above description is only an exemplary embodiment of the present invention, and does not limit the patent scope of the present invention. All equivalent structural changes made by using the contents of the present invention specification and drawings under the technical concept of the present invention, or directly / indirectly applied in other related technical fields are included in the patent protection scope of the present invention.

Claims

1. An adsorption platform, characterized in that: The adsorption platform comprises: A plurality of adsorption areas, wherein the plurality of adsorption areas are distributed from the center to the edge of the adsorption platform, and an independent adsorption air channel is provided in any of the adsorption areas, and the adsorption air channel is evenly arranged in the corresponding adsorption area and extends in a direction away from the center of the adsorption platform; and The adsorption surface is provided with a plurality of adsorption holes connected to the adsorption air channel, the plurality of adsorption holes are distributed along the extension direction of the corresponding adsorption air channel, and the adsorption surface is used for adsorbing the workpiece to be peeled.

2. The adsorption platform according to claim 1, characterized in that: The plurality of adsorption areas include an inner adsorption area and an outer adsorption area. The inner adsorption area is located at the center of the adsorption platform, and the outer adsorption area is arranged around the outer periphery of the inner adsorption area.

3. The adsorption platform according to claim 2, characterized in that: The adsorption air channel of the inner adsorption zone is spirally arranged from the center to the edge of the inner adsorption zone; And / or, the adsorption air channel of the outer adsorption zone is spirally arranged from the inner periphery to the outer periphery of the outer adsorption zone.

4. The adsorption platform according to claim 1, characterized in that: The adsorption platform is configured in a long strip shape, and the plurality of adsorption areas are distributed in the length direction of the adsorption platform.

5. The adsorption platform according to claim 4, characterized in that: The plurality of adsorption zones include side adsorption zones disposed at two ends of the adsorption platform, and the adsorption air passages of the side adsorption zones extend in a serpentine shape in the length direction of the adsorption platform.

6. The adsorption platform according to claim 1, characterized in that: The adsorption platform is provided with a plurality of air suction ports, the plurality of air suction ports are connected to the plurality of adsorption air channels in a one-to-one correspondence, and the air suction ports are located at one end of the corresponding adsorption air channel away from the center of the adsorption platform; And / or, the plurality of adsorption holes are evenly spaced or gradually distributed in the extension direction of the corresponding adsorption air channel.

7. The adsorption platform according to any one of claims 1 to 6, characterized in that: The adsorption platform comprises an adsorption lower plate and an adsorption upper plate which are stacked with each other. The opposite sides of the adsorption upper plate and the adsorption lower plate are respectively recessed to form the adsorption air channel. The adsorption surface is located on the adsorption upper plate.

8. The adsorption platform according to claim 7, characterized in that: The adsorption upper plate and the adsorption lower plate are stacked and sealed by adhesive, and are tightly bonded to the side wall of the adsorption airway.

9. The adsorption platform according to claim 7, characterized in that: The adsorption platform further comprises a plurality of air extraction joints, which are arranged on the adsorption lower plate and are connected to the plurality of adsorption air passages one by one through air extraction ports, and the air extraction joints are used to connect to an external pump body.

10. A laser lift-off device, characterized in that: It comprises a laser emitting device and an adsorption platform as described in any one of claims 1 to 9, wherein the adsorption platform is used to carry the workpiece to be peeled off, and the laser emitting device is used to scan the workpiece to be peeled off.

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