Hoop processing device for silicon-based chip etching equipment

Abstract

The utility model discloses a hoop processing device for silicon-based chip etching equipment, which relates to the technical field of chip processing, and comprises a base, one end of the top of the base is fixedly connected with a boss, the top of the boss is eccentrically, uniformly and fixedly connected with a support column, and the top of the support column is fixedly connected with a clamping assembly; a sliding groove is formed in the upper end of the side wall, close to the boss, of the processing frame, a moving plate is slidably connected to the sliding groove, a first motor is fixedly connected to the center of the top of the moving plate, and a rotating disc is rotatably connected to the center of the bottom of the moving plate; the bottom of the turntable is eccentrically and fixedly connected with a grinding rod; the side wall, away from the boss, of the treatment frame is fixedly connected with a pump used for sucking polytetrafluoroethylene powder into the treatment frame. The clamp polishing device solves the problem that pollution is caused by polytetrafluoroethylene dust generated when a clamp is polished.

Description

Technical Field

[0001] The utility model relates to the technical field of chip processing, in particular to a clamp processing device for silicon-based chip etching equipment. Background Art

[0002] In the production process of semiconductor chips, silicon-based chip etching is a key step, which uses specific chemical or physical methods to remove materials on the surface of the silicon wafer to form the desired circuit pattern. In the etching equipment, the material used to make the clamp (used to fix and protect the silicon wafer) needs to have excellent chemical stability and corrosion resistance. Therefore, polytetrafluoroethylene has become the preferred material due to its excellent properties.

[0003] However, during the processing of PTFE clamps, especially during grinding, a large amount of fine dust will be generated. This dust not only threatens the cleanliness of the processing environment and the health of workers, but also due to the high stability of PTFE, this dust is difficult to degrade in the environment, which may cause long-term environmental pollution. Utility Model Content

[0004] The utility model aims to solve at least one of the technical problems existing in the prior art. To this end, the utility model proposes a clamp processing device for silicon-based chip etching equipment, which solves the above-mentioned problem.

[0005] In order to achieve the above-mentioned purpose, the utility model proposes a clamp processing device for silicon-based chip etching equipment.

[0006] As a further solution of the utility model:

[0007] A clamp processing device for silicon-based chip etching equipment comprises a base, one end of the top of the base is fixedly connected to a boss, the top of the boss is eccentrically and evenly fixedly connected to a support column, and the top of the support column is fixedly connected to a clamping assembly;

[0008] The other end of the top of the base is fixedly connected with a processing frame for collecting and processing polytetrafluoroethylene powder, and a slide groove is provided at the upper end of the side wall of the processing frame close to the boss, and a moving plate is slidably connected to the slide groove, and a first motor is fixedly connected to the top center of the moving plate, and a turntable is rotatably connected to the bottom center of the moving plate, and a grinding rod is eccentrically fixedly connected to the bottom of the turntable;

[0009] A pump for sucking polytetrafluoroethylene powder into the processing frame is fixedly connected to the side wall of the processing frame away from the boss.

[0010] Furthermore, the upper end of the cavity of the processing frame is a water storage frame, the bottom of the water storage frame is fixedly connected to a spray head, an absorption hole is opened at the lower end of the side wall of the processing frame close to the boss, the lower end of the cavity of the processing frame is connected to the absorption hole, and a connecting pipe is fixedly connected between the pump and the lower end of the cavity of the processing frame.

[0011] Furthermore, the clamping assembly includes a fixed platform, which is fixedly connected to the top of the support column, a fence is fixedly connected to the top edge of the fixed platform, a disc groove is fixedly connected to the top center of the fixed platform, abutment plates are evenly inserted on the sides of the disc groove, a fixing rod is fixedly connected to the bottom of the abutment plate, and the fixing rod passes through the rectangular groove opened on the fixed platform.

[0012] Furthermore, a driven gear is rotatably connected to the center of the bottom of the fixed platform, and an arc groove is formed through the driven gear in correspondence with the fixed rod, and the lower end of the fixed rod passes through the arc groove;

[0013] The bottom of the fixed platform is eccentrically connected to a driving gear, the driving gear is meshed with a driven gear, and the bottom of the driving gear is fixedly connected to a second motor.

[0014] Furthermore, shielding plates are fixedly connected to both the front and rear sides of the top of the boss, and the inner end surface of the shielding plate is fitted with the side surface of the movable plate.

[0015] Furthermore, two corners of the top of the boss away from the processing frame are fixedly connected with slots, and the slots are plugged with plug boards.

[0016] Furthermore, the grinding rod is detachably connected to the bottom of the turntable.

[0017] Furthermore, the connecting pipe is detachably connected to the processing frame and the pump, and a screen for filtering polytetrafluoroethylene powder is arranged inside the connecting pipe.

[0018] Compared with the prior art, the beneficial effects of the utility model are:

[0019] 1. Take the plug plate out of the slot, then place the annular structure part of the clamp on the fixed table in the clamping assembly, and then start the second motor. The second motor rotates to drive the driving gear to rotate, and the driving gear rotates to drive the driven gear to rotate, so that the fixed rod moves in the arc groove, and the fixed rod carries the back plate to make a linear motion inside the disc groove, so that the back plate presses against the inner side of the clamp annular structure of different sizes.

[0020] 2. Adjust the movable plate to move on the slide slot so that the grinding rod fits the clamp ring just right, then insert the plug plate into the slot, start the pump and the first motor in turn, the grinding rod grinds the clamp to produce polytetrafluoroethylene powder, the pump sucks the polytetrafluoroethylene powder into the lower end of the cavity of the processing frame through the absorption hole, and the spray head sprays the water in the water storage frame, so that the powdered polytetrafluoroethylene is wetted and fixed on the inner wall of the processing frame, avoiding the floating polytetrafluoroethylene powder from causing harm to the environment and human body. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 It is a structural stereogram of the utility model;

[0022] Figure 2 is a perspective view of the utility model;

[0023] Figure 3 This is a schematic diagram of the structure of the clamping assembly of the utility model;

[0024] Figure 4 This is a schematic diagram of the structure of the clamping assembly of the utility model;

[0025] Figure 5 It is a schematic diagram of the processing frame structure of the utility model.

[0026] In the figure: 1. base; 2. processing frame; 3. moving plate; 4. first motor; 5. slide; 6. slot; 7. pump; 8. turntable; 9. grinding rod; 10. clamping assembly; 101. fixed platform; 102. enclosure; 103. disc slot; 104. abutment plate; 105. driven gear; 106. driving gear; 107. second motor; 108. fixed rod; 11. boss; 12. support column; 13. plug plate; 14. shield plate; 15. absorption hole; 16. water storage frame; 17. sprinkler head; 18. connecting pipe. DETAILED DESCRIPTION

[0027] The technical solution of the utility model will be described clearly and completely in conjunction with the embodiments below. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of them. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0028] like Figure 1-5 As shown, a clamp processing device for silicon-based chip etching equipment includes a base 1, a boss 11 is fixedly connected to one end of the top of the base 1, a support column 12 is fixedly connected to the top of the boss 11 in an eccentric and uniform manner, and a clamping assembly 10 is fixedly connected to the top of the support column 12;

[0029] A processing frame 2 for collecting and processing polytetrafluoroethylene powder is fixedly connected to the other end of the top of the base 1. A chute 5 is provided at the upper end of the side wall of the processing frame 2 close to the boss 11. A moving plate 3 is slidably connected to the chute 5. A first motor 4 is fixedly connected to the top center of the moving plate 3. A turntable 8 is rotatably connected to the bottom center of the moving plate 3. A grinding rod 9 is eccentrically fixedly connected to the bottom of the turntable 8.

[0030] A pump 7 for sucking polytetrafluoroethylene powder into the processing frame 2 is fixedly connected to the side wall of the processing frame 2 away from the boss 11 .

[0031] The upper end of the cavity of the processing frame 2 is a water storage frame 16, and the bottom of the water storage frame 16 is fixedly connected to a spray head 17. An absorption hole 15 is opened at the lower end of the side wall of the processing frame 2 close to the boss 11. The lower end of the cavity of the processing frame 2 is connected to the absorption hole 15, and a connecting pipe 18 is fixedly connected between the pump 7 and the lower end of the cavity of the processing frame 2.

[0032] The clamping assembly 10 includes a fixed platform 101, which is fixedly connected to the top of the support column 12. The top edge of the fixed platform 101 is fixedly connected to a fence 102. The top center of the fixed platform 101 is fixedly connected to a disc groove 103. The sides of the disc groove 103 are evenly inserted with abutment plates 104. The bottom of the abutment plate 104 is fixedly connected to a fixing rod 108, which passes through the rectangular groove provided on the fixed platform 101 to match it.

[0033] A driven gear 105 is rotatably connected to the center of the bottom of the fixed platform 101. The driven gear 105 is matched with the fixed rod 108 and has an arc groove extending therethrough. The lower end of the fixed rod 108 passes through the arc groove.

[0034] The bottom of the fixed platform 101 is eccentrically connected to a driving gear 106 , the driving gear 106 is meshedly connected to the driven gear 105 , and the bottom of the driving gear 106 is fixedly connected to a second motor 107 .

[0035] Shielding plates 14 are fixedly connected to both the front and rear sides of the top of the boss 11 , and the inner end surface of the shielding plate 14 is in contact with the side surface of the movable plate 3 .

[0036] The top of the boss 11 and the two corners away from the processing frame 2 are fixedly connected with slots 6 , and the slots 6 are plugged with plug boards 13 .

[0037] The grinding rod 9 is detachably connected to the bottom of the rotating disk 8 .

[0038] The connecting pipe 18 is detachably connected to the processing frame 2 and the pump 7 , and a screen for filtering polytetrafluoroethylene powder is arranged inside the connecting pipe 18 .

[0039] Working principle:

[0040] During use, the insert plate 13 is taken out from the slot 6, and then the annular structure part of the clamp is placed on the fixed platform 101 in the clamping assembly 10, and then the second motor 107 is started, and the second motor 107 rotates to drive the driving gear 106 to rotate, and the driving gear 106 rotates to drive the driven gear 105 to rotate, so that the fixing rod 108 moves in the arc groove, and the fixing rod 108 drives the abutment plate 104 to make a linear motion inside the disc groove 103, so that the abutment plate 104 presses against the inner side of the clamp annular structure of different sizes;

[0041] The movable plate 3 is adjusted to move on the slide groove 5 so that the grinding rod 9 fits the clamp ring just right, and then the plug plate 13 is inserted into the slot 6, and the pump 7 and the first motor 4 are started successively. The grinding rod 9 grinds the clamp to produce polytetrafluoroethylene powder, and the pump 7 absorbs the polytetrafluoroethylene powder into the lower end of the cavity of the processing frame 2 through the absorption hole 15, and the spray head 17 sprays the water in the water storage frame 16, so that the powdered polytetrafluoroethylene is wetted and fixed on the inner wall of the processing frame 2, thereby preventing the floating polytetrafluoroethylene powder from causing harm to the environment and human body;

[0042] The above embodiments are only used to illustrate the technical method of the utility model rather than to limit it. Although the utility model is described in detail with reference to the preferred embodiments, ordinary technicians in the field should understand that the technical method of the utility model can be modified or replaced by equivalents without departing from the spirit and scope of the technical method of the utility model.

Claims

1. A clamp processing device for silicon-based chip etching equipment, characterized in that: It comprises a base (1), one end of the top of the base (1) is fixedly connected to a boss (11), the top of the boss (11) is eccentrically and evenly fixedly connected to a support column (12), and the top of the support column (12) is fixedly connected to a clamping assembly (10); A processing frame (2) for collecting and processing polytetrafluoroethylene powder is fixedly connected to the other end of the top of the base (1); a slide groove (5) is provided at the upper end of the side wall of the processing frame (2) close to the boss (11); a moving plate (3) is slidably connected to the slide groove (5); a first motor (4) is fixedly connected to the center of the top of the moving plate (3); a turntable (8) is rotatably connected to the center of the bottom of the moving plate (3); a grinding rod (9) is eccentrically fixedly connected to the bottom of the turntable (8); A pump (7) for sucking polytetrafluoroethylene powder into the processing frame (2) is fixedly connected to the side wall of the processing frame (2) away from the boss (11).

2. A clamp processing device for silicon-based chip etching equipment according to claim 1, characterized in that: The upper end of the cavity of the processing frame (2) is a water storage frame (16), the bottom of the water storage frame (16) is fixedly connected to a spray head (17), the lower end of the side wall of the processing frame (2) close to the boss (11) is provided with an absorption hole (15), the lower end of the cavity of the processing frame (2) is connected to the absorption hole (15), and a connecting pipe (18) is fixedly connected between the pump (7) and the lower end of the cavity of the processing frame (2).

3. A clamp processing device for silicon-based chip etching equipment according to claim 2, characterized in that: The clamping assembly (10) comprises a fixed platform (101), the fixed platform (101) is fixedly connected to the top of the support column (12), the top edge of the fixed platform (101) is fixedly connected to a fence (102), the top center of the fixed platform (101) is fixedly connected to a disc groove (103), the side of the disc groove (103) is evenly inserted with abutment plates (104), the bottom of the abutment plate (104) is fixedly connected to a fixing rod (108), and the fixing rod (108) passes through a rectangular groove provided in the fixed platform (101) to match the fixing rod (108).

4. A clamp processing device for silicon-based chip etching equipment according to claim 3, characterized in that: A driven gear (105) is rotatably connected to the center of the bottom of the fixed platform (101), and the driven gear (105) is matched with the fixed rod (108) and has an arc groove extending therethrough in a one-to-one correspondence, and the lower end of the fixed rod (108) passes through the arc groove; The bottom of the fixed platform (101) is eccentrically rotatably connected to a driving gear (106), the driving gear (106) is meshingly connected to a driven gear (105), and the bottom of the driving gear (106) is fixedly connected to a second motor (107).

5. A clamp processing device for silicon-based chip etching equipment according to claim 4, characterized in that: The top of the boss (11) is fixedly connected to shielding plates (14) on both the front and rear sides, and the inner end surface of the shielding plate (14) is in contact with the side surface of the movable plate (3).

6. A clamp processing device for silicon-based chip etching equipment according to claim 5, characterized in that: The top of the boss (11) and two corners away from the processing frame (2) are fixedly connected with slots (6), and the slots (6) are plugged with plug boards (13).

7. A clamp processing device for silicon-based chip etching equipment according to claim 6, characterized in that: The grinding rod (9) is detachably connected to the bottom of the rotating disk (8).

8. The clamp processing device for silicon-based chip etching equipment according to claim 7, characterized in that: The connecting pipe (18) is detachably connected to the processing frame (2) and the pump (7), and a screen for filtering polytetrafluoroethylene powder is arranged inside the connecting pipe (18).

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