Non-contact cyclone insertion hand

Abstract

The utility model relates to a non-contact cyclonic insertion hand, which comprises a cyclonic Bernoulli suction cup and a plurality of limiting blocks arranged on the cyclonic Bernoulli suction cup and used for limiting the suspension position of a wafer, and is characterized in that the plurality of limiting blocks are arranged around the cyclonic Bernoulli suction cup, and meanwhile, chamfering design is performed on the limiting blocks, so that the wafer suspension position can be limited; according to the technical scheme, the wafer can be basically transferred in a non-contact mode, the wafer can suspend in an area limited by the limiting blocks, the risk of wafer subfissure caused by deflection due to shaking when the wafer is transferred is effectively reduced, and the problem that the wafer is prone to large-amplitude shaking when the wafer is adsorbed and moved by the cyclone type Bernoulli suction cup to cause deflection is solved.

Description

Technical Field

[0001] The present application relates to the technical field of wafer transfer, and in particular to a non-contact cyclone inserter. Background Art

[0002] During the chip production process, wafers need to be cut and transported between various processes.

[0003] In the related technology, a Bernoulli suction cup is usually used to adsorb and transfer the wafer. However, since the wafer is in a suspended state during the adsorption process, it often shakes left and right during the transfer, causing the wafer to deflect during the transfer. Alternatively, a Bernoulli suction cup is used in combination with a friction pad to adsorb the wafer, and all of the above require contact with the wafer, which will cause contamination to the wafer.

[0004] In order to solve the above problems, the present application provides a non-contact cyclone inserter. Utility Model Content

[0005] In order to solve the problem that the wafer is prone to shake greatly when being sucked by the Bernoulli suction cup, thereby causing deflection, the present application provides a non-contact cyclone suction cup.

[0006] The non-contact cyclone intervention provided in this application adopts the following technical solution:

[0007] A non-contact cyclone suction cup comprises a cyclone Bernoulli suction cup and a plurality of limit blocks arranged on the cyclone Bernoulli suction cup for limiting the floating position of a wafer.

[0008] By adopting the above technical solution: the cyclone Bernoulli suction cup adsorbs the wafer according to the Bernoulli principle, so that the wafer is suspended in the air for contactless transfer; and the setting of the limit block enables the wafer to be suspended in the area defined by the limit block, effectively reducing the occurrence of shaking during wafer transfer, causing the wafer to deflect.

[0009] Preferably, a chamfer is designed on one side of the plurality of limit blocks close to the wafer.

[0010] By adopting the above technical solution: the use of chamfer design can effectively reduce the hidden cracks on the wafer caused by adsorption and transportation.

[0011] Preferably, the plurality of limit blocks include movable limit blocks that are movably arranged and fixed limit blocks that are fixedly arranged.

[0012] By adopting the above technical solution, the size of the limited area can be adjusted by relying on the cooperation between the fixed limiting block and the movable limiting block.

[0013] Preferably, the cyclonic Bernoulli chuck is provided with a driving member for driving a movable limit block to clamp the wafer.

[0014] By adopting the above technical solution: the driving member drives the movable limiting block so that the limited area range can be changed to clamp and limit the wafer.

[0015] Preferably, the driving member is a cylinder and / or a motor screw.

[0016] By adopting the above technical solution: the cylinder drives the movable limit block, or the movable limit block is installed on the motor lead screw to reciprocate and perform linear motion, so that the size of the limit area can be adjusted.

[0017] Preferably, the cyclonic Bernoulli suction cup is provided with a fixing component for locking and fixing the limit block.

[0018] By adopting the above technical solution, the setting of the fixing assembly enables the limit block to be fixed on the upper cover plate and the lower base plate more firmly.

[0019] Preferably, the fixing assembly includes bolts, and the cyclonic Bernoulli suction cup and the limiting block are penetrated with fastening holes adapted to the bolts.

[0020] By adopting the above technical solution: a plurality of limit blocks are aligned with the fastening holes on the upper cover plate and the lower base plate respectively, and bolts are inserted into the fastening holes for fixing and locking.

[0021] Preferably, the cyclone Bernoulli suction cup comprises a lower bottom plate and an upper cover plate detachably arranged on the lower bottom plate, the lower bottom plate and the upper cover plate are in a U-shaped ring shape, a guide groove is provided on the lower bottom plate, including a main guide groove and a plurality of branch guide grooves, and a plurality of suction cup openings and a plurality of air outlets are penetrated on the upper cover plate and the lower bottom plate;

[0022] One end of the main flow channel away from the branch flow channel is connected to a high-speed airflow;

[0023] A plurality of branch guide grooves are laid along the direction of the U-shaped ring and surround the suction cup opening;

[0024] The suction cup opening is a circular opening, and a plurality of air flow cutouts communicating with the branch guide grooves are arranged on the suction cup opening.

[0025] By adopting the above technical solution: high-speed airflow converges from the main flow groove, flows along several branch guide grooves in the direction of the U-shaped ring of the lower bottom plate and flows out from the air outlet; the suction cup mouth is wrapped between several branch guide grooves, and the high-speed airflow flows into the suction cup mouth from several air flow cuts, rotates to form a cyclone, so that the air pressure at the center of the suction cup mouth is greatly reduced, generating negative pressure, and the atmospheric pressure presses the object at the suction cup mouth, so that the product that can be adsorbed can be suspended in the adsorption area.

[0026] Preferably, the inner wall of the guide groove is provided with a sealing strip capable of sealing the high-speed airflow in the guide groove.

[0027] By adopting the above technical solution: the setting of the sealing strip is conducive to maintaining the airtightness inside the guide groove, so that the high-speed airflow will not escape from the gap, thereby ensuring the stability of the airflow velocity, and helping to reduce the situation where the suction cup mouth cannot generate a strong enough negative pressure due to air leakage, resulting in adsorption failure.

[0028] Preferably, the upper cover plate is provided with a clamping plate which corresponds to the position of the guide groove on the lower base plate and can be adapted to be clamped with the guide groove, and the thickness of the clamping plate is smaller than the depth of the guide groove.

[0029] By adopting the above technical solution: the clamping plate on the upper cover is aligned with the guide groove on the lower bottom plate and inserted into the guide groove, so that the upper cover plate and the lower bottom plate are clamped together.

[0030] In summary, the present application includes at least one of the following beneficial technical effects:

[0031] 1. The present application provides a plurality of limit blocks on the cyclonic Bernoulli suction cup, and at the same time, provides a chamfer design on the limit blocks, so that the wafer can be transferred without contact, and the wafer can be suspended in the area defined by the limit blocks, effectively reducing the risk of wafer cracking caused by deflection caused by shaking during wafer transfer;

[0032] 2. The present application provides a sealing strip on the inner wall of the guide groove, which is conducive to maintaining the airtightness of the guide groove so that the high-speed airflow will not escape from the gap, thereby ensuring the stability of the airflow velocity;

[0033] 3. The present application sets a clip plate on the upper cover plate corresponding to the position of the guide groove on the lower base plate. On the one hand, the upper cover plate can be well clipped and fixed on the lower base plate. On the other hand, the thickness of the clip plate is smaller than the depth of the guide groove, which reserves a certain space channel for air circulation in the guide groove. BRIEF DESCRIPTION OF THE DRAWINGS

[0034] Figure 1 It is a schematic diagram of the overall structure of the non-contact cyclone inserter according to an embodiment of the present application;

[0035] Figure 2 It is a structural schematic diagram of the upper cover plate of the non-contact cyclone insert in the embodiment of the present application;

[0036] Figure 3 It is a structural schematic diagram of the lower base plate of the non-contact cyclone insert according to an embodiment of the present application.

[0037] Figure numerals: 1, lower base plate; 2, upper cover plate; 3, limit block; 311, movable limit block; 312, fixed limit block; 32, chamfer; 41, bolt; 42, fastening hole; 5, main guide groove; 6, branch guide groove; 7, suction cup mouth; 71, air flow cutout; 8, air outlet; 9, sealing strip; 10, clamping plate; 11, motor screw; 12, cylinder. DETAILED DESCRIPTION

[0038] The present application is further described in detail below in conjunction with the accompanying drawings.

[0039] Example 1

[0040] The present application embodiment discloses a non-contact cyclone inserter, referring to Figure 1 , including a cyclonic Bernoulli suction cup and a limiting block 3. The cyclonic Bernoulli suction cup is composed of an upper cover plate 2 and a lower base plate 1 which are arranged in sequence from top to bottom. Four limiting blocks 3 are installed around the upper cover plate 2 and the lower base plate 1. The wafer is adsorbed in the air by the cyclonic Bernoulli suction cup, and the setting of the limiting block 3 enables the wafer to be suspended in the area defined by the limiting block 3, which effectively reduces the shaking and deflection of the wafer during transfer;

[0041] In order to reduce the risk of wafer cracking caused by wafer deflection and collision with the stop block 3 during wafer transfer, refer to Figure 1 The side of the limiting block 3 close to the wafer is chamfered 32 to effectively reduce the damage to the wafer caused by adsorption and transportation.

[0042] The limit block 3 includes a movable limit block 311 and a fixed limit block 312 respectively arranged on the lower base plate 1 and the upper cover plate 2. In order to enable the movable limit block 311 to be slidably adjusted, refer to Figure 1 A driving member is installed on the movable limit block 311. In this embodiment, a motor screw 11 is installed between the movable limit block 311 and the lower base plate 1, and a cylinder 12 is installed on the lower base plate 1. The movable limit block 311 is driven by the cylinder 12 to slide on the motor screw 11, so that the size of the limited area can be adjusted;

[0043] In order to firmly fix the fixed limit block 312 on the upper cover plate 2, refer to Figure 2 and Figure 3 A fixing assembly is provided on the upper cover plate 2, which in this embodiment is a bolt 41 and a fastening hole 42 that penetrates the fixed limit block 312 and the upper cover plate 2. The bolt 41 is inserted into the fastening hole 42 on the fixed limit block 312, and the fixed limit block 312 is aligned with the fastening hole 42 of the upper cover plate 2, so that it can be fixed and locked.

[0044] Reference Figure 2 and Figure 3The cyclone Bernoulli suction cup also includes a main flow groove 5 and four branch flow grooves 6 opened on the lower bottom plate 1, six suction cup openings 7 used in pairs and a plurality of air outlet holes 8 which are arranged on the lower bottom plate 1 and the upper cover plate 2;

[0045] The lower bottom plate 1 and the upper cover plate 2 are in a U-shaped ring shape, and the four branch guide grooves 6 are symmetrically laid along the direction of the U-shaped ring and surround the suction cup opening 7. The end of the main guide groove 5 away from the branch guide groove 6 is connected to a high-speed airflow. The suction cup opening 7 is a circular opening, and each suction cup opening 7 is provided with four airflow cutouts 71 connected to the two branch guide grooves 6;

[0046] The high-speed airflow flows from the main flow groove 5 into the four branch flow grooves 6 and flows out from the air outlet 8. The suction cup mouth 7 is wrapped between the two branch flow grooves 6. The high-speed airflow flows into the suction cup mouth 7 from the air flow cutout 71 and rotates to form a cyclone, which greatly reduces the air pressure at the center of the suction cup mouth 7 and generates negative pressure. The atmospheric pressure will press the object against the suction cup mouth 7, so that the product that can be adsorbed can be suspended in the adsorption area.

[0047] To maintain the stability of the entire insertion plane, refer to Figure 1 The four limit blocks 3 are symmetrically arranged around the upper cover plate 2 and the lower base plate 1 along the central axis of the U-shaped ring, and the deadweight of the limit blocks 3 is evenly distributed on the upper cover plate 2 and the lower base plate 1.

[0048] Reference Figure 2 A sealing strip 9 is also installed on the inner wall of the main guide groove 5 and the branch guide groove 6. The sealing strip 9 can effectively reduce the occurrence of gas escaping from the guide groove, which is beneficial to maintaining the flow stability of the high-speed airflow.

[0049] In order to achieve the goal of not affecting the high-speed gas flow in the guide groove, the upper cover plate 2 and the lower base plate 1 can be clamped and fixed together, referring to Figure 2 and Figure 3 A snap-in plate 10 corresponding to the position of the guide groove on the lower base plate 1 is provided on the upper cover plate 2. The thickness of the snap-in plate 10 is less than the depth of the guide groove. The snap-in plate 10 can be adapted and connected with the guide groove. The snap-in plate 10 on the upper cover plate 2 is aligned with the guide groove on the lower base plate 1 and inserted so that they can be snap-fitted and fixed to each other.

[0050] The working process and implementation principle in Example 1 are as follows: turn on the high-speed airflow switch, so that the high-speed airflow is transported to the two pairs of branch guide grooves 6 through the main guide groove 5, and flows into the suction cup mouth 7 through the airflow cutout 71 on the suction cup mouth 7, forming a cyclone, so that the suction cup mouth 7 is under negative pressure. At this time, the cyclone is inserted and aimed at the wafer to be transported, so that the wafer can be suspended and adsorbed, so that the wafer can be transported without contact. At the same time, thanks to the limit blocks 3 with chamfers 32 designed symmetrically installed around the upper cover plate 2 and the lower base plate 1, the wafer can be suspended in the area defined by the limit blocks 3, effectively reducing the risk of shaking and deflection of the wafer during transfer, and further reducing the invisible damage to the wafer caused by adsorption and transportation. If the size of the limited area needs to be adjusted, it is only necessary to turn on the switch of the cylinder 12 to drive the movable limit block 311 to move on the motor screw 11.

[0051] The above are preferred embodiments of the present application, and the protection scope of the present application is not limited thereto. Therefore, any equivalent changes made according to the structure, shape, and principle of the present application should be included in the protection scope of the present application.

Claims

1. A non-contact cyclone intervention, characterized in that: It comprises a cyclonic Bernoulli suction cup and a plurality of limit blocks (3) arranged on the cyclonic Bernoulli suction cup for limiting the floating position of a wafer, wherein a chamfer (32) is designed on a side of the plurality of limit blocks (3) close to the wafer, and the plurality of limit blocks (3) comprise a movable limit block (311) which is movably arranged and a fixed limit block (312) which is fixedly arranged; The cyclone Bernoulli suction cup comprises a lower bottom plate (1) and an upper cover plate (2) detachably arranged on the lower bottom plate (1); the lower bottom plate (1) and the upper cover plate (2) are in a U-shaped ring shape; a guide groove is provided on the lower bottom plate (1), comprising a main guide groove (5) and a plurality of branch guide grooves (6); and a plurality of suction cup openings (7) and a plurality of air outlet holes (8) are provided through the upper cover plate (2) and the lower bottom plate (1); One end of the main flow channel (5) away from the branch flow channel (6) is connected to a high-speed airflow; A plurality of branch guide grooves (6) are laid along the direction of the U-shaped ring and surround the suction cup opening (7); The suction cup opening (7) is a circular opening, and is provided with a plurality of air flow cutouts (71) which are connected to the branch guide grooves (6).

2. The non-contact cyclone inserter according to claim 1 is characterized in that: The cyclonic Bernoulli suction cup is provided with a driving component for driving a movable limiting block (311) to clamp a wafer.

3. The non-contact cyclone inserter according to claim 2 is characterized in that: The driving member is a cylinder (12) and / or a motor screw (11).

4. The non-contact cyclone inserter according to claim 1, characterized in that: The cyclonic Bernoulli suction cup is provided with a fixing assembly for locking and fixing the limit block (312).

5. The non-contact cyclone inserter according to claim 4 is characterized in that: The fixing assembly comprises a bolt (41), and a fastening hole (42) adapted to the bolt (41) is formed through the cyclonic Bernoulli suction cup and the fixed limit block (312).

6. The non-contact cyclone inserter according to claim 1, characterized in that: The inner wall of the guide groove is provided with a sealing strip (9) capable of sealing the high-speed airflow in the guide groove.

7. The non-contact cyclone inserter according to claim 1, characterized in that: The upper cover plate (2) is provided with a clamping plate (10) which corresponds to the position of the guide groove on the lower base plate (1) and can be adapted to be clamped with the guide groove, and the thickness of the clamping plate (10) is less than the depth of the guide groove.

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