Evaporation equipment

The fine particles are obtained through the evaporation boat and wave atomization device, and the combination of ultrasonic wave and corona device is used to solve the problem of particle size control in vacuum coating, achieving the improvement of the uniformity of the coating and the evaporation rate.

CN222349099UActive Publication Date: 2025-01-14JIANGSU ENPACK COMPOSITE CURRENT COLLECTORS CO LTD
View PDF 0 Cites 0 Cited by

Patent Information

Application Number
CN202421134290.4
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-05-22
Publication Date
2025-01-14
Estimated Expiration
2034-05-22

AI Technical Summary

Technical Problem

In the existing vacuum coating technology, the evaporation source cannot control the size of steam particles, resulting in uneven coating.

Method used

The liquid material is processed into steam by using an evaporation boat, and tiny particles are obtained through the wave atomization device. Combined with the frequency and intensity adjustment of ultrasonic waves, the particle size of the material can be precisely controlled, and the surface roughness is increased by using the corona device to prevent it through the vacuum chamber. pollute.

Benefits of technology

The uniformity of the coating and the evaporation rate are improved, ensuring uniform deposition and efficient evaporation of the surface coating of the product.

✦ Generated by Eureka AI based on patent content.

Smart Images

  • Figure CN222349099U_ABST
    Figure CN222349099U_ABST
Patent Text Reader

Abstract

The utility model discloses evaporation equipment, which comprises a feeding device, an evaporation device and a control device, wherein the feeding device is used for conveying products; the evaporation boat is arranged on the lower side of the product and is used for evaporating a liquid material; the atomization device is arranged between the product and the evaporation boat; the guide device is arranged between the evaporation boat and the atomization device, and the guide device is used for guiding the evaporated liquid material to the atomization device; the evaporation boat is used for processing a liquid material to form steam, and the steam passes through the wave atomization device, so that a large number of smaller particles are obtained, and a coating film on the surface of a product is more uniform; by adjusting the frequency and the intensity of the ultrasonic waves, the accurate control on the molecular particle size of the material can be realized, so that more uniform and fine particles are obtained, and the particles are more uniformly deposited on the surface of a base film; meanwhile, after the liquid material is evaporated, the volume of molecular particles is small, the surface area is relatively large, and the evaporation rate is accelerated, so that the evaporation process of the liquid material is promoted.
Need to check novelty before this filing date? Find Prior Art

Description

Technical Field

[0001] The utility model relates to the technical field of film coating, in particular to a vapor deposition device. Background Art

[0002] Vacuum coating refers to a method of heating metal or non-metal materials under high vacuum conditions to evaporate and condense on the surface of the coated part to form a thin film. Currently, when using an evaporation source to vacuum coat products, the evaporation source is usually used to directly coat the product. The evaporation source method cannot control the particle size of the steam, which will lead to uneven coating. Utility Model Content

[0003] In order to overcome the above-mentioned shortcomings, the purpose of the utility model is to provide a vapor deposition device, which uses an evaporation boat to process the liquid material to form vapor and then passes it through a wave atomization device, so as to obtain a large number of smaller particles, so that the coating on the surface of the product is more uniform; by adjusting the frequency and intensity of the ultrasonic wave, the molecular particle size of the material can be accurately controlled, so as to obtain more uniform and fine particles, so that they can be more evenly deposited on the surface of the base film; at the same time, after the liquid material evaporates, its molecular particles have a smaller volume and a relatively larger surface area, and the evaporation rate will be accelerated, thereby promoting the evaporation process of the liquid material.

[0004] In order to achieve the above purpose, the technical solution adopted by the utility model is: a vapor deposition device, comprising:

[0005] A feeding device, which is used to transfer products;

[0006] Evaporation boat, which is arranged at the lower side of the product and is used to evaporate liquid materials;

[0007] Atomizing device, which is arranged between the product and the evaporation boat;

[0008] The guide device connects the evaporation boat and the atomization device. The guide device includes an atomization device installation position and an evaporation device installation position. The evaporation boat is arranged at the evaporation device installation position, and the atomization device is arranged at the atomization device installation position.

[0009] In this technical solution, the feeding device is used to transport the product through the evaporation boat and the atomization device, so as to perform coating treatment on the product. The evaporation boat is used to evaporate the liquid material into a gaseous state, and the atomization device processes the gaseous material to obtain finer particles. The guiding device is used to guide the gaseous material from the evaporation boat to the atomization device to prevent the dispersion from causing uneven coating particles. The liquid material is processed by the evaporation boat to form vapor and then passed through the wave atomization device, so as to obtain a large number of smaller particles, so that the coating on the surface of the product is more uniform. By adjusting the frequency and intensity of the ultrasonic wave, the molecular particle size of the material can be accurately controlled, so as to obtain more uniform and fine particles, so that they are more evenly deposited on the surface of the base film. At the same time, after the liquid material evaporates, its molecular particles are smaller in volume and relatively larger in surface area, and the evaporation rate will be accelerated, thereby promoting the evaporation process of the liquid material.

[0010] In some embodiments, the evaporation equipment further includes a corona device, which is disposed before the evaporation boat in the running direction of the product.

[0011] In this technical solution, the corona device performs corona treatment on the product, thereby increasing the roughness of the product surface, which is beneficial to the coating treatment of the product.

[0012] In some embodiments, the evaporation boat includes a first evaporation boat and a second evaporation boat, the atomization device includes a first atomization device and a second atomization device, the first atomization device is arranged on the upper side of the first evaporation boat, and the second atomization device is arranged on the upper side of the second evaporation boat.

[0013] In this technical solution, the first atomizing device is used to atomize the material evaporated by the first evaporation boat, and the second atomizing device is used to atomize the material evaporated by the second evaporation boat.

[0014] In some embodiments, the guide device includes a first guide device and a second guide device, the first guide device connects the first evaporation boat and the first atomization device, and the second guide device connects the second evaporation boat and the second atomization device.

[0015] In this technical solution, the first guide device is used to guide the material in the vapor state from the first evaporation boat to the first atomization device, and the second guide device is used to guide the material in the vapor state from the second evaporation boat to the second atomization device.

[0016] In some embodiments, the product includes a first surface and a second surface, the first evaporation boat faces the first surface, and the second evaporation boat faces the second surface.

[0017] In this technical solution, a first evaporation boat is used to perform a coating process on a first surface of a product, and a second evaporation boat is used to perform a coating process on a second surface of the product.

[0018] In some embodiments, the corona device includes a first corona device and a second corona device, the first corona device faces the first surface, the first corona device is arranged before the first evaporation boat in the running direction of the product, and the second corona device is arranged before the second evaporation boat in the running direction of the product.

[0019] In this technical solution, the first corona device performs corona treatment on the first surface of the product, which is conducive to the evaporation equipment to perform coating treatment on the first surface of the product, and the second corona device performs corona treatment on the second surface of the product, which is conducive to the evaporation equipment to perform coating treatment on the second surface of the product.

[0020] In some embodiments, the feeding device further includes a cooling roller, the cooling roller includes a first cooling roller and a second cooling roller, the first atomizing device faces the first cooling roller, and the second atomizing device faces the second cooling roller.

[0021] In this technical solution, the cooling roller plays the role of supporting the product. At the same time, when the evaporation boat and the atomization device are coating the product, the cooling roller can cool the product to prevent the product from overheating and causing damage.

[0022] In some embodiments, the feeding device further includes a feeding roller and a receiving roller, wherein the feeding roller is used to mount unprocessed products, and the receiving roller is used to collect processed products.

[0023] In this technical solution, the product is driven by a feeding roller and a receiving roller, and the product passes through an evaporation boat and an atomizing device, thereby being coated.

[0024] In some embodiments, the feeding device also includes guide rollers, which include a first guide roller, a second guide roller and a third guide roller, the first guide roller is arranged between the feeding roller and the first cooling roller, the second guide roller is arranged between the first cooling roller and the second cooling roller, and the third guide roller is arranged between the second cooling roller and the receiving roller.

[0025] In this technical solution, the first guide roller is used to guide the product to the first cooling roller, the second guide roller guides the product to the second cooling roller, and the third guide roller guides the product to the receiving roller.

[0026] In some embodiments, the evaporation device further includes a vacuum chamber, and the feeding device, the evaporation boat, the atomizing device, the guiding device and the corona device are arranged in the vacuum chamber.

[0027] In this technical solution, the vacuum chamber is used to prevent the product surface from being contaminated during the evaporation process.

[0028] The beneficial effect of the utility model is that by utilizing an evaporation boat to process the liquid material into vapor and then passing it through a wave atomization device, a large number of smaller particles are obtained, making the coating on the surface of the product more uniform; by adjusting the frequency and intensity of the ultrasonic wave, the molecular particle size of the material can be precisely controlled, thereby obtaining more uniform and fine particles, which are more evenly deposited on the surface of the base film; at the same time, after the liquid material evaporates, its molecular particles are smaller in volume and have a relatively larger surface area, and the evaporation rate is accelerated, thereby promoting the evaporation process of the liquid material. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] Figure 1 A schematic diagram of a vapor deposition device according to an embodiment of the present invention Figure 1 ;

[0030] Figure 2 A schematic diagram of a vapor deposition device according to an embodiment of the present invention Figure 2 ;

[0031] Figure 3 A schematic diagram of a guide device of a vapor deposition device according to an embodiment of the present utility model;

[0032] In the figure: 11, first evaporation boat; 12, second evaporation boat;

[0033] 21. a first atomizing device; 22. a second atomizing device;

[0034] 31. First guide device; 32. Second guide device; 33. Atomization device installation position; 34. Evaporation device installation position;

[0035] 41. a first corona device; 42. a second corona device;

[0036] 51. a first cooling roller; 52. a second cooling roller;

[0037] 61. Feeding roller; 62. Receiving roller;

[0038] 71, first guide roller; 72, second guide roller; 73, third guide roller

[0039] 8. Vacuum chamber. DETAILED DESCRIPTION

[0040] The preferred embodiments of the present invention are described in detail below in conjunction with the accompanying drawings so that the advantages and features of the present invention can be more easily understood by those skilled in the art, thereby making a clearer and more definite definition of the protection scope of the present invention.

[0041] Combined with Figure 1 To Attachment Figure 3 As shown, the utility model provides a vapor deposition device. Figure 1 As shown in FIG. 1 , the evaporation equipment includes:

[0042] A feeding device is used to transfer products. The feeding device is used to transport products through an evaporation boat and an atomization device, so as to perform a coating process on the products. The evaporation boat is used to evaporate liquid materials into a gaseous state;

[0043] Evaporation boat, which is arranged at the lower side of the product and is used to evaporate liquid materials;

[0044] Atomizing device, which is set between the evaporation boat and the product and the evaporation boat, processes the gaseous material to obtain finer particles. The atomizing device uses an ultrasonic atomizer, which acts on the steam material passing through the atomizing device through high-frequency vibration, so that the steam material forms a large number of smaller material particles.

[0045] The guide device is trumpet-shaped, and connects the evaporation boat and the atomization device. The guide device includes an atomization device mounting position 33 and an evaporation device mounting position 34. The evaporation boat is arranged at the evaporation device mounting position 34, and the atomization device is arranged at the atomization device mounting position 33.

[0046] The guide device is used to guide the gaseous material from the evaporation boat to the atomization device. After the material is evaporated into gas by the evaporation boat, it is guided to the atomization device in the guide device, so that all the materials for coating the product are processed by the atomization device, preventing the gaseous material from escaping without being processed by the atomization device, resulting in uneven coating particles; by using the evaporation boat to process the liquid material into steam and then passing it through the wave atomization device, a large number of smaller particles are obtained, making the coating on the surface of the product more uniform; by adjusting the frequency and intensity of the ultrasonic wave, the molecular particle size of the material can be accurately controlled, so as to obtain more uniform and fine particles, so that they are more evenly deposited on the surface of the base film; at the same time, after the liquid material evaporates, its molecular particles are smaller in volume and relatively larger in surface area, and the evaporation rate will be accelerated, thereby promoting the evaporation process of the liquid material.

[0047] Continue to combine Figure 1 As shown, in some embodiments, the evaporation equipment also includes a corona device, which is arranged before the evaporation boat in the running direction of the product. The corona device performs corona treatment on the product, thereby increasing the roughness of the product surface, which is beneficial to the coating treatment of the product.

[0048] Continue to combine Figure 1 and attached Figure 2As shown, in some embodiments, the evaporation boat includes a first evaporation boat 11 and a second evaporation boat 12, and the atomization device includes a first atomization device 21 and a second atomization device 22. The first atomization device 21 is arranged on the upper side of the first evaporation boat 11, and the second atomization device 22 is arranged on the upper side of the second evaporation boat 12. The first atomization device 21 is used to atomize the material evaporated by the first evaporation boat 11, and the second atomization device 22 is used to atomize the material evaporated by the second evaporation boat 12.

[0049] Continue to combine Figure 1 and attached Figure 2 As shown, in some embodiments, the guide device includes a first guide device 31 and a second guide device 32, the first guide device 31 connects the first evaporation boat 11 and the first atomization device 21, the second guide device 32 connects the second evaporation boat 12 and the second atomization device 22, the first guide device 31 is used to guide the material in the vapor state from the first evaporation boat 11 to the first atomization device 21, and the second guide device 32 is used to guide the material in the vapor state from the second evaporation boat 12 to the second atomization device 22.

[0050] Continue to combine Figure 1 and attached Figure 2 As shown, in some embodiments, the product includes a first surface and a second surface, the first evaporation boat 11 faces the first surface, and the second evaporation boat 12 faces the second surface, the first surface of the product is coated by the first evaporation boat 11, and the second surface of the product is coated by the second evaporation boat 12.

[0051] Continue to combine Figure 1 and attached Figure 2 As shown, in some embodiments, the corona device includes a first corona device 41 and a second corona device 42. The first corona device 41 faces the first surface and is arranged before the first evaporation boat 11 in the running direction of the product. The second corona device 42 is arranged before the second evaporation boat 12 in the running direction of the product. The first corona device 41 performs corona treatment on the first surface of the product, which is beneficial for the evaporation equipment to perform film coating on the first surface of the product. The second corona device 42 performs corona treatment on the second surface of the product, which is beneficial for the evaporation equipment to perform film coating on the second surface of the product.

[0052] Continue to combine Figure 1 and attached Figure 2 As shown, in some embodiments, the feeding device also includes a cooling roller, and the cooling roller includes a first cooling roller 51 and a second cooling roller 52. The first atomizing device 21 faces the first cooling roller 51, and the second atomizing device 22 faces the second cooling roller 52. The cooling rollers support the product. At the same time, when the evaporating boat and the atomizing device are coating the product, the cooling rollers can cool the product to prevent the product from overheating and causing damage.

[0053] Continue to combine Figure 1 and attached Figure 2 As shown, in some embodiments, the feeding device also includes a feeding roller 61 and a receiving roller 62, the feeding roller is used to install unprocessed products, and the receiving roller is used to collect processed products. The products are driven by the feeding roller 61 and the receiving roller 62, so that the products pass through the evaporation boat and the atomization device, thereby performing a coating treatment on the products.

[0054] Continue to combine Figure 1 and attached Figure 2 As shown, in some embodiments, the feeding device further includes guide rollers, and the guide rollers include a first guide roller 71, a second guide roller 72 and a third guide roller. Figure 1 As shown in the figure, a first guide roller 71 is arranged between the feeding roller 61 and the first cooling roller 51, two second guide rollers 72 are arranged between the first cooling roller 51 and the second cooling roller 52, and five third guide rollers are arranged between the second cooling roller 52 and the receiving roller 62. However, the utility model does not limit the number of the first guide roller, the second guide roller and the third guide roller. Here, one first guide roller, two second guide rollers and no third guide roller are used for exemplary description. The first guide roller 71 is used to guide the product to the first cooling roller 51, the second guide roller 72 guides the product to the second cooling roller 52, and the third guide roller guides the product to the receiving roller 62.

[0055] Figure 2 As shown in the figure, a first guide roller 71 is arranged between the feed roller 61 and the first cooling roller 51, two second guide rollers 72 are arranged between the first cooling roller 51 and the second cooling roller 52, and three third guide rollers are arranged between the second cooling roller 52 and the receiving roller 62.

[0056] Continue to combine Figure 1 and attached Figure 2 As shown, in some embodiments, the evaporation device also includes a vacuum chamber, and the feeding device, evaporation boat, atomization device, guide device and corona device are arranged in the vacuum chamber, and the vacuum chamber is used to prevent the product surface from being contaminated during the evaporation process.

[0057] In summary, the utility model provides a vapor deposition device, which processes the liquid material into vapor through an evaporation boat and then passes it through a wave atomization device, thereby obtaining a large number of smaller particles, making the coating on the surface of the product more uniform; by adjusting the frequency and intensity of the ultrasonic wave, the molecular particle size of the material can be accurately controlled, thereby obtaining more uniform and fine particles, so that they are more evenly deposited on the surface of the base film; at the same time, after the liquid material evaporates, its molecular particles have a smaller volume and a relatively larger surface area, and the evaporation rate will be accelerated, thereby promoting the evaporation process of the liquid material.

[0058] The above implementation modes are only for illustrating the technical concept and features of the utility model, and their purpose is to allow people familiar with this technology to understand the content of the utility model and implement it. It cannot be used to limit the protection scope of the utility model. Any equivalent changes or modifications made according to the spirit of the utility model should be included in the protection scope of the utility model.

Claims

1. A vapor deposition device, characterized in that: include: A feeding device, the feeding device is used to transport products; An evaporation boat, the evaporation boat is arranged at the lower side of the product, and the evaporation boat is used to evaporate liquid materials; an atomizing device, the atomizing device being disposed between the product and the evaporation boat; The guide device connects the evaporation boat and the atomization device. The guide device includes an atomization device installation position and an evaporation device installation position. The evaporation boat is arranged at the evaporation device installation position, and the atomization device is arranged at the atomization device installation position.

2. The evaporation device according to claim 1, characterized in that: It also includes a corona device, which is arranged before the evaporation boat in the running direction of the product.

3. The evaporation device according to claim 2, characterized in that: The evaporation boat includes a first evaporation boat and a second evaporation boat, and the atomization device includes a first atomization device and a second atomization device. The first atomization device is arranged on the upper side of the first evaporation boat, and the second atomization device is arranged on the upper side of the second evaporation boat.

4. The evaporation device according to claim 3, characterized in that: The guide device includes a first guide device and a second guide device, the first guide device connects the first evaporation boat and the first atomization device, and the second guide device connects the second evaporation boat and the second atomization device.

5. The evaporation device according to claim 3, characterized in that: The product includes a first surface and a second surface, the first evaporation boat faces the first surface, and the second evaporation boat faces the second surface.

6. The evaporation device according to claim 5, characterized in that: The corona device includes a first corona device and a second corona device. The first corona device faces the first surface and is arranged before the first evaporation boat in the running direction of the product. The second corona device is arranged before the second evaporation boat in the running direction of the product.

7. The evaporation device according to claim 3, characterized in that: The feeding device further includes cooling rollers, and the cooling rollers include a first cooling roller and a second cooling roller. The first atomizing device faces the first cooling roller, and the second atomizing device faces the second cooling roller.

8. The evaporation device according to claim 7, characterized in that: The feeding device also includes a feeding roller and a receiving roller, wherein the feeding roller is used to mount unprocessed products, and the receiving roller is used to collect processed products.

9. The evaporation device according to claim 8, characterized in that: The feeding device also includes guide rollers, which include a first guide roller, a second guide roller and a third guide roller, the first guide roller is arranged between the feeding roller and the first cooling roller, the second guide roller is arranged between the first cooling roller and the second cooling roller, and the third guide roller is arranged between the second cooling roller and the receiving roller.

10. The method according to claim 2, characterized in that: It also includes a vacuum chamber, in which the feeding device, the evaporation boat, the atomizing device, the guiding device and the corona device are arranged.