Spray plate for side wall passivation coating equipment and side wall passivation coating equipment

Abstract

The utility model discloses a spraying plate for side wall passivation coating equipment, which comprises a first spraying cavity, a second spraying cavity, a third spraying cavity and a fourth spraying cavity, the second spraying cavity is adjacent to the first spraying cavity and is used for storing a second reactant, and a second ring groove is formed in the edge of the second spraying cavity; the first spraying opening is formed in the bottom of the first spraying cavity, and the second spraying opening is formed in the bottom of the second spraying cavity and used for spraying; and the temperature measuring channel is arranged in the second spraying cavity and used for monitoring the temperature in the coating process, and a thermometer is arranged in the temperature measuring channel. According to the spraying plate provided by the utility model, the sprayed medium can be uniformly distributed on the side surface of the battery piece, so that the cost is saved, and the production process is optimized.

Description

Technical Field

[0001] The utility model relates to the field of solar cells, in particular to a spray plate of a coating device for producing solar cells, and in particular to a spray plate and a coating device for side wall passivation coating equipment. Background Art

[0002] Solar cells are semiconductor devices that convert sunlight directly into electrical energy. They are environmentally friendly, green and renewable, so in today's energy shortage situation, solar cells have broad development prospects. In the production process of solar cells, coating plays a vital role in improving the conversion efficiency of cells. In the coating process, the medium needs to be sprayed out from the spray plate and diffused onto the surface of the cell to coat the film.

[0003] In the prior art, there is already a spray plate used for surface passivation. However, when this prior art spray plate is used in a sidewall passivation coating device, there is the following defect: the sprayed medium cannot be evenly distributed to the side of the battery cell.

[0004] It can be seen that overcoming the shortcomings of the prior art and providing an improved spray plate that can evenly distribute the sprayed medium to the sides of the battery cell, ultimately reducing costs and improving production efficiency, has become a technical problem that needs to be urgently solved by those skilled in the art. Utility Model Content

[0005] The purpose of the utility model is to overcome the defects of the prior art and provide a spray plate. The spray plate provided by the utility model is simple to set up and convenient to process, which reduces the cost and improves the production efficiency.

[0006] The first aspect of the utility model relates to a spray plate for a sidewall passivation coating device, comprising:

[0007] A first spray chamber, used for storing a first reactant and having a first ring groove at the edge;

[0008] A second spray chamber adjacent to the first spray chamber is used to store a second reactant and is provided with a second ring groove at the edge;

[0009] A first spray outlet at the bottom of the first spray chamber and a second spray outlet at the bottom of the second spray chamber are provided for spraying;

[0010] The temperature measurement channel in the second spray chamber is used to monitor the temperature during the coating process.

[0011] A thermometer is provided in the temperature measuring channel.

[0012] Preferably, the first reactant is trimethylaluminum or water.

[0013] Preferably, the second reactant is nitrogen.

[0014] Preferably, the first groove and the second groove are O-shaped.

[0015] Preferably, the first ring groove and the second ring groove are rubber rings.

[0016] Preferably, the distances between adjacent lamp tubes are equal.

[0017] Preferably, it also includes a connecting member arranged below the isolating member.

[0018] The second aspect of the utility model relates to a side wall passivation coating device, comprising the spray plate involved in the first aspect of the utility model.

[0019] Compared with the prior art, the utility model has the following advantages:

[0020] The spray plate provided by the utility model has simple arrangement and convenient process, thus reducing heating cost and improving production efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 It is a structural schematic diagram of the spray plate of the utility model.

[0022] Description of Reference Numerals

[0023] 1First spray chamber

[0024] 2 Second spray chamber

[0025] 3 temperature measurement channels

[0026] 1A first circle groove

[0027] 1B First outlet

[0028] 2A Second ring groove

[0029] 2B first outlet DETAILED DESCRIPTION

[0030] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the following embodiments are only some specific implementation methods of the utility model, but not all embodiments. The following exemplary embodiment description is only illustrative and does not limit the utility model and its application or use. Based on the description of the utility model, all other technical solutions obtained by ordinary technicians in this field without creative labor are within the scope of protection of the utility model.

[0031] For ease of description, the present invention uses spatially relative terms, such as "above", "above", "on the upper surface of", "above", etc., to describe the spatial positional relationship between a device or feature and other devices or features as shown in the figures. It should be understood that the spatially relative terms are intended to include different orientations of the device in use or operation in addition to the orientation described in the figure. For example, if the device in the accompanying drawings is inverted, the device described as "above" or "above" will be positioned as "below" or "below". Thus, the exemplary term "above" can include both "above" and "below". The device can also be positioned in other different ways (rotated 90 degrees or in other orientations), and the spatially relative descriptions used here are interpreted accordingly.

[0032] like Figure 1 As shown, the first aspect of the utility model is a spray plate, comprising: a first spray chamber 1 , a second spray chamber 2 , and a temperature measurement channel 3 .

[0033] The first spray chamber 1 is used to store the first reactant and is provided with a first groove 1A at the edge. The first groove 1A has a sealing effect and is preferably an O-shaped rubber ring, but is not limited thereto and may also be other suitable shapes and made of suitable materials other than rubber. The first spray port 1B is provided at the bottom of the first spray chamber 1 and is used for spraying and ejecting the first reactant. The first spray port 1B is preferably in a strip shape, but is not limited thereto and may also be in other suitable shapes. The first reactant is preferably trimethylaluminum or water, but is not limited thereto and may also be changed to other suitable reactants according to actual spraying needs.

[0034] The second spray chamber 2 is adjacent to the first spray chamber 1, and is used to store the second reactant and has a second groove 2A at the edge. The second groove 2A has a sealing effect, and is preferably an O-shaped rubber ring, but is not limited thereto, and may also be other suitable shapes, and the material may also be a suitable material other than rubber.

[0035] The second spray port 2B is disposed at the bottom of the second spray chamber 2 and is used for spraying and ejecting the second reactant.

[0036] The second spray port 2B is preferably in a strip shape, but is not limited thereto, and may also be in other suitable shapes. The second reactant is preferably nitrogen, but is not limited thereto, and may also be changed to other suitable reactants according to actual spraying needs.

[0037] The temperature measuring channel 3 is provided in the second spray chamber 2 for monitoring the temperature during the coating process. Preferably, a thermometer is provided in the temperature measuring channel 3 for temperature monitoring.

[0038] The second aspect of the utility model is a sidewall passivation coating device, which includes the spray plate involved in the first aspect of the utility model. When the entire system is working, the reactant (gas) is sprayed downward from the spray plate, and the first groove 1A and the second groove 2A play a sealing role to ensure that the reactants are not mixed together and the gas in the spray chamber is single, so that the sprayed reactants are evenly distributed to the side of the battery cell. The thermometer set in the temperature measurement channel 3 measures the temperature of the workpiece in the cavity, that is, the reaction temperature, and makes appropriate adjustments to the spray process according to the reaction temperature.

[0039] The spray plate of the utility model is used in the coating process of the coating equipment. After testing, it can make the sprayed reactants evenly distributed on the sides of the battery sheet. The process of setting the spray plate is simple and convenient, which reduces the cost and improves the production efficiency.

[0040] Although the embodiments of the present invention are described in detail above, it is obvious to those skilled in the art that various modifications and variations can be made to these embodiments. However, it should be understood that such modifications and variations are within the scope and spirit of the present invention as described in the claims. Moreover, the present invention described herein may have other embodiments and may be implemented or realized in a variety of ways.

Claims

1. A shower plate for side wall passivation coating equipment, characterized in that: include: A first spray chamber, used for storing a first reactant and having a first ring groove at the edge; A second spray chamber adjacent to the first spray chamber is used to store a second reactant and is provided with a second ring groove at the edge; A first spray outlet at the bottom of the first spray chamber and a second spray outlet at the bottom of the second spray chamber are provided for spraying; The temperature measurement channel in the second spray chamber is used to monitor the temperature during the coating process. A thermometer is provided in the temperature measuring channel.

2. The shower plate for side wall passivation coating equipment according to claim 1, characterized in that: The first reactant is trimethylaluminum or water.

3. The shower plate for side wall passivation coating equipment according to claim 1, characterized in that: The second reactant is nitrogen.

4. The shower plate for sidewall passivation coating equipment according to claim 1, characterized in that: The first groove and the second groove are in an O shape.

5. The shower plate for side wall passivation coating equipment according to claim 1, characterized in that: The first ring groove and the second ring groove are rubber rings.

6. The shower plate for side wall passivation coating equipment according to claim 1, characterized in that: The spray outlet is strip-shaped.

7. A sidewall passivation coating device, characterized in that: include: A shower plate for side wall passivation coating equipment as described in any one of claims 1 to 6.

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