Airtight cabin door for preventing gas backflow

Abstract

The utility model relates to the technical field of cabin doors, in particular to a closed cabin door capable of preventing gas backflow. In order to solve the problems that due to the fact that external air pressure suddenly becomes large, external air enters a clean room, dust in the external air affects wafer manufacturing in the clean room, and the quality of wafer finished products is affected, the following technical scheme is provided: the cabin door comprises a cabin door body; the ventilation mechanism is installed on the cabin door body and facilitates air flowing, and the ventilation mechanism comprises a ventilation pipe, a protective cover and ventilation holes; and the non-return assembly is arranged in the ventilation mechanism and is used for preventing air from flowing back. According to the utility model, gas can be prevented from flowing back into the clean room from the air outlet, so that the cleanliness of the surface of a wafer is ensured, and the performance and quality of a wafer finished product are improved.

Description

Technical Field

[0001] The utility model relates to the technical field of cabin doors, in particular to a closed cabin door for preventing gas backflow. Background Art

[0002] In the clean room of the semiconductor wafer manufacturing process, air quality is crucial because any tiny pollutant may have a negative impact on the wafer manufacturing process. At the same time, the air in the clean room will also ensure a certain speed of flow. At the outlet where the air flows outward, the external air pressure may suddenly increase, causing the external gas to enter the clean room, so that the dust in the external air affects the wafer manufacturing in the clean room and affects the quality of the finished wafers. In view of this, the utility model proposes a closed door that prevents gas backflow. Utility Model Content

[0003] The purpose of the utility model is to propose a closed cabin door that prevents gas backflow in order to address the problem in the background technology that the external air pressure suddenly increases, causing the external gas to enter the clean room, so that the dust in the external air affects the wafer manufacturing in the clean room and affects the quality of the finished wafers.

[0004] The technical solution of the utility model is as follows: a closed cabin door for preventing gas backflow, comprising a cabin door body; a ventilation mechanism installed on the cabin door body to facilitate air flow, the ventilation mechanism comprising a ventilation pipe, a protective cover, and ventilation holes; and a check assembly arranged in the ventilation mechanism for preventing air backflow.

[0005] Optionally, the ventilation pipe is installed on the hatch body, the shield is fixedly connected to the end of the ventilation pipe away from the hatch body, a plurality of ventilation holes are formed on the shield, and the end of the ventilation pipe away from the shield is trumpet-shaped.

[0006] Optionally, the ventilation mechanism also includes a first baffle, a first sealing plug, and a first sealing gasket. The first baffle is fixedly connected to the inner wall of the ventilation pipe, the first sealing plug is installed in the through hole on the first baffle, the first sealing plug is truncated in a cone shape, and the first sealing gasket is installed on the outer ring of the first sealing plug.

[0007] Optionally, the ventilation mechanism also includes a connecting rod, a limiting ring, and a first fixed rod, the connecting rod is fixedly connected to the first sealing plug, the limiting ring is slidably connected to the connecting rod, the limiting ring is arranged on the side of the first sealing plug close to the shield, and multiple groups of the first fixed rods are fixedly connected between the limiting ring and the hatch body.

[0008] Optionally, the check assembly includes a second baffle, a second sealing plug, and a second sealing gasket. The second baffle is fixedly connected to the inner wall of the ventilation pipe, the second baffle is arranged between the limiting ring and the protective cover, the second sealing plug fixedly connected to the end of the connecting rod away from the first sealing plug is installed in the through hole on the second baffle, the second sealing plug is arranged in a truncated cone shape, and the second sealing gasket is installed on the outer ring of the second sealing plug.

[0009] Optionally, the check assembly also includes a movable cylinder and a fixed cylinder, the movable cylinder is fixedly connected to the side of the second sealing plug away from the first sealing plug, the fixed cylinder is slidably sleeved on the movable cylinder, the movable cylinder and the fixed cylinder are connected in a T-shaped structure, and the end of the fixed cylinder close to the protective cover is trumpet-shaped.

[0010] Optionally, the check assembly further includes a fixing ring and a second fixing rod, wherein the fixing ring is fixedly connected to the outer ring of the fixing cylinder, and a plurality of groups of the second fixing rods are fixedly connected between the fixing ring and the ventilation pipe.

[0011] Compared with the prior art, the utility model has the following beneficial technical effects:

[0012] The utility model sets a ventilation mechanism to push open the first sealing plug when the air flows outward, so that the first sealing plug leaves the first baffle plate, and the second sealing plug leaves the second baffle plate position, so that the air in the clean room flows out, making the air flow convenient for wafer manufacturing;

[0013] Furthermore, by setting the check assembly, when the outside air is blown in, it is blown into the moving cylinder, and at the same time, the moving cylinder is pushed into the hole position in the second baffle plate for sealing, thereby preventing the backflow of air from driving dust into the clean room, thereby improving the performance and quality of the wafer;

[0014] In summary, the utility model can prevent gas from flowing back from the air outlet into the clean room, thereby ensuring the cleanliness of the wafer surface and improving the performance and quality of the finished wafer products. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is a schematic diagram of the structure of a closed hatch to prevent gas backflow;

[0016] Figure 2 It is a schematic diagram of the cross-sectional structure of the ventilation mechanism;

[0017] Figure 3 It is a cross-sectional schematic diagram of the check assembly.

[0018] Reference numerals:

[0019] 1. Door body;

[0020] 2. ventilation mechanism; 21. ventilation pipe; 22. shield; 23. ventilation hole; 24. first baffle; 25. first sealing plug; 26. first sealing pad; 27. connecting rod; 28. limiting ring; 29. ​​first fixing rod;

[0021] 3. Check assembly; 31. Second baffle; 32. Second sealing plug; 33. Second sealing gasket; 34. Moving cylinder; 35. Fixed cylinder; 36. Fixed ring; 37. Second fixed rod. DETAILED DESCRIPTION

[0022] The technical solution of the present utility model will be clearly and completely described below in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present utility model, rather than all of the embodiments.

[0023] The components of the embodiments of the present invention generally described and shown in the drawings herein can be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiments of the present invention provided in the drawings is not intended to limit the scope of the claimed invention, but merely represents selected embodiments of the present invention.

[0024] Based on the embodiments of the present utility model, all other embodiments obtained by ordinary technicians in the field without making any creative work shall fall within the scope of protection of the present utility model.

[0025] In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.

[0026] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0027] Example

[0028] like Figure 1-3As shown, the utility model proposes a closed door for preventing gas backflow, including a door body 1. The door body 1 cooperates with a sealing rubber ring to achieve sealing to prevent air leakage at the edge. A handle is provided on the door body 1 for easy opening and closing. A ventilation mechanism 2 is installed on the door body 1 to facilitate air flow. The ventilation mechanism 2 includes a ventilation pipe 21, a protective cover 22, and ventilation holes 23. The ventilation pipe 21 is installed on the door body 1, and the position of the ventilation pipe 21 is fixed. The protective cover 22 is fixedly connected to the end of the ventilation pipe 21 away from the door body 1. A plurality of ventilation holes 23 are provided on the protective cover 22 to facilitate the passage of gas while preventing foreign matter from entering. The end of the ventilation pipe 21 away from the protective cover 22 is trumpet-shaped, which is convenient for air in the clean room to enter the ventilation pipe 21. The ventilation mechanism 2 further includes a first baffle 24, a first sealing plug 25, and a first sealing gasket 26. The first baffle 24 is fixedly connected to the inner wall of the ventilation pipe 21. The first sealing plug 25 is installed in the through hole on the first baffle 24. The first sealing plug 25 is truncated and is used to block the through hole position after the first sealing plug 25 is installed to prevent gas from entering. The first sealing gasket 26 is installed on the outer ring of the first sealing plug 25 to enhance the sealing performance. The ventilation mechanism 2 further includes a connecting rod 27, a limiting ring 28, and a first fixing rod 29. The connecting rod 27 is fixedly connected to the first sealing plug 25, and the connecting rod 27 moves synchronously with the first sealing plug 25. The limiting ring 28 is slidably connected to the connecting rod 27. The limiting ring 28 is set on the side of the first sealing plug 25 close to the shield 22. Multiple groups of first fixing rods 29 are fixedly connected between the limiting ring 28 and the hatch body 1. The first fixing rod 29 fixes the position of the limiting ring 28, so as to limit the position when the connecting rod 27 moves, so that the movement of the first sealing plug 25 is stable.

[0029] Specifically, the hatch further includes a check assembly 3 arranged in the ventilation mechanism 2 for preventing air backflow. The check assembly 3 includes a second baffle 31, a second sealing plug 32, and a second sealing gasket 33. The second baffle 31 is fixedly connected to the inner wall of the ventilation pipe 21, and the position of the second baffle 31 is fixed. The second baffle 31 is arranged between the limit ring 28 and the shield 22. The second sealing plug 32 fixedly connected to the end of the connecting rod 27 away from the first sealing plug 25 is installed in the through hole on the second baffle 31. The second sealing plug 32 is arranged in a truncated cone shape. The second sealing plug 32 is used to block the through hole on the second baffle 31 to prevent gas from entering the clean room. The second sealing gasket 33 is installed on the outer ring of the second sealing plug 32 to enhance the sealing performance. The check assembly 3 also includes a moving cylinder 34 and a fixed cylinder 35. The moving cylinder 34 is fixedly connected to the side of the second sealing plug 32 away from the first sealing plug 25, and the moving cylinder 34 moves synchronously with the second sealing plug 32. The fixed cylinder 35 is slidably sleeved on the moving cylinder 34. The moving cylinder 34 and the fixed cylinder 35 are connected in a T-shaped structure. The end of the fixed cylinder 35 close to the shield 22 is horn-shaped, so that when the outside air enters through the ventilation hole 23, it enters the moving cylinder 34 and the fixed cylinder 35, thereby pushing the moving cylinder 34 to slide in the fixed cylinder 35 and driving the second sealing plug 32 to move, so that the second sealing plug 32 blocks the through hole on the second baffle 31 to prevent gas backflow. The check assembly 3 also includes a fixed ring 36 and a second fixed rod 37. The fixed ring 36 is fixedly connected to the outer ring of the fixed cylinder 35. Multiple sets of second fixed rods 37 are fixedly connected between the fixed ring 36 and the ventilation pipe 21, so that the position of the fixed cylinder 35 is fixed.

[0030] In this embodiment, when the gas in the clean room flows outward, the gas first enters the ventilation pipe 21 through the trumpet-shaped position at one end of the ventilation pipe 21, and pushes the first sealing plug 25 with the flow of the gas, so that the first sealing plug 25 is away from the first baffle 24. At the same time, the first sealing plug 25 slides under the limiting action of the connecting rod 27 and the limiting ring 28, and drives the second sealing plug 32 away from the second baffle 31. When the second sealing plug 32 moves, it drives the moving cylinder 34 to slide in the fixed cylinder 35, and the moving cylinder 34 approaches the shield 22. At this time, the gas passes through the first baffle 24 and the second baffle 31 in turn, and is discharged outward from the ventilation hole 23 through the shield 22. When the external air pressure suddenly increases or gas blows toward the shield 22 and enters the interior of the door body 1 through the ventilation hole 23. At this time, the outside air enters through the ventilation hole 23, and part of the air enters the fixed cylinder 35 and the moving cylinder 34, and pushes the moving cylinder 34 to slide so that the moving cylinder 34 drives the second sealing plug 32 to approach the second baffle 31. At this time, the second sealing plug 32 blocks the through hole position of the second baffle 31 to complete the sealing to prevent gas backflow. At the same time, some air does not enter the fixed cylinder 35, but directly passes through the outside of the fixed cylinder 35, and then reaches between the first baffle 24 and the second baffle 31 through the through hole on the second baffle 31. When the second sealing plug 32 moves, the first sealing plug 25 is driven to move synchronously through the connecting rod 27, and the first sealing plug 25 blocks the hole position of the first baffle 24 to prevent air from passing through the first baffle 24. Therefore, the air entering through the ventilation hole 23 cannot enter the clean room at all, effectively ensuring the production quality of the wafer.

[0031] The above specific embodiment is only an optional embodiment of the present invention. Based on the technical solution of the present invention and the relevant inspiration of the above embodiment, those skilled in the art can make various alternative improvements and combinations to the above specific embodiment.

Claims

1. A closed hatch to prevent gas backflow, characterized in that: include: Door body (1); A ventilation mechanism (2) installed on the door body (1) to facilitate air flow, the ventilation mechanism (2) comprising a ventilation pipe (21), a protective cover (22), and a ventilation hole (23); A check assembly (3) is arranged in the ventilation mechanism (2) and is used to prevent air from flowing back.

2. A closed door for preventing gas backflow according to claim 1, characterized in that: The ventilation pipe (21) is installed on the door body (1), and the protective cover (22) is fixedly connected to one end of the ventilation pipe (21) away from the door body (1). The protective cover (22) is provided with a plurality of ventilation holes (23), and one end of the ventilation pipe (21) away from the protective cover (22) is trumpet-shaped.

3. A closed door for preventing gas backflow according to claim 2, characterized in that: The ventilation mechanism (2) further comprises a first baffle (24), a first sealing plug (25), and a first sealing gasket (26); the first baffle (24) is fixedly connected to the inner wall of the ventilation pipe (21); the first sealing plug (25) is installed in a through hole on the first baffle (24); the first sealing plug (25) is truncated cone-shaped; and the first sealing gasket (26) is installed on the outer ring of the first sealing plug (25).

4. A closed door for preventing gas backflow according to claim 3, characterized in that: The ventilation mechanism (2) further comprises a connecting rod (27), a limiting ring (28), and a first fixing rod (29); the connecting rod (27) is fixedly connected to the first sealing plug (25); the limiting ring (28) is slidably connected to the connecting rod (27); the limiting ring (28) is arranged on a side of the first sealing plug (25) close to the protective cover (22); and a plurality of groups of the first fixing rods (29) are fixedly connected between the limiting ring (28) and the hatch body (1).

5. A sealed door for preventing gas backflow according to claim 4, characterized in that: The check assembly (3) comprises a second baffle (31), a second sealing plug (32), and a second sealing gasket (33); the second baffle (31) is fixedly connected to the inner wall of the ventilation pipe (21); the second baffle (31) is arranged between the limiting ring (28) and the protective cover (22); the second sealing plug (32) fixedly connected to the end of the connecting rod (27) away from the first sealing plug (25) is installed in the through hole on the second baffle (31); the second sealing plug (32) is arranged in a truncated cone shape; and the second sealing gasket (33) is installed on the outer ring of the second sealing plug (32).

6. A sealed door for preventing gas backflow according to claim 5, characterized in that: The check assembly (3) further comprises a movable cylinder (34) and a fixed cylinder (35); the movable cylinder (34) is fixedly connected to a side of the second sealing plug (32) away from the first sealing plug (25); the fixed cylinder (35) is slidably sleeved on the movable cylinder (34); the movable cylinder (34) and the fixed cylinder (35) are connected in a T-shaped structure; and one end of the fixed cylinder (35) close to the protective cover (22) is flared.

7. A sealed door for preventing gas backflow according to claim 6, characterized in that: The non-return assembly (3) further comprises a fixing ring (36) and a second fixing rod (37); the fixing ring (36) is fixedly connected to the outer ring of the fixing cylinder (35); and a plurality of groups of the second fixing rods (37) are fixedly connected between the fixing ring (36) and the ventilation pipe (21).

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