Humidification type barrel air supply device

Abstract

The utility model relates to the technical field of semiconductor equipment, in particular to a humidification type barrel air supply device which comprises a barrel body, a raw material conveying unit arranged at the input end of the barrel body, a humidification assembly connected between the raw material conveying unit and the barrel body and a pure water unit arranged at the input end of a closed tank body. The upper half part of the closed tank body is a spraying cabin, the spraying cabin is respectively connected with the output end of the raw material conveying unit and the output end of the pure water unit, nitrogen is conveyed into the closed tank body through the raw material conveying unit, and pure water is conveyed into the closed tank body through the pure water unit, so that the nitrogen is conveniently humidified; and the upper half part of the closed tank body is the spraying cabin, and pure water in the pure water cabin is discharged in a spraying manner by utilizing the spraying cabin, so that the contact area of the pure water and nitrogen is increased, and the humidifying treatment effect on the nitrogen is ensured.

Description

Technical Field

[0001] The invention relates to the technical field of semiconductor equipment, and in particular to a humidifying barrel air replenishing device. Background Art

[0002] In various industries such as electronics and semiconductors, grinding fluid has the problem of crystallization. Crystallization of grinding fluid can easily lead to unstable grinding rate and increased wafer defects and scratches, which in turn affects product yield. The grinding fluid mixing supply system equipment used in semiconductor wafer manufacturing must meet the following requirements: ultra-high cleanliness; no metal ion precipitation; no crystallization, flocculation, stratification and other problems; all pipelines and barrels have self-cleaning function; high degree of automation. Using dry N2 for gas replenishment cannot avoid or reduce the risk of crystallization, blockage of pipelines, and affect flow and pressure. Therefore, a humidifying barrel gas replenishment device is proposed. Summary of the invention

[0003] In view of the above-mentioned shortcomings of the prior art, the purpose of the present invention is to provide a humidifying barrel air replenishing device for solving the problem of crystallization of the grinding liquid raw material when it flows through the pipeline and valve in the prior art.

[0004] To achieve the above objectives and other related objectives, the present invention provides the following technical solutions:

[0005] A humidifying barrel air replenishing device comprises a barrel body, a raw material conveying unit arranged at the input end of the barrel body, and a humidifying component connected between the raw material conveying unit and the barrel body, wherein the humidifying component comprises a closed tank body separated into upper and lower parts, and a pure water unit arranged at the input end of the closed tank body, wherein the lower half of the closed tank body is a pure water tank, and the upper half of the closed tank body is a spray tank, wherein the spray tank is respectively connected to the output end of the raw material conveying unit and the output end of the pure water unit, and the output end of the spray tank is connected to the input end of the barrel body.

[0006] To implement the above technical solution, nitrogen is transported into the closed tank body through the raw material transport unit, and pure water is transported into the closed tank body by the pure water unit, so as to facilitate humidification treatment of the nitrogen. The lower half of the closed tank body is a pure water tank, and the upper half of the closed tank body is a spray tank. The spray tank is used to discharge the pure water in the pure water tank in a spray form, thereby increasing the contact area between the pure water and the nitrogen, ensuring the effect of the nitrogen humidification treatment, and the output end of the spray tank is connected to the input end of the barrel body, and the humidified nitrogen is discharged into the barrel body, thereby ensuring the humidity of the grinding liquid raw material and preventing it from crystallizing.

[0007] In one embodiment of the present invention, an overflow pipe is provided on one side of the pure water tank near the upper end, and the overflow pipe is a U-shaped pipe. A liquid level sensor is also provided on one side of the pure water tank.

[0008] To implement the above technical solution, the height of the U-shaped pipe bend is set to ensure the height of the liquid level and meet production needs.

[0009] In one embodiment of the present invention, a PFA pipeline is connected between the raw material delivery unit, the pure water unit and the closed tank body, so that the gas and water can have a better cleanliness.

[0010] By implementing the above technical solution, the PFA pipeline can ensure the cleanliness of gas and water without affecting the cleanliness of raw materials.

[0011] In one embodiment of the present invention, a nozzle is provided in the spray chamber, a spray pipe is provided between the nozzle and the pure water chamber, and the nozzle is a mist nozzle.

[0012] To implement the above technical solution, by setting a mist nozzle, the sprayed water mist can have a larger diffusion area and a larger area in contact with N2, thereby ensuring the efficiency and humidity of N2 humidification.

[0013] In one embodiment of the present invention, an N2 pneumatic valve is provided between the raw material conveying unit and the closed tank body, a pure water pneumatic valve is provided between the pure water unit and the closed tank body, the liquid level sensor is electrically connected to the pneumatic valve, and the N2 pneumatic valve and the pure water pneumatic valve are both controlled by solenoid valves.

[0014] To implement the above technical solution, pneumatic valves are used to ensure cleanliness while the switch of the valve can be controlled by linkage intelligently, so that the N2 humidification process does not require manual intervention by personnel. When the liquid level sensor detects an abnormal liquid level, the N2 pneumatic valve is closed and the raw material liquid supply is suspended to ensure the humidity of the barrel gas replenishment; when the liquid level is normal, the N2 pneumatic valve is opened and the raw material liquid supply is continued.

[0015] In one embodiment of the present invention, the closed tank body material is a clean CPVC material, and the closed tank body is a transparent tank body.

[0016] To implement the above technical solution, by using clean CPVC materials, the internal cleanliness can be guaranteed and the N2 humidification process can be observed intuitively. When problems occur, they can be discovered, inspected and repaired more intuitively.

[0017] As described above, a humidification barrel air replenishing device of the present invention has the following beneficial effects: nitrogen is transported into the closed tank body through the raw material conveying unit, and pure water is transported into the closed tank body by the pure water unit to facilitate the humidification treatment of nitrogen. The lower half of the closed tank body is a pure water tank, and the upper half of the closed tank body is a spray tank. The spray tank is used to discharge the pure water in the pure water tank in a spray state, thereby increasing the contact area between pure water and nitrogen and ensuring the effect of humidification treatment of nitrogen. The output end of the spray tank is connected to the input end of the barrel body, and the humidified nitrogen is discharged into the barrel body, thereby ensuring the humidity of the grinding liquid raw material and not easy to crystallize. By setting the height of the U-shaped pipe bend, the height of the liquid level is guaranteed to meet the production needs. By setting the mist nozzle, the diffusion area of ​​the sprayed water mist is larger, and the area in contact with N2 is larger, thereby ensuring the efficiency and humidity of the humidification of N2. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 Shown is a schematic structural diagram of a humidifying barrel air replenishing device disclosed in an embodiment of the present invention.

[0019] Component number description

[0020] 1. Barrel body; 2. Raw material conveying unit; 3. Trough body; 4. Pure water unit; 5. Overflow pipe; 6. Liquid level sensor; 7. Nozzle; 8. Spray pipe; 9. N2 pneumatic valve; 10. Pure water pneumatic valve. DETAILED DESCRIPTION

[0021] The following specific embodiments illustrate the implementation of the present invention, and those familiar with the technology can easily understand other advantages and effects of the present invention from the contents disclosed in this specification. It should be noted that the following embodiments and features in the embodiments can be combined with each other without conflict.

[0022] See also Figure 1 The present invention provides a humidifying barrel air replenishing device, comprising a barrel body 1, a raw material conveying unit 2 arranged at the input end of the barrel body 1, a humidifying component connected between the raw material conveying unit 2 and the barrel body 1, the humidifying component comprising a closed tank body 3 separated into upper and lower parts, and a pure water unit 4 arranged at the input end of the closed tank body 3, the lower half of the closed tank body 3 is a pure water cabin, the upper half of the closed tank body 3 is a spray cabin, the spray cabin is respectively connected to the output end of the raw material conveying unit 2 and the output end of the pure water unit 4, and the output end of the spray cabin is connected to the input end of the barrel body 1.

[0023] Nitrogen is transported into the closed tank body 3 through the raw material transport unit 2, and pure water is transported into the closed tank body 3 by the pure water unit 4, so as to facilitate the humidification treatment of the nitrogen. The lower half of the closed tank body 3 is a pure water tank, and the upper half of the closed tank body 3 is a spray tank. The spray tank is used to discharge the pure water in the pure water tank in a spray state, thereby increasing the contact area between the pure water and the nitrogen, and ensuring the effect of the humidification treatment of the nitrogen. The output end of the spray tank is connected to the input end of the barrel body 1, and the humidified nitrogen is discharged into the barrel body 1, thereby ensuring the humidity of the grinding liquid raw material and not easy to crystallize.

[0024] An overflow pipe 5 is provided near the upper end of the pure water tank. The overflow pipe 5 is a U-shaped pipe. A liquid level sensor 6 is also provided on one side of the pure water tank. The height of the liquid level is guaranteed by setting the height of the U-shaped pipe bend to meet the production needs. A PFA pipeline is connected between the raw material conveying unit 2, the pure water unit 4 and the closed tank body 3 to ensure that the gas and water have better cleanliness. The PFA pipeline can ensure the cleanliness of the gas and water and has no effect on the cleanliness of the raw materials.

[0025] A nozzle 7 is provided in the spray cabin, and a spray pipe 8 is provided between the nozzle 7 and the pure water cabin. The nozzle 7 is a mist nozzle 7. By providing the mist nozzle 7, the diffusion area of ​​the sprayed water mist is larger, and the area in contact with N2 is larger, so as to ensure the efficiency and humidity of N2 humidification. A N2 pneumatic valve 9 is provided between the raw material conveying unit 2 and the closed tank body 3, and a pure water pneumatic valve 10 is provided between the pure water unit 4 and the closed tank body 3. The liquid level sensor 6 is electrically connected to the pneumatic valve. The N2 pneumatic valve 9 and the pure water pneumatic valve 10 are both controlled by solenoid valves. The use of pneumatic valves can ensure cleanliness while the switch of the valve can be controlled by linkage intelligent control, so that the humidification process of N2 does not require manual intervention by personnel. When the liquid level sensor 6 detects that the liquid level is abnormal, the N2 pneumatic valve 9 is closed, and the raw material liquid supply is suspended to ensure the humidity of the barrel gas replenishment; when the liquid level is normal, the N2 pneumatic valve 9 is linked to open and the raw material liquid supply is continued.

[0026] The closed tank body 3 is made of clean CPVC material, and the closed tank body 3 is a transparent tank body 3. By using the clean CPVC material, the internal cleanliness can be guaranteed and the N2 humidification process can be observed intuitively. When problems occur, they can be discovered and inspected and repaired more intuitively.

[0027] The present invention transports nitrogen into a closed tank body through a raw material transport unit, and transports pure water into the closed tank body by a pure water unit, so as to facilitate humidification treatment of the nitrogen. The lower half of the closed tank body is a pure water cabin, and the upper half of the closed tank body is a spray cabin. The spray cabin is used to discharge the pure water in the pure water cabin in a spray state, thereby increasing the contact area between the pure water and the nitrogen, and ensuring the effect of humidification treatment of the nitrogen. The output end of the spray cabin is connected to the input end of the barrel body, and the humidified nitrogen is discharged into the barrel body, thereby ensuring the humidity of the grinding liquid raw material and preventing it from crystallizing easily. By setting the height of the U-shaped pipe bend, the height of the liquid level is ensured to meet the production demand. By setting the mist nozzle, the diffusion area of ​​the sprayed water mist is larger, and the area in contact with N2 is larger, thereby ensuring the humidification efficiency and humidity of N2.

[0028] The above embodiments are merely illustrative of the principles and effects of the present invention, and are not intended to limit the present invention. All equivalent modifications or changes made by those skilled in the art without departing from the spirit and technical ideas disclosed by the present invention shall still be covered by the claims of the present invention.

Claims

1. A humidifying barrel air replenishing device, characterized in that: It includes a barrel body, a raw material conveying unit arranged at the input end of the barrel body, and a humidifying component connected between the raw material conveying unit and the barrel body, the humidifying component includes a closed tank body separated into upper and lower parts, and a pure water unit arranged at the input end of the closed tank body, the lower half of the closed tank body is a pure water tank, and the upper half of the closed tank body is a spray tank, the spray tank is respectively connected to the output end of the raw material conveying unit and the output end of the pure water unit, and the output end of the spray tank is connected to the input end of the barrel body.

2. The humidifying barrel air replenishing device according to claim 1 is characterized in that: An overflow pipe is provided on one side of the pure water tank near the upper end, and the overflow pipe is a U-shaped pipeline. A liquid level sensor is also provided on one side of the pure water tank.

3. The humidifying barrel air replenishing device according to claim 2 is characterized in that: The raw material conveying unit, the pure water unit and the closed tank are connected with a PFA pipeline, so that the gas and water can have a better cleanliness.

4. The humidifying barrel air replenishing device according to claim 2 is characterized in that: A nozzle is arranged in the spray chamber, a spray pipe is arranged between the nozzle and the pure water chamber, and the nozzle is a mist nozzle.

5. The humidifying barrel air replenishing device according to claim 2, characterized in that: An N2 pneumatic valve is provided between the raw material conveying unit and the closed tank body, a pure water pneumatic valve is provided between the pure water unit and the closed tank body, the liquid level sensor is electrically connected to the pneumatic valve, and the N2 pneumatic valve and the pure water pneumatic valve are both controlled by solenoid valves.

6. The humidifying barrel air replenishing device according to claim 1, characterized in that: The closed tank body material is a clean CPVC material, and the closed tank body is a transparent tank body.

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