Graphite electrode structure of PECVD (plasma enhanced chemical vapor deposition) equipment and PECVD equipment

Abstract

The utility model discloses a graphite electrode structure of PECVD (Plasma Enhanced Chemical Vapor Deposition) equipment and the PECVD equipment, and relates to the technical field of solar cells. The graphite electrode structure of the PECVD equipment provided by the embodiment of the utility model comprises an electrode plate group and a quartz tube, wherein the electrode plate group is placed in the quartz tube; wherein the electrode plate group comprises a plurality of high-frequency electrode plates and grounding electrode plates which are alternately stacked and arranged; the total number of the high-frequency electrode plates and the grounding electrode plates is odd, the grounding electrode plates are arranged on the two sides of the electrode plate group, the graphite electrodes on the two sides are grounding electrodes, the potential of the grounding electrodes is the same as that of the quartz tube, and an electric field is not generated between the grounding electrodes and the quartz tube, so that the uniformity of a coating on the surface of the battery piece is not influenced; the graphite electrodes on the two sides are grounding electrodes, so that the problem of poor uniformity of an electric field caused by the electric field generated between the high-frequency electrode and the quartz tube can be avoided, and further, the uniformity of the surface coating of the battery surface is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of solar cells, in particular to a graphite electrode structure of a PECVD device and a PECVD device. Background Art

[0002] With the development of plasma enhanced chemical vapor deposition (PECVD) technology, PECVD equipment has also undergone significant development.

[0003] PECVD equipment is a photovoltaic process equipment that can be used to prepare SiNx (silicon nitride) film layers and amorphous silicon film layers on photovoltaic cells. These prepared film layers are generally used in full back electrode contact crystalline silicon photovoltaic cells (BC type photovoltaic cells) or heterojunction cells (HJT type cells).

[0004] In the prior art, the total number of graphite electrodes, high-frequency electrodes and grounding electrodes, is usually odd, and the high-frequency electrode is located on the outside. Since the quartz furnace tube is grounded, an electric field will be generated between the high-frequency electrode and the quartz furnace tube. This electric field will interfere with the electric field between the high-frequency electrode and the grounding electrode. Due to the poor uniformity of the electric field, the uniformity of the coating on the battery cell is ultimately significantly reduced. Utility Model Content

[0005] The utility model aims to provide a graphite electrode structure of a PECVD device and a PECVD device, so as to solve the problem that the existing graphite electrode usually has an odd number of high-frequency electrodes and grounding electrodes, and the high-frequency electrode is located on the outside. Since the quartz furnace tube is grounded, an electric field will be generated between the high-frequency electrode and the quartz furnace tube, and the electric field will interfere with the electric field between the high-frequency electrode and the grounding electrode. Due to the poor uniformity of the electric field, the uniformity of the coating on the battery cell is ultimately significantly reduced.

[0006] In a first aspect, the utility model provides a graphite electrode structure of a PECVD device, the graphite electrode structure of the PECVD device comprising:

[0007] An electrode sheet group and a quartz tube, wherein the electrode sheet group is placed in the quartz tube;

[0008] The electrode sheet group includes a plurality of high-frequency electrode sheets and grounding electrode sheets that are alternately stacked and arranged; the total number of the high-frequency electrode sheets and the grounding electrode sheets is odd, and the grounding electrode sheets are arranged on both sides of the electrode sheet group.

[0009] When the above technical solution is adopted, the graphite electrode structure of the PECVD equipment provided by the embodiment of the utility model includes: an electrode sheet group and a quartz tube, wherein the electrode sheet group is placed in the quartz tube; wherein the electrode sheet group includes a plurality of high-frequency electrode sheets and grounding electrode sheets that are alternately stacked; the total number of the high-frequency electrode sheets and the grounding electrode sheets is odd, and the two sides of the electrode sheet group are set as the grounding electrode sheets. Since the graphite electrodes on both sides are grounding electrodes, the potential of the grounding electrode is the same as the potential of the quartz tube, and no electric field is generated between the two. Therefore, the uniformity of the surface coating of the battery cell will not be affected. In other words, since the graphite electrodes on both sides are grounding electrodes, the problem of poor electric field uniformity caused by the electric field generated between the high-frequency electrode and the quartz tube can be avoided, and the uniformity of the surface coating of the battery surface can be further improved.

[0010] In some embodiments, the total number of the high-frequency electrode sheets and the ground electrode sheets ranges from [25-41].

[0011] In some embodiments, the potential of the grounding electrode sheet is the same as the potential of the quartz tube. Since the graphite electrodes on both sides are grounding electrodes, the potential of the grounding electrode is the same as the potential of the quartz tube, and no electric field is generated between the two. Therefore, the uniformity of the surface coating of the battery cell will not be affected. In other words, since the graphite electrodes on both sides are grounding electrodes, the problem of poor electric field uniformity caused by the electric field generated between the high-frequency electrode and the quartz tube can be avoided, and the uniformity of the surface coating of the battery surface can be further improved.

[0012] In some embodiments, the potential of the ground electrode sheet and the potential of the quartz tube are both 0 potential.

[0013] In some embodiments, the graphite electrode structure further comprises a battery sheet, and the battery sheet is attached to the surface of the electrode sheet group;

[0014] The outermost electrode in the electrode sheet group is not attached to the battery sheet in the direction close to the quartz tube.

[0015] In some embodiments, the quartz tube includes a quartz tube body, a high-frequency electrode lead wire and a ground electrode lead wire, wherein the high-frequency electrode lead wire and the ground electrode lead wire are arranged on the quartz tube body, the high-frequency electrode lead wire is connected to the high-frequency electrode sheet, and the ground electrode lead wire is connected to the ground electrode sheet.

[0016] In some embodiments, the quartz tube further comprises a gas inlet, and the gas inlet is used for gaseous reaction materials to enter the quartz tube through the gas inlet when the PECVD device is in operation;

[0017] The gaseous reaction material is ionized by the electric field formed by the high-frequency electrode sheet and the ground electrode sheet, and the reaction material in an ion state is extended to one side of the battery sheet.

[0018] In some embodiments, the quartz tube further includes a gas extraction port, and the gas extraction port is used to extract residual gas from the gas extraction port after the reaction is completed, and the battery cell flows to the next process.

[0019] In some embodiments, the air inlet and the air extraction port are symmetrically arranged.

[0020] In a second aspect, the utility model provides a PECVD device, comprising a PECVD body, and a graphite electrode structure of the PECVD device described in any one of the first aspects connected to the PECVD body.

[0021] When the above technical solution is adopted, the PECVD device provided by the embodiment of the utility model includes a PECVD main body and a graphite electrode structure of the PECVD device described in the first aspect connected to the PECVD main body, the graphite electrode structure of the PECVD device includes: an electrode sheet group and a quartz tube, the electrode sheet group is placed in the quartz tube; wherein the electrode sheet group includes a plurality of high-frequency electrode sheets and grounding electrode sheets that are alternately stacked and arranged; the total number of the high-frequency electrode sheets and the grounding electrode sheets is odd, and the two sides of the electrode sheet group are set as the grounding electrode sheets. Since the graphite electrodes on both sides are grounding electrodes, the potential of the grounding electrode is the same as the potential of the quartz tube, and no electric field is generated between the two. Therefore, the uniformity of the surface coating of the battery cell will not be affected. In other words, since the graphite electrodes on both sides are grounding electrodes, the problem of poor electric field uniformity caused by the electric field generated between the high-frequency electrode and the quartz tube can be avoided. Furthermore, in the process of coating the surface of the battery surface by combining the PECVD main body with the graphite electrode structure, the uniformity of the surface coating of the battery surface can be improved. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] The drawings described herein are used to provide a further understanding of the present invention and constitute a part of the present invention. The exemplary embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute an improper limitation on the present invention. In the drawings:

[0023] Figure 1 A schematic diagram of the structure of a graphite electrode structure of a PECVD device provided by the utility model is shown;

[0024] Figure 2 A structural schematic diagram of a graphite electrode structure of another PECVD device provided by the utility model is shown.

[0025] Reference numerals:

[0026] 10-electrode sheet group, 20-quartz tube, 101-high-frequency electrode sheet, 102-grounding electrode sheet, 301-battery sheet, 201-quartz tube body, 202-high-frequency electrode lead wire, 203-grounding electrode lead wire, 301-battery sheet, 204-air inlet, 205-exhaust port, 2011-furnace tube, 2012-furnace door. DETAILED DESCRIPTION

[0027] In order to clearly describe the technical solutions of the embodiments of the present utility model, in the embodiments of the present utility model, words such as "first" and "second" are used to distinguish the same or similar items with basically the same functions and effects. Those skilled in the art can understand that words such as "first" and "second" do not limit the quantity and execution order, and words such as "first" and "second" do not necessarily limit the difference.

[0028] In the description of the present invention, it should be understood that the terms "upper", "lower", "front", "back", "left", "right", etc. indicate directions or positional relationships based on the directions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore should not be understood as a limitation on the present invention.

[0029] It should be noted that in the present invention, words such as "exemplary" or "for example" are used to indicate examples, illustrations or descriptions. Any embodiment or design described as "exemplary" or "for example" in the present invention should not be interpreted as being more preferred or more advantageous than other embodiments or designs. Specifically, the use of words such as "exemplary" or "for example" is intended to present related concepts in a specific way.

[0030] In the present utility model, "at least one" means one or more, and "more than one" means two or more. "And / or" describes the association relationship of associated objects, indicating that three relationships may exist. For example, A and / or B can mean: A exists alone, A and B exist at the same time, and B exists alone, where A and B can be singular or plural. The character " / " generally indicates that the objects associated before and after are in an "or" relationship. "At least one of the following" or similar expressions refers to any combination of these items, including any combination of single or plural items. For example, at least one of a, b or c can mean: a, b, c, the combination of a and b, the combination of a and c, the combination of b and c, or the combination of a, b and c, where a, b, c can be single or plural.

[0031] Figure 1The schematic diagram of the structure of the graphite electrode structure of a PECVD device provided by the utility model is shown as follows: Figure 1 As shown, the graphite electrode structure of the PECVD device includes:

[0032] An electrode sheet group 10 and a quartz tube 20, wherein the electrode sheet group 10 is placed in the quartz tube 20;

[0033] The electrode sheet group 10 includes a plurality of high-frequency electrode sheets 101 and grounding electrode sheets 102 that are alternately stacked. The total number of the high-frequency electrode sheets 101 and the grounding electrode sheets 102 is odd, and the grounding electrode sheets 102 are arranged on both sides of the electrode sheet group 10 .

[0034] In summary, the graphite electrode structure of the PECVD equipment provided by the embodiment of the utility model includes: an electrode sheet group and a quartz tube, wherein the electrode sheet group is placed in the quartz tube; wherein the electrode sheet group includes a plurality of high-frequency electrode sheets and grounding electrode sheets that are alternately stacked; the total number of the high-frequency electrode sheets and the grounding electrode sheets is odd, and the two sides of the electrode sheet group are set as the grounding electrode sheets. Since the graphite electrodes on both sides are grounding electrodes, the potential of the grounding electrode is the same as the potential of the quartz tube, and no electric field is generated between the two. Therefore, the uniformity of the surface coating of the battery cell will not be affected. In other words, since the graphite electrodes on both sides are grounding electrodes, the problem of poor electric field uniformity caused by the electric field generated between the high-frequency electrode and the quartz tube can be avoided, and the uniformity of the surface coating of the battery surface can be further improved.

[0035] Optionally, the total number of the high-frequency electrode sheets and the grounding electrode sheets ranges from [25-41]. The embodiment of the present application does not impose any specific limitation on the total number of the high-frequency electrode sheets and the grounding electrode sheets, and specific settings can be made according to actual application scenarios.

[0036] Optional, see Figure 1 , the potential of the grounding electrode sheet 102 is the same as the potential of the quartz tube 20 , and the potential of the grounding electrode sheet 102 and the potential of the quartz tube 20 are both 0 potential.

[0037] Optional, see Figure 1 , the graphite electrode structure includes a battery sheet 301, and the battery sheet 301 is attached to the surface of the electrode sheet group 10;

[0038] The outermost electrodes in the electrode sheet group 10 are not attached to the battery sheet in the direction close to the quartz tube 20 .

[0039] Figure 2 The schematic diagram of the structure of another graphite electrode structure of a PECVD device provided by the utility model is shown as follows: Figure 2As shown, the quartz tube 20 includes a quartz tube body 201, a high-frequency electrode lead wire 202 and a ground electrode lead wire 203, wherein the high-frequency electrode lead wire 202 and the ground electrode lead wire 203 are arranged on the quartz tube body 201, the high-frequency electrode lead wire 202 is connected to the high-frequency electrode sheet 101, and the ground electrode lead wire 203 is connected to the ground electrode sheet 102. Figure 2 The quartz tube body 201 includes a furnace tube 2011 and a furnace door 2012 .

[0040] Optional, see Figure 2 The quartz tube 20 further includes an air inlet 204, and the air inlet 204 is used for gaseous reaction materials to enter the quartz tube 20 through the air inlet 204 when the PECVD device is in operation;

[0041] The gaseous reaction substances are ionized by the electric field formed by the high-frequency electrode sheet 101 and the ground electrode sheet 102 , and the reaction substances in an ion state are extended to one side of the battery sheet 301 .

[0042] Optional, see Figure 2 The quartz tube 20 further includes a gas extraction port 205 , and the gas extraction port 205 is used to extract residual gas from the gas extraction port 205 after the reaction is completed, and the battery cell 301 flows to the next process.

[0043] Optional, see Figure 2 The air inlet 204 and the air extraction port 205 are symmetrically arranged.

[0044] In summary, the graphite electrode structure of the PECVD equipment provided by the embodiment of the utility model includes: an electrode sheet group and a quartz tube, wherein the electrode sheet group is placed in the quartz tube; wherein the electrode sheet group includes a plurality of high-frequency electrode sheets and grounding electrode sheets that are alternately stacked; the total number of the high-frequency electrode sheets and the grounding electrode sheets is odd, and the two sides of the electrode sheet group are set as the grounding electrode sheets. Since the graphite electrodes on both sides are grounding electrodes, the potential of the grounding electrode is the same as the potential of the quartz tube, and no electric field is generated between the two. Therefore, the uniformity of the surface coating of the battery cell will not be affected. In other words, since the graphite electrodes on both sides are grounding electrodes, the problem of poor electric field uniformity caused by the electric field generated between the high-frequency electrode and the quartz tube can be avoided, and the uniformity of the surface coating of the battery surface can be further improved.

[0045] The utility model also provides a PECVD device, the PECVD device includes a PECVD body 02, and a Figure 1-Figure 2 Graphite electrode structure of any of the PECVD devices shown.

[0046] Optionally, the PECVD main body includes interconnected vacuum and pressure control systems, deposition systems, gas and flow control, system safety protection systems and computer control units, wherein the graphite electrode structure of the PECVD equipment described in the present application is arranged in the deposition system, and the surface coating of the battery surface is completed through the vacuum and pressure control system, deposition system, gas and flow control, system safety protection system and computer control unit.

[0047] In summary, the PECVD device provided in the embodiment of the present invention comprises a PECVD body and a Figure 1 The graphite electrode structure of the PECVD device shown in the figure comprises: an electrode sheet group and a quartz tube, wherein the electrode sheet group is placed in the quartz tube; wherein the electrode sheet group comprises a plurality of high-frequency electrode sheets and grounding electrode sheets which are alternately stacked; the total number of the high-frequency electrode sheets and the grounding electrode sheets is odd, and the two sides of the electrode sheet group are set as the grounding electrode sheets. Since the graphite electrodes on both sides are grounding electrodes, the potential of the grounding electrode is the same as the potential of the quartz tube, and no electric field is generated between the two. Therefore, the uniformity of the surface coating of the battery cell is not affected. In other words, since the graphite electrodes on both sides are grounding electrodes, the problem of poor electric field uniformity caused by the electric field generated between the high-frequency electrode and the quartz tube can be avoided. Furthermore, in the process of coating the battery surface by combining the PECVD body with the graphite electrode structure, the uniformity of the surface coating of the battery surface can be improved.

[0048] Although the present invention is described herein in conjunction with various embodiments, in the process of implementing the claimed invention, those skilled in the art may understand and implement other variations of the disclosed embodiments by viewing the drawings, the disclosure, and the appended claims. In the claims, the word "comprising" does not exclude other components or steps, and "one" or "a" does not exclude multiple components. Certain measures are recorded in different dependent claims, but this does not mean that these measures cannot be combined to produce good results.

[0049] Although the utility model has been described in conjunction with specific features and embodiments thereof, it is obvious that various modifications and combinations may be made thereto without departing from the spirit and scope of the utility model. Accordingly, this specification and the drawings are merely exemplary illustrations of the utility model as defined by the appended claims, and are deemed to have covered any and all modifications, variations, combinations or equivalents within the scope of the utility model. Obviously, those skilled in the art may make various modifications and variations to the utility model without departing from the spirit and scope of the utility model. Thus, if these modifications and variations of the utility model fall within the scope of the claims of the utility model and their equivalents, the utility model is also intended to include these modifications and variations.

Claims

1. A graphite electrode structure of a PECVD device, characterized in that: include: An electrode sheet group and a quartz tube, wherein the electrode sheet group is placed in the quartz tube; The electrode sheet group includes a plurality of high-frequency electrode sheets and grounding electrode sheets that are alternately stacked and arranged; the total number of the high-frequency electrode sheets and the grounding electrode sheets is odd, and the grounding electrode sheets are arranged on both sides of the electrode sheet group.

2. The graphite electrode structure of the PECVD device according to claim 1, characterized in that: The total number of the high-frequency electrode sheets and the ground electrode sheets ranges from [25-41].

3. The graphite electrode structure of the PECVD device according to claim 1, characterized in that: The potential of the ground electrode sheet is the same as the potential of the quartz tube.

4. The graphite electrode structure of the PECVD device according to claim 3, characterized in that: The potential of the ground electrode sheet and the potential of the quartz tube are both 0 potential.

5. The graphite electrode structure of the PECVD device according to claim 1, characterized in that: The graphite electrode structure further comprises a battery sheet, and the battery sheet is attached to the surface of the electrode sheet group; The outermost electrode in the electrode sheet group is not attached to the battery sheet in the direction close to the quartz tube.

6. The graphite electrode structure of the PECVD device according to claim 1, characterized in that: The quartz tube includes a quartz tube body, a high-frequency electrode lead wire and a ground electrode lead wire, wherein the high-frequency electrode lead wire and the ground electrode lead wire are arranged on the quartz tube body, the high-frequency electrode lead wire is connected to the high-frequency electrode sheet, and the ground electrode lead wire is connected to the ground electrode sheet.

7. The graphite electrode structure of the PECVD device according to claim 5, characterized in that: The quartz tube further comprises an air inlet, and the air inlet is used for gaseous reaction materials to enter the quartz tube through the air inlet when the PECVD device is in operation; The gaseous reaction material is ionized by the electric field formed by the high-frequency electrode sheet and the ground electrode sheet, and the reaction material in an ion state is extended to one side of the battery sheet.

8. The graphite electrode structure of the PECVD device according to claim 7, characterized in that: The quartz tube also includes a gas extraction port, which is used to extract residual gas from the gas extraction port after the reaction is completed, and the battery cell flows to the next process.

9. The graphite electrode structure of the PECVD device according to claim 8, characterized in that: The air inlet and the air extraction port are symmetrically arranged.

10. A PECVD device, characterized in that: It comprises a PECVD body and a graphite electrode structure of the PECVD device according to any one of claims 1 to 9 connected to the PECVD body.

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