Aerial temporary storage station for carrying wafer cassette and system comprising same

Abstract

The utility model provides an air temporary storage station for carrying wafer cassettes and a system comprising the air temporary storage station, which solve the problems that a loading port is easy to block, the wafer cassettes are difficult to deploy and temporarily store and the like in high-altitude wafer cassette transportation operation, and the scheme is that the air temporary storage station comprises a supporting plate, two parallel slide rails and two lower slide rails, the lower sliding rails are erected at the bottoms of the sliding rails, the rail direction of the lower sliding rails is perpendicular to the sliding rails, connecting rods with the adjustable length are vertically fixed to the tops of the two sides, corresponding to the sliding rails, of the lower sliding rails, the connecting rods are slidably connected with the bottom faces of the sliding rails, and the bottom faces of the two lower sliding rails are upwards slidably connected with vertical plates respectively. The tail ends, away from the sliding rails, of the two vertical plates are fixedly connected with horizontal bottom beams, the bottom beams are arranged in parallel, the bottom faces of the supporting plates are fixedly connected to the bottom beams, the two parallel outer sides of the bottom beams are further fixedly provided with reflectors, the two parallel outer sides of the sliding rails are further provided with retro-reflection sensors corresponding to the reflectors, and the retro-reflection sensors correspond to the reflectors. The number of the supporting plates is at least two, and the top face of each supporting plate is provided with a three-point type positioning pin in a protruding mode.

Description

Technical Field

[0001] The utility model relates to the technical field of wafer box transportation, in particular to an aerial temporary storage station for wafer box transportation and a system containing the same. Background Art

[0002] In semiconductor automated factories (Fabs for short), AMHS (Automatic Material Handling System) is usually used on a large scale to quickly and accurately transport carriers (wafer boxes for short) containing wafer materials to the destination based on AMHS, thereby improving the production efficiency of the Fab.

[0003] In AMHS, the walking track for the aerial transport vehicle is usually suspended under the ceiling to facilitate OHT to carry out high-altitude handling operations. However, during the handling operation, the loading port at the destination may be blocked, and the high-altitude operation and transportation method obviously brings difficulties to the handling and allocation of the blocked loading port. For this reason, we propose an aerial temporary storage station for wafer box transportation to ensure the short-term storage of wafer boxes and avoid blockage of the loading port. Utility Model Content

[0004] The technical problem to be solved by the utility model is to overcome the defects of the prior art. The utility model proposes an aerial temporary storage station for wafer box transportation, which can realize the removal and allocation of wafer boxes from high and medium loading ports and avoid clogging of the loading ports, and a system containing the same.

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[0006] Furthermore, the top surface of the slide rail is evenly spaced with mounting holes, and the bottom surface is provided with a slide groove, the top end of the connecting rod is slidably connected in the slide groove, and the slide rail is connected and fixed to the roof of the external dust-free workshop through the mounting holes.

[0007] Furthermore, the connecting rod is adjusted by a screw nut, and the adjustment amount is not less than 50 mm.

[0008] Furthermore, fixed corner blocks are provided at the four corners of the vertical plate, and the fixed corner blocks are used to connect the top of the vertical plate with the lower sliding rail and the bottom of the vertical plate with the bottom beam respectively.

[0009] Furthermore, pull blocks are bolted to the outer sides of the two fixed angle blocks corresponding to the lower slide rail, and pull rods are bolted to the outer sides of the two fixed angle blocks corresponding to the bottom beam, the two pull blocks are arranged with exposed fixed angle blocks and the side edges of the vertical plates are bolted to the exposed parts, and anti-fall rods parallel to the slide rails are bolted to the opposite outer ends of the two pull rods.

[0010] Furthermore, the pull rod and the anti-drop rod are spliced ​​into an integrated frame structure surrounded by the outside of the support plate and are arranged flush with the support plate. The reflectors are grouped in pairs and each group of reflectors corresponds to a wafer box. The back of each reflector is fixedly connected to the anti-drop rod through a plate frame.

[0011] Furthermore, the frame is tilted and the tilt angle corresponds to the reflector. When a wafer box is placed on the pallet, the wafer box can block the reflector emission circuit. The frame includes multiple types according to the tilt angle, and each type of frame corresponds to the size of the wafer box.

[0012] Furthermore, the protruding height of the positioning pin does not exceed 12 mm, and the top end thereof is in a smooth truncated cone state. The bottom surface of the wafer is provided with a slot corresponding to the positioning pin one by one, and the top end of the positioning pin is embedded in the slot.

[0013] An aerial temporary storage system for wafer box transport includes a plurality of aerial temporary storage stations for wafer box transport as described above, wherein the plurality of aerial temporary storage stations are adjacently arranged in parallel and are arranged corresponding to external wafer box destination loading ports.

[0014] Compared with the prior art, the beneficial effects of the utility model include: when the retro-reflective sensor with a pre-set angle on the overhead crane emits light to illuminate the reflective plate, the retro-reflective sensor receives the retrogressive light based on whether the light can pass through the reflective plate and return to the light, thereby letting the overhead crane know whether there is a wafer box at the current position. The overall station structure is flexible and changeable, and can be adjusted, and can be used for aerial temporary storage operations of wafer boxes of various sizes and specifications. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] The disclosure of the present invention is described with reference to the accompanying drawings. It should be understood that the accompanying drawings are only for illustrative purposes and are not intended to limit the scope of protection of the present invention. In the accompanying drawings, the same reference numerals are used to refer to the same components.

[0016] in:

[0017] Figure 1 The isometric diagram of the overall structure of the aerial temporary storage station proposed according to one embodiment of the utility model is schematically shown;

[0018] Figure 2 The schematic diagram shows a front view of an aerial temporary storage station proposed according to one embodiment of the utility model;

[0019] Figure 3 Schematically shows a method according to an embodiment of the present invention. Figure 2 AA section view;

[0020] Figure 4 The diagram schematically shows a right side view of an aerial temporary storage station according to one embodiment of the utility model;

[0021] Figure 5 The figure schematically shows a bottom structure diagram of a wafer box proposed according to one embodiment of the utility model.

[0022] Numbers in the figure: 1. Slide rail; 2. Lower slide rail; 3. Connecting rod; 4. Vertical plate; 5. Fixed angle block; 6. Pull block; 7. Pull rod; 8. Anti-fall beam; 9. Support plate; 10. Positioning pin; 11. Plate rack; 12. Reflective plate; 13. Bottom beam; 14. Mounting hole; 15. Card slot; 16. Wafer box; 17. Retro-reflective sensor. DETAILED DESCRIPTION

[0023] It is easy to understand that according to the technical solution of the utility model, without changing the essential spirit of the utility model, a person skilled in the art can propose a variety of interchangeable structural modes and implementation modes. Therefore, the following specific implementation modes and drawings are only exemplary descriptions of the technical solution of the utility model, and should not be regarded as the entirety of the utility model or as a limitation or restriction to the technical solution of the utility model.

[0024] According to one embodiment of the present invention, Figure 1-Figure 5 Shown.

[0025] like Figure 1As shown, for the overall structure, in this embodiment, an aerial temporary storage station for transporting wafer boxes 16 includes: a pallet 9, two parallel slide rails 1 and two lower slide rails 2, the lower slide rails 2 are mounted on the bottom of the slide rail 1 and the track direction of the lower slide rail 2 is perpendicular to the slide rail 1, the lower slide rail 2 is vertically fixed with a length-adjustable connecting rod 3 on the top of both sides of the corresponding slide rail 1, the connecting rod 3 is slidably connected to the bottom surface of the slide rail 1, the bottom surfaces of the two lower slide rails 2 are respectively slidably connected with vertical plates 4 along their tracks, and the ends of the two vertical plates 4 away from the slide rail 1 are fixedly connected with a horizontal bottom beam 13, the bottom beam 13 includes at least two and is arranged in parallel, the pallet 9 includes at least two and the bottom surface is fixedly connected to the bottom beam 13, the two parallel outer sides of the bottom beam 13 are also fixed with a reflector 12, the two parallel outer sides of the slide rail 1 are also provided with a regression reflection sensor 17 corresponding to the reflector 12, the pallet 9 includes at least two and each pallet 9 has a three-point positioning pin 10 protruding from the top surface.

[0026] like Figure 2 , Figure 3 as well as Figure 4 As shown, for the above-mentioned specific structure, in this scheme, the top surface of the slide rail 1 is evenly distributed with mounting holes 14, and the bottom surface is provided with a slide groove. The top end of the connecting rod 3 is slidably connected in the slide groove, and the slide rail 1 is connected and fixed to the roof of the external dust-free workshop through the mounting hole 14. The connecting rod 3 is adjusted by a screw nut, and the adjustment amount is not less than 50mm. Fixed angle blocks 5 are also provided at the four corners of the vertical plate 4, and the fixed angle blocks 5 are respectively used to connect the top of the vertical plate 4 with the lower slide rail 2 and the bottom of the vertical plate 4 with the bottom beam 13. The protruding height of the positioning pin 10 does not exceed 12mm, and its top end is in a smooth truncated cone state. The bottom surface of the wafer is provided with a card slot 15 corresponding to the positioning pin one by one, and the top end of the positioning pin 10 is embedded in the card slot 15.

[0027] Furthermore, pull blocks 6 are bolted to the outer sides of the two fixed angle blocks 5 corresponding to the lower slide rail 2, and pull rods 7 are bolted to the outer sides of the two fixed angle blocks 5 corresponding to the bottom beam 13. The two pull blocks 6 are arranged outside the exposed fixed angle blocks 5 and the side edges of the vertical plates 4 are bolted to the exposed parts, and anti-fall rods parallel to the slide rail 1 are also bolted to the opposite outer ends of the two pull rods 7.

[0028] The pull rod 7 and the anti-drop rod are spliced ​​into an integrated frame structure surrounding the outside of the support plate 9, and are arranged flush with the support plate 9. The reflectors 12 are grouped in pairs and each group of reflectors corresponds to a wafer box 16. The back of each reflector 12 is fixedly connected to the anti-drop rod through a plate frame 11. The plate frame 11 is tilted and the tilt angle corresponds to the reflector 12. When the wafer box 16 is placed on the support plate 9, the wafer box 16 can block the emission circuit of the reflector 12. The plate frame 11 includes multiple types according to the tilt angle, and each type of the plate frame 11 corresponds to the size of the wafer box 16. The model of the regression reflection sensor 17 depends on the model of the overhead crane.

[0029] Through the above structure, the aerial temporary storage station in the present application is fixed on the roof of a dust-free workshop, etc., and the slide rail 1 is installed at a fixed interval. The slide rail 1 is provided with a mounting hole 14 for fixing the slide rail 1. Due to the large number of holes, it can meet the installation requirements of various different distances. At the bottom of the slide rail 1 is a connecting rod 3 that can adjust the height of the support plate 9 along the length direction. The adjusting rod is adjusted by a screw nut, and the adjustment amount is 50mm. Below the connecting rod 3 is the lower slide rail 2, and the slide rail 1 and the lower slide rail 2 can meet the front and back left and right adjustment of the support plate 9. The lower slide rail 2 is fixedly connected to the angle seat below, and the pull block 6 is fixed below it, and the vertical plate 4 is fixed below the pull block 6.

[0030] The two vertical plates 4 are fixed with two brackets on the top and two bottom beams 13 on the bottom. Two support plates 9 are fixed on the two bottom beams 13. The support plates 9 are fixedly connected with positioning pins 10. Pull rods 7 and 7 are fixed on both sides of the two vertical plates 48. The other ends of the two pull rods 7 are fixed with anti-fall rods. The other ends of the two pull rods 7 are also fixed with another anti-fall rod. The two anti-fall rods are fixed with plate frames 11, and the plate frames 11 are fixed with reflectors 12.

[0031] like Figure 5 As shown, the three positioning pins 10 can accurately position the three grooves under the wafer box 16, thereby better improving the position accuracy of the wafer box 16.

[0032] For the detection process, when the overhead crane moves to the specified position and stops in front of or behind the aerial temporary storage station, the regression reflection sensor 17 on the overhead crane emits light at a set angle to illuminate the reflector 12. When there is a wafer box 16 on the pallet 9, the light cannot return through the reflector 12, so that the regression reflection sensor 17 cannot receive the return light, thereby letting the overhead crane know that there is a wafer box 16 at this position, and the wafer box 16 can be taken out, but the wafer box 16 cannot be placed; when there is no wafer box 16 on the pallet 9, the light will shine on the reflector 12, pass through the reflector 12, and return the light, so that the regression reflection sensor 17 receives the return light and determines that there is no wafer box 16 at the current position, thereby letting the overhead crane know that the wafer box 16 can be placed at this position without taking the wafer box 16.

[0033] Similarly, an aerial temporary storage system including the above-mentioned aerial temporary storage station is also within the protection scope of the present utility model. Specifically, an aerial temporary storage system for transporting wafer boxes 16 includes multiple aerial temporary storage stations for transporting wafer boxes 16 as described above. The multiple aerial temporary storage stations are adjacent to each other and arranged corresponding to the destination loading ports of the external wafer boxes 16. They are connected by multiple parallel servo docking to realize the integrated automated aerial transportation operation of the wafer boxes 16.

[0034] The technical scope of the present invention is not limited to the contents described above. Those skilled in the art can make various deformations and modifications to the above embodiments without departing from the technical concept of the present invention, and these deformations and modifications should all fall within the protection scope of the present invention.

Claims

1. An aerial temporary storage station for wafer box transportation, characterized in that: include: The cam is provided with a plurality of connecting rods, each of which is connected to a pair of connecting rods, and the connecting rods are connected to the cam bottom surface of the cam, and the connecting rods are connected to the cam bottom surface of the cam, and the cam bottom surfaces of the two connecting rails are connected to the cam bottom surfaces along the connecting rails.

2. The aerial temporary storage station for wafer box transportation according to claim 1, characterized in that: The top surface of the slide rail is evenly and evenly provided with mounting holes, and the bottom surface thereof is provided with a slide groove, the top end of the connecting rod is slidably connected in the slide groove, and the slide rail is connected and fixed to the roof of the external dust-free workshop through the mounting holes.

3. The aerial temporary storage station for wafer box transportation according to claim 1, characterized in that: The connecting rod is adjusted by a screw nut, and the adjustment amount is not less than 50mm.

4. The aerial temporary storage station for wafer box transportation according to claim 1, characterized in that: The four corners of the vertical plate are also provided with fixed corner blocks, and the fixed corner blocks are respectively used to connect the top of the vertical plate with the lower sliding rail and the bottom of the vertical plate with the bottom beam.

5. The aerial temporary storage station for wafer box transportation according to claim 4, characterized in that: Pull blocks are bolted to the outer sides of the two fixed angle blocks corresponding to the lower sliding rail, and pull rods are bolted to the outer sides of the two fixed angle blocks corresponding to the bottom beam. The two pull blocks are arranged with exposed fixed angle blocks and the side edges of the vertical plates are bolted to the exposed parts. Anti-fall rods parallel to the sliding rails are also bolted to the opposite outer ends of the two pull rods.

6. The aerial temporary storage station for wafer box transportation according to claim 5, characterized in that: The pull rod and the anti-drop rod are spliced ​​into an integrated frame structure surrounded by the outside of the support plate and are arranged flush with the support plate. The reflectors are grouped in pairs and each group of reflectors corresponds to a wafer box. The back of each reflector is fixedly connected to the anti-drop rod through a plate frame.

7. The aerial temporary storage station for wafer box transportation according to claim 6, characterized in that: The frame is tilted and the tilt angle corresponds to the reflector. When a wafer box is placed on the pallet, the wafer box can block the reflector emission circuit. The frame includes multiple types according to the tilt angle, and each type of frame corresponds to the size of the wafer box.

8. The aerial temporary storage station for wafer box transportation according to claim 1, characterized in that: The protruding height of the positioning pin does not exceed 12 mm, and the top end thereof is in a smooth truncated cone state. The bottom surface of the wafer is provided with a card slot corresponding to the positioning pin one by one, and the top end of the positioning pin is embedded in the card slot.

9. An aerial temporary storage system for wafer box transportation, characterized in that: It comprises a plurality of aerial temporary storage stations for wafer box transport as described in any one of claims 1 to 8, wherein the plurality of aerial temporary storage stations are arranged adjacently and in parallel and corresponding to the destination loading ports of the external wafer boxes.

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