Mask automatic feeding and discharging structure and coating equipment

Abstract

The utility model relates to a mask automatic feeding and discharging structure and coating equipment, which comprises a rack and a mounting rack, the rack is connected with the mounting rack through a lifting mechanism, the mounting rack is provided with a conveying mechanism, and the conveying mechanism is used for conveying materials. According to the utility model, through the mounting frame capable of lifting and adjusting and the conveying mechanism capable of automatically conveying materials on the mounting frame, the feeding and discharging structure can be lifted and adjusted through the lifting mechanism when feeding materials to equipment, and interference with an equipment door is avoided.

Description

Technical Field

[0001] The utility model belongs to the technical field of machinery, and in particular relates to an automatic mask feeding and discharging structure and film coating equipment. Background Art

[0002] Semiconductor mask is a key tool widely used in the semiconductor manufacturing process. Its function is to form the required structure and pattern through selective etching of materials during the manufacturing process of semiconductor chips.

[0003] Equipment equipped with a feeding conveyor line generally has a fixed position. For coating equipment with an internal feeding line and door requirements, the inlet and outlet structure in the prior art does not have a lifting function. When the inlet and outlet structure is aligned horizontally with the internal conveyor line of the equipment as an external conveyor line, the inlet and outlet structure will interfere with the door openings on both sides of the equipment. Utility Model Content

[0004] The utility model aims to solve the problem that the position of the conveyor line in the prior art is fixed and easily interferes with the equipment when the door is opened during the loading process, and provides a mask automatic feeding and unloading structure, which can adjust the height through the lifting mechanism during the automatic material conveying process of the loading equipment, ensuring that the internal conveyor line does not interfere with the equipment when the door is opened. The main concept is:

[0005] An automatic in-and-out material structure for a mask plate, characterized in that it includes a frame and a mounting frame, the frame is connected to the mounting frame through a lifting mechanism, the mounting frame is provided with a conveying mechanism, and the conveying mechanism is used to transport materials. This scheme is provided with a conveying mechanism for automatically transporting materials, and the materials are transported to the conveying line inside the equipment through the conveying mechanism to realize the loading process, a lifting mechanism is provided between the frame and the mounting frame, and the lifting function on the mounting frame is realized through the lifting mechanism, when the equipment door is opened, the height of the conveying mechanism with materials is lowered to a height below the equipment door through the lifting mechanism, and after the equipment door is opened, the lifting mechanism is provided to raise the conveying mechanism of the in-and-out material structure of the external conveying line to be horizontally aligned with the internal conveying line of the equipment, and the materials are automatically transported to the inside of the equipment through the conveying mechanism, and after the material transportation is completed, the conveying mechanism is lowered again to a height below the equipment door through the lifting mechanism, and the equipment door is closed to complete the loading; the in-and-out material structure arranged on the external conveying line of the equipment is prevented from interfering with the conveying mechanism on the mounting frame with the equipment door under the cooperation of the lifting mechanism.

[0006] Preferably, a mounting plate 1 is disposed at the upper end of the frame, a mounting plate 2 is disposed at the lower end of the mounting frame, the mounting plate 1 and the mounting plate 2 are disposed horizontally opposite to each other, and the mounting plate 1 and the mounting plate 2 are provided with a lifting mechanism and a guide mechanism. The mounting plate 1 and the mounting plate 2 are respectively disposed on the frame and the mounting frame, and are disposed horizontally opposite to each other to provide a mounting surface for installing the lifting mechanism and the guide mechanism between the frame and the mounting frame, so that the movement synchronization of the lifting mechanism and the guide mechanism can be achieved.

[0007] Preferably, the lifting mechanism includes a driving member and a movable rod, the driving member of the lifting mechanism is connected to the mounting plate 1 of the frame, and the movable rod of the lifting mechanism is connected to the mounting plate 2 of the mounting frame. The driving member and the movable rod of the lifting mechanism are respectively mounted on the frame and the mounting frame through the mounting plate 1 and the mounting plate 2, so that when the driving member of the lifting mechanism drives the movable rod to perform linear motion, the mounting frame connected to the movable rod is also driven to perform vertical linear motion, thereby realizing the lifting and lowering effect of the mounting frame on the frame.

[0008] The utility model can solve the problem that the mounting frame is prone to deviation and shaking during lifting. Preferably, the guide mechanism is arranged in the same direction as the moving direction of the lifting mechanism, and the guide mechanism includes a first guide part and a second guide part, the first guide part is installed on the mounting plate 1 of the frame, and the second guide part is installed on the mounting plate 2 of the mounting frame, and the first guide part cooperates with the second guide part. The direction of movement of the guide mechanism of this scheme is consistent with the direction of movement of the movable rod of the lifting mechanism. Since the lifting mechanism is provided with a conveying mechanism for material transmission, the material on the conveying mechanism is transferred in a specified direction, and the load of the conveying mechanism on the lifting mechanism is different during the material conveying process. When the movable rod of the lifting mechanism is lifted, the mounting frame will deviate and shake. The guide mechanism provided in this scheme can ensure that the mounting frame on the lifting mechanism runs along a predetermined track during the lifting process through the cooperation of the first guide part and the second guide part, bear the vertical and horizontal forces of the mounting frame during the lifting process, and transfer these forces to the guide mechanism between the frame and the mounting frame, so as to avoid damage to the lifting mechanism and the mounting frame, thereby improving the stability and accuracy of the lifting process of the mounting frame.

[0009] Preferably, a plurality of bearing seats are installed at the upper end of the mounting frame, and the plurality of bearing seats are evenly distributed and installed on both sides of the mounting frame, the bearing seats opposite to each other on both sides are coaxially arranged, and the guide plates are installed on the bearing seats on the same side by bolts.

[0010] The utility model can solve the problem that materials on the conveying mechanism are prone to displacement. Preferably, strip holes are provided on the guide plate, and the direction of the strip holes is consistent with the distribution direction of the bearing seats on both sides. In this scheme, guide plates are installed on the bearing seats on both sides of the roller for the conveying mechanism, which can be used to guide the conveyed materials. The guide plate is movably connected to the upper ends of the bearing seats on both sides by bolts, and a plurality of strip holes matched with the connecting bolts are provided on the guide plate. The opening direction of the strip holes is consistent with the distribution direction between the bearing seats on both sides, so that the guide plate can adjust the distance between the bearing seats on both sides through the strip holes, and the guide plates on both sides are adjusted to an adaptive width in the strip holes on the bearing seats according to the outer contour width of the conveyed material to guide the conveyed material.

[0011] Preferably, the conveying mechanism includes a roller and a driving motor, the two ends of the roller are respectively installed in the bearing seat, a transmission shaft is arranged at one end of the roller, and a second transmission wheel is installed on the transmission shaft. The roller is used to make indirect or direct contact with the conveyed material to realize the transportation of the material on the conveying mechanism, and a transmission shaft extends from one end of the roller to install a second transmission wheel for driving the roller to rotate, and the second transmission wheel is connected to the transmission shaft by a key so that the roller and the second transmission wheel move synchronously.

[0012] Preferably, the mounting frame is provided with a driving motor, and a first transmission wheel is installed at the end of the output shaft of the driving motor. The driving motor is used as a driving member of the conveying mechanism, and a first transmission wheel is installed at the end of its output shaft as a driving wheel to provide active power for the conveying mechanism.

[0013] Preferably, the first transmission wheel is connected to a second transmission wheel of the drum at the head end through a first transmission belt, the other second transmission wheel of the drum at the head end is connected to the second transmission wheel on the adjacent drum through a second transmission belt, and the second transmission wheels on the adjacent drums are connected through a second transmission belt. The first transmission wheel is transmission-connected to the second transmission wheel installed on the drum through the first transmission belt, and the corresponding multiple drums on the multiple bearing seats are transmission-connected to the second transmission wheel through the second transmission belt, so as to realize synchronous transmission of the drums, so that the drums can transport the materials at a uniform and stable speed.

[0014] Preferably, the mounting frame is equipped with an anti-fool baffle, and the bottom of the frame is equipped with rollers. The anti-fool baffle is used to distinguish the head end and the tail end of the feeding and discharging structure, and the conveying direction of the conveying mechanism on the mounting frame is determined according to the setting of the anti-fool baffle; the bottom of the frame is equipped with rollers so that the feeding and discharging mechanism can move flexibly.

[0015] Furthermore, a coating device is provided, which is used to cooperate with the automatic material loading and unloading structure of the mask, and the coating device receives the material transported by the conveying mechanism.

[0016] The beneficial effect of the utility model is that by arranging a lifting mechanism between the frame and the mounting frame, the mounting frame can be adjusted to rise and fall, thereby avoiding interference between the equipment door and the feeding and unloading mechanism composed of the frame and the mounting frame when the conveying mechanism feeds in and out materials. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a structural schematic diagram of the utility model.

[0018] Figure 2 It is a structural front view of the utility model.

[0019] Figure 3 It is a structural side view of the utility model.

[0020] Figure 4 It is a top view of the structure of the utility model.

[0021] Figure 5 It is a structural schematic diagram of the roller of the utility model.

[0022] Figure 6 It is a structural top view of the guide plate of the utility model.

[0023] Figure 7 This is a structural effect diagram of the utility model when in use.

[0024] The reference numerals include: 1, frame; 101, mounting plate 1; 2, mounting frame; 201, mounting plate 2; 3, lifting mechanism; 301, driving member; 302, movable rod; 4, roller; 401, transmission shaft; 5, guide mechanism; 501, first guide part; 502, second guide part; 6, first transmission wheel; 7, second transmission wheel; 8, bearing seat; 9, guide plate; 901, strip hole; 10, driving motor; 11, first transmission belt; 12, second transmission belt; 13, anti-fool baffle; 14, roller. DETAILED DESCRIPTION

[0025] In order to make the purpose, technical solutions and advantages of the embodiments more clear, the utility model is further described in detail below in conjunction with the accompanying drawings and embodiments. When the following description refers to the drawings, unless otherwise indicated, the same numbers in different drawings represent the same or similar elements. The embodiments described in the following exemplary embodiments do not represent all embodiments consistent with the present disclosure. Instead, they are only examples of devices and methods consistent with some aspects of the present disclosure as detailed in the attached claims.

[0026] It should be noted that all actions to obtain signals, information or data in this application are carried out in compliance with the relevant data protection laws and policies of the country where they are located, and with the authorization given by the owner of the corresponding device.

[0027] In the present disclosure, unless otherwise stated, the directional words used, such as "inside" and "outside", are defined according to the corresponding parts' own contours. The terms used in the present disclosure, such as "first" and "second", etc., are used to distinguish one element from another element and do not have order and importance.

[0028] Embodiment 1:

[0029] Basically as attached Figure 1 To Attachment Figure 4 As shown, a mask automatic feeding and discharging structure is characterized in that it includes a frame 1 and a mounting frame 2, wherein the frame 1 is connected to the mounting frame 2 via a lifting mechanism 3, and the mounting frame 2 is provided with a conveying mechanism for transporting materials.

[0030] In this embodiment, a mounting plate 101 is disposed at the upper end of the frame 1, and a mounting plate 201 is disposed at the lower end of the mounting frame 2. The mounting plate 101 and the mounting plate 201 are disposed horizontally opposite to each other, and the mounting plate 101 and the mounting plate 201 are provided with a lifting mechanism 3 and a guiding mechanism 5. Figure 1 Mounting plate 1 101 and mounting plate 2 201 are respectively arranged on the frame 1 and the mounting frame 2, and are arranged horizontally relative to each other to provide mounting surfaces for mounting the lifting mechanism 3 and the guide mechanism 5 between the frame 1 and the mounting frame 2, so as to achieve synchronous movement of the lifting mechanism 3 and the guide mechanism 5.

[0031] The lifting mechanism includes a driving member 301 and a movable rod 302. The driving member 301 of the lifting mechanism 3 is connected to the mounting plate 101 of the frame 1, and the movable rod 302 of the lifting mechanism 3 is connected to the mounting plate 201 of the mounting frame 2. Figures 2 to 3 shown.

[0032] The driving member 301 and the movable rod 302 of the lifting mechanism 3 are respectively installed on the frame 1 and the mounting frame 2 through the mounting plate 1 101 and the mounting plate 2 201, so that when the driving member 301 of the lifting mechanism 3 drives the movable rod 302 to perform linear motion, the mounting frame 2 connected to the movable rod 302 is also driven to perform vertical linear motion, thereby realizing the lifting and lowering effect of the mounting frame 2 on the frame 1.

[0033] In this embodiment, in order to achieve a more efficient and stable lifting effect of the mounting frame 2, the lifting mechanism 3 can select a cylinder as an actuator, the cylinder body of the cylinder as a driving member 301, and the piston rod of the cylinder as a movable rod 302. The air source enters the piston chamber in the cylinder body through the cylinder, generates pressure to push the piston in one direction, and the piston rod transmits force to perform mechanical movement, so that the mounting frame 2 can be stably lifted and lowered relative to the frame 1 in the direction of the piston rod extension through the cylinder.

[0034] Specifically, the material inlet and outlet structure serves as an external feeding line, and the material inlet and outlet mechanism transports materials to the conveying line inside the equipment through the conveying mechanism, and the mounting frame 2 realizes the lifting function on the frame 1 through the lifting mechanism 3.

[0035] During operation, when the equipment door is opened, the height of the conveying mechanism carrying the material is lowered to a height below the equipment door through the lifting mechanism 3; after the equipment door is opened, the conveying mechanism on the feed-in and feed-out structure mounting frame 2 of the external conveying line is raised to a position horizontally aligned with the internal conveying line of the equipment through the lifting mechanism 3, and the material is automatically transported to the inside of the equipment through the conveying mechanism; after the material transportation is completed, the conveying mechanism is lowered again to a height below the equipment door through the lifting mechanism 3, and the equipment door is closed to complete the loading. The feed-in and feed-out structure arranged on the external conveying line of the equipment can avoid interference between the conveying mechanism on the mounting frame 2 and the equipment door with the cooperation of the lifting mechanism 3.

[0036] Embodiment 2:

[0037] In order to solve the problem that the mounting frame 2 is prone to deviation and shaking during the lifting process. Figures 2 to 3 As shown, this embodiment is provided with a guide mechanism 5 in the same direction as the moving direction of the lifting mechanism 3, and the guide mechanism 5 includes a first guide portion 501 and a second guide portion 502, the first guide portion 501 is installed on the mounting plate 101 of the frame 1, and the second guide portion 502 is installed on the mounting plate 201 of the mounting frame 2, and the first guide portion 501 cooperates with the second guide portion 502.

[0038] The movement direction of the second guide part 101 of the guide mechanism 5 is consistent with the movement direction of the movable rod 302 of the lifting mechanism 3. Since the lifting mechanism 3 is provided with a conveying mechanism for material transmission, the material on the conveying mechanism is transferred in a specified direction, so that the load-bearing capacity of the conveying mechanism on the lifting mechanism 3 is different during the material transportation process. When the movable rod 302 of the lifting mechanism 3 is raised or lowered, the mounting frame 2 will deviate and shake.

[0039] The guide mechanism 5 provided in this embodiment can ensure that the mounting frame 2 on the lifting mechanism 3 runs along a predetermined trajectory during the lifting process through the cooperation of the first guide part 501 and the second guide part 502, and can withstand the vertical and horizontal forces of the mounting frame 2 during the lifting process, and transmit these forces to the guide mechanism 5 between the frame 1 and the mounting frame 2, so as to avoid damage to the lifting mechanism 3 and the mounting frame 2, thereby improving the stability and accuracy of the lifting process of the mounting frame 2.

[0040] In order to achieve a better guiding effect, the guiding mechanism 5 of this embodiment can adopt a guiding sleeve rod structure, with the first guiding part 501 being set as a guiding sleeve, and the second guiding part 502 being set as a guiding rod, so that the guiding rod is inserted into the guide sleeve, and the guiding rod and the guiding sleeve are movably connected through sliding cooperation; the guiding rod has a high degree of straightness, and the guiding sleeve acts as a support and a guide in the direction of movement, and the guiding rod can perform a linear motion under the guidance of the guiding sleeve; at the same time, during the linear motion process, the guiding rod can reduce friction and improve positioning accuracy.

[0041] In addition, the guide mechanism 5 of this embodiment may also adopt structures such as guide pins, guide plates and sliding rails that can realize the positioning and guiding of moving parts and ensure the operation accuracy and stability.

[0042] In order to achieve a more stable force effect, the guide mechanism 5 of this embodiment is evenly arranged between the frame 1 and the mounting frame 2. The lifting mechanism 3 can be arranged at the middle part between the frame 1 and the mounting frame 2, and the guide mechanism 5 can be arranged at the outer side of the frame 1 and the mounting frame 2; the lifting mechanism 3 can also be arranged at the outer side between the frame 1 and the mounting frame 2, and the guide mechanism 5 can be arranged at the middle part of the frame 1 and the mounting frame 2; the lifting mechanism 3 and the guide mechanism 5 can also be evenly installed between the frame 1 and the mounting frame 2; it is used to bear the vertical and horizontal forces of the mounting frame 2 during the lifting process, and transmit these forces to the guide mechanism 5 between the frame 1 and the mounting frame 2 to avoid damage to the lifting mechanism 3 and the mounting frame 2.

[0043] Embodiment 3:

[0044] In order to realize the transportation function of materials on the conveying mechanism, such as Figure 3 As shown, the conveying mechanism of this embodiment includes a roller 4 and a driving motor 10, a plurality of bearing seats 8 are installed on the upper end of the mounting frame 2, and the plurality of bearing seats 8 are evenly installed on both sides of the mounting frame 2, and the bearing seats 8 opposite to each other on both sides are coaxially arranged, and the two ends of the roller 4 are respectively installed in the bearing seats 8, and a transmission shaft 401 is arranged at one end of the roller 4, and the transmission shaft 401 is installed with a second transmission wheel 7. The first transmission wheel 6 is installed at the end of the output shaft of the driving motor 10. The driving motor is used as a driving member of the conveying mechanism, and the first transmission wheel is installed at the end of its output shaft as a driving wheel to provide active power for the conveying mechanism.

[0045] like Figure 5 As shown, the roller 4 is used to make indirect or direct contact with the conveyed material to realize the transportation of the material on the conveying mechanism. A transmission shaft 401 extends from one end of the roller 4 to install a second transmission wheel 7 that drives the roller 4 to rotate. The second transmission wheel 7 is connected to the transmission shaft 401 through a key so that the roller 4 and the second transmission wheel 7 move synchronously.

[0046] The first transmission wheel 6 is connected to a second transmission wheel 7 of the drum 4 at the head end through a first transmission belt 11, and another second transmission wheel 7 of the drum 4 at the head end is connected to the second transmission wheel 7 on the adjacent drum 4 through a second transmission belt 12, and the second transmission wheels 7 on the adjacent drums 4 are connected through the second transmission belt 12. Figure 2 The first transmission wheel is connected to the second transmission wheel installed on the drum through the first transmission belt, and the corresponding multiple rollers on the multiple bearing seats are connected to the second transmission wheel through the second transmission belt, so as to realize synchronous transmission of the rollers, so that the rollers can transport the materials at a uniform and stable speed.

[0047] The conveying mechanism of this embodiment can adopt belt drive. The first transmission wheel 6 and the second transmission wheel 7 of the conveying mechanism are pulleys, and the first transmission belt 11 and the second transmission belt 12 are transmission belts. The power of the driving shaft of the driving motor 10 or the transmission shaft 401 of the roller 4 is transmitted to the transmission shaft 401 of another roller 4 by relying on the friction force generated when the transmission belt and the pulley are tensioned.

[0048] In addition, in order for the driving shaft 401 on the drum 4 to receive the drive from the upper level and realize the drive to the next level, it is necessary to set two mutually staggered transmission belts on the second transmission wheel 7 on the driving shaft 401. The two pulleys can be coaxially installed on the transmission shaft 401 through a connecting key, and the two pulleys are respectively connected to the two transmission belts for transmission. Two flange structures can also be opened on the second transmission wheel 7 for the transmission connection of the two pulleys.

[0049] Embodiment 4:

[0050] The utility model can solve the problem that materials on the conveying mechanism are prone to shifting, such as Figure 4 As shown, in this embodiment, the guide plate 9 is installed on the bearing seat 8 on the same side by bolts. The guide plate 9 is provided with a strip hole 901, and the direction of the strip hole 901 is consistent with the distribution direction of the bearing seats 8 on both sides.

[0051] In this embodiment, guide plates 9 are installed on the bearing seats 8 on both sides of the roller 4 for the conveying mechanism to guide the conveyed materials. The guide plates 9 are movably connected to the upper ends of the bearing seats 8 on both sides by bolts, and a plurality of strip holes 901 cooperating with the connecting bolts are arranged on the guide plates 9. The opening direction of the strip holes 901 is consistent with the distribution direction between the bearing seats 8 on both sides, so that the guide plates 9 can adjust the distance between the bearing seats 8 on both sides through the strip holes 901. According to the outer contour width of the conveyed material, the guide plates 9 on both sides are adjusted to an appropriate width in the strip holes 901 on the bearing seats 8 to guide the conveyed materials.

[0052] like Figure 6As shown, in this embodiment, one or more guide plates 9 are arranged on one side of the mounting frame 2, and short and thick flange structures are arranged on both sides of the guide plate 9. The flange structures on both sides of the guide plate 9 are movably connected to the top of the bearing seat 8 through bolts. In order to avoid interference between the guide plate 9 and the roller 4 arranged in the bearing seat 8, the guide plate 9 is increased by the flange structure, and the width of the guide surface of the guide plate 9 facing the roller 4 is not increased or decreased, which can reduce the contact area between the guide plate 9 and the material on the roller 4 and reduce friction.

[0053] like Figure 1 As shown, the mounting frame 2 of this embodiment is equipped with an anti-fool baffle 13, and the bottom of the frame 1 is equipped with a roller 14. The anti-fool baffle 13 is used to distinguish the head end and the tail end of the feeding and discharging structure, and the conveying direction of the conveying mechanism on the mounting frame 2 is determined according to the setting of the anti-fool baffle 13; the roller 14 is installed at the bottom of the frame 1 so that the feeding and discharging mechanism can move flexibly.

[0054] like Figure 7 As shown, a shell is installed on the outside of the frame 1 and the mounting frame 2 of the inlet and outlet structure, and the shell is used to protect the inlet and outlet structure to prevent the inlet and outlet structure from bumping and dust from adhering to the internal structure.

[0055] The automatic mask loading and unloading structure transports the materials transported by its transport mechanism to the coating equipment.

[0056] The above is only an embodiment of the utility model, and the common knowledge such as the known specific structure and characteristics in the scheme is not described in detail here. It should be pointed out that for those skilled in the art, several deformations and improvements can be made without departing from the structure of the utility model, which should also be regarded as the protection scope of the utility model, and these will not affect the effect of the implementation of the utility model and the practicality of the patent. The scope of protection required by this application shall be based on the content of its claims, and the specific implementation methods and other records in the specification can be used to interpret the content of the claims.

Claims

1. A mask automatic feeding and discharging structure, characterized in that: It comprises a frame (1) and a mounting frame (2); the frame (1) is connected to the mounting frame (2) via a lifting mechanism (3); the mounting frame (2) is provided with a conveying mechanism, and the conveying mechanism is used to transport materials.

2. The automatic mask feeding and discharging structure according to claim 1, characterized in that: A mounting plate 1 (101) is arranged at the upper end of the frame (1), and a mounting plate 2 (201) is arranged at the lower end of the mounting frame (2). The mounting plate 1 (101) and the mounting plate 2 (201) are arranged horizontally opposite to each other, and a lifting mechanism (3) and a guiding mechanism (5) are arranged on the mounting plate 1 (101) and the mounting plate 2 (201).

3. The automatic mask loading and unloading structure according to claim 2, characterized in that: The lifting mechanism (3) comprises a driving member (301) and a movable rod (302); the driving member (301) of the lifting mechanism (3) is connected to a first mounting plate (101) of the frame (1); and the movable rod (302) of the lifting mechanism (3) is connected to a second mounting plate (201) of the mounting frame (2).

4. The automatic mask loading and unloading structure according to claim 2, characterized in that: The guide mechanism (5) is arranged in the same direction as the moving direction of the lifting mechanism, and the guide mechanism (5) comprises a first guide portion (501) and a second guide portion (502), the first guide portion (501) being mounted on a first mounting plate (101) of the frame (1), and the second guide portion (502) being mounted on a second mounting plate (201) of the mounting frame (2), and the first guide portion (501) cooperates with the second guide portion (502).

5. The automatic mask feeding and discharging structure according to claim 1, characterized in that: A plurality of bearing seats (8) are installed at the upper end of the mounting frame (2), and the plurality of bearing seats (8) are evenly distributed and installed on both sides of the mounting frame (2). The bearing seats (8) opposite to each other on the two sides are coaxially arranged, and a guide plate (9) is installed on the bearing seats (8) on the same side by means of bolts.

6. The automatic mask loading and unloading structure according to claim 5, characterized in that: The guide plate (9) is provided with strip holes (901), and the direction of the strip holes (901) is consistent with the distribution direction of the bearing seats (8) on both sides.

7. The automatic mask loading and unloading structure according to claim 1, characterized in that: The conveying mechanism comprises a roller (4) and a driving motor (10); the two ends of the roller (4) are respectively installed in a bearing seat (8); a transmission shaft (401) is arranged at one end of the roller (4); and the transmission shaft (401) is installed with a second transmission wheel (7); the mounting frame (2) is installed with the driving motor (10); and the first transmission wheel (6) is installed at the end of the output shaft of the driving motor (10).

8. The automatic mask loading and unloading structure according to claim 7, characterized in that: The first transmission wheel (6) is connected to a second transmission wheel (7) of the roller (4) at the head end via a first transmission belt (11); another second transmission wheel (7) of the roller (4) at the head end is connected to the second transmission wheel (7) on the adjacent roller (4) via a second transmission belt (12); and the second transmission wheels (7) on the adjacent rollers (4) are connected via a second transmission belt (12).

9. The automatic mask loading and unloading structure according to claim 1, characterized in that: The mounting frame (2) is provided with an anti-foolproof baffle (13), and a roller (14) is provided at the bottom of the frame (1).

10. A coating device, characterized in that: The coating equipment is used to cooperate with the automatic mask loading and unloading structure of any one of claims 1 to 9, and the coating equipment receives materials transported by the conveying mechanism.

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