Filtering device and cleaning equipment

Abstract

The utility model provides a filtering device and cleaning equipment, and relates to the technical field of semiconductor equipment. The filtering device comprises a bottom plate, a first side plate, a second side plate, a first filtering plate and a second filtering plate. The first side plate is connected to the bottom plate, the second side plate is connected to the bottom plate, and the second side plate and the first side plate are oppositely arranged. The first filter plate is connected with the first side plate and the second side plate, and the first filter plate and the bottom plate are oppositely arranged. The first filter plate is provided with first filter holes. The second filter plate is connected with the first side plate and the second side plate and arranged on the side, away from the bottom plate, of the first filter plate. And second filtering holes are formed in the second filtering plate. And a liquid discharge channel is formed between the first filter plate and the bottom plate. The filtering device is good in filtering effect and high in liquid discharging efficiency.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor equipment, in particular to a filtering device and a cleaning device. Background Art

[0002] With the rapid development of the semiconductor industry, surface mount technology is widely used in semiconductor manufacturing processes. When printing solder paste, a steel mesh is needed to print the solder paste onto the substrate to achieve component mounting and welding. The steel mesh needs to be cleaned after use. The wastewater after cleaning the steel mesh usually contains residual tin beads and volatile debris from the solder resist, which can easily cause the drainage hole of the cleaning machine to be blocked. Utility Model Content

[0003] The utility model aims to provide a filtering device and a cleaning device, which can improve the drainage efficiency and have good filtering performance.

[0004] The embodiment of the utility model is achieved as follows:

[0005] In a first aspect, the utility model provides a filtering device, comprising:

[0006] Base plate;

[0007] a first side plate connected to the bottom plate;

[0008] a second side plate, the second side plate being connected to the bottom plate, the second side plate being arranged opposite to the first side plate;

[0009] a first filter plate, the first filter plate being connected to the first side plate and the second side plate respectively, the first filter plate being arranged opposite to the bottom plate; the first filter plate being provided with a first filter hole;

[0010] a second filter plate, the second filter plate being connected to the first side plate and / or the second side plate, the second filter plate being arranged on a side of the first filter plate away from the bottom plate; the second filter plate being provided with a second filter hole;

[0011] A drainage channel is formed between the first filter plate and the bottom plate.

[0012] In an optional embodiment, the second filter plate is arranged obliquely relative to the first filter plate.

[0013] In an optional embodiment, the second filter plate includes a first inclined plate, one end of the first inclined plate is connected to the first side plate, and the other end of the first inclined plate is connected to the first filter plate.

[0014] In an optional embodiment, the second filter plate further includes a second inclined plate, one end of the second inclined plate is connected to the second side plate, and the other end of the second inclined plate is connected to the first filter plate.

[0015] In an optional embodiment, one end of the first inclined plate away from the first side plate is connected to one end of the second inclined plate away from the second side plate.

[0016] In an optional embodiment, the first inclined plate is connected to the end of the first side plate away from the bottom plate; the second inclined plate is connected to the end of the second side plate away from the bottom plate.

[0017] In an optional embodiment, a water retaining wall is respectively provided at one end of the first side plate and the second side plate away from the bottom plate, and the water retaining wall is higher than a side of the first inclined plate and the second inclined plate away from the first filter plate.

[0018] In an optional embodiment, the first filter hole and the second filter hole are arranged opposite to each other.

[0019] In an optional embodiment, a positioning member is provided on a side of the bottom plate away from the first filter plate.

[0020] In a second aspect, the utility model provides a cleaning device, comprising a cleaning machine and a filtering device as described in any one of the aforementioned embodiments, wherein the filtering device is installed on the cleaning machine.

[0021] The beneficial effects of the embodiments of the utility model include:

[0022] The filter device provided by the embodiment of the utility model is provided with a first filter plate and a second filter plate, which can perform two filtrations, filter more fully, and avoid clogging of the sewage outlet. In addition, a drainage channel is formed between the bottom plate and the first filter plate, and the drainage channel has a large flow volume, a fast drainage speed, and a high drainage efficiency, which reduces the deposition of dirt and avoids clogging of the sewage outlet.

[0023] The cleaning device provided by the embodiment of the utility model comprises the above-mentioned filtering device, has high dirt filtering efficiency, fast liquid discharge, and avoids blockage of the sewage outlet. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] In order to more clearly illustrate the technical solutions of the embodiments of the utility model, the drawings required for use in the embodiments will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the utility model and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other relevant drawings can be obtained based on these drawings without paying creative work.

[0025] Figure 1A schematic structural diagram of a filtering device provided by an embodiment of the utility model from a first perspective;

[0026] Figure 2 A schematic structural diagram of a filtering device provided by an embodiment of the utility model from a second viewing angle;

[0027] Figure 3 A schematic structural diagram of a filtering device provided by an embodiment of the utility model from a third viewing angle;

[0028] Figure 4 A schematic structural diagram of the filtering device provided by an embodiment of the utility model from a fourth perspective.

[0029] Icon: 100-filter device; 110-bottom plate; 120-first side plate; 130-second side plate; 140-first filter plate; 141-first filter hole; 150-second filter plate; 151-second filter hole; 153-first inclined plate; 155-second inclined plate; 160-drainage channel; 161-water retaining wall; 163-water retaining groove; 170-positioning piece. DETAILED DESCRIPTION

[0030] In order to make the purpose, technical scheme and advantages of the embodiments of the utility model clearer, the technical scheme in the embodiments of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiments of the utility model. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Generally, the components of the embodiments of the utility model described and shown in the drawings here can be arranged and designed in various different configurations.

[0031] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the present invention to be protected, but merely represents selected embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0032] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, further definition and explanation thereof is not required in subsequent drawings.

[0033] In the description of the present utility model, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inside", "outside", etc. indicate the orientation or position relationship based on the orientation or position relationship shown in the accompanying drawings, or the orientation or position relationship in which the utility model product is usually placed when in use, which is only for the convenience of describing the utility model and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present utility model. In addition, the terms "first", "second", "third", etc. are only used to distinguish the description, and cannot be understood as indicating or implying relative importance.

[0034] In addition, the terms "horizontal", "vertical" and the like do not mean that the components are required to be absolutely horizontal or suspended, but can be slightly tilted. For example, "horizontal" only means that its direction is more horizontal than "vertical", and does not mean that the structure must be completely horizontal, but can be slightly tilted.

[0035] In the description of the present invention, it is also necessary to explain that, unless otherwise clearly specified and limited, the terms "set", "install", "connect", and "connect" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0036] Please refer to Figures 1 to 4 The present embodiment provides a filtering device 100, which includes a bottom plate 110, a first side plate 120, a second side plate 130, a first filter plate 140 and a second filter plate 150. The first side plate 120 is connected to the bottom plate 110, the second side plate 130 is connected to the bottom plate 110, and the second side plate 130 and the first side plate 120 are arranged opposite to each other. The first filter plate 140 is connected to the first side plate 120 and the second side plate 130 respectively, and the first filter plate 140 is arranged opposite to the bottom plate 110. The first filter plate 140 is provided with a first filter hole 141. The second filter plate 150 is connected to the first side plate 120 and / or the second side plate 130, and the second filter plate 150 is arranged on a side of the first filter plate 140 away from the bottom plate 110. The second filter plate 150 is provided with a second filter hole 151. A drainage channel 160 is formed between the first filter plate 140 and the bottom plate 110. Due to the first filter plate 140 and the second filter plate 150, two filtrations can be performed, the filtration is more complete, and the blockage of the sewage outlet is avoided. In addition, a drainage channel 160 is formed between the bottom plate 110 and the first filter plate 140. The drainage channel 160 has a large flow volume, a fast drainage speed, and a high drainage efficiency, which reduces the deposition of dirt and avoids the blockage of the sewage outlet.

[0037] The second filter plate 150 is arranged obliquely relative to the first filter plate 140. The second filter plate 150 is arranged obliquely, and the drainage efficiency is higher, which is conducive to the rapid drainage of sewage.

[0038] Optionally, the second filter plate 150 includes a first inclined plate 153, one end of the first inclined plate 153 is connected to the first side plate 120, and the other end is connected to the first filter plate 140. The end of the first inclined plate 153 connected to the first side plate 120 is higher than the end connected to the first filter plate 140, so that the first inclined plate 153 is tilted to increase the drainage efficiency.

[0039] Optionally, the second filter plate 150 further includes a second inclined plate 155, one end of the second inclined plate 155 is connected to the second side plate 130, and the other end is connected to the first filter plate 140. The end of the second inclined plate 155 connected to the second side plate 130 is higher than the end connected to the first filter plate 140, so that the second inclined plate 155 is tilted to increase the drainage efficiency.

[0040] Optionally, one end of the first inclined plate 153 away from the first side plate 120 is connected to one end of the second inclined plate 155 away from the second side plate 130. That is, the lower ends of the first inclined plate 153 and the second inclined plate 155 are connected to each other and are also connected to the first filter plate 140. With this arrangement, the structure is more stable and has stronger water flow impact resistance.

[0041] In this embodiment, the first inclined plate 153 and the second inclined plate 155 are symmetrically distributed, so that the force is more evenly distributed, which is beneficial to extending the service life of the filter device 100.

[0042] Of course, in some other embodiments, the first inclined plate 153 and the lower end of the second inclined plate 155 may not be connected, and the two may be spaced apart and connected to the first filter plate 140 respectively, which is not specifically limited here.

[0043] Optionally, the first inclined plate 153 is connected to the end of the first side plate 120 away from the bottom plate 110. The second inclined plate 155 is connected to the end of the second side plate 130 away from the bottom plate 110. This arrangement increases the inclination of the first inclined plate 153 and the second inclined plate 155, improves the drainage efficiency, and facilitates rapid drainage.

[0044] In some embodiments, only one of the first inclined plate 153 and the second inclined plate 155 may be provided, or both the first inclined plate 153 and the second inclined plate 155 may be provided.

[0045] The first filter hole 141 and the second filter hole 151 are used to filter sewage impurities. Optionally, the first filter hole 141 and the second filter hole 151 are arranged opposite to each other. The second filter hole 151 is respectively provided on the first inclined plate 153 and the second inclined plate 155. The shape, number and distribution of the second filter holes 151 are not limited, for example, they can be distributed in a circular array or a rectangular array, or in any other distribution mode. The axis of the second filter hole 151 on the first inclined plate 153 is perpendicular to the plate surface of the first inclined plate 153. The axis of the second filter hole 151 on the second inclined plate 155 is perpendicular to the plate surface of the second inclined plate 155. Of course, the axis of the second filter hole 151 can also be set vertically downward, which is not specifically limited here.

[0046] The shape, number and distribution of the first filter holes 141 are not limited, for example, they can be distributed in a circular array or a rectangular array, or in any other distribution method. The axis of the first filter hole 141 is perpendicular to the surface of the first filter plate 140. The first filter hole 141 is connected to the drainage channel 160. It should be noted that the first filter holes 141 and the second filter holes 151 can be arranged one by one, or they can be staggered with each other. Or they can be partially staggered and partially relative. The number of the first filter holes 141 and the number of the second filter holes 151 can be equal or unequal.

[0047] It is easy to understand that in this embodiment, the bottom plate 110 is arranged in a rectangular parallelepiped. The first side plate 120 and the second side plate 130 are connected to a set of long sides of the bottom plate 110. A set of short sides of the bottom plate 110 is used to form a drainage channel 160, that is, the filter device 100 adopts a side wall drainage method, and the drainage volume is large.

[0048] Optionally, a water retaining wall 161 is respectively provided at one end of the first side plate 120 and the second side plate 130 away from the bottom plate 110, and the water retaining wall 161 is higher than the side of the first inclined plate 153 and the second inclined plate 155 away from the first filter plate 140. The provision of the water retaining wall 161 can drain the liquid to the second filter plate 150, so that the liquid is discharged through the second filter hole 151, the first filter hole 141, and the drainage channel 160. In addition to drainage, the water retaining wall 161 also has the function of preventing liquid from overflowing. In addition, the water retaining wall 161 also has the function of destroying the water flow tension, thereby achieving the purpose of rapid drainage.

[0049] It should be noted that a water retaining groove 163 is formed between the first filter plate 140 and the second filter plate 150. As a water flow channel, the water retaining groove 163 has the function of destroying the water flow tension, thereby achieving the purpose of rapid drainage. The cleaned sewage first enters the first inclined plate 153 and the second inclined plate 155, enters the water retaining groove 163 through the second filter hole 151, enters the drainage channel 160 through the first filter hole 141, and is finally discharged to the sewage outlet. The entire drainage process is filtered twice, and the filtration is sufficient. The main dirt and impurities are intercepted and discharged, avoiding clogging of the sewage outlet. Of course, the number of the first filter plate 140 is not limited to one, and it can also be a plurality of first filter plates 140 spaced apart in the height direction. Each first filter plate 140 is provided with a first filter hole 141. The number of the first filter plates 140 can be set according to the actual cleaning and filtering requirements.

[0050] Optionally, a positioning member 170 is provided on one side of the bottom plate 110 away from the first filter plate 140. The positioning member 170 includes but is not limited to a positioning groove and a positioning boss. The positioning member 170 is used to achieve the connection between the bottom plate 110 and the cleaning machine. The positioning member 170 can be used to be installed on the sewage outlet or sewage tank of the cleaning machine. Only a positioning groove or only a positioning boss can be provided on the bottom plate 110. Alternatively, both a positioning groove and a positioning boss can be provided. In this embodiment, four positioning bosses are provided on one side of the bottom plate 110 away from the first filter plate 140. The positioning bosses are respectively provided at the four corners of the bottom plate 110.

[0051] Of course, the number and shape of the positioning members 170 can be flexibly set and adjusted according to actual needs, and are not specifically limited here.

[0052] The present utility model also provides a cleaning device, including a cleaning machine and the above-mentioned filter device 100, the filter device 100 is installed on the cleaning machine. The cleaning machine is provided with a positioning groove or positioning boss corresponding to the positioning member 170 on the bottom plate 110, so as to facilitate the installation of the filter device 100 on the cleaning machine.

[0053] Optionally, a steel mesh flushing assembly and a sewage outlet are provided on the cleaning machine. The filter device 100 is installed at the sewage outlet. Optionally, the filter device 100 is located at the bottom of the steel mesh flushing assembly. After flushing the steel mesh, the sewage enters the filter device 100, is filtered through the second filter hole 151 and the first filter hole 141 in sequence, enters the drainage channel 160, and then flows to the sewage outlet for discharge.

[0054] In this embodiment, the filter device 100 can achieve sufficient filtration and prevent dirt from clogging the sewage outlet. In addition, the filter device 100 has a large discharge volume, rapid discharge, good filtration effect, and high discharge efficiency.

[0055] In summary, the filter device 100 and the cleaning device provided in the embodiment of the utility model have the following beneficial effects, including:

[0056] The filter device 100 provided by the embodiment of the utility model is provided with a first filter plate 140 and a second filter plate 150, which can perform two filtrations, filter more fully, and avoid clogging of the sewage outlet. In addition, a drainage channel 160 is formed between the bottom plate 110 and the first filter plate 140, and the drainage channel 160 has a large flow volume, a fast drainage speed, and a high drainage efficiency, which reduces the deposition of dirt and avoids clogging of the sewage outlet.

[0057] The cleaning device provided by the embodiment of the utility model includes the above-mentioned filtering device 100, which has high dirt filtering efficiency, fast liquid discharge, and avoids blockage of the sewage outlet.

[0058] The above description is only the preferred embodiment of the utility model, and is not intended to limit the utility model. For those skilled in the art, the utility model can have various modifications and changes. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the utility model shall be included in the protection scope of the utility model.

Claims

1. A filtering device, characterized in that: include: Base plate; a first side plate connected to the bottom plate; a second side plate, the second side plate being connected to the bottom plate, the second side plate being arranged opposite to the first side plate; a first filter plate, the first filter plate being connected to the first side plate and the second side plate respectively, the first filter plate being arranged opposite to the bottom plate; the first filter plate being provided with a first filter hole; a second filter plate, the second filter plate being connected to the first side plate and / or the second side plate, the second filter plate being arranged on a side of the first filter plate away from the bottom plate; the second filter plate being provided with a second filter hole; A drainage channel is formed between the first filter plate and the bottom plate.

2. The filtering device according to claim 1, characterized in that: The second filter plate is arranged obliquely relative to the first filter plate.

3. The filtering device according to claim 2, characterized in that: The second filter plate includes a first inclined plate, one end of the first inclined plate is connected to the first side plate, and the other end of the first inclined plate is connected to the first filter plate.

4. The filtering device according to claim 3, characterized in that: The second filter plate further includes a second inclined plate, one end of the second inclined plate is connected to the second side plate, and the other end of the second inclined plate is connected to the first filter plate.

5. The filtering device according to claim 4, characterized in that: One end of the first inclined plate away from the first side plate is connected to one end of the second inclined plate away from the second side plate.

6. The filtering device according to claim 4, characterized in that: The first inclined plate is connected to an end of the first side plate away from the bottom plate; the second inclined plate is connected to an end of the second side plate away from the bottom plate.

7. The filtering device according to claim 6, characterized in that: A water retaining wall is respectively disposed at one end of the first side plate and the second side plate away from the bottom plate, and the water retaining wall is higher than a side of the first inclined plate and the second inclined plate away from the first filter plate.

8. The filtering device according to claim 1, characterized in that: The first filter hole and the second filter hole are arranged opposite to each other.

9. The filtering device according to any one of claims 1 to 8, characterized in that A positioning piece is provided on one side of the bottom plate away from the first filter plate.

10. A cleaning device, characterized in that: It comprises a cleaning machine and a filtering device as claimed in any one of claims 1 to 9, wherein the filtering device is mounted on the cleaning machine.

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