Hydrogen discharging device of hydrogen furnace

Abstract

According to the hydrogen discharging device of the hydrogen furnace, a mixture of hydrogen and inert gas is shunted through the main pipe and the auxiliary pipe, hydrogen purity detection is conducted on part of the mixture of the hydrogen and the inert gas through the detector, and after the hydrogen purity reaches the ignition standard, the first valve and the second valve are opened; gas in the main pipe and the auxiliary pipe is fed into the ignition mechanism for hydrogen combustion treatment, so that the possibility of explosion accidents is reduced, and the structure is simple, safe and reliable; and the cooling bottle is arranged to quickly cool the hydrogen discharged from the hydrogen furnace, so that the hydrogen is prevented from maintaining high temperature and being ignited in advance near the ignition mechanism, and the safety of the hydrogen discharging process is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of hydrogen exhaust from a hydrogen furnace, and more specifically refers to a hydrogen exhaust device for a hydrogen furnace. Background Art

[0002] With the rapid development of modern electronic technology, semiconductor products are increasingly widely used, and hydrogen furnaces for welding semiconductors are also being vigorously promoted. As a flammable and explosive gas, hydrogen is very likely to cause explosion accidents if it is not properly discharged and handled. The current method of discharging hydrogen in the industry is to mix hydrogen with inert gas and then send it directly to the ignition mechanism for combustion, which poses certain safety hazards and cannot achieve the purpose of safe production. Utility Model Content

[0003] The utility model aims to overcome the defects of the prior art and provide a hydrogen exhaust device for a hydrogen furnace to solve the technical problem of low safety of the existing hydrogen exhaust device for a hydrogen furnace.

[0004] In order to achieve the above purpose, the utility model adopts the following technical solutions:

[0005] A hydrogen exhaust device for a hydrogen furnace, comprising: an air inlet pipe, a main pipe, a sub-pipe, an ignition mechanism, a cooling bottle, and a detector; the air outlet end of the air inlet pipe is connected to the air inlet end of the main pipe and the air inlet end of the sub-pipe; the air outlet end of the main pipe and the air outlet end of the sub-pipe are connected to the ignition mechanism; the cooling bottle is arranged on the air inlet pipe, and is used for cooling the hydrogen and inert gas mixture entering the air inlet pipe; the detector is arranged on the sub-pipe, and is used for detecting the purity of hydrogen; a first valve is arranged on the main pipe, and a second valve is arranged between the detector and the air outlet end of the sub-pipe, the first valve is used for connecting the main pipe with the ignition mechanism when the hydrogen concentration reaches a preset value, and the second valve is used for connecting the sub-pipe with the ignition mechanism when the hydrogen concentration reaches a preset value.

[0006] Wherein, the auxiliary pipe is also provided with a third valve, and the third valve is located between the detector and the air inlet end of the auxiliary pipe.

[0007] Wherein, the auxiliary pipe includes: a first branch pipe and a second branch pipe; the air inlet end and the air outlet end of the first branch pipe are respectively connected to the air inlet pipe and the detector, and the air inlet end and the air outlet end of the second branch pipe are respectively connected to the detector and the ignition mechanism; the air inlet end of the first branch pipe and the air outlet end of the second branch pipe are respectively arranged corresponding to the air inlet end and the air outlet end of the main pipe; the second valve and the third valve are respectively arranged on the first branch pipe and the second branch pipe.

[0008] Wherein, it also includes: a main pipe; the gas outlet end of the main pipe and the gas outlet end of the second branch pipe are connected to the gas inlet end of the main pipe, and the gas outlet end of the main pipe is connected to the ignition mechanism.

[0009] Wherein, it also includes: a first T-shaped pipe; the air intake pipe, the main pipe and the first branch pipe are respectively connected to the first T-shaped pipe, and the first branch pipe is perpendicular to the air intake pipe and the main pipe.

[0010] Wherein, it also includes: a second T-shaped pipe; the main pipe, the second branch pipe and the main pipe are respectively connected to the second T-shaped pipe, and the main pipe is perpendicular to the second branch pipe and the main pipe.

[0011] Wherein, a one-way valve is also provided on the main pipe, and the one-way valve is located between the first valve and the gas outlet end of the main pipe.

[0012] Wherein, the main pipe is further provided with a fourth valve, and the fourth valve is located between the one-way valve and the gas outlet end of the main pipe; the fourth valve is normally open.

[0013] Wherein, the first valve, the second valve, the third valve and the fourth valve are needle valves.

[0014] Wherein, the ignition mechanism comprises: a burner and a combustion platform; the burner is arranged through the combustion platform, and the burner is connected to the main pipe.

[0015] Compared with the prior art, the utility model has the following beneficial effects: the utility model divides the mixture of hydrogen and inert gas through the main pipe and the sub-pipe, adopts a detector to detect the purity of hydrogen on part of the mixture of hydrogen and inert gas, and only opens the first valve and the second valve after the purity of hydrogen reaches the ignition standard, and sends the gas in the main pipe and the sub-pipe to the ignition mechanism to carry out combustion treatment of hydrogen, thereby reducing the possibility of explosion accidents, and having a simple structure and being safe and reliable; a cooling bottle is provided to quickly cool down the hydrogen discharged from the hydrogen furnace, thereby preventing the hydrogen from maintaining a high temperature and igniting in advance near the ignition mechanism, thereby improving the safety of the hydrogen discharge process.

[0016] The above description is only an overview of the technical solution of the utility model. In order to more clearly understand the technical means of the utility model, it can be implemented in accordance with the contents of the specification. In order to make the above and other purposes, features and advantages of the utility model more obvious and easy to understand, the following preferred embodiments are specifically cited and described in detail as follows. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 A schematic diagram of the main structure of a hydrogen exhaust device for a hydrogen furnace provided by the utility model;

[0018] Figure 2A schematic diagram of the three-dimensional structure of a hydrogen exhaust device for a hydrogen furnace provided by the utility model;

[0019] Figure 3 The utility model is a schematic diagram of the structure of a hydrogen exhaust device of a hydrogen furnace provided by the utility model.

[0020] Reference numerals:

[0021] 1. Intake pipe; 2. Main pipe; 3. Sub-pipe; 31. First branch pipe; 32. Second branch pipe; 4. Ignition mechanism; 41. Burner nozzle; 42. Combustion table; 5. Cooling bottle; 6a. First valve; 6b. Second valve; 6c. Third valve; 6d. Fourth valve; 7. Main pipe; 8a. First T-tube; 8b. Second T-tube; 9. One-way valve. DETAILED DESCRIPTION

[0022] In order to make the purpose, technical solution and advantages of the utility model clearer, the utility model is further described in detail in conjunction with the accompanying drawings and specific implementation methods. The technical solution in the embodiment of the utility model will be clearly and completely described in conjunction with the accompanying drawings in the embodiment of the utility model. Obviously, the described embodiment is a part of the embodiment of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0023] It should be understood that when used in this specification and the appended claims, the terms "include" and "comprises" indicate the presence of described features, integers, steps, operations, elements and / or components, but do not exclude the presence or addition of one or more other features, integers, steps, operations, elements, components and / or combinations thereof.

[0024] It should also be understood that the terms used in this utility model specification are only for the purpose of describing specific embodiments and are not intended to limit the utility model. As used in this utility model specification and the appended claims, unless the context clearly indicates otherwise, the singular forms "a", "an" and "the" are intended to include plural forms.

[0025] It should be further understood that the term “and / or” used in the present specification and the appended claims refers to any combination and all possible combinations of one or more of the associated listed items, and includes these combinations.

[0026] See also Figure 1-3As shown, this embodiment discloses a hydrogen exhaust device for a hydrogen furnace, which includes: an air inlet pipe 1, a main pipe 2, a sub-pipe 3, an ignition mechanism 4, a cooling bottle 5, and a detector (not shown in the figure); the air outlet end of the air inlet pipe 1 is connected to the air inlet end of the main pipe 2 and the air inlet end of the sub-pipe 3; the air outlet end of the main pipe 2 and the air outlet end of the sub-pipe 3 are connected to the ignition mechanism 4; the cooling bottle 5 is arranged on the air inlet pipe 1, and is used for cooling the hydrogen and inert gas mixture entering the air inlet pipe 1; the detector is arranged on the sub-pipe 3, and is used for detecting the purity of hydrogen; a first valve 6a is arranged on the main pipe 2, and a second valve 6b is arranged between the detector and the air outlet end of the sub-pipe 3, the first valve 6a is used for connecting the main pipe 2 with the ignition mechanism 4 when the hydrogen concentration reaches a preset value, and the second valve 6b is used for connecting the sub-pipe 3 with the ignition mechanism 4 when the hydrogen concentration reaches a preset value.

[0027] The inlet end of the inlet pipe 1 is connected to the hydrogen furnace, and the hydrogen furnace is filled with inert gas to send hydrogen through the inlet pipe 1 to the cooling bottle 5. After being cooled by the cooling bottle 5, the mixture of hydrogen and inert gas (hereinafter referred to as the mixture) is divided into two from the outlet end of the inlet pipe 1, and flows into the main pipe 2 and the auxiliary pipe 3 respectively. The mixture in the main pipe 2 is blocked by the first valve 6a in the closed state and cannot move forward; the mixture in the auxiliary pipe 3 enters the detector for hydrogen purity detection. If the detected hydrogen purity does not reach the preset target, the detector continues to intermittently detect the mixture. If the hydrogen purity value is within the preset range, the first valve 6a is opened first to exhaust the mixture in the main pipe 2 to the ignition mechanism 4 and then the second valve 6b is opened, or the second valve 6b is opened first to exhaust the mixture in the auxiliary pipe 3 to the ignition mechanism 4 and then the first valve 6a is opened, so that the mixture is completely exhausted and ignited. A detector is used to detect the mixture, and only the mixture that meets the detection standard can enter the ignition mechanism 4, which reduces the possibility of explosion accidents. The overall structure of the hydrogen discharge device is simple and safe and reliable. A cooling bottle 5 is provided to quickly cool the hydrogen discharged from the hydrogen furnace to avoid the hydrogen maintaining a high temperature and igniting in advance near the ignition mechanism 4, thereby improving the safety of the hydrogen discharge process.

[0028] In one embodiment, a third valve 6c is further provided on the auxiliary pipe 3, and the third valve 6c is located between the detector and the air inlet end of the auxiliary pipe 3. Nitrogen is continuously filled into the hydrogen furnace, so that the hydrogen purity of the mixture entering the air inlet pipe 1 changes continuously, and the detector performs multiple tests on the hydrogen concentration of the mixture to ensure that the hydrogen concentration reaches the ignition standard. The third valve 6c can control the flow rate so that a small portion of the mixture continues to slowly enter the detector. The third valve 6c can also be opened and closed intermittently so that the mixture intermittently enters the detector, which is convenient for the detector to perform real-time detection of the change state of the hydrogen purity of the mixture, thereby improving the accuracy of the detection; when the hydrogen purity detected by the detector reaches the standard, the third valve 6c is closed to prevent the mixture from entering the auxiliary pipe 3, and then the mixture in the main pipe 2 and the auxiliary pipe 3 flows to the ignition mechanism 4.

[0029] In other embodiments, the inner diameter of the auxiliary pipe 3 can be set to be much smaller than the inner diameter of the main pipe 2 to replace the third valve 6c, so as to control the flow rate of the mixture flowing into the auxiliary pipe 3, so that a small part of the mixture enters the auxiliary pipe 3 and most of the mixture enters the main pipe 2, thereby shortening the time spent on detecting the purity of hydrogen and saving detection resources.

[0030] In one embodiment, the sub-pipe 3 includes: a first branch pipe 31 and a second branch pipe 32; the air inlet end and the air outlet end of the first branch pipe 31 are connected to the air inlet pipe 1 and the detector respectively, and the air inlet end and the air outlet end of the second branch pipe 32 are connected to the detector and the ignition mechanism 4 respectively; the air inlet end of the first branch pipe 31 and the air outlet end of the second branch pipe 32 are respectively arranged corresponding to the air inlet end and the air outlet end of the main pipe 2; the second valve 6b and the third valve 6c are respectively arranged on the first branch pipe 31 and the second branch pipe 32. The third valve 6c and the second valve 6b respectively control the mixture to enter and leave the sub-pipe 3; the first branch pipe 31 is arranged corresponding to the air inlet end of the main pipe 2, ensuring that the mixture in the main pipe 2 and the sub-pipe 3 flows out from the air inlet pipe 1 at the same time, ensuring that the hydrogen purity of the mixture in the main pipe 2 and the sub-pipe 3 is consistent; the second branch pipe 32 is arranged corresponding to the air outlet end of the main pipe 2, so that the ignition mechanism 4 does not need to be provided with multiple air inlets, so that the ignition mechanism 4 has a simple structure and is easy to control the temperature at the air inlet.

[0031] In one embodiment, it further comprises: a main pipe 7; the outlet end of the main pipe 2 and the outlet end of the second branch pipe 32 are connected to the inlet end of the main pipe 7, and the outlet end of the main pipe 7 is connected to the ignition mechanism 4. The main pipe 2 and the branch pipe 3 are connected to the ignition mechanism 4 through the main pipe 7, so that the mixture is gathered and ignited at the same position.

[0032] In one embodiment, it further includes: a first T-shaped pipe 8a; the air intake pipe 1, the main pipe 2 and the first branch pipe 31 are respectively connected to the first T-shaped pipe 8a, and the first branch pipe 31 is perpendicular to the air intake pipe 1 and the main pipe 2. The main pipe 2 and the air intake pipe 1 are arranged on both sides of the first T-shaped pipe 8a, so that the main pipe 2 and the first branch pipe 31 are arranged adjacent to each other, which is convenient for controlling the flow direction of the mixture, making the fluidity of the mixture flowing into the main pipe 2 and the first branch pipe 31 different, and realizing the flow distribution of the mixture, so that most of the mixture flows naturally into the main pipe 2 with less resistance, and part of the mixture is diverted from the first branch pipe 31 into the detector.

[0033] In one embodiment, it further includes: a second T-shaped pipe 8b; the main pipe 2, the second branch pipe 32 and the main pipe 7 are respectively connected to the second T-shaped pipe 8b, and the main pipe 2 is perpendicular to the second branch pipe 32 and the main pipe 7. The second branch pipe 32 and the main pipe 7 are located on the same straight line. With the cooperation of the first T-shaped pipe 8a and the second T-shaped pipe 8b, the main pipe 2, the first branch pipe 31, the detector and the second branch pipe 32 are enclosed to form a quadrilateral structure, so that the structure of the hydrogen discharge device is simple and stable, and it is convenient to realize the diversion of the mixture at the same starting point and the convergence at the same end point.

[0034] In this embodiment, the first branch pipe 31, the second branch pipe 32 and the detector are located on the same side of the main pipe 2, the detector and the main pipe 2 are arranged parallel to each other, and the main pipe 2, the first branch pipe 31, the detector and the second branch pipe 32 form a square structure; the ignition mechanism 4 is located on the side of the main pipe 2 away from the auxiliary pipe 3, and the cooling bottle 5 is located at the end of the main pipe 2 away from the ignition mechanism 4, so that the structure of the hydrogen exhaust device is simple and compact, and it is easy to install.

[0035] In one embodiment, a one-way valve 9 is further provided on the main pipe 2, and the one-way valve 9 is located between the first valve 6a and the gas outlet end of the main pipe 2. The guiding direction of the one-way valve 9 is from the first valve 6a to the gas outlet end of the main pipe 2, so that the mixture in the main pipe 2 enters the main pipe 7, but the mixture in the main pipe 7 cannot enter the end of the main pipe 2 close to the first valve 6a and the air inlet pipe 1, which has flame retardant and explosion-proof functions, and greatly improves the safety of the hydrogen discharge device.

[0036] In one embodiment, a fourth valve 6d is further provided on the main pipe 2, and the fourth valve 6d is located between the one-way valve 9 and the gas outlet of the main pipe 2; the fourth valve 6d is normally open. The normally open fourth valve 6d keeps the mixture flowing from the main pipe 2 into the main pipe 7 unobstructed, and prevents the gas outlet of the main pipe 2 from being blocked. The fourth valve 6d is a manual valve, which is used for the inspection, commissioning and maintenance of the hydrogen discharge device.

[0037] In one embodiment, the first valve 6a, the second valve 6b, the third valve 6c and the fourth valve 6d are needle valves. The needle valve can accurately control the flow rate, and the internal flow channel of the needle valve is small, which is convenient for adjusting the flow rate, greatly improving the response speed of the first valve 6a, the second valve 6b, the third valve 6c and the fourth valve 6d. In other embodiments, ball valves or other valves can be used instead of needle valves according to actual needs.

[0038] In one embodiment, the ignition mechanism 4 includes: a burner 41 and a combustion platform 42; the burner 41 is arranged through the combustion platform 42, and the burner 41 is connected to the main pipe 7. The combustion platform 42 facilitates the stable installation of the burner 41 and the external bracket, and is used to block the flame from approaching and burning the main pipe 7, so as to prevent the mixture from burning in the main pipe 7. The burner 41 can ignite hydrogen by ignition sparks, heating wires, heating plates or other heating structures.

[0039] In one embodiment, the burner 41 and the main pipe 7 are arranged vertically, and the gas outlet end of the burner 41 is arranged upward, and the combustion platform 42 is arranged horizontally. The vertical arrangement of the burner 41 is convenient for controlling the flow rate of the mixture, and makes the hydrogen at the burner 41 burn fully, avoiding the excessive horizontal flow rate of the mixture that is easy to overflow or cause hydrogen leakage, and ensuring the safety of the hydrogen ignition process.

[0040] A hydrogen exhaust device for a hydrogen furnace in this embodiment diverts a mixture of hydrogen and an inert gas through a main pipe and a sub-pipe, and uses a detector to detect the purity of a portion of the mixture of hydrogen and an inert gas. After the purity of the hydrogen reaches the ignition standard, the first valve and the second valve are opened to send the gas in the main pipe and the sub-pipe to the ignition mechanism for hydrogen combustion treatment, thereby reducing the possibility of explosion accidents, having a simple structure, and being safe and reliable. A cooling bottle is provided to quickly cool down the hydrogen exhausted from the hydrogen furnace, thereby preventing the hydrogen from maintaining a high temperature and being ignited in advance near the ignition mechanism, thereby improving the safety of the hydrogen exhaust process.

[0041] The above examples are only used to further illustrate the technical content of the utility model, so that readers can understand it more easily, but it does not mean that the implementation methods of the utility model are limited to this. Any technical extension or re-creation made based on the utility model is protected by the utility model. The protection scope of the utility model shall be based on the claims.

Claims

1. A hydrogen exhaust device for a hydrogen furnace, characterized in that: include: An air intake pipe, a main pipe, a sub-pipe, an ignition mechanism, a cooling bottle, and a detector; the air outlet end of the air intake pipe is connected to the air intake end of the main pipe and the air intake end of the sub-pipe; the air outlet end of the main pipe and the air outlet end of the sub-pipe are connected to the ignition mechanism; the cooling bottle is arranged on the air intake pipe, and is used for cooling the hydrogen and inert gas mixture entering the air intake pipe; the detector is arranged on the sub-pipe, and is used for detecting the purity of hydrogen; a first valve is arranged on the main pipe, and a second valve is arranged between the detector and the air outlet end of the sub-pipe, the first valve is used for connecting the main pipe with the ignition mechanism when the hydrogen concentration reaches a preset value, and the second valve is used for connecting the sub-pipe with the ignition mechanism when the hydrogen concentration reaches a preset value.

2. The hydrogen exhaust device of the hydrogen furnace according to claim 1, characterized in that: The auxiliary pipe is also provided with a third valve, and the third valve is located between the detector and the air inlet end of the auxiliary pipe.

3. The hydrogen exhaust device of the hydrogen furnace according to claim 2, characterized in that: The auxiliary pipe includes: a first branch pipe and a second branch pipe; the air inlet end and the air outlet end of the first branch pipe are respectively connected to the air inlet pipe and the detector, and the air inlet end and the air outlet end of the second branch pipe are respectively connected to the detector and the ignition mechanism; the air inlet end of the first branch pipe and the air outlet end of the second branch pipe are respectively arranged corresponding to the air inlet end and the air outlet end of the main pipe; the second valve and the third valve are respectively arranged on the first branch pipe and the second branch pipe.

4. The hydrogen exhaust device of the hydrogen furnace according to claim 3, characterized in that: Also includes: The gas outlet end of the main pipe and the gas outlet end of the second branch pipe are connected to the gas inlet end of the main pipe, and the gas outlet end of the main pipe is connected to the ignition mechanism.

5. The hydrogen exhaust device of the hydrogen furnace according to claim 4, characterized in that: Also includes: A first T-shaped pipe; the air intake pipe, the main pipe and the first branch pipe are respectively connected to the first T-shaped pipe, and the first branch pipe is perpendicular to the air intake pipe and the main pipe.

6. The hydrogen exhaust device of the hydrogen furnace according to claim 4, characterized in that: Also includes: The second T-shaped pipe; the main pipe, the second branch pipe and the main pipe are respectively connected to the second T-shaped pipe, and the main pipe is perpendicular to the second branch pipe and the main pipe.

7. The hydrogen exhaust device of the hydrogen furnace according to claim 3, characterized in that: The main pipe is also provided with a one-way valve, and the one-way valve is located between the first valve and the gas outlet end of the main pipe.

8. The hydrogen exhaust device of the hydrogen furnace according to claim 7, characterized in that: The main pipe is also provided with a fourth valve, which is located between the one-way valve and the gas outlet end of the main pipe; the fourth valve is normally open.

9. The hydrogen exhaust device of the hydrogen furnace according to claim 8, characterized in that: The first valve, the second valve, the third valve and the fourth valve are needle valves.

10. The hydrogen exhaust device of the hydrogen furnace according to claim 4, characterized in that: The ignition mechanism comprises: a burner and a combustion platform; the burner is arranged through the combustion platform, and the burner is communicated with the main pipe.

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