Recovery device for disilane

Abstract

The utility model discloses a recovery device for disilane, which comprises a gas cylinder main body, a recovery assembly and an adsorption assembly, one side of the gas cylinder main body is fixedly provided with the recovery assembly, one side of the recovery assembly is fixedly provided with the adsorption assembly, and gas in the gas cylinder main body is recovered and filtered through the recovery assembly. The adsorption assembly is used for purifying and adsorbing waste gas, the recovery assembly comprises a first communicating pipe, an extraction valve, a recovery box, a first filter screen, a second filter screen and a recovery box, and the first communicating pipe is fixedly mounted above one side of the gas cylinder main body; according to the disilane recycling device, when gas enters the recycling box, due to the fact that the speed is increased, the gas reacts with a reaction solution in the recycling box more sufficiently, disilane is filtered in multiple groups through cooperation of multiple groups of filter screens, impurities of the filtered disilane are used, the recycling efficiency is higher, an adsorption plate is fixedly connected to the inner wall of the purification box, and the gas can be recycled conveniently. The gas is in full contact with clear water.

Description

Technical Field

[0001] The utility model relates to the technical field of recovery equipment, in particular to a recovery device for disilane. Background Art

[0002] Silane refers to a compound of silicon and hydrogen, and is a general term for a series of compounds. Generally, we refer to monosilane as silane. In the process of silane production, many waste gases and solid particles will be generated, usually including hydrogen, nitrogen, hydrogen chloride, chlorosilane gas and solid particles, etc. Some of these products are worth recycling, so we need to recycle the waste gas after silane production. In the semiconductor manufacturing process, disilane is a commonly used gas source for depositing silicon thin films. However, due to its low boiling point, disilane is easy to volatilize in the reaction chamber and the delivery pipeline;

[0003] In the existing document 201720354896.2, the recycling rate of the general disilane production recovery device is not high, and the ordinary disilane production recovery device cannot make the water-soluble gas fully contact with water, which will produce a large amount of carbon dioxide and water vapor, causing pollution to the environment. Therefore, the utility model proposes a disilane recovery device to solve the problems existing in the prior art. Utility Model Content

[0004] In view of the above problems, the purpose of the utility model is to provide a disilane recovery device, which uses a first connecting pipe, an exhaust valve, a recovery box, a first filter screen and a second filter screen to cooperate with each other, so that when the gas enters the recovery box, the speed is accelerated, so that the gas and the reaction solution in the recovery box react more fully, and the disilane is filtered by multiple groups of filter screens to filter out impurities in the disilane, so that the recovery efficiency is higher.

[0005] To achieve the purpose of the utility model, the utility model is implemented through the following technical solutions: a recovery device for disilane, comprising a gas cylinder body, a recovery component and an adsorption component, a recovery component is fixedly installed on one side of the gas cylinder body, and an adsorption component is fixedly installed on one side of the recovery component, the gas inside the gas cylinder body is recovered and filtered by the recovery component, and the exhaust gas is purified and adsorbed by the adsorption component for use, the recovery component comprises a first connecting pipe, an exhaust valve, a recovery box, a first filter screen, a second filter screen and a recovery box, a first connecting pipe is fixedly installed on the upper side of one side of the gas cylinder body, an exhaust valve is fixedly installed on the surface of the first connecting pipe, a recovery box is fixedly placed on one side of the gas cylinder body, one side of the recovery box is interconnected with the first connecting pipe, a first filter screen is fixedly installed on one side of the inside of the recovery box, the first filter screen is arranged on one side of the first connecting pipe, a second filter screen is movably installed inside the recovery box, and a recovery box is movably installed below the second filter screen.

[0006] Further improvements are: the adsorption assembly includes a purification box, a second connecting pipe, an air outlet valve and an adsorption plate, the purification box is fixedly placed on one side of the recovery box, the second connecting pipe is fixedly installed on the top of the purification box, one side of the second connecting pipe is connected to the recovery box, the other side of the second connecting pipe is connected to the purification box, the surface of the second connecting pipe is fixedly installed with an air outlet valve, and multiple groups of adsorption plates are fixedly installed inside the recovery box.

[0007] A further improvement is that a gas guide valve port is movably installed at the lower part of one side of the gas cylinder body, a movable opening is movably installed at the upper part of the other side of the gas cylinder body, and one side of the movable opening is movably installed with the first connecting pipe.

[0008] A further improvement is that a handle is fixedly installed on one side of the recycling box, and a clamping block is fixedly installed inside the recycling box.

[0009] A further improvement is that a water supply port is fixedly installed on one side of the top of the purification box.

[0010] A further improvement is that a water outlet is fixedly installed on one side of the purification box.

[0011] A further improvement is that: the adsorption plates are provided in a plurality of groups, and the size, specification and function of the adsorption plates in each group are the same.

[0012] The beneficial effects of the utility model are as follows: the device of the utility model uses the first connecting pipe, the air extraction valve, the recovery box, the first filter screen and the second filter screen to cooperate with each other, so that when the gas enters the recovery box, the speed is accelerated, so that the gas reacts more fully with the reaction solution in the recovery box, and multiple groups of filtering are performed on disilane through the cooperation of multiple groups of filter screens to filter out the impurities of disilane, so that the recovery efficiency is higher, and an adsorption plate is fixedly connected to the inner wall of the purification box to make the gas fully contact with clean water and make the gas components soluble in water in the gas fully dissolved, thereby improving the utilization rate of resources and helping to save costs. It can convert disilane that may have been discharged into the atmosphere into usable chemicals again, avoiding the waste of resources. At the same time, by recycling disilane, the procurement cost of raw materials can be reduced and the economic benefits can be improved. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] In order to more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings required for use in the embodiments or the prior art descriptions are briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative labor.

[0014] Figure 1 It is a side sectional view of the utility model;

[0015] Figure 2 This is a schematic diagram of a recycling box of the present utility model.

[0016] Among them: 1. Gas cylinder body; 2. First connecting pipe; 3. Air extraction valve; 4. Recovery box; 5. First filter; 6. Second filter; 7. Recovery box; 8. Purification box; 9. Second connecting pipe; 10. Air outlet valve; 11. Adsorption plate; 12. Air guide valve port; 13. Movable opening; 14. Handle; 15. Clamp block; 16. Water supply port; 17. Water outlet. DETAILED DESCRIPTION

[0017] The following will be combined with the drawings in the practical embodiment to clearly and completely describe the technical solution in the practical embodiment. Obviously, the described embodiment is only a part of the embodiment of the practical, not all of the embodiments. Based on the embodiment in the practical, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this practical.

[0018] In the description of this utility model, it should be noted that, unless otherwise clearly specified and limited, the terms installation, connection and connection should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be an indirect connection through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0019] according to Figure 1 , Figure 2As shown, this embodiment provides a recovery device for disilane, including a gas cylinder body 1, a recovery component and an adsorption component. The recovery component is fixedly installed on one side of the gas cylinder body 1, and the adsorption component is fixedly installed on one side of the recovery component. The gas inside the gas cylinder body 1 is recovered and filtered by the recovery component, and the waste gas is purified and adsorbed by the adsorption component for use. The recovery component includes a first connecting pipe 2, an exhaust valve 3, a recovery box 4, a first filter screen 5, a second filter screen 6 and a recovery box 7. The first connecting pipe 2 is fixedly installed on the upper side of one side of the gas cylinder body 1, and the exhaust valve 3 is fixedly installed on the surface of the first connecting pipe 2. The recovery box is fixedly placed on one side of the gas cylinder body 1 4, one side of the recovery box 4 is connected with the first connecting pipe 2, and the disilane in the gas cylinder body 1 is driven to enter the recovery box 4 along the first connecting pipe 2 by driving the exhaust valve 3. A first filter 5 is fixedly installed on one side of the recovery box 4, and the gas passes through the first filter 5 for the first filtration of the gas. The first filter 5 is arranged on one side of the first connecting pipe 2, and a second filter 6 is movably installed inside the recovery box 4. When the gas is introduced into the recovery box 4, it passes through the second filter 6 for the second filtration. A recovery box 7 is movably installed below the second filter 6 for filtering impurities multiple times, and finally the filtered impurities are taken out for use through the recovery box 7.

[0020] The adsorption component includes a purification box 8, a second connecting pipe 9, an air outlet valve 10 and an adsorption plate 11. The purification box 8 is fixedly placed on one side of the recovery box 4. The purification box 8 is used to fully contact the disilane with clean water, and the gas components soluble in water in the gas are fully dissolved. The second connecting pipe 9 is fixedly installed on the top of the purification box 8. One side of the second connecting pipe 9 is connected to the recovery box 4, and the other side of the second connecting pipe 9 is connected to the purification box 8. The surface of the second connecting pipe 9 is fixedly installed with an air outlet valve 10. The disilane is introduced through the second connecting pipe 9 through the air outlet valve 10. A plurality of adsorption plates 11 are fixedly installed inside the recovery box 4. Finally, the particles in the disilane are adsorbed by the adsorption plate 11 to improve the recovery efficiency.

[0021] An air guide valve port 12 is movably installed at the lower part of one side of the gas cylinder body 1, and disilane can be easily introduced into the gas cylinder body 1 through the air guide valve port 12. A movable opening 13 is movably installed at the upper part of the other side of the gas cylinder body 1. One side of the movable opening 13 is movably installed with the first connecting pipe 2, and the first connecting pipe 2 can be easily installed and disassembled for use through the movable opening 13.

[0022] A handle 14 is fixedly installed on one side of the recovery box 7, and the recovery box 7 is pulled out by pulling the handle 14. A clamping block 15 is fixedly installed inside the recovery box 4, and the second filter screen 6 is clamped and fixed by the clamping block 15 for use.

[0023] A water inlet 16 is fixedly installed on one side of the top of the purification box 8, through which water can be added to the water flow to improve the purification effect.

[0024] A water outlet 17 is fixedly installed on one side of the purification box 8, and the arrangement of the water outlet 17 facilitates the water flow inside the purification box 8 to be discharged.

[0025] There are multiple groups of adsorption plates 11, and each group of adsorption plates 11 has the same size, specification and function. The coordination of multiple groups of adsorption plates 11 facilitates the adsorption of more impurities.

[0026] When the disilane recovery device is used, the gas inside the gas cylinder body 1 is recovered and filtered through the recovery component, and the waste gas is purified and adsorbed by the adsorption component. The disilane in the gas cylinder body 1 is driven to enter the recovery box 4 along the first connecting pipe 2 by driving the exhaust valve 3. The gas passes through the first filter screen 5 to filter the gas for the first time. The gas is introduced into the recovery box 4 and filtered for the second time through the second filter screen 6. It is used to filter impurities multiple times. Finally, the filtered impurities are taken out through the recovery box 7 for use. The disilane is fully contacted with clean water through the purification box 8, and the gas components soluble in water in the gas are fully dissolved, and the gas is discharged through the outlet valve 10. Disilane is introduced through the second connecting pipe 9, and finally the particles in the disilane are adsorbed by the adsorption plate 11 to improve the recovery efficiency. The disilane is conveniently introduced into the gas cylinder body 1 through the air guide valve port 12, and the first connecting pipe 2 is conveniently installed and disassembled through the movable opening 13. The recovery box 7 is pulled out by pulling the handle 14, and the second filter screen 6 is clamped and fixed by the clamping block 15. The water replenishment port 16 is convenient for adding water flow to improve the purification effect. The setting of the water outlet 17 is convenient for leading out the water flow inside the purification box 8. The cooperation of multiple groups of adsorption plates 11 facilitates the adsorption of more impurities.

[0027] The above shows and describes the basic principles, main features and advantages of the utility model. Those skilled in the art should understand that the utility model is not limited by the above embodiments. The above embodiments and descriptions are only for explaining the principles of the utility model. Without departing from the spirit and scope of the utility model, the utility model may have various changes and improvements, which fall within the scope of the utility model to be protected. The scope of protection claimed by the utility model is defined by the attached claims and their equivalents.

Claims

1. A disilane recovery device, comprising a gas cylinder body (1), a recovery component and an adsorption component, characterized in that: A recovery component is fixedly installed on one side of the gas cylinder body (1), and the recovery component comprises a first connecting pipe (2), an air extraction valve (3), a recovery box (4), a first filter (5), a second filter (6) and a recovery box (7). The first connecting pipe (2) is fixedly installed above one side of the gas cylinder body (1), and the air extraction valve (3) is fixedly installed on the surface of the first connecting pipe (2). A recovery box (4) is fixedly placed on one side of the gas cylinder body (1), and a first filter (5) is fixedly installed on one side of the recovery box (4). The first filter (5) is arranged on one side of the first connecting pipe (2), and a second filter (6) is movably installed inside the recovery box (4), and a recovery box (7) is movably installed below the second filter (6).

2. A disilane recovery device according to claim 1, characterized in that: An adsorption component is fixedly installed on one side of the recovery component, and the adsorption component includes a purification box (8), a second connecting pipe (9), an air outlet valve (10) and an adsorption plate (11). The purification box (8) is fixedly placed on one side of the recovery box (4), and a second connecting pipe (9) is fixedly installed on the top of the purification box (8). One side of the second connecting pipe (9) is connected to the recovery box (4), and the other side of the second connecting pipe (9) is connected to the purification box (8). The surface of the second connecting pipe (9) is fixedly installed with an air outlet valve (10), and multiple groups of adsorption plates (11) are fixedly installed inside the recovery box (4).

3. A disilane recovery device according to claim 1, characterized in that: A gas guide valve port (12) is movably mounted below one side of the gas cylinder body (1), and a movable opening (13) is movably mounted above the other side of the gas cylinder body (1), and one side of the movable opening (13) is movably mounted to the first connecting pipe (2).

4. A disilane recovery device according to claim 1, characterized in that: A handle (14) is fixedly mounted on one side of the recovery box (7), and a clamping block (15) is fixedly mounted inside the recovery box (4).

5. A disilane recovery device according to claim 2, characterized in that: A water replenishment port (16) is fixedly mounted on one side of the top of the purification box (8).

6. A disilane recovery device according to claim 2, characterized in that: A water outlet (17) is fixedly mounted on one side of the purification box (8).

7. A disilane recovery device according to claim 2, characterized in that: The adsorption plates (11) are provided in a plurality of groups, and the adsorption plates (11) in each group have the same size, specification and function.

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