Silicon carbide crystal growth furnace with uniform heating function

Abstract

The utility model discloses a silicon carbide crystal growth furnace with uniform heating, which relates to the field of crystal growth furnaces, and comprises a furnace body, two ends of the furnace body are fixedly connected with fixing components, the outer surface of the furnace body is fixedly connected with a connecting ring, the outer surface of the connecting ring is fixedly connected with a connecting rod, the outer surface of the connecting rod is fixedly connected with a connecting plate, and the connecting plate is fixedly connected with the furnace body. A shrinkage assembly is fixedly connected to one side of the connecting plate, an adsorption assembly is fixedly connected to one end of the shrinkage assembly, a cover is inserted into the furnace body, a hole is formed in the front face of the cover, a feeding assembly is fixedly connected into the hole, and a heating ring piece is fixedly connected to the outer surface of the furnace body. By means of the feeding assembly, when a silicon solution is added into the furnace body, a solution pipe is inserted into the feeding assembly, the sealing performance of the interior of the feeding assembly is high, when a plug is pulled out, too much air cannot enter the furnace body, air is prevented from entering the furnace body, and the influence on the internal environment of the furnace body is reduced.

Description

Technical Field

[0001] The utility model relates to the field of crystal growth furnaces, in particular to a silicon carbide crystal growth furnace with uniform heating. Background Art

[0002] Silicon carbide crystal growth furnace is mainly used to produce silicon carbide single crystals. To ensure the crystal quality and growth efficiency, a design that can achieve uniform heating is required. Silicon carbide crystal growth furnace is a kind of equipment used to produce silicon carbide single crystals. It is usually used in the semiconductor industry. Silicon carbide single crystal is an important semiconductor material with excellent thermal properties and chemical stability. It is widely used in power devices, optoelectronic devices and other fields.

[0003] When using an existing crystal growth furnace, the crystal inside the furnace body needs to be heated. However, during heating, an appropriate amount of silicon solution needs to be added during the heating process to melt the crystal so that the crystal can grow. If the lid is opened frequently, it will affect the growth of the crystal. It is necessary to reduce contact with air while adding the solution. In addition, when the furnace body is opened, the gas inside the furnace body will produce a pungent odor. If people open it rashly, it will affect their respiratory tract. Therefore, the furnace body needs to be opened without harming people.

[0004] Therefore, we propose a silicon carbide crystal growth furnace with uniform heating. Utility Model Content

[0005] The utility model provides a silicon carbide crystal growth furnace with uniform heating.

[0006] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a uniformly heated silicon carbide crystal growth furnace, comprising a furnace body, both ends of the furnace body are fixedly connected with fixing components, the outer surface of the furnace body is fixedly connected with a connecting ring, the outer surface of the connecting ring is fixedly connected with a connecting rod, the outer surface of the connecting rod is fixedly connected with a connecting plate, one side of the connecting plate is fixedly connected with a shrinking component, one end of the shrinking component is fixedly connected with an adsorption component, a cover is plugged into the interior of the furnace body, a hole is opened on the front of the cover, a feeding component is fixedly connected to the inside of the hole, a heating ring sheet is fixedly connected to the outer surface of the furnace body, and a heating sheet is fixedly connected to the inner wall of the furnace body;

[0007] The feed assembly includes a feed pipe, the outer surface of which is fixedly connected to the inside of the hole, the inside of the feed pipe is fixedly connected to a rubber tube sleeve A, the inner side wall of the rubber tube sleeve A is fixedly connected to a rubber tube sleeve B, one end of the feed pipe is fixedly connected to a rubber tube sleeve C, and the other end of the feed pipe is plugged with a plug.

[0008] Preferably, the fixing assembly includes an A connecting plate, one end of which is fixedly connected to the two ends of the furnace body, one side of the A connecting plate is threadedly connected to the B connecting plate via an A bolt, the outer surface of the A bolt is threadedly connected to a nut, and one end of the B connecting plate is fixedly connected to one end of the lid; the A connecting plate and the B connecting plate use the A bolt to fix the lid and the furnace body, and use the nut to reinforce them.

[0009] Preferably, the shrinking assembly includes a support plate, one end of the support plate is fixedly connected to one side of the connecting plate, the other end of the support plate is fixedly connected to an electric push rod, the inner wall of the support plate is fixedly connected to a support rod, and the bottom of the support plate is fixedly connected to an A support pad; the electric push rod is started, the electric push rod is retracted inward, the adsorption assembly is close to the lid, the lid is tightly adsorbed, and then the electric push rod is started again, the electric push rod drives the adsorption assembly to pull the lid away from the furnace body, the furnace body is opened, and the crystal is taken out.

[0010] Preferably, the adsorption component includes a vacuum suction plate, the front side of the vacuum suction plate is fixedly connected to one end of the shrinking component, the back side of the vacuum suction plate is provided with an exhaust hole, the interior of the exhaust hole is fixedly connected with a suction cup, and one side of the vacuum suction plate is fixedly connected with a micro vacuum pump; the adsorption component is close to the cover, the suction cup is used to stick tightly to the cover, the micro vacuum pump is started, the air is sucked out, and the cover is tightly adsorbed.

[0011] Preferably, buckles are fixedly connected to both sides of the furnace body, and blocks are fixedly connected to both sides of the cover; the buckles and blocks play a fixing role to fix the cover and the furnace body.

[0012] Preferably, a sealing gasket is fixedly connected to the edge of one end of the furnace body, and a sealing sleeve is fixedly connected to the outer surface of the cover; the sealing gasket and the sealing sleeve play a sealing role, which can increase the sealing effect and prevent air from entering the furnace body during the production of silicon carbide single crystals and affecting the internal environment of the furnace body.

[0013] Preferably, both ends of one side of the connecting plate are fixedly connected with fixing plates, a threaded hole is opened on the surface of the fixing plate, the internal thread of the threaded hole is connected with a B bolt, and the bottom of the connecting plate is fixedly connected with a B support pad; the furnace body is fixed to the ground using the fixing plate and the B bolt, and supported by the B support pad.

[0014] Compared with the prior art, the beneficial effects of the utility model are:

[0015] 1. The utility model provides a feed assembly. When adding silicon solution into the furnace body, the solution tube is inserted into the feed assembly. The inside of the feed assembly has strong sealing performance. When the plug is pulled out, not much air can enter, thereby blocking the entry of air and reducing the impact on the internal environment of the furnace body.

[0016] 2. The utility model provides a shrinking component and an adsorption component. When the furnace body needs to be opened, in order to avoid gas harm to personnel when opening, the adsorption component is used to adsorb the cover. After the cover is firmly secured, the shrinking component is used to pull out the cover and open the furnace body. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0018] Figure 2 It is a schematic diagram of the overall structure of the utility model;

[0019] Figure 3 This is a schematic diagram of the structure of the feed assembly of the utility model;

[0020] Figure 4 This is a schematic diagram of the structure of the adsorption component of the utility model;

[0021] Figure 5 This is a schematic diagram of the structure of the shrinking component of the utility model.

[0022] In the figure: 1. furnace body; 2. fixing assembly; 201. A connecting piece; 202. A bolt; 203. B connecting piece; 204. nut; 3. connecting ring; 4. connecting rod; 5. connecting plate; 6. shrinking assembly; 601. support plate; 602. electric push rod; 603. support rod; 604. A support pad; 7. adsorption assembly; 701. vacuum suction plate; 702. suction cup; 703. micro vacuum pump; 8. cover; 9. feeding assembly; 901. feeding pipe; 902. A rubber tube sleeve; 903. B rubber tube sleeve; 904. C rubber tube sleeve; 905. plug; 10. heating ring; 11. buckle; 12. block; 13. sealing pad; 14. sealing sleeve; 15. fixing plate; 16. B bolt; 17. B support pad; 18. heating plate. DETAILED DESCRIPTION

[0023] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0024] Example 1

[0025] See also Figure 1-5, a uniformly heated silicon carbide crystal growth furnace is shown in the figure, comprising a furnace body 1, both ends of the furnace body 1 are fixedly connected with a fixing assembly 2, the outer surface of the furnace body 1 is fixedly connected with a connecting ring 3, the outer surface of the connecting ring 3 is fixedly connected with a connecting rod 4, the outer surface of the connecting rod 4 is fixedly connected with a connecting plate 5, one side of the connecting plate 5 is fixedly connected with a shrinking assembly 6, one end of the shrinking assembly 6 is fixedly connected with an adsorption assembly 7, a cover 8 is plugged into the interior of the furnace body 1, a hole is opened on the front of the cover 8, a feeding assembly 9 is fixedly connected to the inside of the hole, a heating ring sheet 10 is fixedly connected to the outer surface of the furnace body 1, and a heating sheet 18 is fixedly connected to the inner wall of the furnace body 1;

[0026] The feed assembly 9 includes a feed pipe 901, the outer surface of which is fixedly connected to the inside of the hole, the inside of the feed pipe 901 is fixedly connected to a rubber tube sleeve A 902, the inner side wall of the rubber tube sleeve A 902 is fixedly connected to a rubber tube sleeve B 903, one end of the feed pipe 901 is fixedly connected to a rubber tube sleeve C 904, and the other end of the feed pipe 901 is plugged with a plug 905.

[0027] In this embodiment: when adding silicon solution to the interior of the furnace body 1, the solution tube is inserted into the feed assembly 9. The sealing inside the feed assembly 9 is strong. When the plug 905 is pulled out, not much air will enter, thereby blocking the entry of air and reducing the impact on the internal environment of the furnace body 1.

[0028] See also Figure 1 and Figure 2 In the figure, the fixing component 2 includes an A connecting piece 201, one end of which is fixedly connected to the two ends of the furnace body 1, one side of the A connecting piece 201 is threadedly connected to a B connecting piece 203 through an A bolt 202, a nut 204 is threadedly connected to the outer surface of the A bolt 202, and one end of the B connecting piece 203 is fixedly connected to one end of the cover 8.

[0029] In this embodiment: the A connecting piece 201 and the B connecting piece 203 use the A bolt 202 to fix the cover 8 and the furnace body 1, and use the nut 204 to reinforce them.

[0030] Working principle: When producing silicon carbide single crystals in the furnace body 1, the furnace body 1 is fixed to the ground using the fixing plate 15 and the B bolt 16. Then, the heating ring plate 10 and the heating plate 18 are started to heat the inside and outside of the furnace body 1 at the same time, so that the furnace body 1 can be heated evenly. Then, when it is necessary to add silicon solution during production, the plug 905 is opened. When the plug 905 is opened, the A rubber tube sleeve 902, the B rubber tube sleeve 903 and the C rubber tube sleeve 904 can play a sealing role to prevent air from entering the furnace body 1. After the solution tube is inserted into the feed tube 901, a number of cracks are opened at the bottom of the A rubber tube sleeve 902, the B rubber tube sleeve 903 and the C rubber tube sleeve 904. Use the solution tube to open it and put the solution into the furnace body 1. Then, when the furnace body 1 needs to be opened, unscrew the nut 204 from the outside of the A bolt 202, open the A connecting piece 201 and the B connecting piece 203, then open the buckle 11 and the block 12, open the cover 8, start the electric push rod 602, the electric push rod 602 retracts inward, and moves the adsorption component 7 close to the cover 8, uses the suction cup 702 to stick to the cover 8, starts the micro vacuum pump 703, drains the air, and tightly adsorbs the cover 8. Then, start the electric push rod 602 again, the electric push rod 602 drives the adsorption component 7 to pull the cover 8 away from the furnace body 1, opens the furnace body 1, and takes out the crystal.

[0031] Example 2

[0032] See also Figure 1 , Figure 2 and Figure 5 This embodiment further explains Example 1. In the figure, the shrinking component 6 includes a support plate 601, one end of the support plate 601 is fixedly connected to one side of the connecting plate 5, the other end of the support plate 601 is fixedly connected to an electric push rod 602, the inner wall of the support plate 601 is fixedly connected to a support rod 603, and the bottom of the support plate 601 is fixedly connected to an A support pad 604.

[0033] In this embodiment: start the electric push rod 602, the electric push rod 602 extends inward, moves the adsorption component 7 close to the cover 8, and tightly adsorbs the cover 8. Then, start the electric push rod 602 again, the electric push rod 602 drives the adsorption component 7 to pull the cover 8 away from the furnace body 1, open the furnace body 1, and take out the crystal.

[0034] See also Figure 1 , Figure 2 and Figure 4 In the figure, the adsorption component 7 includes a vacuum suction plate 701, the front side of the vacuum suction plate 701 is fixedly connected to one end of the shrinking component 6, the back side of the vacuum suction plate 701 is provided with an exhaust hole, the interior of the exhaust hole is fixedly connected to a suction cup 702, and one side of the vacuum suction plate 701 is fixedly connected to a micro exhaust pump 703.

[0035] In this embodiment, the adsorption component 7 is close to the cover 8, and the suction cup 702 is used to stick to the cover 8, and the micro vacuum pump 703 is started to suck out the air and tightly adsorb the cover 8.

[0036] See also Figure 1 and Figure 2 In the figure, buckles 11 are fixedly connected to both sides of the furnace body 1, and blocks 12 are fixedly connected to both sides of the cover 8.

[0037] In this embodiment, the buckle 11 and the block 12 play a fixing role, fixing the cover 8 and the furnace body 1.

[0038] Example 3

[0039] See also Figure 1 and Figure 2 In the figure, a sealing gasket 13 is fixedly connected to the edge of one end of the furnace body 1, and a sealing sleeve 14 is fixedly connected to the outer surface of the cover 8.

[0040] In this embodiment, the sealing gasket 13 and the sealing sleeve 14 play a sealing role, which can increase the sealing effect and prevent air from entering the furnace body 1 during the production of silicon carbide single crystals, thereby preventing the internal environment of the furnace body 1 from being affected.

[0041] See also Figure 1 and Figure 2 As shown in the figure, both ends of one side of the connecting plate 5 are fixedly connected with fixing plates 15, the surface of the fixing plate 15 is provided with a threaded hole, the internal thread of the threaded hole is connected with a B bolt 16, and the bottom of the connecting plate 5 is fixedly connected with a B support pad 17.

[0042] In this embodiment, the furnace body 1 is fixed to the ground by using a fixing plate 15 and a B bolt 16 , and supported by a B support pad 17 .

[0043] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include"-"comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process-method-article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process-method-article or device.

[0044] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A silicon carbide crystal growth furnace with uniform heating, characterized in that: The invention comprises a furnace body (1), both ends of the furnace body (1) are fixedly connected with a fixing assembly (2), the outer surface of the furnace body (1) is fixedly connected with a connecting ring (3), the outer surface of the connecting ring (3) is fixedly connected with a connecting rod (4), the outer surface of the connecting rod (4) is fixedly connected with a connecting plate (5), one side of the connecting plate (5) is fixedly connected with a shrinking assembly (6), one end of the shrinking assembly (6) is fixedly connected with an adsorption assembly (7), a cover (8) is inserted into the interior of the furnace body (1), a hole is provided on the front of the cover (8), a feeding assembly (9) is fixedly connected inside the hole, a heating ring sheet (10) is fixedly connected to the outer surface of the furnace body (1), and a heating sheet (18) is fixedly connected to the inner wall of the furnace body (1); The feed assembly (9) comprises a feed pipe (901), the outer surface of the feed pipe (901) is fixedly connected to the inside of the hole, the inside of the feed pipe (901) is fixedly connected to a rubber tube sleeve A (902), the inner side wall of the rubber tube sleeve A (902) is fixedly connected to a rubber tube sleeve B (903), one end of the feed pipe (901) is fixedly connected to a rubber tube sleeve C (904), and the other end of the feed pipe (901) is plugged with a plug (905).

2. The silicon carbide crystal growth furnace with uniform heating according to claim 1, characterized in that: The fixing assembly (2) comprises an A connecting piece (201), one end of the A connecting piece (201) is fixedly connected to two ends of the furnace body (1), one side of the A connecting piece (201) is threadedly connected to a B connecting piece (203) via an A bolt (202), a nut (204) is threadedly connected to the outer surface of the A bolt (202), and one end of the B connecting piece (203) is fixedly connected to one end of the cover (8).

3. The silicon carbide crystal growth furnace with uniform heating according to claim 1, characterized in that: The contraction assembly (6) comprises a support plate (601), one end of the support plate (601) is fixedly connected to one side of the connecting plate (5), the other end of the support plate (601) is fixedly connected to an electric push rod (602), the inner side wall of the support plate (601) is fixedly connected to a support rod (603), and the bottom of the support plate (601) is fixedly connected to an A support pad (604).

4. The silicon carbide crystal growth furnace with uniform heating according to claim 1, characterized in that: The adsorption component (7) comprises a vacuum suction plate (701), the front side of the vacuum suction plate (701) is fixedly connected to one end of the contraction component (6), the back side of the vacuum suction plate (701) is provided with an air suction hole, the interior of the air suction hole is fixedly connected to a suction cup (702), and one side of the vacuum suction plate (701) is fixedly connected to a micro air suction pump (703).

5. The silicon carbide crystal growth furnace with uniform heating according to claim 1, characterized in that: Buckles (11) are fixedly connected to both sides of the furnace body (1), and clamping blocks (12) are fixedly connected to both sides of the cover (8).

6. The silicon carbide crystal growth furnace with uniform heating according to claim 1, characterized in that: A sealing gasket (13) is fixedly connected to the edge of one end of the furnace body (1), and a sealing sleeve (14) is fixedly connected to the outer surface of the cover (8).

7. The silicon carbide crystal growth furnace with uniform heating according to claim 1, characterized in that: Both ends of one side of the connecting plate (5) are fixedly connected with fixing plates (15), a threaded hole is provided on the surface of the fixing plate (15), a B bolt (16) is threadedly connected to the inner part of the threaded hole, and a B support pad (17) is fixedly connected to the bottom of the connecting plate (5).

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