Photomask box for mask plate

Abstract

The utility model relates to the technical field of mask plates, in particular to a photomask box for a mask plate, which comprises a photomask box body, a top cover is hinged to the top of the photomask box body, a placing groove is arranged in the photomask box body, an adjusting mechanism is arranged in the photomask box body, and the adjusting mechanism is arranged on the top of the photomask box body. The adjusting mechanism comprises a limiting spring, a clamping plate, a rubber pad, a containing groove, a double-shaft motor, a threaded rod, a sliding sleeve, a first clamping base, a silica gel block, an electric push rod and a second clamping base. According to the photomask box for the mask plate, firstly, the mask plate body is placed on the first clamping seats on one side, the controller drives the double-shaft motor to be started, the two first clamping seats move in the opposite directions till the four corners of the bottom of the mask plate body are clamped, the limiting springs on the two sides push the two clamping plates to reset, and the left side and the right side of the mask plate body are stably fixed; finally, the two sets of electric push rods drive the two sets of second clamping bases to move in the opposite directions, and the four corners of the top of the mask plate body are fixed.

Description

Technical Field

[0001] The utility model relates to the technical field of mask plates, in particular to a mask box for a mask plate. Background Art

[0002] A mask, also known as a photomask, is a graphic transfer tool or master in the microelectronics manufacturing process. It is a carrier of information such as graphic design and process technology. Due to the high fineness of the mask lithography pattern, the risk of mask contamination is also high. In the existing technology, mask boxes are mostly used to store and transport masks.

[0003] For example, the Chinese patent number CN219916173U is a mask support and a mask box. The utility model forms a line contact by making the mask contact with the side, thereby reducing the contact area between the mask support and the mask and avoiding the formation of indentations on the mask. However, the mask box can only provide fixed support for masks of a single specification when in use. Different mask boxes need to be replaced for masks of different specifications, which has great limitations in actual use and is very inconvenient. Therefore, a mask box for a mask is proposed to solve the above-mentioned problems. Utility Model Content

[0004] In view of this, the purpose of the utility model is to propose a mask box for a mask plate, so as to solve the problem that the mask box can only fix and support a mask plate of a single specification when in use, and different mask boxes need to be replaced for masks of different specifications, which has great limitations and is very inconvenient in actual use.

[0005] Based on the above purpose, the utility model provides a mask box for a mask plate, comprising a mask box body, a top cover is hinged on the top of the mask box body, a placement slot is opened inside the mask box body, and an adjustment mechanism is arranged inside the mask box body;

[0006] The adjusting mechanism includes a limit spring, a card plate, a rubber pad, a receiving groove, a dual-axis motor, a threaded rod, a sliding sleeve, a first card seat, a silicone block, an electric push rod and a second card seat. The left and right inner walls of the placement groove are fixedly installed with limit springs, two card plates are installed inside the mask box body, and rubber pads are fixedly installed on opposite sides of the two card plates. A receiving groove is opened inside the mask box body, and a dual-axis motor is fixedly installed inside the receiving groove. Threaded rods are fixedly installed on the left and right sides of the dual-axis motor, and a sliding sleeve is sleeved on the outside of the threaded rod. A first card seat is provided inside the mask box body, and a silicone block is installed inside the first card seat. An electric push rod is fixedly installed inside the top cover, and a second card seat is fixedly installed on the bottom of the electric push rod.

[0007] Preferably, the number of the limit springs is four, and the four limit springs are divided into two groups, each group of limit springs has two limit springs, and the opposite sides of the two groups of limit springs are respectively connected to the left and right inner walls of the placement slot.

[0008] Preferably, the opposite sides of the two clamping plates are respectively connected to the opposite sides of the two groups of limit springs, and the number of the accommodating grooves is two.

[0009] Preferably, the two threaded rods are rotatably connected to the left and right inner walls of the accommodating groove at one side away from the dual-axis motor, and the number of the dual-axis motors is two, and the two dual-axis motors are respectively located inside the two accommodating grooves.

[0010] Preferably, the number of the sliding sleeves is four, and the four sliding sleeves are divided into two groups, and the number of the sliding sleeves in each group is two, and an extension rod is fixedly installed on the top of the sliding sleeve.

[0011] Preferably, a side of the extension rod away from the sliding sleeve is connected to the bottom of the first clamping seat, and the first clamping seat is L-shaped.

[0012] Preferably, a mask body is arranged inside the placement groove, and the four first clamping seats are respectively engaged with the four corners of the mask body, and the number of the second clamping seats is four, and the four second clamping seats are respectively engaged with the top four corners of the mask body.

[0013] The beneficial effects of the utility model are as follows: 1. A closed space is formed by arranging a mask box body in cooperation with a top cover on the top, thereby protecting the mask version body; an adjustment mechanism is arranged, and the various mechanisms of the adjustment mechanism cooperate with each other, so that the mask box body can be adapted to mask versions of different sizes, thereby making the use scope wider and easier to promote.

[0014] 2. By setting a limit spring, when the mask version body is placed in the placement slot, the clamping plate can be used to fix mask version bodies of different sizes by squeezing the limit spring. By setting a rubber pad, the rubber pad can protect the outer wall of the mask version body to avoid indentations and scratches. By setting a dual-axis motor, when the controller drives the dual-axis motor to start, the threaded rod can be driven to rotate, so that the sliding sleeve drives the two groups of first clamping seats to move in opposite or opposite directions, and the bottom four corners of the mask version body are clamped. At the same time, the mask version body is protected by the silicone block to avoid indentations. By setting an electric push rod, the controller drives the electric push rod to start and drive the two groups of second clamping seats on the top to move in opposite or relative directions, so that the top four corners of the mask version body are fixed and stabilized, thereby achieving a more stable fixation and avoiding shaking of the mask version body. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] In order to more clearly illustrate the technical solutions in the present invention or the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings in the following description are only for the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0016] Figure 1 It is a three-dimensional schematic diagram of the utility model;

[0017] Figure 2 It is a cross-sectional schematic diagram of the utility model;

[0018] Figure 3 This is a schematic diagram of the local adjustment mechanism of the utility model;

[0019] Figure 4 It is a partial three-dimensional schematic diagram of the utility model.

[0020] The markings in the figure are:

[0021] 1. Mask box body; 2. Top cover; 3. Placement slot; 4. Adjustment mechanism; 401. Limit spring; 402. Clamping plate; 403. Rubber pad; 404. Accommodation slot; 405. Dual-axis motor; 406. Threaded rod; 407. Sliding sleeve; 408. First clamping seat; 409. Silicone block; 410. Electric push rod; 411. Second clamping seat; 5. Mask version body; 6. Extension rod. DETAILED DESCRIPTION

[0022] In order to make the purpose, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below in conjunction with specific embodiments.

[0023] It should be noted that, unless otherwise defined, the technical terms or scientific terms used in the present invention should be understood by people with ordinary skills in the field to which the present invention belongs. The words "first", "second" and similar words used in the present invention do not indicate any order, quantity or importance, but are only used to distinguish different components. "Include" or "comprise" and similar words mean that the elements or objects appearing before the word include the elements or objects listed after the word and their equivalents, without excluding other elements or objects. "Connect" or "connected" and similar words are not limited to physical or mechanical connections, but may include electrical connections, whether direct or indirect. "Up", "down", "left", "right" and the like are only used to indicate relative positional relationships. When the absolute position of the described object changes, the relative positional relationship may also change accordingly.

[0024] like Figure 1 , Figure 2 , Figure 3 and Figure 4 As shown, a mask box for a mask plate comprises a mask box body 1, characterized in that a top cover 2 is hingedly connected to the top of the mask box body 1, a placement slot 3 is provided inside the mask box body 1, and an adjustment mechanism 4 is provided inside the mask box body 1;

[0025] The adjusting mechanism 4 includes a limit spring 401, a card plate 402, a rubber pad 403, a receiving groove 404, a dual-axis motor 405, a threaded rod 406, a sleeve 407, a first card seat 408, a silicone block 409, an electric push rod 410 and a second card seat 411. The limit spring 401 is fixedly installed on the inner walls of the left and right sides of the placement groove 3. Two card plates 402 are installed inside the photomask box body 1. The rubber pads 403 are fixedly installed on the opposite sides of the two card plates 402. A receiving groove 404 is provided inside the box body 1, and a dual-axis motor 405 is fixedly installed inside the receiving groove 404. Threaded rods 406 are fixedly installed on the left and right sides of the dual-axis motor 405, and a sliding sleeve 407 is sleeved on the outside of the threaded rod 406. A first clamping seat 408 is provided inside the mask box body 1, and a silicone block 409 is installed inside the first clamping seat 408. An electric push rod 410 is fixedly installed inside the top cover 2, and a second clamping seat 411 is fixedly installed on the bottom of the electric push rod 410.

[0026] like Figure 1 and Figure 2 As shown, by setting an adjustment mechanism 4, the various mechanisms of the adjustment mechanism 4 cooperate with each other, so as to achieve the effect of enabling the mask box body 1 to adapt to mask versions of different sizes 5, so that the scope of use is wider and easier to promote. The adjustment mechanism 4 includes a limit spring 401, a clamping plate 402, a rubber pad 403, a receiving groove 404, a dual-axis motor 405, a threaded rod 406, a sliding sleeve 407, a first clamping seat 408, a silicone block 409, an electric push rod 410 and a second clamping seat 411. The number of limit springs 401 is four, and the four limit springs 401 are divided into two groups, and the number of limit springs 401 in each group is two, and the opposite sides of the two groups of limit springs 401 are respectively connected to the left and right inner walls of the placement groove 3.

[0027] like Figure 1 and Figure 2 As shown, the opposite sides of the two clamping plates 402 are respectively connected to the opposite sides of the two sets of limit springs 401, and the number of the accommodating grooves 404 is two. When the mask version body 5 is placed in the placement groove 3, the clamping plate 402 can fix the mask version body 5 of different sizes by squeezing the limit springs 401.

[0028] like Figure 1 and Figure 3As shown, the two threaded rods 406 are rotatably connected to the left and right inner walls of the accommodating groove 404 at one side away from the dual-axis motor 405, and the number of the dual-axis motors 405 is two, and the two dual-axis motors 405 are respectively located inside the two accommodating grooves 404. By setting the dual-axis motor 405, when the controller drives the dual-axis motor 405 to start, the threaded rod 406 can be driven to rotate, so that the sliding sleeve 407 drives the two groups of first clamping seats 408 to move in relative or opposite directions, and the bottom four corners of the mask version body 5 are clamped.

[0029] like Figure 1 and Figure 3 As shown, there are four sliding sleeves 407 , which are divided into two groups. Each group of sliding sleeves 407 has two sliding sleeves. An extension rod 6 is fixedly installed on the top of the sliding sleeve 407 .

[0030] like Figure 2 and Figure 3 As shown, the side of the extension rod 6 away from the sliding sleeve 407 is connected to the bottom of the first clamping seat 408. The first clamping seat 408 is L-shaped, and the mask body 5 is protected by the silicone block 409 to avoid indentation.

[0031] like Figure 2 and Figure 4 As shown, the placement slot 3 is provided with a mask body 5, four first clamping seats 408 are respectively engaged with the four corners of the mask body 5, and the number of second clamping seats 411 is four, and the four second clamping seats 411 are respectively engaged with the top four corners of the mask body 5.

[0032] When in use, first open the top cover 2, place the mask version body 5 on the first clamping seat 408 on one side, then the controller drives the dual-axis motor 405 to start, so that the two groups of first clamping seats 408 move in opposite directions until the bottom four corners of the mask version body 5 are clamped, and the mask version body 5 is protected by the silicone block 409. At this time, the limit springs 401 on both sides push the two clamping plates 402 to reset, and fix the left and right sides of the mask version stably. Finally, the user closes the top cover 2. At this time, the two groups of electric push rods 410 will drive the two groups of second clamping seats 411 to move in opposite directions to fix the top four corners of the mask version body 5.

[0033] A person skilled in the art should understand that the discussion of any of the above embodiments is merely illustrative and is not intended to imply that the scope of the present invention, including the claims, is limited to these examples. Under the concept of the present invention, the technical features in the above embodiments or different embodiments may be combined, the steps may be implemented in any order, and there are many other variations of different aspects of the present invention as above, which are not provided in detail for the sake of simplicity.

[0034] The utility model is intended to cover all such substitutions, modifications and variations that fall within the broad scope of the appended claims. Therefore, any omissions, modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the utility model should be included in the scope of protection of the utility model.

Claims

1. A mask box for a mask plate, comprising a mask box body (1), characterized in that: A top cover (2) is hingedly connected to the top of the mask box body (1); a placement groove (3) is provided inside the mask box body (1); and an adjustment mechanism (4) is provided inside the mask box body (1); The adjusting mechanism (4) comprises a limit spring (401), a card plate (402), a rubber pad (403), a receiving groove (404), a dual-axis motor (405), a threaded rod (406), a sliding sleeve (407), a first card seat (408), a silicone block (409), an electric push rod (410) and a second card seat (411); the limit springs (401) are fixedly installed on the inner walls on both sides of the placement groove (3); two card plates (402) are installed inside the photomask box body (1); the rubber pads (403) are fixedly installed on the opposite sides of the two card plates (402); the photomask A receiving groove (404) is provided inside the box body (1), a dual-axis motor (405) is fixedly installed inside the receiving groove (404), threaded rods (406) are fixedly installed on both the left and right sides of the dual-axis motor (405), a sliding sleeve (407) is sleeved on the outside of the threaded rod (406), a first clamping seat (408) is provided inside the mask box body (1), a silicone block (409) is installed inside the first clamping seat (408), an electric push rod (410) is fixedly installed inside the top cover (2), and a second clamping seat (411) is fixedly installed at the bottom of the electric push rod (410).

2. A mask box for a mask plate according to claim 1, characterized in that: The number of the limit springs (401) is four, and the four limit springs (401) are divided into two groups, and the number of the limit springs (401) in each group is two, and the opposite sides of the two groups of limit springs (401) are respectively connected to the left and right inner walls of the placement groove (3).

3. A mask box for a mask plate according to claim 1, characterized in that: The opposite sides of the two clamping plates (402) are respectively connected to the opposite sides of the two groups of limit springs (401), and the number of the accommodating grooves (404) is two.

4. The mask box for a mask plate according to claim 1, characterized in that: The two threaded rods (406) are rotatably connected to the left and right inner walls of the receiving groove (404) at the sides away from the dual-axis motor (405), respectively. There are two dual-axis motors (405), and the two dual-axis motors (405) are respectively located inside the two receiving grooves (404).

5. The mask box for a mask plate according to claim 1, characterized in that: The number of the sliding sleeves (407) is four, and the four sliding sleeves (407) are divided into two groups, and the number of the sliding sleeves (407) in each group is two. An extension rod (6) is fixedly installed on the top of the sliding sleeve (407).

6. The mask box for a mask plate according to claim 5, characterized in that: The side of the extension rod (6) away from the sliding sleeve (407) is connected to the bottom of the first clamping seat (408), and the first clamping seat (408) is L-shaped.

7. The mask box for a mask plate according to claim 1, characterized in that: A mask version body (5) is arranged inside the placement groove (3); four first clamping seats (408) are respectively engaged with four corners of the mask version body (5); and there are four second clamping seats (411), which are respectively engaged with four top corners of the mask version body (5).

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