High-efficiency and energy-saving direct-current magnetron sputtering power supply box body

Abstract

The utility model discloses a high-efficiency energy-saving direct current magnetron sputtering power supply box body, which comprises a power supply box main body, a cooling fan is arranged on the outer side surface of the power supply box main body, a detachable structure is arranged between the cooling fan and the power supply box main body, and a circuit break protection module is arranged on one side of a voltage detection module. The voltage detection module and the current detection module are electrically connected with the circuit break protection module. According to the utility model, the temperature sensing module is arranged in the power supply box body and is used for monitoring the temperature in the box body in real time, and when the temperature is too high, related signals are transmitted to the power supply module, so that the heat dissipation fan is started to dissipate heat, and electric energy consumption caused by continuous operation of the fan is prevented; meanwhile, the voltage detection module and the current detection module can monitor the voltage and the current of the power supply in real time, and when the voltage or the current is abnormal, the circuit break protection module can cut off the power supply in time to prevent power resource loss and waste caused by power supply faults.

Description

Technical Field

[0001] The utility model relates to the technical field of power supply boxes, in particular to a high-efficiency and energy-saving direct current magnetron sputtering power supply box. Background Art

[0002] Energy-saving DC magnetron sputtering power supply is a magnetron sputtering power supply that uses direct current and has the advantage of energy saving. This power supply usually uses magnetic materials and electronic components to control the size and direction of the current, thereby realizing the control of the radio source. Due to the use of magnetic materials, this power supply has higher energy conversion efficiency and less heat loss, so it can achieve energy saving. In addition, this power supply also has higher stability and reliability, can provide precise current control, and is suitable for various occasions that require precise current control. At the same time, due to the use of direct current, this power supply also has a longer service life and lower maintenance costs.

[0003] The Chinese public patent document with publication number CN117794118A belongs to the technical field of DC magnetron sputtering power supplies, and discloses an energy-saving DC magnetron sputtering power supply, including a power supply box, a protective door hinged on one side of the power supply box, a power supply body arranged inside the power supply box, an air inlet opened on the side wall of the power supply box, a ventilation plate fixedly installed on the inner wall of the power supply box, ventilation holes evenly opened on the inner wall of the ventilation plate, and a winding assembly and a scraping assembly respectively arranged on both sides of the ventilation plate; during the operation of the energy-saving DC magnetron sputtering power supply, the motor can be started by an external power supply to move the roller on one side of the ventilation plate, and the flocs entering from the ventilation holes are adsorbed and wound together to prevent them from adhering to the energy-saving DC magnetron sputtering power supply and affecting the operation, thereby ensuring the normal use of the energy-saving DC magnetron sputtering power supply.

[0004] The DC magnetron sputtering power supply in the above-mentioned prior art cannot perform energy-saving monitoring and protection on the power module, which easily causes power supply power resource loss and waste, seriously affecting the normal operation of the power supply equipment. Therefore, it is necessary to develop an efficient and energy-saving DC magnetron sputtering power supply box. Utility Model Content

[0005] The purpose of the utility model is to provide a high-efficiency and energy-saving DC magnetron sputtering power supply box to solve the problem that the DC magnetron sputtering power supply in the prior art proposed in the above background technology cannot perform energy-saving monitoring and protection on the power module, which easily causes power supply power resource loss and waste, and seriously affects the normal operation of the power supply equipment.

[0006] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a high-efficiency and energy-saving DC magnetron sputtering power supply box, comprising a power supply box main body, a cooling fan is installed on the external side surface of the power supply box main body, a detachable structure is formed between the cooling fan and the power supply box main body, a magnetron power supply and a control circuit board are respectively installed inside the power supply box main body, a temperature sensor is installed on the control circuit board, the temperature sensor is electrically connected to the cooling fan, a voltage detection module and a current detection module are respectively installed on the surface of the control circuit board, a circuit breaker protection module is installed on one side of the voltage detection module, and the voltage detection module and the current detection module are both electrically connected to the circuit breaker protection module.

[0007] Preferably, the magnetron power supply and the control circuit board are fixedly connected via a power supply wire.

[0008] Preferably, a voltage stabilizing module is installed on the surface of the control circuit board, and the voltage stabilizing module is electrically connected to the magnetron power supply.

[0009] Preferably, a power consumption sensor is installed on the surface of the control circuit board.

[0010] Preferably, the outside of the heat dissipation fan is fixed to the side surface of the power box body through the frame.

[0011] Preferably, a sealing cover is installed on the upper end surface of the power box body, and fixing screw holes are provided at four corners of the upper surface of the power box body. The sealing cover is fixedly connected to the power box body by hexagonal screws passing through the fixing screw holes.

[0012] Compared with the prior art, the beneficial effects of the utility model are:

[0013] The utility model installs a temperature sensor module inside the power supply box to monitor the internal temperature of the box in real time. When the temperature is too high, the relevant signal will be transmitted to the power module, prompting the cooling fan to start to dissipate heat, thereby preventing the power consumption caused by continuous operation of the fan. At the same time, the voltage and current of the power supply can be monitored in real time by using the voltage detection module and the current detection module. When the voltage or current is abnormal, the circuit breaker protection module will cut off the power supply in time to prevent the loss and waste of power resources caused by power failure. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 It is a schematic diagram of the overall external structure of the utility model;

[0015] Figure 2 This is a schematic diagram of the internal installation structure of the utility model;

[0016] Figure 3 It is a partial structural schematic diagram of the utility model.

[0017] In the figure: 1. Power box body; 2. Sealing cover; 3. Fixed frame; 4. Cooling fan; 5. Fixed screw holes; 6. Circuit breaker protection module; 7. Voltage stabilizing module; 8. Magnetron power supply; 9. Power supply wire; 10. Temperature sensor; 11. Control circuit board; 12. Voltage detection module; 13. Current detection module; 14. Power consumption sensor. DETAILED DESCRIPTION

[0018] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all of the embodiments.

[0019] See also Figure 1-3 The utility model provides an embodiment: a high-efficiency and energy-saving DC magnetron sputtering power supply box, including a power supply box body 1, a cooling fan 4 is installed on the external side surface of the power supply box body 1, and a detachable structure is formed between the cooling fan 4 and the power supply box body 1. A magnetron power supply 8 and a control circuit board 11 are respectively installed inside the power supply box body 1, a temperature sensor 10 is installed on the control circuit board 11, and the temperature sensor 10 is electrically connected to the cooling fan 4. A voltage detection module 12 and a current detection module 13 are respectively installed on the surface of the control circuit board 11, and a circuit breaker protection module 6 is installed on one side of the voltage detection module 12, and the voltage detection module 12 and the current detection module 13 are both electrically connected to the circuit breaker protection module 6.

[0020] Furthermore, the magnetron power supply 8 and the control circuit board 11 are fixedly connected via a power supply wire 9 .

[0021] Furthermore, a voltage stabilizing module 7 is installed on the surface of the control circuit board 11 . The voltage stabilizing module 7 is electrically connected to the magnetron power supply 8 . The voltage stabilizing module 7 can be used to stably regulate the internal voltage of the magnetron power supply 8 .

[0022] Furthermore, an electric power consumption sensor 14 is installed on the surface of the control circuit board 11 , and the electric power consumption sensor 14 is used to monitor the power transmission of the magnetron power supply 8 in real time.

[0023] Furthermore, the outside of the cooling fan 4 is fixed to the side surface of the power box body 1 through the fixing frame 3, so that the cooling fan 4 can be quickly installed and fixed, and the cooling fan 4 can quickly dissipate heat inside the power box body 1.

[0024] Furthermore, a sealing cover plate 2 is installed on the upper end surface of the power box main body 1, and fixing screw holes 5 are provided at the four corners of the upper surface of the power box main body 1. The sealing cover plate 2 is fixedly connected to the power box main body 1 by hexagonal screws passing through the fixing screw holes 5, so as to facilitate the sealing and fixing of the upper end of the power box main body 1.

[0025] Working principle: When in use, a cooling fan 4 is installed on the external side surface of the power box body 1. The outside of the cooling fan 4 is connected to the side surface of the power box body 1 through a fixing frame 3, which facilitates the cooling fan 4 to be quickly installed and fixed, so that the cooling fan 4 can quickly dissipate heat inside the power box body 1. A magnetically controlled power supply 8 and a control circuit board 11 are installed inside the power box body 1. A temperature sensor 10 is installed on the control circuit board 11. The temperature sensor 10 is electrically connected to the cooling fan 4. By installing a temperature sensor module inside the power box body 1, the temperature sensor 10 is used to monitor the internal temperature of the box in real time. When the temperature is too high, the relevant signal will be transmitted to the power module, prompting the cooling fan 4 to start. To dissipate heat and prevent power consumption caused by continuous operation of the fan, a voltage detection module 12 and a current detection module 13 are respectively installed on the surface of the control circuit board 11, and a circuit breaker protection module 6 is installed on one side of the voltage detection module 12. The voltage detection module 12 and the current detection module 13 are electrically connected to the circuit breaker protection module 6. At the same time, the voltage and current of the power supply can be monitored in real time by using the voltage detection module 12 and the current detection module 13. When the voltage or current is abnormal, the circuit breaker protection module 6 will cut off the power supply in time to prevent power failure from causing power loss and waste. An electric power consumption sensor 14 is installed on the surface of the control circuit board 11. The electric power consumption sensor 14 is used to monitor the power transmission of the magnetron power supply 8 in real time.

[0026] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device.

[0027] The standard parts used in this application document can all be purchased from the market, and the specific connection methods of each part are connected by conventional means such as mature bolts, rivets, welding, etc. in the prior art. In addition, the machinery, parts and equipment all adopt conventional models in the prior art, and the circuit connection adopts the conventional connection method in the prior art, so no specific description is given here.

[0028] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A high-efficiency and energy-saving DC magnetron sputtering power supply box, comprising a power supply box body (1), characterized in that: A cooling fan (4) is installed on the external side surface of the power box body (1), and a detachable structure is formed between the cooling fan (4) and the power box body (1). A magnetron power supply (8) and a control circuit board (11) are installed inside the power box body (1), and a temperature sensor (10) is installed on the control circuit board (11). The temperature sensor (10) and the cooling fan (4) are electrically connected. A voltage detection module (12) and a current detection module (13) are installed on the surface of the control circuit board (11), and a circuit breaker protection module (6) is installed on one side of the voltage detection module (12). The voltage detection module (12) and the current detection module (13) are both electrically connected to the circuit breaker protection module (6).

2. The high-efficiency and energy-saving DC magnetron sputtering power supply box according to claim 1 is characterized in that: The magnetron power supply (8) and the control circuit board (11) are fixedly connected via a power supply wire (9).

3. The high-efficiency and energy-saving DC magnetron sputtering power supply box according to claim 1 is characterized in that: A voltage stabilizing module (7) is mounted on the surface of the control circuit board (11), and the voltage stabilizing module (7) is electrically connected to the magnetron power supply (8).

4. The high-efficiency and energy-saving DC magnetron sputtering power supply box according to claim 1 is characterized in that: An electric power consumption sensor (14) is mounted on the surface of the control circuit board (11).

5. The high-efficiency and energy-saving DC magnetron sputtering power supply box according to claim 1 is characterized in that: The exterior of the heat dissipation fan (4) is connected to the side surface of the power box body (1) through the fixing frame (3).

6. The high-efficiency and energy-saving DC magnetron sputtering power supply box according to claim 1, characterized in that: A sealing cover plate (2) is installed on the upper surface of the power box body (1), and fixing screw holes (5) are arranged at four corners of the upper surface of the power box body (1). The sealing cover plate (2) is fixedly connected to the power box body (1) by hexagonal screws passing through the fixing screw holes (5).

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