Diffusion furnace gas supply assembly for solar cell diffusion process

Abstract

The utility model discloses a diffusion furnace gas supply assembly for a solar cell diffusion process, which belongs to the technical field of diffusion furnaces and comprises a main gas inlet pipe and a branch gas inlet pipe, the main gas inlet pipe and the branch gas inlet pipe are connected in parallel in the diffusion furnace, and the end parts of the main gas inlet pipe and the branch gas inlet pipe are respectively provided with a rotary gas outlet assembly; the rotary air outlet assembly comprises a connecting sleeve, a rotary sleeve and an air outlet cylinder, the connecting sleeve is rotationally connected to the end of the main air inlet pipe and the end of the branch air inlet pipe, a pneumatic driving assembly is installed in the rotary sleeve, air inlet airflow can drive the rotary sleeve to rotate through the pneumatic driving assembly, and multiple sets of air outlet holes are formed in the air outlet cylinder. According to the gas supply assembly of the diffusion furnace, the rotary gas outlet assembly capable of rotatably discharging gas is assembled at the end parts of the main gas inlet pipe and the branch gas inlet pipe, so that gas can be dynamically supplied to the inside of the diffusion furnace in multiple directions, the gas required by diffusion is uniformly supplied, the diffusion reaction is uniform, and the doping amount difference of battery pieces is effectively reduced.

Description

Technical Field

[0001] The utility model belongs to the technical field of diffusion furnaces, and in particular relates to a diffusion furnace gas supply component used in a diffusion process of a solar cell sheet. Background Art

[0002] At present, the air inlet position of the diffusion furnace is the same. An air inlet pipe is extended from the furnace tail to about 20-30cm from the furnace mouth. The gas required for diffusion is introduced at this position, and the gas is pumped toward the furnace tail through a vacuum pump and discharged through the tail exhaust. Since phosphorus oxychloride decomposes above 600℃, phosphorus pentachloride in the product reacts with oxygen. At present, the process temperature when phosphorus oxychloride is introduced is 750-800℃, which accelerates the decomposition and the reaction of the product with oxygen, resulting in a large difference in the doping amount of the battery cells from the furnace mouth to the furnace tail.

[0003] In the prior art, although the number of air intake pipes is increased, a branch air intake pipe is added at the tail of the diffusion furnace tube, the doping amount from the furnace to the tail is increased, the uniformity inside the tube / chip is optimized, and the efficiency is improved, but the direction and position of the end outlet of both the main air intake pipe and the branch air intake pipe are fixed, resulting in the gas required for diffusion being relatively concentrated inside the diffusion furnace, which is prone to uneven diffusion reaction and will also cause differences in the doping amount of the battery cells.

[0004] Therefore, in view of the above technical problems, it is necessary to provide a diffusion furnace gas supply component for the solar cell diffusion process.

[0005] The information disclosed in this background technology section is only intended to increase the understanding of the overall background of the present invention, and should not be regarded as acknowledging or suggesting in any form that the information constitutes the prior art already known to a person skilled in the art. Utility Model Content

[0006] The utility model aims to provide a diffusion furnace gas supply assembly for a solar cell diffusion process, which can solve the problem that the direction and position of the gas outlet at the end of the air inlet pipe are fixed, resulting in the gas required for diffusion being relatively concentrated inside the diffusion furnace, which is prone to uneven diffusion reaction and causes differences in the doping amount of the solar cells.

[0007] In order to achieve the above-mentioned purpose, a specific embodiment of the utility model provides a diffusion furnace air supply assembly for a solar cell diffusion process, comprising a main air inlet pipe and a branch air inlet pipe, wherein the main air inlet pipe and the branch air inlet pipe are connected in parallel inside the diffusion furnace, and the ends of the main air inlet pipe and the branch air inlet pipe are both equipped with a rotating air outlet assembly; the rotating air outlet assembly comprises a connecting sleeve, a rotating sleeve and an air outlet cylinder, the connecting sleeve is rotatably connected to the ends of the main air inlet pipe and the branch air inlet pipe, a pneumatic drive assembly is installed inside the rotating sleeve, and the intake air flow can drive the rotating sleeve to rotate through the pneumatic drive assembly, and a plurality of air outlet holes are provided on the air outlet cylinder.

[0008] By assembling rotating gas outlet components that can rotate gas outlet at the ends of the main gas inlet pipe and the branch gas inlet pipe, gas can be supplied to the diffusion furnace in multiple directions dynamically, so that the gas required for diffusion is supplied evenly, thereby making the diffusion reaction uniform and effectively reducing the difference in the doping amount of the battery cells.

[0009] In one or more embodiments of the present invention, the connecting sleeve has a rotary sealing structure at the end of the main intake pipe and the end of the branch intake pipe.

[0010] The rotary sealing structure enables the connecting sleeve to be sealed and rotated at the ends of the main intake pipe and the branch intake pipe.

[0011] In one or more embodiments of the present utility model, the rotary sealing structure includes a limiting groove and a limiting boss, the limiting groove is opened on the inner wall of the connecting sleeve, the limiting boss is fixedly connected to the outer walls of the main intake pipe and the branch intake pipe, and the limiting groove matches the limiting boss.

[0012] The limiting boss is rotatably connected to the inside of the limiting groove, so that the connecting sleeve can be limitedly rotated at the ends of the main intake pipe and the branch intake pipe.

[0013] In one or more embodiments of the present invention, the outer wall of the limiting boss fits with the inner wall of the limiting groove.

[0014] The outer wall of the limiting boss fits with the inner wall of the limiting groove, which can ensure the sealing of the connection between the connecting sleeve and the main intake pipe and the branch intake pipe.

[0015] In one or more embodiments of the present invention, the ends of the main air intake pipe and the branch air intake pipe are inserted into the interior of the connecting sleeve and communicate with the interior of the rotating sleeve.

[0016] The ends of the main air intake pipe and the branch air intake pipe are inserted into the interior of the connecting sleeve, which can increase the structural strength between the main air intake pipe, the branch air intake pipe and the connecting sleeve, making it difficult for the connecting sleeve to fall off.

[0017] In one or more embodiments of the present invention, the pneumatic drive assembly includes a plurality of groups of blades, and the plurality of groups of blades are fixedly connected to the inside of the rotating sleeve.

[0018] The plurality of blades can push the rotating sleeve to rotate during the flow of the intake gas, thereby driving the rotating gas outlet assembly to rotate as a whole, thereby performing dynamic rotating air supply.

[0019] In one or more embodiments of the present invention, the plurality of groups of blades are distributed circumferentially inside the rotating sleeve.

[0020] The plurality of blades distributed circumferentially can make the rotating air outlet component rotate at a uniform speed, thereby adjusting the air outlet direction at a uniform speed.

[0021] In one or more embodiments of the present invention, the plurality of groups of blades are arranged at an inclination.

[0022] In one or more embodiments of the present invention, the inclination angle of the plurality of groups of blades is 15 to 30°.

[0023] A plurality of groups of blades which are arranged in a circular distribution and are inclined can make the rotating sleeve rotate more easily, thereby ensuring that multi-directional rotating air supply can be performed.

[0024] In one or more embodiments of the present invention, a control valve is fixedly installed on the branch air intake pipe, and the control valve is used to control the flow inside the branch air intake pipe.

[0025] The control valve can effectively control the intake ratio of the main intake pipe and the branch intake pipe, making it easier to control the diffusion reaction.

[0026] Compared with the prior art, the diffusion furnace gas supply assembly of the utility model can dynamically supply gas to the inside of the diffusion furnace in multiple directions by assembling rotating gas outlet assemblies that can rotate to exhaust gas at the ends of the main gas inlet pipe and the branch gas inlet pipe, so as to ensure uniform supply of gas required for diffusion, thereby making the diffusion reaction uniform and effectively reducing the difference in doping amount of the battery cells. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the prior art descriptions are briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in the utility model, and for ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0028] Figure 1 This is a structural diagram of a gas supply assembly for a diffusion furnace used in a solar cell diffusion process in one embodiment of the utility model;

[0029] Figure 2 It is a front view of a gas supply assembly of a diffusion furnace for a solar cell diffusion process in one embodiment of the utility model;

[0030] Figure 3 A gas supply assembly for a diffusion furnace used in a diffusion process of a solar cell in an embodiment of the utility model Figure 2 Enlarged view of point A in the middle;

[0031] Figure 4 It is a side view of the blades of the gas supply assembly of the diffusion furnace used in the diffusion process of solar cells in one embodiment of the utility model.

[0032] Description of main reference numerals:

[0033] 1. Main air inlet pipe; 2. Branch air inlet pipe; 201. Control valve; 3. Rotating air outlet assembly; 301. Connecting sleeve; 3011. Limiting groove; 302. Rotating sleeve; 3021. Blade; 303. Air outlet tube; 3031. Air outlet hole; 4. Limiting boss. DETAILED DESCRIPTION

[0034] In order to enable those skilled in the art to better understand the technical solutions in the present invention, the technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work should fall within the scope of protection of the present invention.

[0035] like Figures 1 to 4 As shown, a diffusion furnace gas supply assembly for a solar cell diffusion process in one embodiment of the utility model comprises a main air inlet pipe 1 and a branch air inlet pipe 2. The main air inlet pipe 1 and the branch air inlet pipe 2 are connected in parallel inside the diffusion furnace. The end of the main air inlet pipe 1 is located at a position 20 to 30 cm away from the furnace mouth inside the diffusion furnace, and the end of the branch air inlet pipe 2 is located in the middle position inside the diffusion furnace. The main air inlet pipe 1 and the branch air inlet pipe 2 supply the gas required for diffusion at different positions inside the diffusion furnace respectively.

[0036] A control valve 201 is fixedly installed on the branch air intake pipe 2 , and the control valve 201 is used to control the flow inside the branch air intake pipe 2 .

[0037] like Figure 2 and Figure 3 As shown, the ends of the main air inlet pipe 1 and the branch air inlet pipe 2 are both installed with a rotating air outlet assembly 3, which includes a connecting sleeve 301, a rotating sleeve 302 and an air outlet tube 303. A limiting groove 3011 is provided on the inner wall of the connecting sleeve 301, and the ends of the main air inlet pipe 1 and the branch air inlet pipe 2 are both fixedly connected to a limiting boss 4, which is rotatably connected to the inside of the limiting groove 3011.

[0038] The outer wall of the limiting boss 4 fits with the inner wall of the limiting groove 3011 , so that the limiting boss 4 has a sealing effect inside the limiting groove 3011 .

[0039] Specifically, the limiting boss 4 is rotatably connected to the inside of the limiting groove 3011, so that the connecting sleeve 301 can be limitedly rotated and sealed at the ends of the main intake pipe 1 and the branch intake pipe 2.

[0040] like Figures 2 to 4As shown, the ends of the main air intake pipe 1 and the branch air intake pipe 2 are inserted into the interior of the connecting sleeve 301 and communicate with the interior of the rotating sleeve 302. That is, the gas required for diffusion supplied by the main air intake pipe 1 and the branch air intake pipe 2 will flow through the interior of the rotating sleeve 302.

[0041] A plurality of blades 3021 are fixedly connected to the interior of the rotating sleeve 302 , and the plurality of blades 3021 are distributed in a circular pattern inside the rotating sleeve 302 .

[0042] The multiple groups of blades 3021 are all inclined at 15 to 30 degrees. The multiple groups of blades 3021 that are distributed in a circle and inclined can utilize the principle of a windmill. When air flows through, they can generate rotational power to drive the rotating air outlet assembly 3 to rotate as a whole.

[0043] Specifically, when the gas required for diffusion flows through the interior of the rotating sleeve 302 , it will blow the blades 3021 , so that the blades 3021 drive the rotating sleeve 302 to rotate, thereby driving the rotating gas outlet assembly 3 to rotate as a whole.

[0044] The rotating sleeve 302 is connected to the inside of the gas outlet cylinder 303, and the rotating sleeve 302 is fixedly connected to the gas outlet cylinder 303. The gas outlet cylinder 303 is provided with multiple groups of gas outlet holes 3031, and gas can be supplied to the inside of the diffusion furnace in multiple directions through the multiple groups of gas outlet holes 3031. In other words, the gas required for diffusion supplied by the main air inlet pipe 1 and the branch air inlet pipe 2 will evenly enter the inside of the diffusion furnace through the multiple groups of gas outlet holes 3031. Since the rotating gas outlet assembly 3 rotates as a whole, the rotating gas outlet assembly 3 can dynamically supply gas to the inside of the diffusion furnace in multiple directions.

[0045] When in use, the gas required for diffusion is introduced into the diffusion furnace through the main air inlet pipe 1 and the branch air inlet pipe 2, and then passes through the connecting sleeve 301, the rotating sleeve 302 and the air outlet tube 303 from the end in sequence, and finally enters the diffusion furnace through the air outlet hole 3031. When the gas flows through the rotating sleeve 302, the rotating air outlet assembly 3 is driven to rotate as a whole through the blades 3021, thereby performing multi-directional dynamic rotation to supply the gas required for diffusion to the interior of the diffusion furnace, so that the gas required for diffusion is evenly supplied.

[0046] The diffusion furnace gas supply component of the utility model assembles a rotating gas outlet component 3 capable of rotating gas outlet at the ends of the main gas inlet pipe 1 and the branch gas inlet pipe 2, which can dynamically supply gas to the inside of the diffusion furnace in multiple directions, so that the gas required for diffusion is supplied evenly, thereby making the diffusion reaction uniform and effectively reducing the difference in the doping amount of the battery cells.

[0047] It is obvious to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above, and that the present invention can be implemented in other specific forms without departing from the spirit or essential features of the present invention. Therefore, the embodiments should be regarded as exemplary and non-restrictive from any point of view, and the scope of the present invention is defined by the appended claims rather than the above description, and it is intended that all changes falling within the meaning and scope of the equivalent elements of the claims be included in the present invention. Any reference numeral in a claim should not be regarded as limiting the claim to which it relates.

[0048] In addition, it should be understood that although the present specification is described according to implementation modes, not every implementation mode contains only one independent technical solution. This description of the specification is only for the sake of clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in each embodiment may also be appropriately combined to form other implementation modes that can be understood by those skilled in the art.

Claims

1. A diffusion furnace gas supply assembly for a solar cell diffusion process, comprising a main air inlet pipe (1) and a branch air inlet pipe (2), wherein the main air inlet pipe (1) and the branch air inlet pipe (2) are connected in parallel inside the diffusion furnace, and characterized in that: The ends of the main air intake pipe (1) and the branch air intake pipe (2) are both installed with a rotating air outlet assembly (3); The rotating air outlet component (3) comprises a connecting sleeve (301), a rotating sleeve (302) and an air outlet cylinder (303); the connecting sleeve (301) is rotatably connected to the ends of the main air inlet pipe (1) and the branch air inlet pipe (2); a pneumatic drive component is installed inside the rotating sleeve (302); the air intake airflow can drive the rotating sleeve (302) to rotate through the pneumatic drive component; and a plurality of air outlet holes (3031) are provided on the air outlet cylinder (303).

2. The gas supply assembly for a diffusion furnace for a solar cell diffusion process according to claim 1, characterized in that: The connecting sleeve (301) has a rotary sealing structure at the ends of the main air intake pipe (1) and the branch air intake pipe (2), and the rotary sealing structure enables the connecting sleeve (301) to be sealed and rotated at the ends of the main air intake pipe (1) and the branch air intake pipe (2).

3. The gas supply assembly for a diffusion furnace for a solar cell diffusion process according to claim 1, characterized in that: The rotary sealing structure comprises a limiting groove (3011) and a limiting boss (4); the limiting groove (3011) is formed on the inner wall of the connecting sleeve (301); the limiting boss (4) is fixedly connected to the outer walls of the main air intake pipe (1) and the branch air intake pipe (2); the limiting groove (3011) matches the limiting boss (4).

4. The gas supply assembly for a diffusion furnace for a solar cell diffusion process according to claim 3, characterized in that: The outer wall of the limiting boss (4) fits into the inner wall of the limiting groove (3011).

5. The gas supply assembly for a diffusion furnace for a solar cell diffusion process according to claim 3, characterized in that: The ends of the main air intake pipe (1) and the branch air intake pipe (2) are both inserted into the interior of the connecting sleeve (301) and are connected to the interior of the rotating sleeve (302).

6. The gas supply assembly for a diffusion furnace for a solar cell diffusion process according to claim 1, characterized in that: The pneumatic drive assembly comprises a plurality of groups of blades (3021), and the plurality of groups of blades (3021) are fixedly connected to the interior of the rotating sleeve (302).

7. The gas supply assembly for a diffusion furnace for a solar cell diffusion process according to claim 6, characterized in that: The plurality of groups of blades (3021) are distributed in a circular pattern inside the rotating sleeve (302).

8. The gas supply assembly for a diffusion furnace for a solar cell diffusion process according to claim 7, characterized in that: The plurality of groups of blades (3021) are all arranged at an inclination.

9. The gas supply assembly for a diffusion furnace for a solar cell diffusion process according to claim 8, characterized in that: The inclination angles of the multiple groups of blades (3021) are 15 to 30 degrees.

10. The gas supply assembly for a diffusion furnace for a solar cell diffusion process according to claim 1, characterized in that: A control valve (201) is fixedly mounted on the branch air intake pipe (2), and the control valve (201) is used to control the flow rate inside the branch air intake pipe (2).

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