Process detection station for preparing high-resistance carbon film plate

Abstract

The utility model discloses a process detection station for preparing a high-resistance carbon film plate, which comprises an object placing table 1 used for placing a film thickness process sample piece to be detected. The X-axis linear module 2 and the Z-axis linear module 3 are arranged above the object placing table 1 and work cooperatively to drive the detection mechanism 4 to move accurately in a three-dimensional space. The detection mechanism 4 can form two test lines with different incident angles at any test point on the process sample piece; the traditional vertical distance measuring method from top to bottom is easy to cause misjudgment when facing a complex shape, but the possibility of misjudgment is obviously reduced through a multi-angle and omnibearing detection mode. The two inclined distance measuring lines are intersected with the two side surfaces of the salient point, so that the existence and the shape change of the salient point can be sensed. When the distance measuring line is inclined, not only can the highest point of the salient point be detected, but also the side surface of the salient point can be scanned, so that the geometric characteristics of the salient point can be reflected more comprehensively.

Description

Technical Field

[0001] The utility model relates to the technical field of carbon film plates, specifically to the technical field of using PTC conductive slurry to prepare carbon film plates (dry films or wet films), and particularly to a process detection station for preparing high-resistance carbon film plates. Background Art

[0002] Carbon film board is a thin film board made of carbon material, which has good electrical conductivity and thermal conductivity. PTC conductive paste is a special conductive material, which can automatically adjust the resistance under certain temperature changes, thereby controlling the current. This material has important applications in the manufacture of carbon film boards, which can improve the conductivity and stability of carbon film boards.

[0003] Since PTC conductive paste has the characteristic of automatically adjusting resistance, it can effectively protect carbon film boards from potential damage such as overcurrent and overheating. When the temperature of the carbon film board increases, the resistance of PTC conductive paste will increase accordingly, thereby reducing the current and preventing the carbon film board from being damaged by overheating. This protection mechanism can improve the service life and safety of carbon film boards. In addition, PTC conductive paste also has good processing performance and stability, and can be easily applied to the surface of carbon film boards to form a uniform conductive layer. This makes carbon film boards easier to operate and control quality during the manufacturing process.

[0004] It can be seen from R=ρL / (wd) that the thickness of PTC slurry affects the size of the resistance. The traditional method is to set a laser non-contact testing device vertically on the upper part of the carbon film plate after the wet film is dried to become a dry film, such as a laser rangefinder or a topography meter, and obtain the film thickness data by subtracting the distance between the plane at the bottom of the carbon film plate and the testing device from the distance between the carbon film plate and the testing device.

[0005] However, this traditional method has certain drawbacks: when uneven slurry or poor preparation process causes bumps of certain special shapes to appear on the surface of the carbon film plate, such bumps do not affect the distance information detected by the vertical distance measuring line from top to bottom. On the contrary, the distance measuring line in an inclined state can detect the distance information of such bumps. Because when the distance measuring line is projected vertically onto the bump, it can only detect the highest point of the bump, but cannot perceive the information on the side of the bump. In other words, the vertical distance measuring line can only obtain the distance of the point it is directly projected onto, but cannot "see" the three-dimensional shape of the bump.

[0006] Therefore, the traditional vertical top-down distance measurement arrangement method is prone to misjudgment and cannot effectively perform process inspection on carbon film plates.

[0007] Therefore, a process inspection station for preparing high-resistance carbon film plates is proposed. Utility Model Content

[0008] In view of this, the embodiment of the utility model hopes to provide a process inspection station for preparing a high-resistance carbon film plate to solve or alleviate the technical problems existing in the prior art, that is, how to solve the phenomenon that the traditional vertical top-down ranging arrangement method is prone to misjudgment, and at least provide a beneficial option for this; the technical solution of the utility model is implemented as follows:

[0009] A process inspection station for preparing a high-resistance carbon film plate includes a placement table 1 for placing a process sample of a film thickness to be inspected. Above the placement table 1, an X-axis linear module 2 and a Z-axis linear module 3 are arranged, which work together to drive a detection mechanism 4 to move precisely in a three-dimensional space. The detection mechanism 4 can form two test lines with different incident angles at any test point on the process sample, and detect the distance between the test point and the detection mechanism through laser non-contact measurement technology. The test line can be adjusted in a universal angle to meet the detection requirements of different shapes and angles.

[0010] When in use, first place the process sample on the storage table 1. If it is a wet film, a container is required to ensure that the workpiece is temporarily formed, and then test it after it is left to stand. Then, the detection mechanism 4 starts working and emits two symmetrical test lines to scan the upper surface of the process sample. These scanned points are called detection points. The detection mechanism 4 determines whether there are bumps or unevenness on the detection point by receiving the distance information fed back by the test line. If the distance information of the two test lines is the same, the point is considered normal; if they are different, it is judged that there is an undesirable situation.

[0011] At the same time, the test line of the detection mechanism 4 can be symmetrically adjusted in all directions under the premise of ensuring that the incident angles to the test points are symmetrical and the angles are the same. This design can expand the detection range of the detection points and improve the flexibility and accuracy of the detection.

[0012] In addition, the cooperation between the Z-axis linear module 3 and the X-axis linear module 2 enables the detection mechanism 4 to accurately adjust the position along the upper part of the large process sample. In this way, the detection station can realize the above-mentioned detection point formation, detection and judgment process for the entire area of ​​the process sample.

[0013] In one embodiment, the detection mechanism 4 adopts a combination design of a macro adjustment module 401 and a detection component 402. As a core component, the macro adjustment module 401 has the function of adjusting the depression angle of the detection component 402. This adjustment method can be regarded as a macro adjustment, that is, adjusting the angle of the detection component 402 within a large range. The detection component 402 is responsible for forming the test line and has the ability of universal angle adjustment, which means that the detection component 402 can freely adjust the angle of the test line in multiple directions to meet the detection needs of different shapes and angles.

[0014] Two detection components 402 are symmetrically arranged at both ends of the macro adjustment module 401, and such a layout ensures the symmetry and accuracy of the detection. When the macro adjustment module 401 adjusts the depression angle of the detection component 402, the two detection components 402 will be adjusted synchronously, thereby maintaining the symmetry and consistency of the test.

[0015] In one embodiment, the specific implementation of the macro adjustment module 401 includes a frame 4011, which serves as the basic structure of the entire macro adjustment module and provides a stable support and installation platform. On the upper part of the frame 4011, a wedge-shaped frame 4012 is provided for pitch rotation. This design allows the wedge-shaped frame 4012 to perform pitch rotation on the frame 4011, thereby achieving pitch angle adjustment of the detection component 402. In order to drive the rotation of the wedge-shaped frame 4012, a dual-axis motor 4013 is provided inside the frame 4011, and the motor can provide sufficient torque to drive the wedge-shaped frame 4012 to perform pitch motion.

[0016] Two detection components 402 are symmetrically arranged on the wedge-shaped frame 4012. This symmetrical layout ensures the stability and accuracy of the detection, because the two detection components 402 can perform measurements at the same time and verify the reliability of the data by comparing the results.

[0017] In one embodiment, the detection assembly 402 includes a fixed frame 4012 fixed on a wedge-shaped frame body 4012, an adjustable adjustment frame 4022, and a laser rangefinder 4025 for forming a test line. At least three linear actuators 4023 with adjustable linear stroke are arranged in a circular array between the fixed frame 4012 and the adjustment frame 4022. These linear actuators 4023 can perform precise stroke control, thereby realizing universal angle adjustment of the adjustment frame 4022.

[0018] In order to achieve comprehensive detection of the convex points on the process sample, the wedge-shaped frame 4012 arranges the two detection components 402 and the laser rangefinder 4025 thereon obliquely above the process sample. This oblique arrangement allows the two emitted inclined rangefinder lines to intersect with the two side surfaces of the convex point, so that the existence of the convex point and its shape change can be sensed. When the rangefinder line is inclined, it not only detects the highest point of the convex point, but also scans the side surfaces of the convex point, thereby being able to more comprehensively reflect the geometric characteristics of the convex point.

[0019] At the same time, when each linear actuator 4023 performs different stroke outputs, the adjustment frame 4022 will perform corresponding universal angle adjustment. This design enables the laser rangefinder 4025 to detect process samples at more angles, thereby improving the flexibility and accuracy of detection.

[0020] In one embodiment, the linear actuator 4023 is a servo electric cylinder. The servo electric cylinder is an actuator that can provide high-precision position control, which combines the precise control of a servo motor with the linear motion characteristics of a hydraulic cylinder or a pneumatic cylinder. The cylinder body and piston rod of each servo electric cylinder are universally hinged to the respective sides of the fixed frame 4012 and the adjustment frame 4022 that are opposite to each other through a coupling 4024.

[0021] The design of coupling 4024 allows the servo cylinder to have a certain degree of freedom when adjusting the angle of adjustment frame 4022, thereby realizing universal angle adjustment. This universal articulation method ensures that the servo cylinder can flexibly adapt to various angle changes during the adjustment process while maintaining high-precision position control.

[0022] In one embodiment, the X-axis linear module 2 uses a combination of a first motor 201 and a first ball screw 202 driven to rotate. The first motor 201 serves as a power source to drive the first ball screw 202 to rotate. A moving truss 203 is fixedly arranged on the moving nut of the first ball screw 202, so that when the first ball screw 202 rotates, the moving truss 203 will move accurately in a straight line along the X-axis direction.

[0023] A Z-axis linear module 3 is installed on the mobile truss 203 to realize the movement of the Z axis. The Z-axis linear module 3 also uses a combination of a motor and a ball screw, that is, a second motor 301 and a second ball screw 302 driven to rotate. The second motor 301 drives the second ball screw 302 to rotate, thereby driving the moving table 303 on its moving nut to move accurately in a straight line along the Z axis direction. The frame 4011 of the macro adjustment module 401 of the detection mechanism 4 is installed on the moving table 303. Through such a design, the detection mechanism 4 can achieve precise displacement control in the X-axis and Z-axis directions, thereby meeting the needs of detecting carbon film plates at different positions and angles.

[0024] Compared with the prior art, the beneficial effects of the utility model are:

[0025] 1. Reduce the misjudgment rate: The traditional vertical top-down distance measurement method is prone to misjudgment when facing complex shapes, while the utility model significantly reduces the possibility of misjudgment through multi-angle and all-round detection methods. The two inclined distance measurement lines will intersect with the two sides of the convex point, so the existence of the convex point and its shape changes can be sensed. When the distance measurement line is inclined, it not only detects the highest point of the convex point, but also scans the side of the convex point, so as to more comprehensively reflect the geometric characteristics of the convex point.

[0026] 2. Expand the detection range and accuracy: The macro-adjustment of the macro-adjustment module of the utility model can realize the large-range movement and positioning of the detection component, ensuring that the detection device can cover a wider detection area. The micro-adjustment of the detection component is finely adjusted on this basis to ensure high-precision detection and measurement in a specific area. The combination of the two enables the detection mechanism to grasp the object to be tested as a whole and pay attention to details, thereby improving the comprehensiveness and accuracy of the detection. Faced with objects of different shapes, sizes and complexities, the macro-adjustment can quickly move the detection component to the appropriate position, while the micro-adjustment can make fine adjustments based on the specific characteristics of the object. This combination enables the detection mechanism to flexibly respond to various detection needs, greatly enhancing its adaptability and versatility. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments or technical descriptions will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0028] Figure 1 It is a three-dimensional schematic diagram of the utility model;

[0029] Figure 2 It is a three-dimensional schematic diagram of the storage table, X-axis linear module, Z-axis linear module and detection mechanism of the utility model;

[0030] Figure 3 It is a three-dimensional schematic diagram of the macro adjustment module of the detection mechanism of the utility model;

[0031] Figure 4 It is a three-dimensional schematic diagram of the detection component of the detection mechanism of the utility model;

[0032] Figure 5 for Figure 4 An enlarged three-dimensional schematic diagram of area A.

[0033] Figure numerals: 1. storage table; 2. X-axis linear module; 201. first motor; 202. first ball screw; 203. moving truss; 3. Z-axis linear module; 301. second motor; 302. second ball screw; 303. moving table; 4. detection mechanism; 401. macro adjustment module; 4011. frame; 4012. wedge-shaped frame; 4013. dual-axis motor; 402. detection component; 4021. fixed frame; 4022. adjustment frame; 4023. linear actuator; 4024. coupling; 4025. laser rangefinder; 5. workbench. DETAILED DESCRIPTION

[0034] In order to make the above-mentioned purposes, features and advantages of the utility model more obvious and easy to understand, the specific implementation methods of the utility model are described in detail below in conjunction with the accompanying drawings. In the following description, many specific details are set forth to facilitate a full understanding of the utility model. However, the utility model can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without violating the connotation of the utility model. Therefore, the utility model is not limited to the specific embodiments disclosed below;

[0035] It should be noted that all axial descriptions in this specific embodiment, such as the X-axis, the Y-axis, the Z-axis, one end of the X-axis, the other end of the Y-axis or the other end of the Z-axis, etc., are based on the Cartesian coordinate system.

[0036] Example:

[0037] In the prior art, local protrusions may be formed on the surface of the carbon film plate due to uneven slurry or poor preparation process. The structural characteristics of these protrusions may vary depending on the specific process conditions and slurry properties, but they usually present irregular shapes and sizes. These protrusions may be circular, elliptical, or other irregular shapes, and their heights and widths may also vary. This kind of protrusion does not affect the distance information detected by the vertical top-down ranging line because when the ranging line is vertically projected onto the protrusion, it can only detect the highest point of the protrusion, but cannot perceive the information on the side of the protrusion. In other words, the vertical ranging line can only obtain the distance of the point it is directly projected to, and cannot "see" the three-dimensional shape of the protrusion. However, the ranging line in an inclined state can detect the distance information of the protrusion, because the inclined ranging line may intersect with the side of the protrusion, so that the existence of the protrusion and its shape change can be perceived. When the ranging line is inclined, it no longer only detects the highest point of the protrusion, but can scan the side of the protrusion, so it can more comprehensively reflect the geometric characteristics of the protrusion.

[0038] To do this, see Figure 1-5 This specific embodiment will provide a related technical solution to solve the above technical problems: a process testing station for preparing a high-resistance carbon film plate, comprising: a placement table 1 for placing process samples for film thickness testing, and on the upper part and left and right sides of the placement table 1, respectively,

[0039] Z-axis linear module 3, the Z-axis linear module 3 is used to drive the detection mechanism 4 to adjust the Z-axis position on the upper part of the process sample;

[0040] X-axis linear module 2, the X-axis linear module 2 is used to drive the Z-axis linear module 3 and the detection mechanism 4 carried by it to adjust the X-axis position on the upper part of the process sample;

[0041] The detection mechanism 4 can form two test lines with different incident angles at any test point on the process sample, and detect the distance between the test point and the detection mechanism 4 in a non-contact laser manner. All test lines can be universally adjusted.

[0042] All electrical components of the device as a whole rely on the mains for energy supply; specifically, the electrical components of the device as a whole are electrically connected to the mains output port through relays, transformers, button panels and other devices in a conventional manner to meet the energy supply requirements of all electrical components of the device. In addition, a controller is also provided on the outside of the device, which is used to connect and control all electrical components of the device as a whole to drive according to a pre-set program as a preset value and drive mode; it should be pointed out that the above drive mode corresponds to the corresponding start-stop time interval, speed, power and other output parameters between the relevant electrical components described below, that is, it meets the requirements of the relevant electrical components described below to drive the relevant mechanical devices to operate according to the functions described therein.

[0043] In this scheme: when in use, the process sample (if it is a wet film, it is best to bring a container to ensure that the workpiece is temporarily formed, but it is also necessary to let it stand for detection before placing it on the storage table 1, and then the detection mechanism 4 will work. The detection mechanism 4 will emit two symmetrical test lines to scan the upper surface of the process sample in a non-contact laser manner. The scanned point on the workpiece is called a detection point; through the distance information fed back by the two test lines, if the distance information of the two test lines on the test point is the same, it is considered that there is no convex point or uneven phenomenon at the point, otherwise, it is considered that there is a bad situation. At the same time, the two test lines can synchronously perform symmetrical universal angle adjustment on the premise of ensuring that the incident angle of the test point is the same under the premise of symmetry, so as to expand the detection range of the detection point. On the basis of the above-mentioned test mode, the coordinated cooperation of the Z-axis linear module 3 and the X-axis linear module 2 can control the detection mechanism 4 to adjust the position along the upper part of the large-sized process sample, so as to realize the above-mentioned detection point formation, detection and judgment process for the entire area of ​​the process sample.

[0044] In this solution, the above-mentioned components are the main functional mechanisms in the device provided in this specific embodiment; on the basis of the above-mentioned mechanisms, they are placed on the workbench 5; specifically, the workbench 5, as the reference support structure of the entire device, provides a basis for the above-mentioned device to cooperate with the external environment, and can be adapted to external staff to perform routine mechanical maintenance operations such as maintenance, adjustment and assembly of related parts;

[0045] Specifically, by supporting the above mechanism with the workbench 5, the whole device can be placed and applied in the automated production line of the carbon film plate, so that the whole device can be used as an additional process in the existing automated production line to provide process detection for the production and preparation of the carbon film plate; specifically, the device is applied to the rear part of the offline process section in the automated production line of the carbon film plate;

[0046] It should be pointed out that when the device is applied to the automated production line of the carbon film plate based on the workbench 5, an assembly line body can be matched externally, or the device can be used to transport the process samples in the form of clamping and storage by an external robotic arm to provide the input and output functions of the process samples.

[0047] Specifically: The principle of the process inspection station is based on laser ranging and automation technology. Laser ranging technology determines the distance by measuring the round-trip time of the laser, and has the characteristics of high precision and non-contact. Automation technology realizes the precise positioning and movement of the detection mechanism 4 in three-dimensional space through the precise control of the X-axis linear module 2 and the Z-axis linear module 3. By combining these two technologies, the process inspection station can realize the precise measurement and judgment of the thickness of the film layer on the surface of the process sample.

[0048] It can be understood that in the above scheme: the process inspection station for preparing high-resistance carbon film plates has multiple functions: first, it can realize the accurate measurement of the film thickness on the surface of the process sample, helping the producer to understand the quality control of the product; secondly, through the universal angle adjustment function of the detection mechanism 4, it can adapt to the detection needs of different shapes and angles, and improve the flexibility and accuracy of the detection; finally, through the coordinated cooperation of the X-axis linear module 2 and the Z-axis linear module 3, a comprehensive inspection of large process samples can be achieved to ensure the overall quality of the product.

[0049] In the technical solution provided in this embodiment, please refer to Figure 3~4 : The detection mechanism 4 includes a macro-adjustment module 401, and two detection components 402 for forming a test line are symmetrically arranged at both ends of the macro-adjustment module 401;

[0050] The macro adjustment module 401 can perform macro adjustment in the form of depression angle adjustment on the detection component 402 , and the detection component 402 can perform universal angle adjustment on the test line.

[0051] Specifically: The working principle of the macro adjustment module 401 and the detection component 402 is based on mechanical adjustment and laser ranging technology. The macro adjustment module 401 realizes the angle adjustment of the detection component 402 through the internal mechanical structure. This adjustment method can change the incident angle of the test line to adapt to different detection needs. The detection component 402 uses laser ranging technology to launch the test line and measures the distance by receiving the reflected laser signal. Since the detection component 402 has a universal angle adjustment function, the direction of the test line can be flexibly adjusted to adapt to various complex detection scenarios.

[0052] It can be understood that in the above scheme: the design of the detection mechanism 4 is intended to improve the flexibility and accuracy of carbon film plate detection. The depression angle adjustment function of the macro adjustment module 401 enables the detection mechanism 4 to adapt to the detection requirements of different angles and expand the detection range. At the same time, the universal angle adjustment function of the detection component 402 further enhances the flexibility of detection, so that the test line can be freely adjusted in multiple directions. This design not only improves the accuracy of detection, but also enables the detection mechanism 4 to adapt to more types of carbon film plate detection tasks.

[0053] In the technical solution provided in this embodiment, please refer to Figure 3~4 : The macro adjustment module 401 includes a frame 4011, a wedge-shaped frame 4012 that is matched with the upper part of the frame 401 for pitching and rotating, and a dual-axis motor 4013 arranged in the frame 4011 for driving the wedge-shaped frame 4012 to rotate and match the frame 4011; the wedge-shaped frame 4012 is symmetrically provided with two detection components 402.

[0054] Specifically: The working principle of the macro adjustment module 401 mainly relies on mechanical transmission and motor control. The dual-axis motor 4013 drives the wedge-shaped frame 4012 to pitch and rotate relative to the frame 4011 through its rotation. This rotation changes the angle of the detection component 402, thereby adjusting the incident angle of the test line. The precise control of the dual-axis motor ensures the accuracy and repeatability of the angle adjustment.

[0055] The detection component 402 uses the laser distance measurement principle to measure the distance by emitting and receiving laser beams. Since the detection component 402 is mounted on the pitch-rotatable wedge-shaped frame 4012, its angle can be flexibly adjusted to meet different detection requirements.

[0056] It is understandable that in the above scheme: the design of the macro-adjustment module 401 enables the detection mechanism 4 to flexibly adjust the angle of the detection component 402 to adapt to the detection requirements of different shapes and angles. This flexibility not only improves the accuracy of detection, but also expands the detection range. The precise control of the dual-axis motor 4013 ensures the reliability and repeatability of the angle adjustment, so that the detection mechanism 4 can perform well in various complex detection scenarios. In general, the design of the macro-adjustment module 401 plays a key role in improving the flexibility, accuracy and efficiency of carbon film plate detection.

[0057] In the technical solution provided in this embodiment, please refer to Figures 4 and 5 : The detection assembly 402 includes a fixed frame 4012 fixed on a wedge-shaped frame body 4012, an adjusting frame 4022 and a laser rangefinder 4025 for forming a test line, and at least three linear actuators 4023 with adjustable linear travel are arranged in a ring array between the fixed frame 4012 and the adjusting frame 4022;

[0058] The wedge-shaped frame 4012 tilts the two detection components 402 and the laser rangefinder 4025 thereon to the process sample, and the two tilted rangefinder lines emitted will intersect with the two sides of the convex point, so as to sense the existence of the convex point and the shape change. When the rangefinder line is tilted, it no longer only detects the highest point of the convex point, but can scan the side of the convex point, so that the geometric characteristics of the convex point can be more comprehensively reflected.

[0059] At the same time, when each linear actuator 4023 performs different stroke outputs, the adjustment frame 4022 performs universal angle adjustment.

[0060] Specifically: The working principle of the detection component 402 mainly relies on laser distance measurement and mechanical adjustment. The laser rangefinder 4025 emits a laser beam and receives the reflected signal, and calculates the distance by measuring the round-trip time of the laser. The mechanical adjustment is achieved through linear actuators 4023, which can accurately control the angle of the adjustment frame 4022, thereby changing the emission angle of the laser rangefinder 4025. By arranging the laser rangefinder 4025 at an angle and using the linear actuator 4023 for universal angle adjustment, the detection component 402 can achieve comprehensive detection of the bumps on the process sample. This design not only improves the accuracy of the detection, but also can more comprehensively reflect the geometric characteristics of the bumps.

[0061] It should be pointed out that the two test lines can be synchronously symmetrically adjusted in universal angles, under the premise of ensuring that the incident angles to the test points are symmetrical, so that the detection range of the detection points can be expanded. Therefore, the detection mechanism 402 can cover a wider area, thereby increasing the chance of discovering potential defects. This comprehensive scan helps to identify defects that may only be obvious at a specific angle or position, such as tiny protrusions, depressions or uneven surfaces. And a wider detection range means more data points and a more comprehensive evaluation. This helps to reduce the possibility of missed detection and improve the accuracy and reliability of detection. By scanning the symmetrical test lines at multiple angles, the surface condition of the detection point can be judged more accurately.

[0062] At the same time, for process samples with complex shapes or curved surfaces, expanding the detection range can ensure that all parts are fully detected. The test line can be scanned at different incident angles to better adapt to the shape changes of the sample. Through universal angle adjustment of the symmetrical test line, the detection mechanism 402 can flexibly cope with samples of various shapes and sizes. This flexibility enables the detection mechanism 402 to adapt to different detection needs and improve its practicality and versatility.

[0063] It can be understood that in the above scheme: the design of the detection component 402 is intended to improve the accuracy and comprehensiveness of the carbon film plate detection. By arranging the laser rangefinder 4025 at an angle and using the linear actuator 4023 for universal angle adjustment, the component can detect the bumps on the process sample and sense their shape changes. This design not only improves the flexibility of detection, but also can more comprehensively reflect the geometric characteristics of the bumps. At the same time, the linear actuator 4023 arranged in a ring array is precisely controlled to ensure the reliability and accuracy of the detection.

[0064] In the technical solution provided in this embodiment, please refer to Figures 4 and 5 : The linear actuator 4023 is a servo electric cylinder, and the cylinder body and piston rod of the servo electric cylinder are respectively and universally hinged on the respective opposite sides of the fixed frame 4012 and the adjusting frame 4022 through the coupling 4024.

[0065] Specifically: The servo electric cylinder is driven by an internal servo motor and can accurately control the position and speed of the piston rod. When the angle of the adjustment frame 4022 needs to be adjusted, the controller sends a command to the servo electric cylinder to make it move according to a predetermined trajectory. Since the cylinder body and piston rod of the servo electric cylinder are universally hinged between the fixed frame 4012 and the adjustment frame 4022 through the coupling 4024, various angles can be flexibly adjusted.

[0066] Preferably, coupling 4024 is a spherical coupling or a universal joint coupling.

[0067] It can be understood that in the above scheme: using the servo electric cylinder as the linear actuator 4023 can achieve high-precision angle adjustment of the adjustment frame 4022. The high response speed and high-precision position control capability of the servo electric cylinder enable the detection mechanism to quickly and accurately complete various complex angle adjustment tasks. At the same time, the universal articulated design of the coupling 4024 further enhances the flexibility and adaptability of the detection, allowing the detection mechanism to cope with more types of detection needs.

[0068] It should be pointed out that in the above scheme: the form of at least three servo electric cylinders and their couplings 4024 is essentially equivalent to a parallel mechanism; for those skilled in the art, a conventional parallel mechanism can be used to store preset programs using a PID controller algorithm, thereby realizing the universal angle adjustment function according to corresponding time steps.

[0069] In the technical solution provided in this embodiment, please refer to Figure 2 : The X-axis linear module 2 includes a first motor 201 and a first ball screw 202 driven to rotate. The moving nut of the first ball screw 202 is fixed with a moving truss 203, and the Z-axis linear module 3 is arranged on the moving truss 203.

[0070] The Z-axis linear module 3 includes a second motor 301 and a second ball screw 302 driven to rotate. The moving nut of the second ball screw 302 is fixed with a moving platform 303 , and the frame 4011 of the macro adjustment module 401 of the detection mechanism 4 is installed on the moving platform 303 .

[0071] Specifically: The motor provides rotational power, which is converted into linear motion through the ball screw, thereby driving the mobile truss or mobile stage to move accurately in a linear manner. By controlling the rotation direction and speed of the motor, the position of the detection mechanism can be precisely controlled.

[0072] It can be understood that in the above scheme: the design of this embodiment is intended to improve the automation and accuracy of carbon film plate detection. Through the combination of the X-axis linear module 2 and the Z-axis linear module 3, the detection mechanism 4 can perform precise displacement control in a two-dimensional plane, thereby realizing automatic detection of carbon film plates at different positions and angles. This design not only improves the detection efficiency, but also ensures the accuracy and reliability of the detection. At the same time, due to the use of motor drive and ball screw transmission, this embodiment also has the advantages of compact structure, fast response speed, and high positioning accuracy.

[0073] In summary, in view of the related problems in the traditional technology, this specific embodiment is based on the process inspection station for preparing a high-resistance carbon film plate provided above, and adopts the following technical means or features to achieve the solution:

[0074] The traditional vertical top-down distance measurement arrangement method can only detect the surface features of an object through a single vertical distance measurement line. When facing objects with complex shapes or irregular surfaces, it is easy to cause misjudgment because the distance measurement line cannot fully cover the surface of the object. Especially when detecting objects with raised or recessed features, a single vertical distance measurement line may not be able to accurately capture these features, resulting in misjudgment.

[0075] The technical solution provided in this embodiment realizes the multi-angle adjustment function of the test line by introducing the combined design of the macro adjustment module 401 and the detection component 402. Specifically, the macro adjustment module 401 can adjust the depression angle of the detection component so that the test line can be incident on the surface of the object under test at different angles. This design enables the detection mechanism to more comprehensively scan and perceive the surface features of the object, including irregular shapes such as protrusions and depressions.

[0076] In addition, the detection component 402 also has a universal angle adjustment function, which means that the detection component 402 can freely adjust the angle of the test line in multiple directions. This flexibility enables the detection mechanism to adapt to the detection needs of various complex shapes and angles, thereby improving the accuracy and reliability of the detection.

[0077] The above-mentioned embodiments only express the implementation methods of the relevant practical applications of the utility model, and the descriptions thereof are relatively specific and detailed, but they cannot be understood as limiting the scope of the utility model patent. It should be pointed out that for ordinary technicians in this field, several modifications and improvements can be made without departing from the concept of the utility model, and these all belong to the protection scope of the utility model. Therefore, the protection scope of the utility model patent shall be based on the attached claims.

Claims

1. A process inspection station for preparing high-resistance carbon film plates, characterized in that: include: A storage platform (1) for placing process samples for film thickness testing is provided, wherein the upper part and left and right parts of the storage platform (1) are respectively provided with: A Z-axis linear module (3), the Z-axis linear module (3) being used to drive the detection mechanism (4) to perform Z-axis position adjustment on the upper part of the process sample; An X-axis linear module (2), the X-axis linear module (2) being used to drive the Z-axis linear module (3) and the detection mechanism (4) carried thereon to adjust the X-axis position on the upper part of the process sample; The detection mechanism (4) is capable of forming two test lines with different incident angles at any test point on the process sample, and detecting the distance between the test point and the detection mechanism (4) in a non-contact laser manner, and all the test lines are universally adjustable in angle.

2. The process inspection station for preparing high-resistance carbon film plate according to claim 1, characterized in that: The detection mechanism (4) comprises a macro-adjustment module (401), and two detection components (402) for forming the test line are symmetrically arranged at two ends of the macro-adjustment module (401); The macro adjustment module (401) is capable of performing angle adjustment on the detection component (402), and the detection component (402) is capable of performing universal angle adjustment on the test line.

3. The process inspection station for preparing high-resistance carbon film plate according to claim 2, characterized in that: The macro adjustment module (401) comprises a frame (4011), a wedge-shaped frame (4012) that is matched with the upper part of the frame (4011) in pitch and rotation, and a dual-axis motor (4013) disposed in the frame (4011) and used for driving the wedge-shaped frame (4012) to rotate and match the frame (4011); The wedge-shaped frame (4012) is symmetrically provided with two detection components (402).

4. The process inspection station for preparing high-resistance carbon film plate according to claim 2, characterized in that: The detection assembly (402) comprises a fixed frame (4021), an adjustment frame (4022) and a laser rangefinder (4025) for forming the test line, and at least three linear actuators (4023) with adjustable linear travel are arranged in a ring array between the fixed frame (4021) and the adjustment frame (4022); When each of the linear actuators (4023) performs different stroke outputs, the adjustment frame (4022) performs universal angle adjustment.

5. The process inspection station for preparing high-resistance carbon film plate according to claim 4, characterized in that: The linear actuator (4023) is a servo electric cylinder, and the cylinder body and piston rod of the servo electric cylinder are respectively and universally hinged to the respective sides of the fixed frame (4021) and the adjustment frame (4022) that are opposite to each other through a coupling (4024).

6. The process inspection station for preparing a high-resistance carbon film plate according to any one of claims 1 to 4, characterized in that: The X-axis linear module (2) comprises a first motor (201) and a first ball screw (202) driven to rotate by the first motor, a moving nut of the first ball screw (202) being fixedly provided with a moving truss (203), and the Z-axis linear module (3) being provided on the moving truss (203).

7. The process inspection station for preparing a high-resistance carbon film plate according to any one of claims 1 to 4, characterized in that: The Z-axis linear module (3) comprises a second motor (301) and a second ball screw (302) driven to rotate by the second motor, a moving nut of the second ball screw (302) being fixedly provided with a moving platform (303), and the detection mechanism (4) being mounted on the moving platform (303).

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